ES2032646T3 - Sensor de aceleracion con una vigueta flexible empotrada por un extremo. - Google Patents

Sensor de aceleracion con una vigueta flexible empotrada por un extremo.

Info

Publication number
ES2032646T3
ES2032646T3 ES198989120660T ES89120660T ES2032646T3 ES 2032646 T3 ES2032646 T3 ES 2032646T3 ES 198989120660 T ES198989120660 T ES 198989120660T ES 89120660 T ES89120660 T ES 89120660T ES 2032646 T3 ES2032646 T3 ES 2032646T3
Authority
ES
Spain
Prior art keywords
acceleration sensor
flexible beam
flexible joint
layers
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198989120660T
Other languages
English (en)
Inventor
Dietrich Dr. Juckenack
Matthias Schildwachter
Klaus-Peter Buge
Michael Raab
Gerhard Blumenstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Continental Teves AG and Co oHG
Original Assignee
Alfred Teves GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alfred Teves GmbH filed Critical Alfred Teves GmbH
Application granted granted Critical
Publication of ES2032646T3 publication Critical patent/ES2032646T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/105—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetically sensitive devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/03—Hall effect

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)

Abstract

UN SENSOR DE ACELERACION CONSISTE PRINCIPALMENTE EN UNA VIGA FLEXIBLE UNILATERALMENTE SUJETADA (2,2,8,13+14,20+21,23) Y SITUADA DENTRO DE UNA CAJA (1,24), QUE POR SU INERCIA PUEDE FLEXIONARSE, DENTRO DEL PLANO DE LA ACELERACION QUE VA A MEDIRSE, RELATIVAMENTE A LA CAJA DEL SENSOR. LA VIGA FLEXIBLE CONFORMADA COMO UNA CINTA FINA, ANCHA (B) EN RELACION A SU GROSOR (D), ESTA FABRICADA DE UN METAL AMORFO Y SE COMPONE DE UNA O VARIAS CAPAS. EN UNA CONSTRUCCION DE VARIAS CAPAS, EL ROZAMIENTO ENTRE LAS CAPAS O CINTAS (13,14) AMORTIGUA LA OSCILACION. UN ESCASO INTERSTICIO DE AIRE (L) ENTRE LAS PAREDES (25,26,27) DE LA CAJA CERRADA (24) Y LA VIGA FLEXIBLE (23), SIRVE ADICIONALMENTE PARA LA AMORTIGUACION DE LAS OSCILACIONES DE LA VIGA.
ES198989120660T 1988-12-09 1989-11-08 Sensor de aceleracion con una vigueta flexible empotrada por un extremo. Expired - Lifetime ES2032646T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3841451 1988-12-09
DE3929082A DE3929082A1 (de) 1988-12-09 1989-09-01 Beschleunigungssensor mit einseitig eingespanntem biegebalken

Publications (1)

Publication Number Publication Date
ES2032646T3 true ES2032646T3 (es) 1993-02-16

Family

ID=25874949

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198989120660T Expired - Lifetime ES2032646T3 (es) 1988-12-09 1989-11-08 Sensor de aceleracion con una vigueta flexible empotrada por un extremo.

Country Status (5)

Country Link
US (1) US5027657A (es)
EP (1) EP0377804B1 (es)
JP (1) JPH02238367A (es)
DE (2) DE3929082A1 (es)
ES (1) ES2032646T3 (es)

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GB2256050A (en) * 1991-05-16 1992-11-25 David Alick Burgoyne Transducer using hall effect sensor
US5656846A (en) * 1991-06-18 1997-08-12 Nec Corporation Semiconductor acceleration sensor and method of fabrication thereof
NO921888L (no) * 1991-07-03 1993-01-04 Intevep Sa Sensor for detektering av fluidstroemmoenstre
JPH05249137A (ja) * 1992-03-10 1993-09-28 Takata Kk 加速度センサ
US5383473A (en) * 1993-05-10 1995-01-24 Pacesetter, Inc. Rate-responsive implantable stimulation device having a miniature hybrid-mountable accelerometer-based sensor and method of fabrication
MX9705259A (es) * 1995-01-12 1997-10-31 Siemens Ag Interruptor para aceleracion mecanico.
DE19508014C1 (de) * 1995-01-12 1996-07-11 Siemens Ag Mechanischer Beschleunigungsschalter
SE509206C2 (sv) * 1995-08-30 1998-12-14 Roland Larsson Vibrationsdetektor
DE19753778B4 (de) * 1997-12-04 2004-02-26 Robert Bosch Gmbh Sensor
US6507187B1 (en) * 1999-08-24 2003-01-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ultra-sensitive magnetoresistive displacement sensing device
US6311557B1 (en) * 1999-09-24 2001-11-06 Ut-Battelle, Llc Magnetically tunable resonance frequency beam utilizing a stress-sensitive film
JP4491114B2 (ja) * 2000-06-23 2010-06-30 株式会社日立グローバルストレージテクノロジーズ 落下感知センサ及びこれを用いた情報処理装置
DE10229020A1 (de) * 2002-06-28 2004-01-22 Robert Bosch Gmbh Kraftsensor
JP2004127364A (ja) * 2002-09-30 2004-04-22 Toshiba Corp 電子機器および衝撃対策方法
KR100632458B1 (ko) * 2004-04-30 2006-10-11 아이치 세이코우 가부시키가이샤 가속도 센서
JP2007033045A (ja) * 2005-07-22 2007-02-08 Tdk Corp 加速度センサ用のばね部材、加速度センサ及び磁気ディスクドライブ装置
JP2007093448A (ja) * 2005-09-29 2007-04-12 Aichi Steel Works Ltd モーションセンサ及びこれを用いた携帯電話機
US20070209437A1 (en) * 2005-10-18 2007-09-13 Seagate Technology Llc Magnetic MEMS device
JP4367403B2 (ja) * 2005-11-24 2009-11-18 Ｔｄｋ株式会社 加速度センサ用ばね部材、加速度センサ及び磁気ディスクドライブ装置
JP4556933B2 (ja) * 2006-09-25 2010-10-06 Ｔｄｋ株式会社 加速度センサ及び磁気ディスクドライブ装置
JP2009192379A (ja) * 2008-02-14 2009-08-27 Seiko Instruments Inc 加速度センサ及び加速度センサの製造方法
KR20130067336A (ko) * 2011-11-28 2013-06-24 삼성전기주식회사 관성센서
RU2517787C1 (ru) * 2012-11-09 2014-05-27 Федеральное государственное бюджетное учреждение науки Институт нанотехнологий микроэлектроники Российской академии наук Наноэлектромеханическая система для измерения параметров движения и способ ее изготовления
CN109991442A (zh) * 2017-12-30 2019-07-09 大连良华科技有限公司 一种免温度补偿的加速度传感器
WO2020047043A1 (en) 2018-08-28 2020-03-05 Lenzi Tommaso Variable transmission for assistive prosthesis device
EP4103133A4 (en) 2020-03-20 2024-03-06 University of Utah Research Foundation SELF-ALIGNMENT MECHANISMS IN PASSIVE AND POWERED EXOSKELETONS
IT202000018670A1 (it) * 2020-07-30 2022-01-30 St Microelectronics Srl Accelerometro mems a larga banda per la rilevazione di vibrazioni
CN112179478B (zh) * 2020-10-09 2022-09-30 重庆理工大学 一种基于磁电阻效应的悬臂式振动传感器

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US2665896A (en) * 1943-06-03 1954-01-12 Frank J Kirby Variable resistance acceleration sensitive device
US2552722A (en) * 1948-08-09 1951-05-15 Pennsylvania Res Corp Electromagnetic accelerometer
GB745050A (en) * 1951-08-13 1956-02-22 Statham Lab Inc Improvements in or relating to motion responsive devices such as accelerometers
US3636774A (en) * 1969-08-25 1972-01-25 Conrac Corp Dual mass accelerometer with semiconductive transducer
DE2225945C3 (de) * 1972-05-27 1975-01-23 Dieter Dr.-Ing. 8720 Schweinfurt Lutz Geber zur Messung von Beschleunigungskomponenten
DE2709156A1 (de) * 1977-03-03 1978-09-07 Vdo Schindling Einrichtung zur anzeige von beschleunigungswerten
DE2829425C3 (de) * 1978-07-05 1981-08-06 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Vorrichtung zum Messen von Beschleunigungen an schwingenden Körpern
DE3016001A1 (de) * 1980-04-25 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Messeinrichtung fuer die verzoegerung eines fahrzeuges
DE3021317A1 (de) * 1980-06-06 1981-12-24 Robert Bosch Gmbh, 7000 Stuttgart Messeinrichtung fuer ein fahrzeug
US4322973A (en) * 1980-08-29 1982-04-06 Aisin Seiki Company, Limited Acceleration and deceleration sensor
JPS57165721A (en) * 1981-04-06 1982-10-12 Toyota Central Res & Dev Lab Inc Vibration sensor for engine
JPS58108422A (ja) * 1981-12-23 1983-06-28 Oki Electric Ind Co Ltd 全方位振動センサ−
DE3342186A1 (de) * 1983-11-23 1985-05-30 Robert Bosch Gmbh, 7000 Stuttgart Beschleunigungsaufnehmer
US4849655A (en) * 1985-07-04 1989-07-18 Hayman-Reese Party, Limited Accelerometer or decelerometer for vehicle brake control system
DE3704209A1 (de) * 1986-04-11 1987-10-15 Bosch Gmbh Robert Beschleunigungssensor
JPS631975A (ja) * 1986-06-20 1988-01-06 Atsugi Motor Parts Co Ltd 加速度センサ
JPH0697236B2 (ja) * 1987-05-30 1994-11-30 株式会社日本自動車部品総合研究所 加速度センサ
JPH077012B2 (ja) * 1987-08-18 1995-01-30 富士通株式会社 加速度センサ

Also Published As

Publication number Publication date
DE3929082A1 (de) 1990-06-13
DE58901699D1 (de) 1992-07-23
US5027657A (en) 1991-07-02
EP0377804A1 (de) 1990-07-18
JPH02238367A (ja) 1990-09-20
EP0377804B1 (de) 1992-06-17

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