ES2012483B3 - Circuito integrado con indicador de longitud de canal. - Google Patents

Circuito integrado con indicador de longitud de canal.

Info

Publication number
ES2012483B3
ES2012483B3 ES87303983T ES87303983T ES2012483B3 ES 2012483 B3 ES2012483 B3 ES 2012483B3 ES 87303983 T ES87303983 T ES 87303983T ES 87303983 T ES87303983 T ES 87303983T ES 2012483 B3 ES2012483 B3 ES 2012483B3
Authority
ES
Spain
Prior art keywords
integrated circuit
channel length
length indicator
indicator
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES87303983T
Other languages
English (en)
Inventor
John Anthony Carelli
Robert Leonard Pritchett
Richard Alan Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Application granted granted Critical
Publication of ES2012483B3 publication Critical patent/ES2012483B3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92Capacitors having potential barriers
    • H01L29/94Metal-insulator-semiconductors, e.g. MOS
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2621Circuits therefor for testing field effect transistors, i.e. FET's
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
ES87303983T 1986-05-14 1987-05-05 Circuito integrado con indicador de longitud de canal. Expired - Lifetime ES2012483B3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86309486A 1986-05-14 1986-05-14

Publications (1)

Publication Number Publication Date
ES2012483B3 true ES2012483B3 (es) 1990-04-01

Family

ID=25340235

Family Applications (1)

Application Number Title Priority Date Filing Date
ES87303983T Expired - Lifetime ES2012483B3 (es) 1986-05-14 1987-05-05 Circuito integrado con indicador de longitud de canal.

Country Status (7)

Country Link
EP (1) EP0249325B1 (es)
JP (1) JPS62274635A (es)
KR (1) KR900007045B1 (es)
CA (1) CA1252911A (es)
DE (1) DE3761711D1 (es)
ES (1) ES2012483B3 (es)
IE (1) IE59931B1 (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5068603A (en) * 1987-10-07 1991-11-26 Xilinx, Inc. Structure and method for producing mask-programmed integrated circuits which are pin compatible substitutes for memory-configured logic arrays
FR2656932B1 (fr) * 1990-01-09 1992-05-07 Sgs Thomson Microelectronics Circuit de mesure du courant dans un transistor mos de puissance.
US5761214A (en) * 1992-10-16 1998-06-02 International Business Machines Corporation Method for testing integrated circuit devices
JPH0794683A (ja) * 1993-09-27 1995-04-07 Nec Corp 自己診断機能を有する半導体集積回路装置
JP3011095B2 (ja) * 1996-03-15 2000-02-21 日本電気株式会社 自己診断機能を有する半導体集積回路装置
JP3214556B2 (ja) 1998-08-25 2001-10-02 日本電気株式会社 集積回路装置、半導体ウェハ、回路検査方法
DE10001129A1 (de) * 2000-01-13 2001-07-26 Infineon Technologies Ag Schaltungsanordnung zur Kapazitätsmessung von Strukturen in einer integrierten Schaltung
JP2005057256A (ja) * 2003-08-04 2005-03-03 Samsung Electronics Co Ltd 漏洩電流を利用した半導体検査装置および漏洩電流補償システム

Also Published As

Publication number Publication date
JPH0325937B2 (es) 1991-04-09
EP0249325A1 (en) 1987-12-16
DE3761711D1 (de) 1990-03-15
IE59931B1 (en) 1994-05-04
KR870011703A (ko) 1987-12-26
KR900007045B1 (ko) 1990-09-27
EP0249325B1 (en) 1990-02-07
JPS62274635A (ja) 1987-11-28
CA1252911A (en) 1989-04-18
IE871243L (en) 1987-11-14

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