ES2059216T3 - Un metodo para prolongar la vida util de los gases de los laseres excimeros. - Google Patents

Un metodo para prolongar la vida util de los gases de los laseres excimeros.

Info

Publication number
ES2059216T3
ES2059216T3 ES92905408T ES92905408T ES2059216T3 ES 2059216 T3 ES2059216 T3 ES 2059216T3 ES 92905408 T ES92905408 T ES 92905408T ES 92905408 T ES92905408 T ES 92905408T ES 2059216 T3 ES2059216 T3 ES 2059216T3
Authority
ES
Spain
Prior art keywords
gases
prolong
useful life
excimer lasers
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92905408T
Other languages
English (en)
Inventor
Gregory M Jursich
Drasek William A Von
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of ES2059216T3 publication Critical patent/ES2059216T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

UN METODO PARA PROLONGAR LA VIDA DEL GAS DE UN LASER EXCIMERO SUPRIMIENDO LA IMPUREZA DEL CF4, QUE COMPRENDE: A) LA REACCION DEL CF4, UNA IMPUREZA INDESEABLE QUE SE FORMA Y QUE CONTIENEN LOS GASES DE ACCION LASER, CON UNA CANTIDAD DE UN ADITIVO DE GAS OXIDANTE EFICAZ PARA PRODUCIR UNO O MAS COMPUESTOS QUE SON CONDENSABLES CON UN MEDIO DE REFRIGERACION, SIN REDUCIR EL RENDIMIENTO DEL LASER POR DEBAJO DE UN NIVEL ACEPTABLE PREDETERMINADO; Y B) LA CONDENSACION DE DICHO O DICHOS COMPUESTOS PRODUCIDOS EN EL PASO A) CON UN MEDIO DE REFRIGERACION, SUBSTANCIALMENTE, ADEMAS, SIN CONDENSAR DICHO O DICHOS GASES RAROS, SUPRIMIENDO, DE ESTE MODO, DICHA IMPUREZA DEL CF4 DE DICHO LASER EXCIMERO Y PROLONGANDO LA VIDA DEL GAS DEL LASER.
ES92905408T 1991-03-06 1992-02-25 Un metodo para prolongar la vida util de los gases de los laseres excimeros. Expired - Lifetime ES2059216T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66524091A 1991-03-06 1991-03-06

Publications (1)

Publication Number Publication Date
ES2059216T3 true ES2059216T3 (es) 1994-11-01

Family

ID=24669303

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92905408T Expired - Lifetime ES2059216T3 (es) 1991-03-06 1992-02-25 Un metodo para prolongar la vida util de los gases de los laseres excimeros.

Country Status (7)

Country Link
US (1) US5897847A (es)
EP (1) EP0527986B1 (es)
JP (1) JP3242918B2 (es)
CA (1) CA2082405C (es)
DE (1) DE69200250T2 (es)
ES (1) ES2059216T3 (es)
WO (1) WO1992016036A1 (es)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5307364A (en) * 1993-05-24 1994-04-26 Spectra Gases, Inc. Addition of oxygen to a gas mix for use in an excimer laser
US6195372B1 (en) * 1997-08-19 2001-02-27 David C. Brown Cryogenically-cooled solid-state lasers
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6644324B1 (en) 2000-03-06 2003-11-11 Cymer, Inc. Laser discharge chamber passivation by plasma
US6690706B2 (en) * 2000-06-09 2004-02-10 Cymer, Inc. High rep-rate laser with improved electrodes
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
KR100940782B1 (ko) * 2001-09-13 2010-02-11 사이머 인코포레이티드 향상된 전극을 구비한 고반복률 레이저
US7095774B2 (en) * 2001-09-13 2006-08-22 Cymer, Inc. Cathodes for fluorine gas discharge lasers
US7301980B2 (en) * 2002-03-22 2007-11-27 Cymer, Inc. Halogen gas discharge laser electrodes
BRPI0302019B1 (pt) 2002-06-03 2017-02-21 Praxair Technology Inc método para produzir um gás de ressonador de laser de dióxido de carbono, e, método para cortar, modificar superfície, ou soldar um artigo
ATE398443T1 (de) * 2004-02-13 2008-07-15 Oreal Beschichtungszusammensetzung für keratinfasern enthaltend ein klebriges mikrokristallines wachs and fasern
US7633989B2 (en) * 2005-06-27 2009-12-15 Cymer, Inc. High pulse repetition rate gas discharge laser
US7706424B2 (en) * 2005-09-29 2010-04-27 Cymer, Inc. Gas discharge laser system electrodes and power supply for delivering electrical energy to same
US20070071047A1 (en) * 2005-09-29 2007-03-29 Cymer, Inc. 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
US20070268944A1 (en) * 2006-05-22 2007-11-22 Frank Voss Gas purification in an excimer laser using a stirling cycle cooler
JP6457013B2 (ja) * 2017-05-17 2019-01-23 日本エア・リキード株式会社 ガスリサイクル機能を有するエキシマレーザ発振装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU424809A1 (ru) * 1972-11-16 1974-04-25 Е. А. Мануйлова, Л. Ф. Соколов , С. В. Соколов Способ получения карбонилфторида
US4392888A (en) * 1982-01-07 1983-07-12 Aluminum Company Of America Metal treatment system
CA1298959C (en) * 1985-09-28 1992-04-21 Kohzo Hakuta Method of refining rare gas halide excimer laser gas
US4796271A (en) * 1987-07-02 1989-01-03 Potomac Photonics, Inc. High duty factor rare gas halide laser
JPH0760914B2 (ja) * 1989-01-30 1995-06-28 セントラル硝子株式会社 エキシマーレーザーガスの精製法並びにその装置
GB8927209D0 (en) * 1989-12-01 1990-01-31 British Aerospace Apparatus for controlling the composition of a laser gas or gas mixture

Also Published As

Publication number Publication date
JP3242918B2 (ja) 2001-12-25
CA2082405A1 (en) 1992-09-07
EP0527986B1 (en) 1994-07-20
CA2082405C (en) 2004-09-28
US5897847A (en) 1999-04-27
EP0527986A1 (en) 1993-02-24
JPH06500433A (ja) 1994-01-13
DE69200250D1 (de) 1994-08-25
WO1992016036A1 (en) 1992-09-17
DE69200250T2 (de) 1994-10-27

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