ES2186530B1 - Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos. - Google Patents

Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos.

Info

Publication number
ES2186530B1
ES2186530B1 ES200100911A ES200100911A ES2186530B1 ES 2186530 B1 ES2186530 B1 ES 2186530B1 ES 200100911 A ES200100911 A ES 200100911A ES 200100911 A ES200100911 A ES 200100911A ES 2186530 B1 ES2186530 B1 ES 2186530B1
Authority
ES
Spain
Prior art keywords
procedure
preparation
thin layers
deposition
inorganic oxides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES200100911A
Other languages
English (en)
Other versions
ES2186530A1 (es
Inventor
Angel Barranco Quero
Francisco Yubero Valencia
Jose Cotrino Bautista
Juan Pedro Espinos Manzorro
Agustin Rodriguez Gonzalez-Elipe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Universidad de Sevilla
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Universidad de Sevilla
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC, Universidad de Sevilla filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Priority to ES200100911A priority Critical patent/ES2186530B1/es
Priority to PCT/ES2002/000193 priority patent/WO2002086190A1/es
Publication of ES2186530A1 publication Critical patent/ES2186530A1/es
Application granted granted Critical
Publication of ES2186530B1 publication Critical patent/ES2186530B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/024—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Abstract

Procedimiento para la preparación de capas finas porosas de óxidos inorgánicos. El objeto de la presente invención es un procedimiento para la preparación de capas finas de óxidos inorgánicos sobre substratos mediante la deposición desde fase vapor asistida por plasma que se diferencia de los procedimientos habituales porque se intercalan entre las sucesivas etapas de deposición del óxido inorgánico etapas de deposición de capas orgánicas, de forma que durante la etapa de deposición de la capa inorgánica se produzca la eliminación por combustión de la parte orgánica previamente depositada. El procedimiento es de interés en el desarrollo de membranas selectivas para separación y purificación de fluidos así como para la fabricación y modificación de sensores de gases y de humedad y de componentes electrónicos.
ES200100911A 2001-04-19 2001-04-19 Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos. Expired - Fee Related ES2186530B1 (es)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ES200100911A ES2186530B1 (es) 2001-04-19 2001-04-19 Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos.
PCT/ES2002/000193 WO2002086190A1 (es) 2001-04-19 2002-04-18 Procedimiento para la preparación de capas finas porosas de óxidos inorgánicos

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES200100911A ES2186530B1 (es) 2001-04-19 2001-04-19 Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos.

Publications (2)

Publication Number Publication Date
ES2186530A1 ES2186530A1 (es) 2003-05-01
ES2186530B1 true ES2186530B1 (es) 2005-05-01

Family

ID=8497485

Family Applications (1)

Application Number Title Priority Date Filing Date
ES200100911A Expired - Fee Related ES2186530B1 (es) 2001-04-19 2001-04-19 Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos.

Country Status (2)

Country Link
ES (1) ES2186530B1 (es)
WO (1) WO2002086190A1 (es)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1261227B (it) * 1993-04-06 1996-05-09 Cetev Cent Tecnolog Vuoto Impianto di deposizione di film sottili, preferibilmente riferito a tecniche pecvd e "sputtering", e relativi processi.
WO1999057330A1 (en) * 1998-05-01 1999-11-11 Desu Seshu B Oxide/organic polymer multilayer thin films deposited by chemical vapor deposition
US6015595A (en) * 1998-05-28 2000-01-18 Felts; John T. Multiple source deposition plasma apparatus
US6054188A (en) * 1999-08-02 2000-04-25 Becton Dickinson And Company Non-ideal barrier coating architecture and process for applying the same to plastic substrates
US6541367B1 (en) * 2000-01-18 2003-04-01 Applied Materials, Inc. Very low dielectric constant plasma-enhanced CVD films

Also Published As

Publication number Publication date
WO2002086190A1 (es) 2002-10-31
ES2186530A1 (es) 2003-05-01

Similar Documents

Publication Publication Date Title
TW200705566A (en) Method for manufacturing semiconductor devices
TW200742146A (en) Method of manufacturing device having flexible substrate and device having flexible substrate manufactured using the same
TW200644085A (en) A plasma enhanced atomic layer deposition system having reduced contamination
WO2003044843A3 (en) Forming low k dielectric layers
WO2006069774A3 (de) Vakuumbeschichtungssystem
ATE426455T1 (de) Selbstreinigungs-beleuchtungsvorrichtung
NO20055351L (no) Kompositt-gass-separasjonsmoduler som har hoye Tamman-temperatur mellomlag
JP2002060926A5 (ja) 発光装置の作製方法
TW200802536A (en) Method of manufacturing semiconductor device
EP2230703A3 (en) Manufacturing apparatus and manufacturing method of lighting device
ATE554925T1 (de) Arzneimittelblisterverpackung
TW200731336A (en) Manufacturing method of microstructure and microelectromechanical system
FR2896710B1 (fr) Procede de fabrication de piece de turbomachine comportant des orifices d'evacuation d'air de refroidissement
TW200717654A (en) Multi-source method and system for forming an oxide layer
WO2006036275A3 (en) Multi-layer film for forming a vacuum packaging bag and method of manufacture
TW200618038A (en) Apparatus and method of manufacturing fluorescent lamp
ATE519223T1 (de) Verfahren zur herstellung mehrerer halbleiteranordnungen und trägersubstrat
ATE475998T1 (de) Filteranordnung für eine brennstoffzelle
DE60326979D1 (de) Atomschichtenabscheidungsverfahren und vorrichtung
ES2186530B1 (es) Procedimiento para la preparacion de capas finas porosas de oxidos inorganicos.
TW200639134A (en) Multi-component ltcc substrate with a core of high dielectric constant ceramic material and processes for the development thereof
ATE389042T1 (de) Herstellungsverfahren für reaktor zur zersetzung von gasen
FR2910177B1 (fr) Couche tres fine enterree
WO2008025354A3 (de) Verfahren zum selektiven plasmachemischen trockenätzen von auf oberflächen von silicium-wafern ausgebildetem phosphorsilikatglas
WO2009096901A3 (en) Surface coating method

Legal Events

Date Code Title Description
EC2A Search report published

Date of ref document: 20030501

Kind code of ref document: A1

FG2A Definitive protection

Ref document number: 2186530B1

Country of ref document: ES

FD2A Announcement of lapse in spain

Effective date: 20180807