ES2044593T3 - Metodo y disposicion para llevar a cabo un analisis espectral de una se\al en uno o varios puntos de medicion. - Google Patents

Metodo y disposicion para llevar a cabo un analisis espectral de una se\al en uno o varios puntos de medicion.

Info

Publication number
ES2044593T3
ES2044593T3 ES90908190T ES90908190T ES2044593T3 ES 2044593 T3 ES2044593 T3 ES 2044593T3 ES 90908190 T ES90908190 T ES 90908190T ES 90908190 T ES90908190 T ES 90908190T ES 2044593 T3 ES2044593 T3 ES 2044593T3
Authority
ES
Spain
Prior art keywords
frequency
pct
spectrum analyzer
signal
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90908190T
Other languages
English (en)
Inventor
Hans-Detlef Brust
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brust Hans Detlef
Original Assignee
Brust Hans Detlef
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brust Hans Detlef filed Critical Brust Hans Detlef
Application granted granted Critical
Publication of ES2044593T3 publication Critical patent/ES2044593T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G01R23/16—Spectrum analysis; Fourier analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Abstract

LAS PRUEBAS DE HACES DE ELECTRONES SE SUELEN LLEVAR A CABO EN LA ESCALA DE FRECUENCIA, ASI COMO EN LA ESCALA DE TIEMPO. ESTA INVENCION ESTA RELACIONADA CON UN PROCESO EN EL CUAL LA SEÑAL DE SALIDA DEL OSCILADOR LOCAL DE UN ANALIZADOR DE ESPECTRO CONVENCIONAL DE ALTA FRECUENCIA SUFRE UNA CONVERSION A PRIMERA FRECUENCIA Y SE UTILIZA LUEGO PARA MODULAR EL HAZ PRIMARIO. LA SEÑAL QUE VA A SER ANALIZADA, QUE EN ALGUNOS CASOS ES DE UNA FRECUENCIA MUY ALTA, SE TRANSFORMA A UNA FRECUENCIA INTERMEDIA, BAJA, QUE SE PUEDE DETECTAR RAPIDAMENTE POR LA INTERACCION MULTIPLICATIVA DEL CONTRASTE POTENCIAL Y POR EL HAZ PRIMARIO MODULADO. DESPUES SE TRANSFIERE LA SEÑAL DE FRECUENCIA INTERMEDIA POR UNA CONVERSION DE SEGUNDA FRECUENCIA A UN NIVEL DE ENTRADA DE FRECUENCIA DEL ANALIZADOR DE ESPECTRO QUE PUEDE SER, O BIEN LA FRECUENCIA DE SELECCION DE ENTRADA VARIABLE, O LA FRECUENCIA INTERMEDIA CONSTANTE DEL ANALIZADOR DE ESPECTRO. EL RESULTADO DE LA MEDICION APARECE DE FORMA CONVENCIONAL EN LA PANTALLA DEL ANALIZADOR DE ESPECTRO.
ES90908190T 1989-05-29 1990-05-28 Metodo y disposicion para llevar a cabo un analisis espectral de una se\al en uno o varios puntos de medicion. Expired - Lifetime ES2044593T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3917411A DE3917411A1 (de) 1989-05-29 1989-05-29 Verfahren und anordnung zur schnellen spektralanalyse eines signals an einem oder mehreren messpunkten

Publications (1)

Publication Number Publication Date
ES2044593T3 true ES2044593T3 (es) 1994-01-01

Family

ID=6381583

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90908190T Expired - Lifetime ES2044593T3 (es) 1989-05-29 1990-05-28 Metodo y disposicion para llevar a cabo un analisis espectral de una se\al en uno o varios puntos de medicion.

Country Status (8)

Country Link
US (1) US5260648A (es)
EP (1) EP0428663B1 (es)
JP (1) JPH04500126A (es)
AT (1) ATE93064T1 (es)
DE (2) DE3917411A1 (es)
DK (1) DK0428663T3 (es)
ES (1) ES2044593T3 (es)
WO (1) WO1990015340A1 (es)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
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US5162723A (en) * 1991-02-11 1992-11-10 Hewlett-Packard Company Sampling signal analyzer
GB2283825B (en) * 1993-11-09 1997-07-02 Advantest Corp IC fault analysis system
EP0977052B1 (en) * 1994-01-12 2002-10-02 Advantest Corporation Non-contact type wave signal observation apparatus
EP0702236A3 (en) * 1994-09-19 1996-06-05 Hamamatsu Photonics Kk Voltage measuring system
US5581194A (en) * 1995-06-07 1996-12-03 Advanced Micro Devices, Inc. Method and apparatus for passive optical characterization of semiconductor substrates subjected to high energy (MEV) ion implantation using high-injection surface photovoltage
JPH1062502A (ja) * 1996-08-21 1998-03-06 Mitsubishi Electric Corp 被測定デバイスの故障解析方法、故障解析装置及び故障解析システム
US6425132B1 (en) 1998-04-06 2002-07-23 Wavetek Corporation Ingress testing of CATV system utilizing remote selection of CATV node
EP1151413B1 (en) * 1999-11-23 2007-02-21 Koninklijke Philips Electronics N.V. Watermark embedding and detection
DE10130687A1 (de) * 2001-06-26 2003-01-02 Rohde & Schwarz Meßsystem mit einem Referenzsignal zwischen einem Signalgenerator und einem Signalanalysator
JP4344197B2 (ja) * 2003-08-26 2009-10-14 パナソニック株式会社 絶縁膜測定装置、絶縁膜測定方法及び絶縁膜評価装置
JP2006040991A (ja) * 2004-07-23 2006-02-09 Hitachi Ltd 半導体装置の評価方法、および製造方法
US7116092B2 (en) * 2004-07-28 2006-10-03 International Business Machines Corporation Integrated spectrum analyzer circuits and methods for providing on-chip diagnostics
JP5750213B2 (ja) * 2005-11-04 2015-07-15 テクトロニクス・インコーポレイテッドＴｅｋｔｒｏｎｉｘ，Ｉｎｃ． スペクトラム分析方法
JP5219023B2 (ja) * 2007-10-26 2013-06-26 独立行政法人情報通信研究機構 電界、電圧または磁界用測定プローブ
US20090300534A1 (en) * 2008-05-30 2009-12-03 Trilithic, Inc. Apparatus and method for displaying network status
US20100064078A1 (en) * 2008-08-15 2010-03-11 Powell Thomas J Wireless communication between testing instrument and network
KR100987583B1 (ko) * 2008-10-27 2010-10-12 포항공과대학교 산학협력단 전광 효과를 이용한 빔 진단 장치 및 방법
JP6379018B2 (ja) * 2014-11-20 2018-08-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置および検査方法
WO2019131410A1 (ja) * 2017-12-27 2019-07-04 株式会社Ｐｈｏｔｏ ｅｌｅｃｔｒｏｎ Ｓｏｕｌ 試料検査装置、および、試料検査方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660763A (en) * 1970-01-08 1972-05-02 Benjamin Parzen Wide band frequency extender for a frequency comparator
US3643126A (en) * 1970-03-04 1972-02-15 Hewlett Packard Co Frequency-measuring system utilizing means for momentarily stopping the variable frequency generator
IT1071425B (it) * 1976-08-31 1985-04-10 Rai Radiotelevisione Italiana Procedimento ed apparecchiatura per la misura dell ampiezza e del ritardo di gruppo sulle singole bande laterali..dai morsetti di ingresso a quelli di uscita di un trasmettitore modulato in ampiezza
DE2814049A1 (de) * 1978-03-31 1979-10-18 Siemens Ag Verfahren zur beruehrungslosen messung des potentialverlaufs in einem elektronischen bauelement und anordnung zur durchfuehrung des verfahrens
DE2813948A1 (de) * 1978-03-31 1979-10-11 Siemens Ag Verfahren zur elektronischen abbildung der potentialverteilung in einem elektronischen bauelement
JPS5764171A (en) * 1980-10-08 1982-04-19 Advantest Corp Spectrum analyzer
EP0166814B1 (de) * 1984-05-30 1990-07-18 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Detektion und Abbildung eines Messpunkts, der eine Spannung wenigstens einer bestimmten Frequenz führt
EP0226913A3 (de) * 1985-12-17 1988-10-05 Siemens Aktiengesellschaft Verfahren und Anordnung zur Lokalisierung und/oder Abbildung der ein bestimmtes zeitabhängiges Signal führenden Punkte einer Probe
DE3617044A1 (de) * 1986-05-21 1987-11-26 Siemens Ag Messverarbeitungsanordnung fuer korpuskularstrahlung
US4728884A (en) * 1986-10-09 1988-03-01 Tektronix, Inc. Infinite dynamic range phase detector
EP0302241B1 (de) * 1987-08-06 1994-01-26 Siemens Aktiengesellschaft Spannungsmessung mit einer Elektronensonde ohne externes Triggersignal
DE3866079D1 (de) * 1987-09-30 1991-12-12 Siemens Ag Automatische frequenznachfuehrung bei korpuskularstrahlmessverfahren unter anwendung eines modulierten primaerstrahls.

Also Published As

Publication number Publication date
EP0428663A1 (de) 1991-05-29
DE59002300D1 (de) 1993-09-16
DK0428663T3 (da) 1993-12-13
EP0428663B1 (de) 1993-08-11
US5260648A (en) 1993-11-09
WO1990015340A1 (de) 1990-12-13
JPH04500126A (ja) 1992-01-09
DE3917411A1 (de) 1990-12-06
ATE93064T1 (de) 1993-08-15

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