ATE64491T1 - Kontinuierlich veraenderbare blende. - Google Patents
Kontinuierlich veraenderbare blende.Info
- Publication number
- ATE64491T1 ATE64491T1 AT88200328T AT88200328T ATE64491T1 AT E64491 T1 ATE64491 T1 AT E64491T1 AT 88200328 T AT88200328 T AT 88200328T AT 88200328 T AT88200328 T AT 88200328T AT E64491 T1 ATE64491 T1 AT E64491T1
- Authority
- AT
- Austria
- Prior art keywords
- continuously variable
- aperture
- variable iris
- microdiaphragm
- lozenge
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/005—Diaphragms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Preparation Of Compounds By Using Micro-Organisms (AREA)
- Saccharide Compounds (AREA)
- Road Signs Or Road Markings (AREA)
- Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Vehicle Body Suspensions (AREA)
- Structure Of Belt Conveyors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8700496A NL8700496A (nl) | 1987-02-27 | 1987-02-27 | Continu variabel microdiafragma. |
| EP88200328A EP0280375B1 (de) | 1987-02-27 | 1988-02-23 | Kontinuierlich veränderbare Blende |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE64491T1 true ATE64491T1 (de) | 1991-06-15 |
Family
ID=19849640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT88200328T ATE64491T1 (de) | 1987-02-27 | 1988-02-23 | Kontinuierlich veraenderbare blende. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4880294A (de) |
| EP (1) | EP0280375B1 (de) |
| JP (1) | JPS63226864A (de) |
| AT (1) | ATE64491T1 (de) |
| DE (1) | DE3863199D1 (de) |
| ES (1) | ES2023698B3 (de) |
| GR (1) | GR3002128T3 (de) |
| NL (1) | NL8700496A (de) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144477A (en) * | 1988-04-11 | 1992-09-01 | Medical Research Council | Method of operating a scanning confocal imaging system |
| US5032720A (en) * | 1988-04-21 | 1991-07-16 | White John G | Confocal imaging system |
| US5262895A (en) * | 1991-11-19 | 1993-11-16 | Laduke Thomas F | Optical color synthesizer |
| DE4212077A1 (de) * | 1992-04-10 | 1993-10-14 | Fraunhofer Ges Forschung | Piezoelektrisch verstellbares Ventil und Verfahren zu ihrer Herstellung |
| ATE349719T1 (de) * | 2001-04-10 | 2007-01-15 | Vincent Lauer | Veränderbare anordnung von mikroskopischen löchern |
| DE10244850A1 (de) * | 2002-09-24 | 2004-04-01 | Carl Zeiss Jena Gmbh | Einstellbares Pinhole |
| JP4354207B2 (ja) | 2003-04-15 | 2009-10-28 | オリンパス株式会社 | 顕微鏡装置 |
| DE10323923A1 (de) * | 2003-05-22 | 2004-12-16 | Carl Zeiss Jena Gmbh | Einstellbares Pinhole, insbesondere für ein Laser-Scanning-Mikroskop |
| DE10323922A1 (de) * | 2003-05-22 | 2004-12-16 | Carl Zeiss Jena Gmbh | Einstellbares Pinhole |
| GB0320187D0 (en) * | 2003-08-28 | 2003-10-01 | Shimadzu Res Lab Europe Ltd | Particle optical apparatus |
| EP2498271B1 (de) * | 2003-10-20 | 2021-03-31 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Aperturblende für Teilchenstrahlapparat |
| DE102004005390A1 (de) * | 2004-02-04 | 2005-08-25 | Carl Zeiss Jena Gmbh | Verstellbare optische Spaltblende |
| DE102005029674B4 (de) * | 2005-06-20 | 2008-08-21 | BAM Bundesanstalt für Materialforschung und -prüfung | Blende für eine bildgebende Einrichtung |
| DE102009028013B9 (de) | 2009-07-24 | 2014-04-17 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät |
| WO2012160418A1 (en) * | 2011-05-25 | 2012-11-29 | Albert-Ludwigs-Universität Freiburg | Tunable plasmonic lens |
| CN102662203B (zh) * | 2012-05-14 | 2015-05-13 | 北京国科世纪激光技术有限公司 | 一种光阑 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1924700A (en) * | 1929-03-18 | 1933-08-29 | Siemens Ag | Diaphragm for apparatus for picture telegraphy |
| US2043292A (en) * | 1932-04-12 | 1936-06-09 | Colourgravure Ltd | Light dividing device |
| US2016025A (en) * | 1933-01-09 | 1935-10-01 | Thomaston Lab Inc | Light valve |
| FR895838A (fr) * | 1942-03-02 | 1945-02-05 | Fides Gmbh | Appareil à diffraction des électrons |
| DE891583C (de) * | 1943-08-20 | 1953-09-28 | Aeg | Elektronenoptisches Geraet, insbesondere UEbermikroskop |
| FR1065244A (fr) * | 1951-03-22 | 1954-05-21 | Optische Ind De Oude Delft Nv | Microscope comprenant un diaphragme ayant une partie centrale opaque de diamètre variable |
| DE1053213B (de) * | 1953-12-05 | 1959-03-19 | Zeiss Carl Fa | Veraenderbare Spaltblende, insbesondere fuer optische Geraete |
| US2914987A (en) * | 1954-06-03 | 1959-12-01 | Walter G Finch | Slit mechanisms |
| US2882792A (en) * | 1954-09-10 | 1959-04-21 | Fairchild Camera Instr Co | Luminous output transducer |
| US2964998A (en) * | 1958-10-03 | 1960-12-20 | Fred J Middlestadt | Precision light aperture arrangement |
| US3401189A (en) * | 1966-02-07 | 1968-09-10 | Du Pont | Tetramethyl lead manufacture |
| FR2022123A1 (de) * | 1968-08-14 | 1970-07-31 | Wollnik Hermann | |
| US4017162A (en) * | 1973-08-13 | 1977-04-12 | Varian Techtron Pty. Ltd. | Adjustable slit mechanism |
| JPS5931046B2 (ja) * | 1975-03-19 | 1984-07-31 | 富士写真フイルム株式会社 | 光学機械用羽根 |
| US4047808A (en) * | 1975-08-13 | 1977-09-13 | Varian Techtron Proprietary Limited | Adjustable slit mechanism |
| JPS54651A (en) * | 1977-06-03 | 1979-01-06 | Sumitomo Bakelite Co | Liquid crystal indicator |
| JPS5880614A (ja) * | 1981-11-10 | 1983-05-14 | Gensuke Kiyohara | ピンホ−ル形成方法及びその装置 |
| JPS5964830A (ja) * | 1982-10-05 | 1984-04-12 | Canon Inc | 照明装置 |
| DE3332949A1 (de) * | 1983-09-13 | 1985-04-04 | Finnigan MAT GmbH, 2800 Bremen | Vorrichtung zur einstellung von spaltweiten bei spektrometern |
| SU1188543A1 (ru) * | 1984-05-11 | 1985-10-30 | Специальное Конструкторское Бюро Ордена Трудового Красного Знамени Института Кристаллографии Им.А.В.Шубникова | Щелева диафрагма |
-
1987
- 1987-02-27 NL NL8700496A patent/NL8700496A/nl not_active Application Discontinuation
-
1988
- 1988-02-23 DE DE8888200328T patent/DE3863199D1/de not_active Expired - Lifetime
- 1988-02-23 ES ES88200328T patent/ES2023698B3/es not_active Expired - Lifetime
- 1988-02-23 EP EP88200328A patent/EP0280375B1/de not_active Expired - Lifetime
- 1988-02-23 AT AT88200328T patent/ATE64491T1/de not_active IP Right Cessation
- 1988-02-24 US US07/159,696 patent/US4880294A/en not_active Expired - Fee Related
- 1988-02-25 JP JP63040930A patent/JPS63226864A/ja active Pending
-
1991
- 1991-06-13 GR GR91400731T patent/GR3002128T3/el unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE3863199D1 (de) | 1991-07-18 |
| EP0280375A1 (de) | 1988-08-31 |
| EP0280375B1 (de) | 1991-06-12 |
| NL8700496A (nl) | 1988-09-16 |
| US4880294A (en) | 1989-11-14 |
| ES2023698B3 (es) | 1992-02-01 |
| JPS63226864A (ja) | 1988-09-21 |
| GR3002128T3 (en) | 1992-12-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification | ||
| REN | Ceased due to non-payment of the annual fee |