ES2170890T3 - Oscilador de inestabilidad con ajuste previo electrostatico. - Google Patents

Oscilador de inestabilidad con ajuste previo electrostatico.

Info

Publication number
ES2170890T3
ES2170890T3 ES96945848T ES96945848T ES2170890T3 ES 2170890 T3 ES2170890 T3 ES 2170890T3 ES 96945848 T ES96945848 T ES 96945848T ES 96945848 T ES96945848 T ES 96945848T ES 2170890 T3 ES2170890 T3 ES 2170890T3
Authority
ES
Spain
Prior art keywords
instability
oscillator
prior electrostatic
electrostatic adjustment
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96945848T
Other languages
English (en)
Inventor
Karsten Funk
Hans-Martin Kulcke
Franz Larmer
Werner Uhler
Andrea Schilp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of ES2170890T3 publication Critical patent/ES2170890T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G01P15/10—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by vibratory strings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)

Abstract

LA INVENCION SE REFIERE AUN SENSOR DE FUERZA, EN ESPECIAL UN SENSOR DE ACELERACION O UN SENSOR DE PRESION, CON UNA ESTRUCTURA QUE OSCILA EN RESONANCIA, CUYA FRECUENCIA DE OSCILACION PUEDE VARIAR COMO RESULTADO DE UN EFECTO DE FUERZA A DETECTAR. SE HA PREVISTO QUE, MEDIANTE LA APLICACION DE UNA TENSION ELECTRICA (U), PUEDA AJUSTARSE UNA DISTANCIA DE UN PUNTO DE TRABAJO (P SA ) DEL SENSOR DE FUERZA (10) EN RELACION A UN PUNTO DE SU INESTABILIDAD MECANICA.
ES96945848T 1995-12-16 1996-10-31 Oscilador de inestabilidad con ajuste previo electrostatico. Expired - Lifetime ES2170890T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19547184A DE19547184A1 (de) 1995-12-16 1995-12-16 Kraftsensor

Publications (1)

Publication Number Publication Date
ES2170890T3 true ES2170890T3 (es) 2002-08-16

Family

ID=7780418

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96945848T Expired - Lifetime ES2170890T3 (es) 1995-12-16 1996-10-31 Oscilador de inestabilidad con ajuste previo electrostatico.

Country Status (7)

Country Link
US (1) US6012341A (es)
EP (1) EP0866957B1 (es)
JP (1) JP2000501840A (es)
KR (1) KR100420882B1 (es)
DE (2) DE19547184A1 (es)
ES (1) ES2170890T3 (es)
WO (1) WO1997022864A1 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19643342A1 (de) 1996-10-21 1998-04-30 Bosch Gmbh Robert Verfahren und Vorrichtung zum Messen einer physikalischen Größe
DE19732302B4 (de) * 1997-07-26 2006-12-28 Volkswagen Ag Zierleiste und Stoßfänger mit Kollisions-Sensor-Anordnung für Kraftfahrzeuge
DE102009058320B4 (de) * 2009-12-15 2017-04-06 Airbus Defence and Space GmbH Drucksensor und Druckmessverfahren
KR101676307B1 (ko) * 2010-10-29 2016-11-15 엘지전자 주식회사 보행 보조 시스템 제어 장치
CN111024281B (zh) * 2018-10-09 2021-12-07 中国移动通信集团设计院有限公司 一种压力传感装置、制备方法和压力传感系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1094229A (en) * 1976-11-08 1981-01-20 Henry Guckel Electrostatically deformable thin silicon membranes
US5166892A (en) * 1990-04-30 1992-11-24 Yamato Scale Company, Limited Device for compensating for time-dependent error due to creep and like of measuring apparatus
US5417120A (en) * 1993-06-07 1995-05-23 Allied-Signal Inc. Vibrating beam force transducer with automatic drive control
US5339698A (en) * 1993-06-07 1994-08-23 Alliedsignal Inc. Vibrating beam force transducer with automatic adjustment of its electromagnetic drive
DE4333099A1 (de) * 1993-09-29 1995-03-30 Bosch Gmbh Robert Kraftsensor und Verfahren zur Herstellung eines Kraftsensors
DE4426163A1 (de) * 1994-07-22 1996-01-25 Bosch Gmbh Robert Beschleunigungssensor unter Ausnutzung mechanischer Instabilitäten

Also Published As

Publication number Publication date
DE59608571D1 (de) 2002-02-14
KR100420882B1 (ko) 2004-05-31
KR20000064405A (ko) 2000-11-06
JP2000501840A (ja) 2000-02-15
EP0866957A1 (de) 1998-09-30
DE19547184A1 (de) 1997-06-19
EP0866957B1 (de) 2002-01-09
US6012341A (en) 2000-01-11
WO1997022864A1 (de) 1997-06-26

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