ES2023698B3 - Microdiafragma continuamente variable. - Google Patents

Microdiafragma continuamente variable.

Info

Publication number
ES2023698B3
ES2023698B3 ES88200328T ES88200328T ES2023698B3 ES 2023698 B3 ES2023698 B3 ES 2023698B3 ES 88200328 T ES88200328 T ES 88200328T ES 88200328 T ES88200328 T ES 88200328T ES 2023698 B3 ES2023698 B3 ES 2023698B3
Authority
ES
Spain
Prior art keywords
microdiaphragm
continuously variable
aperture
lozenge
bounded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES88200328T
Other languages
English (en)
Inventor
Godefridus Jacobus Brakenhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STICHTING TECHNISCHE WETENSCHAPPEN
Stichting voor de Technische Wetenschappen STW
Original Assignee
STICHTING TECHNISCHE WETENSCHAPPEN
Stichting voor de Technische Wetenschappen STW
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STICHTING TECHNISCHE WETENSCHAPPEN, Stichting voor de Technische Wetenschappen STW filed Critical STICHTING TECHNISCHE WETENSCHAPPEN
Application granted granted Critical
Publication of ES2023698B3 publication Critical patent/ES2023698B3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/005Diaphragms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Saccharide Compounds (AREA)
  • Road Signs Or Road Markings (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Vehicle Body Suspensions (AREA)
  • Structure Of Belt Conveyors (AREA)
ES88200328T 1987-02-27 1988-02-23 Microdiafragma continuamente variable. Expired - Lifetime ES2023698B3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8700496A NL8700496A (nl) 1987-02-27 1987-02-27 Continu variabel microdiafragma.

Publications (1)

Publication Number Publication Date
ES2023698B3 true ES2023698B3 (es) 1992-02-01

Family

ID=19849640

Family Applications (1)

Application Number Title Priority Date Filing Date
ES88200328T Expired - Lifetime ES2023698B3 (es) 1987-02-27 1988-02-23 Microdiafragma continuamente variable.

Country Status (8)

Country Link
US (1) US4880294A (es)
EP (1) EP0280375B1 (es)
JP (1) JPS63226864A (es)
AT (1) ATE64491T1 (es)
DE (1) DE3863199D1 (es)
ES (1) ES2023698B3 (es)
GR (1) GR3002128T3 (es)
NL (1) NL8700496A (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5144477A (en) * 1988-04-11 1992-09-01 Medical Research Council Method of operating a scanning confocal imaging system
US5032720A (en) * 1988-04-21 1991-07-16 White John G Confocal imaging system
US5262895A (en) * 1991-11-19 1993-11-16 Laduke Thomas F Optical color synthesizer
DE4212077A1 (de) * 1992-04-10 1993-10-14 Fraunhofer Ges Forschung Piezoelektrisch verstellbares Ventil und Verfahren zu ihrer Herstellung
ATE349719T1 (de) * 2001-04-10 2007-01-15 Vincent Lauer Veränderbare anordnung von mikroskopischen löchern
DE10244850A1 (de) * 2002-09-24 2004-04-01 Carl Zeiss Jena Gmbh Einstellbares Pinhole
JP4354207B2 (ja) 2003-04-15 2009-10-28 オリンパス株式会社 顕微鏡装置
DE10323923A1 (de) * 2003-05-22 2004-12-16 Carl Zeiss Jena Gmbh Einstellbares Pinhole, insbesondere für ein Laser-Scanning-Mikroskop
DE10323922A1 (de) * 2003-05-22 2004-12-16 Carl Zeiss Jena Gmbh Einstellbares Pinhole
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
EP2498271B1 (en) * 2003-10-20 2021-03-31 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with aperture
DE102004005390A1 (de) * 2004-02-04 2005-08-25 Carl Zeiss Jena Gmbh Verstellbare optische Spaltblende
DE102005029674B4 (de) * 2005-06-20 2008-08-21 BAM Bundesanstalt für Materialforschung und -prüfung Blende für eine bildgebende Einrichtung
DE102009028013B9 (de) 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
WO2012160418A1 (en) * 2011-05-25 2012-11-29 Albert-Ludwigs-Universität Freiburg Tunable plasmonic lens
CN102662203B (zh) * 2012-05-14 2015-05-13 北京国科世纪激光技术有限公司 一种光阑

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1924700A (en) * 1929-03-18 1933-08-29 Siemens Ag Diaphragm for apparatus for picture telegraphy
US2043292A (en) * 1932-04-12 1936-06-09 Colourgravure Ltd Light dividing device
US2016025A (en) * 1933-01-09 1935-10-01 Thomaston Lab Inc Light valve
FR895838A (fr) * 1942-03-02 1945-02-05 Fides Gmbh Appareil à diffraction des électrons
DE891583C (de) * 1943-08-20 1953-09-28 Aeg Elektronenoptisches Geraet, insbesondere UEbermikroskop
FR1065244A (fr) * 1951-03-22 1954-05-21 Optische Ind De Oude Delft Nv Microscope comprenant un diaphragme ayant une partie centrale opaque de diamètre variable
DE1053213B (de) * 1953-12-05 1959-03-19 Zeiss Carl Fa Veraenderbare Spaltblende, insbesondere fuer optische Geraete
US2914987A (en) * 1954-06-03 1959-12-01 Walter G Finch Slit mechanisms
US2882792A (en) * 1954-09-10 1959-04-21 Fairchild Camera Instr Co Luminous output transducer
US2964998A (en) * 1958-10-03 1960-12-20 Fred J Middlestadt Precision light aperture arrangement
US3401189A (en) * 1966-02-07 1968-09-10 Du Pont Tetramethyl lead manufacture
FR2022123A1 (es) * 1968-08-14 1970-07-31 Wollnik Hermann
US4017162A (en) * 1973-08-13 1977-04-12 Varian Techtron Pty. Ltd. Adjustable slit mechanism
JPS5931046B2 (ja) * 1975-03-19 1984-07-31 富士写真フイルム株式会社 光学機械用羽根
US4047808A (en) * 1975-08-13 1977-09-13 Varian Techtron Proprietary Limited Adjustable slit mechanism
JPS54651A (en) * 1977-06-03 1979-01-06 Sumitomo Bakelite Co Liquid crystal indicator
JPS5880614A (ja) * 1981-11-10 1983-05-14 Gensuke Kiyohara ピンホ−ル形成方法及びその装置
JPS5964830A (ja) * 1982-10-05 1984-04-12 Canon Inc 照明装置
DE3332949A1 (de) * 1983-09-13 1985-04-04 Finnigan MAT GmbH, 2800 Bremen Vorrichtung zur einstellung von spaltweiten bei spektrometern
SU1188543A1 (ru) * 1984-05-11 1985-10-30 Специальное Конструкторское Бюро Ордена Трудового Красного Знамени Института Кристаллографии Им.А.В.Шубникова Щелева диафрагма

Also Published As

Publication number Publication date
DE3863199D1 (de) 1991-07-18
EP0280375A1 (en) 1988-08-31
EP0280375B1 (en) 1991-06-12
NL8700496A (nl) 1988-09-16
US4880294A (en) 1989-11-14
ATE64491T1 (de) 1991-06-15
JPS63226864A (ja) 1988-09-21
GR3002128T3 (en) 1992-12-30

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