GB2013724B - Method for sputtering cadmium stannate films - Google Patents

Method for sputtering cadmium stannate films

Info

Publication number
GB2013724B
GB2013724B GB7840996A GB7840996A GB2013724B GB 2013724 B GB2013724 B GB 2013724B GB 7840996 A GB7840996 A GB 7840996A GB 7840996 A GB7840996 A GB 7840996A GB 2013724 B GB2013724 B GB 2013724B
Authority
GB
United Kingdom
Prior art keywords
cadmium stannate
stannate films
sputtering
sputtering cadmium
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7840996A
Other versions
GB2013724A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wyeth Holdings LLC
Original Assignee
American Cyanamid Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Cyanamid Co filed Critical American Cyanamid Co
Publication of GB2013724A publication Critical patent/GB2013724A/en
Application granted granted Critical
Publication of GB2013724B publication Critical patent/GB2013724B/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • C03C17/2453Coating containing SnO2
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Conductive Materials (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Photovoltaic Devices (AREA)
  • Coating By Spraying Or Casting (AREA)
GB7840996A 1978-01-30 1978-10-18 Method for sputtering cadmium stannate films Expired GB2013724B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87345178A 1978-01-30 1978-01-30

Publications (2)

Publication Number Publication Date
GB2013724A GB2013724A (en) 1979-08-15
GB2013724B true GB2013724B (en) 1982-10-06

Family

ID=25361663

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7840996A Expired GB2013724B (en) 1978-01-30 1978-10-18 Method for sputtering cadmium stannate films

Country Status (11)

Country Link
JP (1) JPS54113096A (en)
AU (1) AU521645B2 (en)
BE (1) BE873761A (en)
BR (1) BR7807832A (en)
CA (1) CA1111373A (en)
DE (1) DE2853875A1 (en)
ES (1) ES477282A1 (en)
FR (1) FR2415864A1 (en)
GB (1) GB2013724B (en)
IT (1) IT1113734B (en)
NL (1) NL7811077A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3103509C2 (en) * 1981-02-03 1986-11-20 Günter Dr. Dipl.-Phys. 7801 Buchenbach Kleer Target for producing thin films, method for producing the target and using the target
JPS63114159U (en) * 1987-01-19 1988-07-22
US4806221A (en) * 1987-03-26 1989-02-21 Ppg Industries, Inc. Sputtered films of bismuth/tin oxide
GB2256282A (en) * 1991-04-02 1992-12-02 Elmwood Sensors Electrochromic device.
JPH04127042U (en) * 1991-05-14 1992-11-19 富士通テン株式会社 Mounting device for automotive components
US6761985B2 (en) 2000-10-05 2004-07-13 Battelle Memorial Institute Magnetic transparent conducting oxide film and method of making
TWI310408B (en) * 2004-12-23 2009-06-01 Ind Tech Res Inst Cadmium tin oxide multi-layer laminate and its producing method
MY177448A (en) 2008-05-01 2020-09-15 First Solar Inc Transparent conductive materials including cadmium stannate
US9276142B2 (en) 2010-12-17 2016-03-01 First Solar, Inc. Methods for forming a transparent oxide layer for a photovoltaic device
US8476105B2 (en) 2010-12-22 2013-07-02 General Electric Company Method of making a transparent conductive oxide layer and a photovoltaic device
CN114657423B (en) * 2022-03-15 2023-03-24 先导薄膜材料(广东)有限公司 CdSn alloy target material and preparation method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB732891A (en) * 1949-03-25 1955-06-29 Megatron Ltd Improvements in and relating to the production of thin layers of chemical compounds on surfaces
US4040927A (en) * 1975-11-19 1977-08-09 Honeywell Inc. Cadmium tellurite thin films

Also Published As

Publication number Publication date
AU521645B2 (en) 1982-04-22
AU4081778A (en) 1980-04-24
BE873761A (en) 1979-07-30
FR2415864A1 (en) 1979-08-24
JPS54113096A (en) 1979-09-04
CA1111373A (en) 1981-10-27
JPS6146921B2 (en) 1986-10-16
FR2415864B1 (en) 1983-11-18
IT1113734B (en) 1986-01-20
IT7947571A0 (en) 1979-01-10
BR7807832A (en) 1979-07-31
ES477282A1 (en) 1979-10-16
NL7811077A (en) 1979-08-01
DE2853875A1 (en) 1979-08-02
GB2013724A (en) 1979-08-15

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee