EP4385290B1 - Verfahren zur erzeugung einer plasmaflamme und plasmaerzeugungsvorrichtung - Google Patents

Verfahren zur erzeugung einer plasmaflamme und plasmaerzeugungsvorrichtung

Info

Publication number
EP4385290B1
EP4385290B1 EP22747342.8A EP22747342A EP4385290B1 EP 4385290 B1 EP4385290 B1 EP 4385290B1 EP 22747342 A EP22747342 A EP 22747342A EP 4385290 B1 EP4385290 B1 EP 4385290B1
Authority
EP
European Patent Office
Prior art keywords
plasma
combustion chamber
plasma combustion
chamber wall
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP22747342.8A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP4385290C0 (de
EP4385290A1 (de
Inventor
Moritz Johann GORATH
Jens Hofmann
Markus REICHMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Muegge GmbH
Original Assignee
Muegge GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Muegge GmbH filed Critical Muegge GmbH
Publication of EP4385290A1 publication Critical patent/EP4385290A1/de
Application granted granted Critical
Publication of EP4385290B1 publication Critical patent/EP4385290B1/de
Publication of EP4385290C0 publication Critical patent/EP4385290C0/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements

Definitions

  • the invention relates to a method for generating a plasma flame with a plasma fuel gas which is blown out of a plasma combustion chamber through a plasma flame opening in a plasma flame direction, wherein the plasma combustion chamber is arranged at least partially in a cavity resonator and microwave energy is supplied to the cavity resonator via a waveguide in order to generate a plasma in the plasma combustion chamber, and wherein a swirl gas is blown into the plasma combustion chamber with a swirl generating device in order to generate a swirl gas jacket surrounding the plasma flame in the plasma combustion chamber, which swirl gas jacket shields a plasma combustion chamber wall made of a dielectric solid material from the plasma flame.
  • Such plasma flames have a very high energy density and are used in many different applications to generate a very high process temperature in a process chamber or in the vicinity of the plasma flame opening, for example, to coat, machine, or weld workpieces.
  • a plasma is generated in a plasma combustion chamber for plasma-chemical processes. This plasma is blown out of the plasma combustion chamber with a plasma gas supplied to the plasma combustion chamber, forming a plasma flame that can be used in plasma treatment processes.
  • the direction of the plasma flame is determined by the flow direction of the plasma gas blown out of the plasma combustion chamber through the plasma flame opening.
  • the energy required to generate the plasma can be supplied as microwave energy via a waveguide to a cavity resonator in which the plasma combustion chamber is arranged such that an economically viable proportion of the microwave energy in the plasma combustion chamber can be used to generate the plasma.
  • the direction of the plasma flame is oriented perpendicular to a propagation direction of the microwaves from the waveguide into the cavity resonator.
  • the plasma combustion chamber can traverse the cavity resonator, and the plasma flame opening of the plasma combustion chamber can be arranged such that the plasma flame blown out of the plasma combustion chamber through the plasma flame opening also leaves the cavity resonator and can be used for its intended purpose outside the cavity resonator.
  • the cavity walls of the cavity resonator are typically made of an electrically conductive material to specify or fulfill the resonance conditions for the microwave energy supplied via a waveguide in the cavity resonator.
  • a plasma combustion chamber wall is made of a dielectric solid material and creates the microwave-transparent, spatial separation of the plasma combustion chamber and the metallic cavity resonator by a dielectric, necessary for the operation of the plasma generation device. This prevents the plasma from leaving the plasma combustion chamber or the cavity resonator, potentially spreading through the waveguide toward the generator and causing destructive effects.
  • a suitable gas or a coolant liquid can be used as the coolant.
  • the coolant conveyed through the cooling section can also flow into the cavity resonator and be discharged from the cavity resonator at a distance from the plasma combustion chamber wall.
  • the swirl generation device is typically located in an area where the plasma fuel gas is injected into the plasma combustion chamber. In many plasma combustion chambers, this area is located opposite the plasma flame opening in the plasma combustion chamber.
  • the plasma combustion chamber is preferably tubular and defined by a hollow cylindrical plasma combustion chamber wall.
  • the plasma generation device can optionally be provided with a first plasma combustion chamber with an associated first cavity resonator and an associated first swirl generation device, as well as a second plasma combustion chamber arranged downstream in the direction of the plasma flame with an associated second cavity resonator.
  • additional plasma combustion chambers with corresponding components can also be arranged one behind the other.
  • the plasma flame generated in the first plasma combustion chamber can be further heated in the second, downstream plasma combustion chamber to increase the thermal output of the plasma flame then emerging from the second plasma combustion chamber.
  • the individual plasma combustion chambers can be thermally separated and insulated from one another, the individual plasma combustion chambers can be operated with different process parameters during operation, so that, for example, different process gases, optionally additional solids or liquids, volume flows and process gas flows, or power outputs can be specified in each plasma combustion chamber.
  • the individual plasma combustion chamber walls can be cooled with the respective assigned cooling devices with significantly less effort so that the temperature distribution within the individual plasma combustion chamber walls is as uniform as possible.
  • a swirl generating device is arranged between the first plasma combustion chamber and the second plasma combustion chamber, which generates a swirl gas jacket in the first plasma combustion chamber opposite to the plasma flame direction and also generates a swirl gas jacket extending into the second plasma combustion chamber in the plasma flame direction.
  • the plasma generation device has, for the first plasma combustion chamber and for the second plasma combustion chamber, respectively associated first and second plasma combustion chamber wall mounts, and respectively associated first and second plasma combustion chamber wall mounts, and each associated first and at least one second cooling section with a cooling section wall.
  • the additional cooling devices enable a significant increase in the performance of the plasma generation device, which more than offsets the additional design effort required for the manufacture and operation of such a plasma generation device.
  • FIG. 1 A sectional view shows a schematic representation of a plasma generation device 1 according to the invention.
  • the plasma generation device 1 has a tubular plasma combustion chamber 2, which is surrounded by a hollow-cylindrical plasma combustion chamber wall 3 made of a dielectric material, for example quartz glass.
  • the plasma combustion chamber 2 passes through a cavity resonator 4 of a microwave device (not shown in detail), with which microwave energy is supplied to the cavity resonator 4 and the plasma combustion chamber 2 arranged therein via a waveguide 5.
  • a plasma is generated by the microwave energy supplied to the plasma combustion chamber 2.
  • a swirl gas is blown in transversely to the plasma flame direction 8 tangentially to the adjacent plasma combustion chamber wall 3 and forms a swirl gas jacket, which tubularly and thereby forms a shield of the plasma combustion gas against the surrounding plasma combustion chamber wall 3.
  • the plasma combustion chamber wall 3 is fixed at a distance from the cavity resonator 4 in a plasma combustion chamber wall holder 10.
  • a holder cooling cavity 11 is formed in each plasma combustion chamber wall holder 10, through which a coolant can flow, which can be supplied and removed again via a coolant supply line indicated only schematically.
  • the supplied coolant cools the plasma combustion chamber wall holder 10 and dissipates heat from the plasma combustion chamber wall 3. Due to the respective distance between the cavity resonator 4 and the two plasma combustion chamber wall holders 10, a temperature difference between the cooled plasma combustion chamber wall holders 10 and the cavity resonator 4, in which the microwave energy is converted into plasma energy, is distributed over a greater distance along the plasma flame direction 8, and a temperature gradient within the plasma combustion chamber wall 3 is reduced.
  • a cooling section 12 with a cooling section wall 13 is arranged, which surrounds the plasma combustion chamber wall 3 at a small radial distance, but does not touch the plasma combustion chamber wall 3.
  • a coolant flows between the cooling section wall 13 and the plasma combustion chamber wall 3, with which the plasma combustion chamber wall 3 is cooled in the respective cooling section 12. In this way, direct contact between the cooling section wall 13 and the plasma combustion chamber wall 3 and a resulting thermal bridge is avoided.
  • Coolant also promotes the most uniform temperature distribution possible in the plasma combustion chamber wall 3 between the cavity resonator 4 and the plasma combustion chamber wall mounts 10 arranged at a distance on opposite sides.
  • the coolant flowing in from an end 14 of the cooling section wall 13 facing away from the cavity resonator 4 can flow into the cavity resonator 4 and be discharged from the cavity resonator via outflow openings 15 arranged at a distance from the plasma combustion chamber wall 3.
  • Each cooling section wall 13 has cooling fins 16 extending circumferentially and radially outward on an outer side opposite the plasma combustion chamber wall 3.
  • a coolant flows between the outer sides of the cooling section walls 13 with the respective cooling fins 16 and a surrounding cooling section housing 15 and can absorb and dissipate thermal energy from the cooling fins 16.
  • a post-cooling device 17 with a post-cooling channel 18 helically surrounding the plasma combustion chamber wall 3 is arranged in a post-cooling wall.
  • a coolant for example a cooling liquid, can flow through the post-cooling channel 18, and heat can be dissipated from the plasma combustion chamber wall 3 via the post-cooling wall 19 directly adjacent to the plasma combustion chamber wall 3.
  • an ignition tip 20 can be inserted into the plasma combustion chamber 2 in an axial direction, and the resulting field increase in the cavity resonator 4 ignites a plasma in the plasma combustion chamber 2.
  • the plasma generates a plasma flame 21 in the plasma fuel gas, which is blown out of the plasma combustion chamber 2 through the plasma flame opening 6 by the plasma fuel gas flowing through the plasma combustion chamber 2 in the plasma flame direction 8.
  • the various cooling devices namely the plasma combustion chamber wall mounts 10, the cooling sections 12, and the aftercooling device 17, can each generate a cooling effect on the plasma combustion chamber wall 3.
  • the most uniform temperature distribution possible can be specified within the plasma combustion chamber wall 3 along the plasma flame direction 8. This reduces thermal stress on the plasma combustion chamber wall 3 and prevents premature damage to the plasma combustion chamber wall 3 due to large temperature gradients.
  • the respective heating of the plasma combustion chamber wall 3 is detected with the aid of temperature sensors, and controlled operation of the individual cooling devices is carried out.
  • FIG 2 A variant of the plasma generation device 1 is shown only schematically, in which a second plasma combustion chamber 22 with a second cavity resonator 23 is arranged after a first plasma combustion chamber 2, which passes through a cavity resonator 4.
  • Each plasma combustion chamber 2 is assigned separate plasma combustion chamber wall supports 10, cooling sections 12 and swirl generation devices 9, which, however, are arranged in Figure 2 are not shown in detail.
  • the plasma flame 21 generated in the first plasma combustion chamber 2 and blown into the second plasma combustion chamber 22 can be supplied with additional microwave energy, so that an additionally heated plasma flame 21 with a significantly higher heat output is blown out of the plasma flame opening 6 of the second plasma combustion chamber 2.
  • FIG. 3 A possible arrangement of the swirl generation device 9 in the region of the plasma flame opening 6 is schematically shown according to the invention.
  • the swirl gas blown into the plasma combustion chamber 2 through swirl gas openings 23 tangentially to the plasma combustion chamber wall 3 forms a tubular swirl gas jacket, which flows along the plasma combustion chamber wall 3 into the plasma combustion chamber 2 and is deflected at an opposite end. Together with the plasma fuel gas, it is blown through the plasma combustion chamber 2 in the plasma flame direction 8 and out of the plasma combustion chamber 2 through the plasma flame opening 6.
  • the swirl gas jacket forms a thermal shield between the hot plasma flame 21 and the surrounding plasma combustion chamber wall 3.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
EP22747342.8A 2021-08-10 2022-07-12 Verfahren zur erzeugung einer plasmaflamme und plasmaerzeugungsvorrichtung Active EP4385290B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021120826.2A DE102021120826A1 (de) 2021-08-10 2021-08-10 Verfahren zur Erzeugung einer Plasmaflamme und Plasmaerzeugungsvorrichtung
PCT/EP2022/069406 WO2023016733A1 (de) 2021-08-10 2022-07-12 Verfahren zur erzeugung einer plasmaflamme und plasmaerzeugungsvorrichtung

Publications (3)

Publication Number Publication Date
EP4385290A1 EP4385290A1 (de) 2024-06-19
EP4385290B1 true EP4385290B1 (de) 2025-08-20
EP4385290C0 EP4385290C0 (de) 2025-08-20

Family

ID=82701894

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22747342.8A Active EP4385290B1 (de) 2021-08-10 2022-07-12 Verfahren zur erzeugung einer plasmaflamme und plasmaerzeugungsvorrichtung

Country Status (8)

Country Link
US (1) US12457679B2 (pl)
EP (1) EP4385290B1 (pl)
CA (1) CA3229088A1 (pl)
DE (1) DE102021120826A1 (pl)
ES (1) ES3048790T3 (pl)
PL (1) PL4385290T3 (pl)
TW (1) TW202318919A (pl)
WO (1) WO2023016733A1 (pl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021120826A1 (de) * 2021-08-10 2023-02-16 Muegge Gmbh Verfahren zur Erzeugung einer Plasmaflamme und Plasmaerzeugungsvorrichtung

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Also Published As

Publication number Publication date
TW202318919A (zh) 2023-05-01
EP4385290C0 (de) 2025-08-20
CA3229088A1 (en) 2023-02-16
DE102021120826A1 (de) 2023-02-16
WO2023016733A1 (de) 2023-02-16
ES3048790T3 (en) 2025-12-11
PL4385290T3 (pl) 2025-12-15
US12457679B2 (en) 2025-10-28
EP4385290A1 (de) 2024-06-19
US20240431013A1 (en) 2024-12-26

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