ES2028204T3 - Detector para alinear lasers de alta potencia. - Google Patents

Detector para alinear lasers de alta potencia.

Info

Publication number
ES2028204T3
ES2028204T3 ES198888112287T ES88112287T ES2028204T3 ES 2028204 T3 ES2028204 T3 ES 2028204T3 ES 198888112287 T ES198888112287 T ES 198888112287T ES 88112287 T ES88112287 T ES 88112287T ES 2028204 T3 ES2028204 T3 ES 2028204T3
Authority
ES
Spain
Prior art keywords
detector
high power
sector
thermally
align
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198888112287T
Other languages
English (en)
Inventor
William Henry Kasner
John Michael Zomp
Vincent Andrew Toth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Application granted granted Critical
Publication of ES2028204T3 publication Critical patent/ES2028204T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Laser Beam Processing (AREA)

Abstract

SE PRESENTA UN DETECTOR PARA ALINEAR UN HAZ DE LASER. EL DETECTOR INCLUYE UN SUBSTRATO AISLANTE, Y UNA CARA PLANA TERMICAMENTE CONDUCTORA SUJETA A DICHO SUBSTRATO. LA CARA ESTA DIVIDIDA EN SECTORES TERMICAMENTE AISLADOS, CADA UNO DE LOS CUALES TIENE LA MISMA FORMA Y AREA. PARA CADA SECTOR SE SUMINISTRA UN DISPOSITIVO TERMICAMENTE SENSIBLE. CADA SECTOR ESTA EN CONTACTO TERMICO CON UNO DE LOS DISPOSITIVOS TERMICOS SENSIBLES CORRESPONDIENTES, Y CADA DISPOSITIVO TERMICO SENSIBLE PRODUCE UNA RESPUESTA PROPORCIONAL A LA CANTIDAD DE ENERGIA DEL LASER QUE INCIDE SOBRE EL MISMO PARA DE ESTA FORMA SUMINISTRAR INDICACION DEL DESALINEAMIENTO DEL HAZ DE LASER CON RELACION A LA LINEA DE TRANSPORTE.
ES198888112287T 1987-08-28 1988-07-29 Detector para alinear lasers de alta potencia. Expired - Lifetime ES2028204T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/090,639 US4793715A (en) 1987-08-28 1987-08-28 Detector for aligning high power lasers

Publications (1)

Publication Number Publication Date
ES2028204T3 true ES2028204T3 (es) 1992-07-01

Family

ID=22223638

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198888112287T Expired - Lifetime ES2028204T3 (es) 1987-08-28 1988-07-29 Detector para alinear lasers de alta potencia.

Country Status (5)

Country Link
US (1) US4793715A (es)
EP (1) EP0304664B1 (es)
JP (1) JPH0196517A (es)
KR (1) KR890004155A (es)
ES (1) ES2028204T3 (es)

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DE3840278A1 (de) * 1988-11-30 1990-05-31 Diehl Gmbh & Co Einrichtung zur erfassung eines laserstrahls
US4964735A (en) * 1989-04-07 1990-10-23 Coherent, Inc. Apparatus for indicating the power and position of a laser beam
DE3919571A1 (de) * 1989-06-15 1990-12-20 Diehl Gmbh & Co Vorrichtung zur messung des intensitaetsprofils eines laserstrahls
US5160917A (en) * 1990-06-14 1992-11-03 Iowa State University Research Foundation, Inc. Energy beam position detector
US5141330A (en) * 1991-02-05 1992-08-25 The Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations Thin-film quadrant temperature sensor for use in a system to control the alignment of a CO2 laser beam
DE19753884A1 (de) * 1997-12-05 1999-06-10 Behr Gmbh & Co Sensor zur Erfassung der Sonneneinstrahlung
GB2357835A (en) * 1999-09-13 2001-07-04 Michael P Geissler Detecting the incident angle of an optical light beam
JP2006500579A (ja) * 2002-09-27 2006-01-05 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 光素子、そのような素子を製作する方法、及び光線とそのような素子の位置を揃える方法
DE10325906B4 (de) * 2003-06-05 2007-03-15 Erwin Martin Heberer Vorrichtung zur Abschirmung von kohärenter elektromagnetischer Strahlung sowie Laserkabine mit einer solchen Vorrichtung
EP1529592A1 (de) * 2003-11-08 2005-05-11 TRUMPF Laser GmbH + Co. KG Ausrichtvorrichtung und -anordnung für einen Laserstrahl sowie zugehöriges Teach-Verfahren
WO2005083462A1 (de) * 2004-02-26 2005-09-09 Daimlerchrysler Ag Verfahren und vorrichtung zum ausrichten eines senders
JP2007175744A (ja) 2005-12-28 2007-07-12 Yamazaki Mazak Corp レーザ加工機における光路軸の調整装置
US20090061752A1 (en) * 2007-08-28 2009-03-05 Current Energy Controls, Lp Autonomous Ventilation System
JP4916535B2 (ja) * 2008-08-14 2012-04-11 エーエスエムエル ネザーランズ ビー．ブイ． 放射源、デバイス製造方法、およびリソグラフィ装置
EP2175701B1 (en) * 2008-10-10 2014-01-22 ASML Netherlands B.V. Radiation source, lithographic apparatus, and device manufacturing method
US9494324B2 (en) 2008-12-03 2016-11-15 Oy Halton Group Ltd. Exhaust flow control system and method
US9042694B2 (en) 2010-12-10 2015-05-26 Raytheon Company Energy target system
DE102011005775B4 (de) 2011-03-18 2012-11-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Detektor und Verfahren zum Erfassen einer Ausrichtung eines Laserstrahls in einer Laserbearbeitungsmaschine sowie Laserbearbeitungsmaschine
WO2015172816A1 (de) * 2014-05-13 2015-11-19 Trumpf Laser- Und Systemtechnik Gmbh Einrichtung zur überwachung der ausrichtung eines laserstrahls und euv-strahlungserzeugungsvorrichtung damit
DE102014016889A1 (de) 2014-11-15 2016-05-19 Mbda Deutschland Gmbh Überwachungsvorrichtung für einen Laserstrahl
WO2019045138A1 (ko) 2017-08-30 2019-03-07 한국생산기술연구원 다종가스 동시 측정 tdlas 정렬 시스템
KR102056920B1 (ko) 2017-10-31 2020-01-22 한국생산기술연구원 다종가스 동시 측정 tdlas 회절 정렬 시스템
KR102056794B1 (ko) 2017-10-31 2019-12-18 한국생산기술연구원 미세 광경로를 이용한 다종가스 동시 측정 tdlas 정렬 시스템
KR102056799B1 (ko) 2017-10-31 2019-12-18 한국생산기술연구원 다종가스 동시 측정 tdlas 자동 정렬 시스템

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US4107530A (en) * 1966-01-26 1978-08-15 Lockheed Aircraft Corporation Infrared acquisition device
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JPS4821363B1 (es) * 1967-12-31 1973-06-28
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US3480777A (en) * 1969-02-28 1969-11-25 Barnes Eng Co Pyroelectric radiation detection system with extended frequency range and reduced capacitance
US3723013A (en) * 1970-10-23 1973-03-27 Atomic Energy Commission Alignment system
GB1393527A (en) * 1971-05-10 1975-05-07 Newcastel Regional Hospital Bo Radiometer
US3819419A (en) * 1972-11-17 1974-06-25 Nasa Steady state thermal radiometers
GB1462618A (en) * 1973-05-10 1977-01-26 Secretary Industry Brit Reducing the reflectance of surfaces to radiation
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US4126032A (en) * 1976-03-23 1978-11-21 Kabushiki Kaisha Daini Seikosha Method and apparatus for determining photo-chemical reaction heat
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US4307338A (en) * 1977-12-22 1981-12-22 National Semiconductor Corporation Laser alignment detector
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Also Published As

Publication number Publication date
EP0304664B1 (en) 1991-11-27
JPH0196517A (ja) 1989-04-14
KR890004155A (ko) 1989-04-20
US4793715A (en) 1988-12-27
EP0304664A3 (en) 1989-10-18
EP0304664A2 (en) 1989-03-01

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