ES2180168T3 - Dispositivo para mover substratos a traves de una instalacion de tratamiento de estos. - Google Patents

Dispositivo para mover substratos a traves de una instalacion de tratamiento de estos.

Info

Publication number
ES2180168T3
ES2180168T3 ES98921450T ES98921450T ES2180168T3 ES 2180168 T3 ES2180168 T3 ES 2180168T3 ES 98921450 T ES98921450 T ES 98921450T ES 98921450 T ES98921450 T ES 98921450T ES 2180168 T3 ES2180168 T3 ES 2180168T3
Authority
ES
Spain
Prior art keywords
transport
lateral
base
spacing
belts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98921450T
Other languages
English (en)
Inventor
Klaus Weber
Bernd Mahner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steag Hamatech AG
Original Assignee
Steag Hamatech AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Hamatech AG filed Critical Steag Hamatech AG
Application granted granted Critical
Publication of ES2180168T3 publication Critical patent/ES2180168T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Threshing Machine Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Drying Of Solid Materials (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

Con el fin de obtener un dispositivo lo más simple y flexible posible para transportar sustratos (7) a través de una planta de proceso de sustratos (11), el dispositivo tiene una cinta transportadora básica (2) y dos cintas transportadoras laterales (4, 6) todas provistas con muescas para sostener los sustratos (7) en posición derecha.
ES98921450T 1997-04-17 1998-04-09 Dispositivo para mover substratos a traves de una instalacion de tratamiento de estos. Expired - Lifetime ES2180168T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19716123A DE19716123C2 (de) 1997-04-17 1997-04-17 Vorrichtung zum Bewegen von Substraten durch eine Substrat-Behandlungseinrichtung

Publications (1)

Publication Number Publication Date
ES2180168T3 true ES2180168T3 (es) 2003-02-01

Family

ID=7826830

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98921450T Expired - Lifetime ES2180168T3 (es) 1997-04-17 1998-04-09 Dispositivo para mover substratos a traves de una instalacion de tratamiento de estos.

Country Status (14)

Country Link
US (1) US6241079B1 (es)
EP (1) EP0976146B1 (es)
JP (1) JP3155015B2 (es)
KR (1) KR100347199B1 (es)
CN (1) CN1111898C (es)
AT (1) ATE220476T1 (es)
CA (1) CA2285393C (es)
DE (2) DE19716123C2 (es)
DK (1) DK0976146T3 (es)
ES (1) ES2180168T3 (es)
HK (1) HK1027671A1 (es)
IL (1) IL131893A0 (es)
TW (1) TW442435B (es)
WO (1) WO1998048450A1 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10028399A1 (de) * 2000-06-13 2001-12-20 Krauss Maffei Kunststofftech Kühlstation
US6913136B2 (en) * 2002-08-22 2005-07-05 Townend Engineering Company Apparatus and method for positioning separately supplied elongate meat products
DE102006035647A1 (de) * 2006-07-31 2008-02-07 Kaindl Flooring Gmbh Vorrichtung zum Herstellen oder/und Bearbeiten von Paneelen
EP1990293B1 (de) 2007-05-04 2009-11-18 Rena Sondermaschinen GmbH Vorrichtung und Verfahren zur Vereinzelung
DE102008060014A1 (de) * 2008-11-24 2010-05-27 Gebr. Schmid Gmbh & Co. Verfahren und Vorrichtung zur Handhabung eines zersägten Waferblocks
DE102009027280A1 (de) * 2009-06-29 2011-03-03 Robert Bosch Gmbh Vorrichtung zum Transportieren von Behältern
DE102009042912B4 (de) * 2009-09-24 2016-03-17 Solarworld Industries Sachsen Gmbh Transportvorrichtung
CN106076893B (zh) * 2016-07-29 2018-06-19 芜湖市振华戎科智能科技有限公司 一种加密光盘生产线的印刷输送装置
CN214298240U (zh) * 2020-11-30 2021-09-28 京东方科技集团股份有限公司 基板传送装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4217977A (en) * 1978-09-15 1980-08-19 The Silicon Valley Group, Inc. Conveyor system
NL8400294A (nl) * 1984-01-31 1985-08-16 Thomassen & Drijver Inrichting voor het transporteren van ronde, platte voorwerpen.
US4795022A (en) * 1985-01-29 1989-01-03 Burtons Gold Metal Biscuits Limited Biscuit conveyor
CH674974A5 (es) * 1987-05-11 1990-08-15 Praezisions Werkzeuge Ag
KR0133676B1 (ko) * 1987-12-07 1998-04-23 후세 노보루 웨이퍼 이동 교체 장치 및 방법
DE4341634A1 (de) * 1993-12-07 1995-06-08 Leybold Ag Vorrichtung für den Transport von scheibenförmigen Substraten in einer Vakuumbeschichtungsanlage
DE19529945C2 (de) * 1995-08-16 1997-12-11 Leybold Ag Vorrichtung zum Greifen und Halten eines flachen Substrats
DE19530858C1 (de) * 1995-08-22 1997-01-23 Siemens Ag Ansaugplatte für Wafer

Also Published As

Publication number Publication date
KR20010005923A (ko) 2001-01-15
CA2285393A1 (en) 1998-10-29
HK1027671A1 (en) 2001-01-19
TW442435B (en) 2001-06-23
CN1252892A (zh) 2000-05-10
JP3155015B2 (ja) 2001-04-09
EP0976146B1 (de) 2002-07-10
DE19716123C2 (de) 2000-01-27
CN1111898C (zh) 2003-06-18
DE59804726D1 (de) 2002-08-14
DK0976146T3 (da) 2002-11-04
US6241079B1 (en) 2001-06-05
DE19716123A1 (de) 1998-10-22
CA2285393C (en) 2003-06-17
IL131893A0 (en) 2001-03-19
ATE220476T1 (de) 2002-07-15
EP0976146A1 (de) 2000-02-02
JP2000510654A (ja) 2000-08-15
KR100347199B1 (ko) 2002-08-03
WO1998048450A1 (de) 1998-10-29

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