ES2024414B3 - Contacto intermitente de cristal de prueba para medicion optica de propiedades de revestimientos en instalaciones de recubrimiento al vacio. - Google Patents
Contacto intermitente de cristal de prueba para medicion optica de propiedades de revestimientos en instalaciones de recubrimiento al vacio.Info
- Publication number
- ES2024414B3 ES2024414B3 ES86116845T ES86116845T ES2024414B3 ES 2024414 B3 ES2024414 B3 ES 2024414B3 ES 86116845 T ES86116845 T ES 86116845T ES 86116845 T ES86116845 T ES 86116845T ES 2024414 B3 ES2024414 B3 ES 2024414B3
- Authority
- ES
- Spain
- Prior art keywords
- coating
- test glass
- optical measurement
- stream
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/251—Colorimeters; Construction thereof
- G01N21/253—Colorimeters; Construction thereof for batch operation, i.e. multisample apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Sampling And Sample Adjustment (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19863604624 DE3604624A1 (de) | 1986-02-14 | 1986-02-14 | Testglaswechsler zur optischen messung von schichteigenschaften in vakuumbeschichtungsanlagen |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2024414B3 true ES2024414B3 (es) | 1992-03-01 |
Family
ID=6294069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES86116845T Expired - Lifetime ES2024414B3 (es) | 1986-02-14 | 1986-12-03 | Contacto intermitente de cristal de prueba para medicion optica de propiedades de revestimientos en instalaciones de recubrimiento al vacio. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4828391A (es) |
EP (1) | EP0241589B1 (es) |
JP (1) | JPS62192605A (es) |
AT (1) | ATE66742T1 (es) |
DE (2) | DE3604624A1 (es) |
ES (1) | ES2024414B3 (es) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4953974A (en) * | 1988-12-19 | 1990-09-04 | Mcdonnell Douglas Corporation | Optical measurement of thin films |
US6630995B1 (en) * | 1999-09-07 | 2003-10-07 | Applied Materials, Inc. | Method and apparatus for embedded substrate and system status monitoring |
US6731386B2 (en) * | 2001-01-04 | 2004-05-04 | Agere Systems Inc. | Measurement technique for ultra-thin oxides |
US6985222B2 (en) * | 2003-04-25 | 2006-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chamber leakage detection by measurement of reflectivity of oxidized thin film |
DE102008056125A1 (de) | 2008-11-06 | 2010-05-12 | Leybold Optics Gmbh | Testglaswechselsystem zur selektiven Beschichtung und optischen Messung von Schichteigenschaften in einer Vakuumbeschichtungsanlage |
EP2508645B1 (en) * | 2011-04-06 | 2015-02-25 | Applied Materials, Inc. | Evaporation system with measurement unit |
CN103608484B (zh) * | 2011-04-20 | 2016-06-22 | Oled工厂有限责任公司 | 用于气相沉积应用的测量设备和方法 |
DE102012010794A1 (de) * | 2011-09-02 | 2013-03-07 | Leybold Optics Gmbh | Testglaswechseln |
US10811285B2 (en) | 2017-05-31 | 2020-10-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Vapor shield replacement system and method |
CN111218649A (zh) * | 2018-11-27 | 2020-06-02 | 深圳市融光纳米科技有限公司 | 一种光学薄膜颜料片的制备方法及制备装置 |
CN114750404B (zh) * | 2022-03-30 | 2023-08-11 | 广州泽矩科技股份有限公司 | 一种提高使用性能的汽车玻璃烤膜设备 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2771055A (en) * | 1952-04-25 | 1956-11-20 | Technicolor Corp | Apparatus for coating optical interference layers |
US3047124A (en) * | 1960-05-05 | 1962-07-31 | Mandell S Wexler | Examining apparatus |
US3698946A (en) * | 1969-11-21 | 1972-10-17 | Hughes Aircraft Co | Transparent conductive coating and process therefor |
DD107141A1 (es) * | 1973-10-05 | 1974-07-12 | ||
CH615757A5 (es) * | 1977-06-06 | 1980-02-15 | Balzers Hochvakuum | |
US4325910A (en) * | 1979-07-11 | 1982-04-20 | Technicraft, Inc. | Automated multiple-purpose chemical-analysis apparatus |
DE2930431A1 (de) * | 1979-07-26 | 1981-02-26 | Boehringer Mannheim Gmbh | Polychromatisches photometer |
DE2932483A1 (de) * | 1979-08-10 | 1981-04-02 | Leybold-Heraeus GmbH, 5000 Köln | Testglashalter mit einer drehbaren platine und mehreren ausnehmungen fuer testglaeser |
US4582431A (en) * | 1983-10-11 | 1986-04-15 | Honeywell Inc. | Optical monitor for direct thickness control of transparent films |
-
1986
- 1986-02-14 DE DE19863604624 patent/DE3604624A1/de not_active Withdrawn
- 1986-07-03 US US06/881,645 patent/US4828391A/en not_active Expired - Fee Related
- 1986-12-03 ES ES86116845T patent/ES2024414B3/es not_active Expired - Lifetime
- 1986-12-03 EP EP86116845A patent/EP0241589B1/de not_active Expired - Lifetime
- 1986-12-03 AT AT86116845T patent/ATE66742T1/de not_active IP Right Cessation
- 1986-12-03 DE DE8686116845T patent/DE3681159D1/de not_active Expired - Fee Related
-
1987
- 1987-02-13 JP JP62029953A patent/JPS62192605A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0241589B1 (de) | 1991-08-28 |
EP0241589A2 (de) | 1987-10-21 |
US4828391A (en) | 1989-05-09 |
EP0241589A3 (en) | 1989-11-02 |
JPS62192605A (ja) | 1987-08-24 |
DE3604624A1 (de) | 1987-08-20 |
DE3681159D1 (de) | 1991-10-02 |
ATE66742T1 (de) | 1991-09-15 |
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