DE69200250T2 - Verfahren zur verlängerung der gaslebensdauer von excimer-lasern. - Google Patents

Verfahren zur verlängerung der gaslebensdauer von excimer-lasern.

Info

Publication number
DE69200250T2
DE69200250T2 DE69200250T DE69200250T DE69200250T2 DE 69200250 T2 DE69200250 T2 DE 69200250T2 DE 69200250 T DE69200250 T DE 69200250T DE 69200250 T DE69200250 T DE 69200250T DE 69200250 T2 DE69200250 T2 DE 69200250T2
Authority
DE
Germany
Prior art keywords
extending
excimer lasers
gas life
life
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69200250T
Other languages
English (en)
Other versions
DE69200250D1 (de
Inventor
Gregory Jursich
Drasek William Von
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69200250D1 publication Critical patent/DE69200250D1/de
Application granted granted Critical
Publication of DE69200250T2 publication Critical patent/DE69200250T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69200250T 1991-03-06 1992-02-25 Verfahren zur verlängerung der gaslebensdauer von excimer-lasern. Expired - Fee Related DE69200250T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66524091A 1991-03-06 1991-03-06
PCT/EP1992/000402 WO1992016036A1 (en) 1991-03-06 1992-02-25 A method for extending the gas lifetime of excimer lasers

Publications (2)

Publication Number Publication Date
DE69200250D1 DE69200250D1 (de) 1994-08-25
DE69200250T2 true DE69200250T2 (de) 1994-10-27

Family

ID=24669303

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69200250T Expired - Fee Related DE69200250T2 (de) 1991-03-06 1992-02-25 Verfahren zur verlängerung der gaslebensdauer von excimer-lasern.

Country Status (7)

Country Link
US (1) US5897847A (de)
EP (1) EP0527986B1 (de)
JP (1) JP3242918B2 (de)
CA (1) CA2082405C (de)
DE (1) DE69200250T2 (de)
ES (1) ES2059216T3 (de)
WO (1) WO1992016036A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5307364A (en) * 1993-05-24 1994-04-26 Spectra Gases, Inc. Addition of oxygen to a gas mix for use in an excimer laser
US6195372B1 (en) * 1997-08-19 2001-02-27 David C. Brown Cryogenically-cooled solid-state lasers
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6644324B1 (en) * 2000-03-06 2003-11-11 Cymer, Inc. Laser discharge chamber passivation by plasma
US6690706B2 (en) * 2000-06-09 2004-02-10 Cymer, Inc. High rep-rate laser with improved electrodes
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US7095774B2 (en) * 2001-09-13 2006-08-22 Cymer, Inc. Cathodes for fluorine gas discharge lasers
KR100940782B1 (ko) * 2001-09-13 2010-02-11 사이머 인코포레이티드 향상된 전극을 구비한 고반복률 레이저
US7301980B2 (en) * 2002-03-22 2007-11-27 Cymer, Inc. Halogen gas discharge laser electrodes
CA2430608C (en) * 2002-06-03 2012-01-10 Praxair Technology, Inc. Carbon dioxide laser resonator gas
EP1563824B1 (de) * 2004-02-13 2008-06-18 L'oreal Beschichtungszusammensetzung für Keratinfasern enthaltend ein klebriges mikrokristallines Wachs and Fasern
US7633989B2 (en) 2005-06-27 2009-12-15 Cymer, Inc. High pulse repetition rate gas discharge laser
US20070071047A1 (en) * 2005-09-29 2007-03-29 Cymer, Inc. 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
US7706424B2 (en) * 2005-09-29 2010-04-27 Cymer, Inc. Gas discharge laser system electrodes and power supply for delivering electrical energy to same
US20070268944A1 (en) * 2006-05-22 2007-11-22 Frank Voss Gas purification in an excimer laser using a stirling cycle cooler
JP6457013B2 (ja) * 2017-05-17 2019-01-23 日本エア・リキード株式会社 ガスリサイクル機能を有するエキシマレーザ発振装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU424809A1 (ru) * 1972-11-16 1974-04-25 Е. А. Мануйлова, Л. Ф. Соколов , С. В. Соколов Способ получения карбонилфторида
US4392888A (en) * 1982-01-07 1983-07-12 Aluminum Company Of America Metal treatment system
CA1298959C (en) * 1985-09-28 1992-04-21 Kohzo Hakuta Method of refining rare gas halide excimer laser gas
US4796271A (en) * 1987-07-02 1989-01-03 Potomac Photonics, Inc. High duty factor rare gas halide laser
JPH0760914B2 (ja) * 1989-01-30 1995-06-28 セントラル硝子株式会社 エキシマーレーザーガスの精製法並びにその装置
GB8927209D0 (en) * 1989-12-01 1990-01-31 British Aerospace Apparatus for controlling the composition of a laser gas or gas mixture

Also Published As

Publication number Publication date
JP3242918B2 (ja) 2001-12-25
US5897847A (en) 1999-04-27
WO1992016036A1 (en) 1992-09-17
ES2059216T3 (es) 1994-11-01
DE69200250D1 (de) 1994-08-25
JPH06500433A (ja) 1994-01-13
CA2082405A1 (en) 1992-09-07
EP0527986B1 (de) 1994-07-20
CA2082405C (en) 2004-09-28
EP0527986A1 (de) 1993-02-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee