DE3863199D1 - Kontinuierlich veraenderbare blende. - Google Patents

Kontinuierlich veraenderbare blende.

Info

Publication number
DE3863199D1
DE3863199D1 DE8888200328T DE3863199T DE3863199D1 DE 3863199 D1 DE3863199 D1 DE 3863199D1 DE 8888200328 T DE8888200328 T DE 8888200328T DE 3863199 T DE3863199 T DE 3863199T DE 3863199 D1 DE3863199 D1 DE 3863199D1
Authority
DE
Germany
Prior art keywords
continuously variable
aperture
variable panel
microdiaphragm
lozenge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888200328T
Other languages
English (en)
Inventor
Godefridus Jacobus Brakenhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stichting voor de Technische Wetenschappen STW
Original Assignee
Stichting voor de Technische Wetenschappen STW
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting voor de Technische Wetenschappen STW filed Critical Stichting voor de Technische Wetenschappen STW
Application granted granted Critical
Publication of DE3863199D1 publication Critical patent/DE3863199D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/005—Diaphragms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Vehicle Body Suspensions (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Saccharide Compounds (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Road Signs Or Road Markings (AREA)
DE8888200328T 1987-02-27 1988-02-23 Kontinuierlich veraenderbare blende. Expired - Fee Related DE3863199D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8700496A NL8700496A (nl) 1987-02-27 1987-02-27 Continu variabel microdiafragma.

Publications (1)

Publication Number Publication Date
DE3863199D1 true DE3863199D1 (de) 1991-07-18

Family

ID=19849640

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888200328T Expired - Fee Related DE3863199D1 (de) 1987-02-27 1988-02-23 Kontinuierlich veraenderbare blende.

Country Status (8)

Country Link
US (1) US4880294A (de)
EP (1) EP0280375B1 (de)
JP (1) JPS63226864A (de)
AT (1) ATE64491T1 (de)
DE (1) DE3863199D1 (de)
ES (1) ES2023698B3 (de)
GR (1) GR3002128T3 (de)
NL (1) NL8700496A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5144477A (en) * 1988-04-11 1992-09-01 Medical Research Council Method of operating a scanning confocal imaging system
US5032720A (en) * 1988-04-21 1991-07-16 White John G Confocal imaging system
US5262895A (en) * 1991-11-19 1993-11-16 Laduke Thomas F Optical color synthesizer
DE4212077A1 (de) * 1992-04-10 1993-10-14 Fraunhofer Ges Forschung Piezoelektrisch verstellbares Ventil und Verfahren zu ihrer Herstellung
ES2279863T3 (es) * 2001-04-10 2007-09-01 Vincent Lauer Conjunto modificable de orificios microscopicos.
DE10244850A1 (de) 2002-09-24 2004-04-01 Carl Zeiss Jena Gmbh Einstellbares Pinhole
JP4354207B2 (ja) 2003-04-15 2009-10-28 オリンパス株式会社 顕微鏡装置
DE10323922A1 (de) * 2003-05-22 2004-12-16 Carl Zeiss Jena Gmbh Einstellbares Pinhole
DE10323923A1 (de) * 2003-05-22 2004-12-16 Carl Zeiss Jena Gmbh Einstellbares Pinhole, insbesondere für ein Laser-Scanning-Mikroskop
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
EP1526563B1 (de) 2003-10-20 2018-12-05 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Aperturblende für Teilchenstrahlapparat
DE102004005390A1 (de) * 2004-02-04 2005-08-25 Carl Zeiss Jena Gmbh Verstellbare optische Spaltblende
DE102005029674B4 (de) * 2005-06-20 2008-08-21 BAM Bundesanstalt für Materialforschung und -prüfung Blende für eine bildgebende Einrichtung
DE102009028013B9 (de) * 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
WO2012160418A1 (en) * 2011-05-25 2012-11-29 Albert-Ludwigs-Universität Freiburg Tunable plasmonic lens
CN102662203B (zh) * 2012-05-14 2015-05-13 北京国科世纪激光技术有限公司 一种光阑

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1924700A (en) * 1929-03-18 1933-08-29 Siemens Ag Diaphragm for apparatus for picture telegraphy
US2043292A (en) * 1932-04-12 1936-06-09 Colourgravure Ltd Light dividing device
US2016025A (en) * 1933-01-09 1935-10-01 Thomaston Lab Inc Light valve
FR895838A (fr) * 1942-03-02 1945-02-05 Fides Gmbh Appareil à diffraction des électrons
DE891583C (de) * 1943-08-20 1953-09-28 Aeg Elektronenoptisches Geraet, insbesondere UEbermikroskop
FR1065244A (fr) * 1951-03-22 1954-05-21 Optische Ind De Oude Delft Nv Microscope comprenant un diaphragme ayant une partie centrale opaque de diamètre variable
DE1053213B (de) * 1953-12-05 1959-03-19 Zeiss Carl Fa Veraenderbare Spaltblende, insbesondere fuer optische Geraete
US2914987A (en) * 1954-06-03 1959-12-01 Walter G Finch Slit mechanisms
US2882792A (en) * 1954-09-10 1959-04-21 Fairchild Camera Instr Co Luminous output transducer
US2964998A (en) * 1958-10-03 1960-12-20 Fred J Middlestadt Precision light aperture arrangement
US3401189A (en) * 1966-02-07 1968-09-10 Du Pont Tetramethyl lead manufacture
FR2022123A1 (de) * 1968-08-14 1970-07-31 Wollnik Hermann
US4017162A (en) * 1973-08-13 1977-04-12 Varian Techtron Pty. Ltd. Adjustable slit mechanism
JPS5931046B2 (ja) * 1975-03-19 1984-07-31 富士写真フイルム株式会社 光学機械用羽根
US4047808A (en) * 1975-08-13 1977-09-13 Varian Techtron Proprietary Limited Adjustable slit mechanism
JPS54651A (en) * 1977-06-03 1979-01-06 Sumitomo Bakelite Co Liquid crystal indicator
JPS5880614A (ja) * 1981-11-10 1983-05-14 Gensuke Kiyohara ピンホ−ル形成方法及びその装置
JPS5964830A (ja) * 1982-10-05 1984-04-12 Canon Inc 照明装置
DE3332949A1 (de) * 1983-09-13 1985-04-04 Finnigan MAT GmbH, 2800 Bremen Vorrichtung zur einstellung von spaltweiten bei spektrometern
SU1188543A1 (ru) * 1984-05-11 1985-10-30 Специальное Конструкторское Бюро Ордена Трудового Красного Знамени Института Кристаллографии Им.А.В.Шубникова Щелева диафрагма

Also Published As

Publication number Publication date
EP0280375B1 (de) 1991-06-12
GR3002128T3 (en) 1992-12-30
ES2023698B3 (es) 1992-02-01
JPS63226864A (ja) 1988-09-21
EP0280375A1 (de) 1988-08-31
NL8700496A (nl) 1988-09-16
US4880294A (en) 1989-11-14
ATE64491T1 (de) 1991-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee