EP4191346B1 - Shock protection of a resonator mechanism with rotatable flexible guiding - Google Patents

Shock protection of a resonator mechanism with rotatable flexible guiding Download PDF

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Publication number
EP4191346B1
EP4191346B1 EP21212441.6A EP21212441A EP4191346B1 EP 4191346 B1 EP4191346 B1 EP 4191346B1 EP 21212441 A EP21212441 A EP 21212441A EP 4191346 B1 EP4191346 B1 EP 4191346B1
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EP
European Patent Office
Prior art keywords
resonator mechanism
flexible
pivot
resonator
modulus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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EP21212441.6A
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German (de)
French (fr)
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EP4191346A1 (en
Inventor
Gianni Di Domenico
Mohammad Hussein Kahrobaiyan
Dominique Lechot
Pascal Winkler
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Swatch Group Research and Development SA
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Swatch Group Research and Development SA
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Publication date
Application filed by Swatch Group Research and Development SA filed Critical Swatch Group Research and Development SA
Priority to EP21212441.6A priority Critical patent/EP4191346B1/en
Priority to US17/812,456 priority patent/US20230176522A1/en
Priority to JP2022134701A priority patent/JP7407250B2/en
Priority to CN202211089846.8A priority patent/CN116224741A/en
Publication of EP4191346A1 publication Critical patent/EP4191346A1/en
Application granted granted Critical
Publication of EP4191346B1 publication Critical patent/EP4191346B1/en
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    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/04Oscillators acting by spring tension
    • G04B17/045Oscillators acting by spring tension with oscillating blade springs
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/04Oscillators acting by spring tension
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/20Compensation of mechanisms for stabilising frequency
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B31/00Bearings; Point suspensions or counter-point suspensions; Pivot bearings; Single parts therefor
    • G04B31/02Shock-damping bearings
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B43/00Protecting clockworks by shields or other means against external influences, e.g. magnetic fields
    • G04B43/002Component shock protection arrangements

Definitions

  • the invention relates to a clockwork resonator mechanism, comprising a structure and an anchoring block from which is suspended at least one inertial element arranged to oscillate according to a first degree of freedom in rotation RZ around a pivot axis extending in a first direction Z, said inertial element being subjected to restoring forces exerted by a flexible pivot comprising a plurality of substantially longitudinal elastic blades, each fixed, at a first end to said anchoring block, and at a second end to said element inertial, each said elastic blade being deformable essentially in an XY plane perpendicular to said first direction Z, the structure carrying this anchoring block by a flexible suspension which allows the mobility of the anchoring block according to five degrees of freedom.
  • the invention also relates to a clock oscillator comprising at least one such resonator mechanism.
  • the invention also relates to a clock movement comprising at least one such oscillator and/or such a resonator mechanism.
  • the invention also relates to a watch comprising such a clock movement, and/or such an oscillator, and/or such a resonator mechanism.
  • the invention relates to the field of watchmaking resonators, and particularly those which include elastic blades acting as return means for the operation of the oscillator, and the shock protection of such mechanisms with flexible guides.
  • a way to achieve this anti-shock was presented in the application CH 715526 on behalf of ETA Manufacture Horlogère Suisse.
  • a flexible structure (called anti-shock) is inserted between the flexible pivot and the plate which allows the movements of the balance according to all degrees of freedom (translations X, Y, Z and rotations X, Y) except the rotation Z of the balance which is authorized by the flexible pivot, and mechanical stops are added to limit the travel of the balance wheel.
  • this anti-shock allows the balance to move to the mechanical stops, while preserving the flexible silicon pivot from breakage.
  • the rigidity of the shock absorber is high enough so that the balance does not touch the mechanical stops.
  • the shock absorber and the flexible pivot are made in a single monolithic silicon piece. This has advantages in terms of simplicity of manufacturing and assembly.
  • silicon is a fragile material, so much so that, during very violent shocks, the part may break because the maximum stress is exceeded.
  • Shock resistance also depends on this torsional rigidity; in fact, during out-of-plane impacts, the stress suffered by the blades quickly reaches levels very high values, which reduces the distance that the part can travel before giving way.
  • Shock absorbers for timepieces come in many variations. However, their main purpose is to protect the fragile pivots of the axis, and not the elastic elements, such as conventionally the spiral spring.
  • the document EP3054357A1 in the name of ETA Manufacture Horlogère Suisse SA describes a watch oscillator comprising a structure and distinct primary resonators, temporally and geometrically phase-shifted, each comprising a mass recalled towards the structure by an elastic return means.
  • This oscillator comprises coupling means for the interaction of the primary resonators, comprising motor means for driving in movement a mobile which comprises drive and guide means arranged to drive and guide a control means articulated with transmission means , each articulated, at a distance from the control means, with a mass of a primary resonator.
  • the primary resonators and the mobile are arranged in such a way that the axes of the joints of any two of the primary resonators and the articulation axis of the control means are never coplanar.
  • the document EP3035127A1 in the name of SWATCH GROUP RESEARCH & DEVELOPMENT Ltd describes a watchmaking oscillator comprising a resonator constituted by a tuning fork which comprises at least two oscillating mobile parts, fixed to a connecting element by flexible elements whose geometry determines a virtual pivot axis of determined position relative to a plate, and around which the respective movable part oscillates, the center of mass of which coincides in the rest position with the respective virtual pivot axis.
  • the flexible elements are made up of crossed elastic blades at a distance from each other in two parallel planes, including the projections of the directions on one of the planes parallel intersect at the level of the virtual pivot axis of the mobile part.
  • New mechanism architectures make it possible to maximize the quality factor of a resonator, through the use of flexible guidance with the use of an anchor escapement with a very small lifting angle, according to application CH01544/16 in the name of ETA Manufacture Horlogère Suisse and its derivatives, the lessons of which can be directly used in the present invention, and whose resonator can be further improved with regard to its sensitivity to shocks, according to certain particular directions. This is therefore to protect the blades from breakage in the event of impact.
  • the anti-shock systems proposed to date for resonators with flexible guides protect the shock blades in certain directions only, but not in all directions, or that they present the defect of allowing the blade to move slightly. embedding of the flexible pivot according to its oscillation rotation, which should be avoided as much as possible.
  • Application CH00518/18 or application EP18168765.8 in the name of ETA Manufacture Horlogère Suisse describes a watch resonator mechanism, comprising a structure carrying, by a flexible suspension, an anchoring block from which is suspended an inertial element oscillating according to a first degree of freedom in rotation RZ, under the action of restoring forces exerted by a flexible pivot comprising first elastic blades each fixed to said inertial element and to said anchoring block, the flexible suspension being arranged to allow a certain mobility of the anchoring block according to all other degrees of freedom that the first degree of freedom in rotation RZ according to which only the inertial element is mobile to avoid any disturbance of its oscillation, and the rigidity of the suspension according to the first degree of freedom in rotation RZ is very much greater than the rigidity of the pivot flexible according to this same first degree of freedom in rotation RZ.
  • the invention aims to optimize the shock protection of such an oscillator, while ensuring the required torsional rigidities of the suspension, in particular for a resonator mechanism according to CH00518/18 or the request EP18168765.8 in the name of ETA Manufacture Horlogère Suisse, or for a similar resonator with flexible guides.
  • a good rotary resonator with flexible guidance which constitutes a flexible pivot and defines a virtual pivot axis, must be both very flexible for oscillation rotation according to a first degree of freedom in rotation RZ, and also very rigid according to the other degrees of freedom (X, Y, Z, RX, RY) so as to avoid parasitic movements of the center of mass of the resonator. Indeed, such parasitic movements can cause walking errors if the orientation of the resonator changes in the gravity field (we speak of a position error).
  • the suspension of the pivot embedding must be very rigid depending on the degree of freedom of the oscillation, so as not to disturb the isochronism of the resonator, and not to dissipate energy via movements due to reaction forces.
  • the invention proposes to produce an improved shock absorber for a flexible guided oscillator, to better manage the torsional rigidities of the suspension, and consequently to limit the out-of-plane movement stroke of the blades of a blade resonator, and therefore to ensure better performance of the system.
  • the invention relates to a blade resonator mechanism according to claim 1.
  • the invention also relates to a clock oscillator comprising at least one such resonator mechanism.
  • the invention also relates to a clock movement comprising at least one such resonator mechanism.
  • the invention also relates to a watch comprising such a clock movement, and/or such a resonator mechanism.
  • the invention relates to a clockwork resonator mechanism, which constitutes a variant of the resonators described in application CH00518/18, or application EP18168765.8 in the name of ETA Manufacture Horlogère Congress, or the request CH 715526 or request EP 3561607 in the name of ETA Manufacture Horlogère Congress, whose characteristics a person skilled in the art will know how to combine with those specific to the present invention.
  • the invention is based on the observation that silicon (or silicon and/or silicon oxide) is the most suitable material for the flexible pivot, but not for the shock absorber. Indeed, in order to fulfill its anti-shock role, the structure must be capable of large deformations with high accumulation of elastic energy. Some metallic materials are more suitable than silicon for this function. For example, NiP material is more suitable than silicon. Indeed, the Young's modulus is 90GPa for NiP compared to 150GPa for Si, and the maximum stress is 1700MPa for NiP compared to 1000MPa for Si. This means that the maximum authorized deformation is three times greater for NiP than for the If.
  • the invention therefore consists of making the pivot in a first material, in particular silicon or equivalent, and of making the anti-shock in a second material, in particular nickel phosphorus NiP or equivalent, this second material having very different physical properties from the first material .
  • This resonator mechanism 100 of clockwork comprises, as visible on the figure 1 , a structure 1 and an anchoring block 30, from which is suspended at least one inertial element 2 which is arranged to oscillate according to a first degree of freedom in rotation RZ around a pivot axis D extending in a first direction Z.
  • This inertial element 2 is subjected to restoring forces exerted by a flexible pivot 200 comprising a plurality of substantially longitudinal elastic blades 3, each fixed, at a first end to the anchoring block 30, and at a second end to the inertial element 2.
  • Each elastic blade 3 is deformable essentially in a plane XY perpendicular to the first direction Z.
  • the resonator mechanism 100 is a composite assembly made from at least two distinct materials, and which comprises, on the one hand, the flexible pivot 200, which is made from a first material characterized by a first Young's modulus E1 and by a first elastic limit Sigma1 and by a first toughness G1, and on the other hand the flexible suspension 300, which is made of a second material characterized by a second Young's modulus E2 and by a second elastic limit Sigma2 and by a second toughness G2.
  • a high G toughness means that the part is able to store more elastic energy before breaking.
  • the value of the second toughness G2 is greater than ten times the value of the first toughness G1. Even more particularly, the value of the second toughness G2 is greater than eighty times the value of the first toughness G1. This is the case when the first material is silicon and/or silicon oxide, and when the second material is NiP, the G2/G1 ratio is close to 100;
  • the Sigma2/E2 ratio is at least twice the Sigma1/E1 ratio.
  • the value of the first Young's modulus E1 is greater than or equal to 1.5 times the value of the second Young's modulus E2.
  • the value of the second elastic limit Sigma2 is greater than or equal to 1.5 times the value of the first elastic limit Sigma1
  • At least one inertial element 2 is integral with the flexible pivot 200.
  • the flexible suspension 300 is integral with the structure 1.
  • the flexible pivot 200 is removable relative to the flexible suspension 300.
  • the flexible suspension 300 comprises gripper elements, in particular jaws 939, to immobilize the flexible pivot 200.
  • these jaws 939 constitute the gripping elements of an elastic gripper 930.
  • Figure 3 shows under the mark 938 the rest position of this clamp.
  • the flexible suspension 300 comprises at least one pocket 933 which is capable of receiving glue to immobilize the flexible pivot 200.
  • the junction between the flexible suspension 300 and the flexible pivot 200 is made on the anchoring block 30, which preferably includes reliefs 309 of a shape complementary to the profile of the elements 939.
  • the clamp 930 is suspended from an intermediate mass 305, which is itself suspended from the structure 1 or from another intermediate mass 303.
  • This elastic assembly has the advantage of minimizing the added mass.
  • the Sigma2/E2 ratio is at least three times the Sigma1/E1 ratio.
  • the first material is silicon and/or silicon oxide.
  • the second material is nickel-phosphorus NiP.
  • the toughness of silicon is almost 100 times lower than that of all nickel alloys.
  • a couple with the first material which is silicon and/or a silicon oxide, and the second material which is nickel-phosphorus NiP, is particularly advantageous for the desired anti-shock application
  • the dissipation (losses) of the NiP is larger than that of silicon, which constitutes an additional advantage.
  • nickel phosphorus NiP can have a sigma elastic limit / Young E modulus ratio which is sufficiently high to meet the conditions of the invention.
  • nickel phosphorus NiP has the major advantage of being able to be shaped precisely with the “LIGA” method (Lithography Galvano-Abformung), with perfect geometry and tight tolerances perfectly compatible with the requirements. watchmakers.
  • the flexible suspension 300 is advantageously, but not limited to, made from a nickel-phosphorus NiP board with a thickness of between 180 and 420 micrometers.
  • FIG. 3 describes the assembly of the flexible pivot 200 with the flexible suspension 300, and shows the assembly area in detail, and also describes the assembly procedure.
  • the assembly is done in three stages: firstly the elastic clamp 930 (in particular in NiP) is moved aside in order to be able to insert the anchoring block 30 (in particular in silicon) in the jaws 939; then the clamp 930 is released so that its jaws 939 grip and block the reliefs 309 of the anchoring block 30; finally, only if necessary, glue is inserted into at least one pocket 933 between the clamp 930 and the anchoring block 30.
  • the elastic clamp 930 in particular in NiP
  • the anchoring block 30 in particular in silicon
  • the 930 elastic clamp is designed so that the clamping force is significant. It is therefore important to ensure that the Hertzian pressure does not exceed the maximum stress at the contact between the jaw 939 and the relief 309 of the silicon anchoring block 30. For this reason, the shape of the jaw 939 matches that of relief 309, so that the difference in radius of curvature is as small as possible. The fact of giving a certain flexibility to the jaw 939 allows it to deform slightly to accommodate possible geometric errors between the clamp 930 and the anchoring block 30.
  • the pocket 933 provided for the glue is made up, on the one hand of at least one wide zone where it is easy to insert the glue, as well as on the other hand at least one narrower zone which helps in the distribution of the glue. glue by capillary action.
  • Using the torsional flexibility of a translation table makes it possible to better manage the torsional rigidities of the suspension. To do this, we orient the blades of the XY tables so that the direction of greatest torsional flexibility targets the axis of rotation of the resonator. Their torsional flexibility is managed by bringing the blades closer to each other.
  • the flexible suspension 300 comprises, advantageously, between the anchoring block 30 and a first intermediate mass 303, which is fixed to the structure 1 directly or via a flexible plate 301 in the first direction Z, a transverse translation table 32 with flexible guidance, and which comprises transverse blades 320 or transverse flexible rods 1320, rectilinear and extending in the second direction X and in symmetry around a transverse axis D2 crossing the pivot axis D .
  • the flexible suspension 300 further comprises, between the anchoring block 30 and a second intermediate mass 305, a longitudinal translation table 31 with flexible guidance, and which comprises longitudinal blades 310 or longitudinal flexible rods, rectilinear and extending in the third direction Y and in symmetry around a longitudinal axis D1 crossing the pivot axis D.
  • the table transverse translation 32 with flexible guidance comprises transverse blades 320 or transverse flexible rods, rectilinear and extending in the second direction X and in symmetry around the transverse axis D2 crossing the pivot axis D.
  • the longitudinal axis D1 crosses the transverse axis D2, and in particular the longitudinal axis D1, the transverse axis D2, and the pivot axis D are concurrent.
  • the longitudinal translation table 31 and the transverse translation table 32 each comprise at least two flexible blades or rods, each blade or rod being characterized by its thickness in the second direction according to the third direction Y or vice versa, by its height according to the first direction Z, and by its length according to the direction in which the blade or rod extends, the length being at least five times greater than the height, the height being at least as great as the thickness, and more particularly at least five times greater than this thickness, and more particularly still at least seven times greater than this thickness.
  • the transverse translation table 32 comprises at least two transverse flexible blades or rods, parallel to each other and of the same length.
  • THE figures 1 And 4 illustrate a variant close to the invention with four parallel transverse blades, and, more particularly, each consisting of two half-blades arranged on two superimposed levels, and extending in the extension of one another in the first direction Z. These half-blades can be either entirely free with respect to each other, or else joined together by gluing or the like, or by growth of SiO 2 in the case of an execution in silicon, or the like.
  • the longitudinal translation table 31, when it exists since it is optional, can obey the same construction principle.
  • FIG 6 illustrates a variant with flexible rods, grouped in two levels of two rods, of substantially square section; another variation has circular flexible rods. The number, arrangement, and section of these blades or rods may vary without departing from the present invention.
  • the blades or transverse rods of the transverse translation table 32 have a first plane of symmetry, which is parallel to the transverse axis D2, and which passes through the pivot axis D.
  • the blades or transverse rods of the transverse translation table 32 have a second plane of symmetry, which is parallel to the transverse axis D2, and orthogonal to the pivot axis D.
  • the blades or transverse rods of the transverse translation table 32 have a third plane of symmetry, which is perpendicular to the transverse axis D2, and parallel to the pivot axis D.
  • the blades or transverse rods of the transverse translation table 32 extend over at least two levels parallel to each other, each level being perpendicular to the pivot axis D.
  • the arrangement of the blades or transverse rods of the transverse translation table 32 is identical on each of the levels.
  • the transverse blades or rectilinear flexible rods 320 are flat blades whose height is at least five times greater than their thickness.
  • transverse blades or rectilinear flexible rods 320 are rods of square or circular section whose height is equal to the thickness.
  • the longitudinal translation table 31 comprises at least two longitudinal flexible blades or rods, parallel to each other and of the same length.
  • the blades or longitudinal rods of the longitudinal translation table 31 have a first plane of symmetry, which is parallel to the longitudinal axis D1, and which passes through the pivot axis D.
  • the blades or longitudinal rods of the longitudinal translation table 31 have a second plane of symmetry, which is parallel to the longitudinal axis D1, and orthogonal to the pivot axis D.
  • the blades or longitudinal rods of the longitudinal translation table 31 have a third plane of symmetry, which is perpendicular to the longitudinal axis D1, and parallel to the pivot axis D.
  • the blades or transverse rods of the longitudinal translation table 31 extend over at least two levels parallel to each other, each level being perpendicular to the pivot axis D.
  • the arrangement of the blades or transverse rods of the longitudinal translation table 31 is identical on each of the levels.
  • the longitudinal blades or rectilinear flexible rods 310 are flat blades whose height is at least five times greater than their thickness.
  • the longitudinal blades or rectilinear flexible rods 310 are rods of square or circular section whose height equals the thickness.
  • the resonator mechanism 100 comprises axial stop means comprising at least a first upper axial stop and a second lower axial stop to limit the translational travel of the inertial element 2 at least in the first direction Z, the means axial stop being arranged to cooperate in stop support with the inertial element 2 for the protection of the longitudinal blades 3 at least against axial shocks in the first direction Z, and the second plane of symmetry is substantially equidistant from the first axial stop 7 and the second axial stop 8.
  • the resonator mechanism 100 comprises a plate fixed on the structure 1 or in one piece with it, comprising at least one flexible blade 302 extending in a plane perpendicular to the pivot axis D and fixed to the first intermediate mass 303, and which is arranged to allow mobility of the first intermediate mass 303 in the first direction Z.
  • the plate 301 comprises at least two such coplanar flexible blades.
  • Such a plate 301 is however optional if the height of the blades of the translation tables XY is low compared to the height of the flexible blades 3, in particular less than a third of the height of the flexible blades 3, and in particular if these translation tables include flexible rods as on the Figure 6 .
  • the technology used for manufacturing makes it possible to obtain two distinct blades in the height of a silicon wafer, which promotes the torsional flexibility of the table without softening it for translation.
  • the resonator mechanism 100 can thus advantageously comprise at least two superimposed elementary assemblies, which each group together a level of the anchoring block 30, and/or a base of the at least one inertial element 2, and of the flexible pivot 200 or the flexible suspension 300 which always form a composite assembly, and/or the first intermediate mass 303, and/or the transverse translation table 32, and/or a breakable element used only during assembly and destroyed before the oscillator is put into service; each elementary assembly can be assembled with at least one other elementary assembly by bonding or the like, by mechanical assembly, or by growth of SiO 2 in the case of an execution in silicon, or the like.
  • such an elementary assembly also comprises at least one level of the second intermediate mass 305 and/or of the longitudinal translation table 31.
  • the invention also relates to a clockwork oscillator mechanism 500 comprising such a clockwork resonator mechanism 100, and an escapement mechanism 400, arranged to cooperate with one another.
  • the invention also relates to a clock movement 1000 comprising at least one such oscillator mechanism 500 and/or at least one resonator mechanism 100.
  • the invention also relates to a watch 2000 comprising at least one such movement 1000 and/or at least one oscillator mechanism 500 and/or at least one such resonator mechanism 100.

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  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Electric Clocks (AREA)

Description

Domaine de l'inventionField of the invention

L'invention concerne un mécanisme résonateur d'horlogerie, comportant une structure et un bloc d'ancrage auquel est suspendu au moins un élément inertiel agencé pour osciller selon un premier degré de liberté en rotation RZ autour d'un axe de pivotement s'étendant selon une première direction Z, ledit élément inertiel étant soumis à des efforts de rappel exercés par un pivot flexible comportant une pluralité de lames élastiques sensiblement longitudinales, chacune fixée, à une première extrémité audit bloc d'ancrage, et à une deuxième extrémité audit élément inertiel, chaque dite lame élastique étant déformable essentiellement dans un plan XY perpendiculaire à ladite première direction Z, la structure portant ce bloc d'ancrage par une suspension flexible qui autorise la mobilité du bloc d'ancrage selon cinq degrés de liberté.The invention relates to a clockwork resonator mechanism, comprising a structure and an anchoring block from which is suspended at least one inertial element arranged to oscillate according to a first degree of freedom in rotation RZ around a pivot axis extending in a first direction Z, said inertial element being subjected to restoring forces exerted by a flexible pivot comprising a plurality of substantially longitudinal elastic blades, each fixed, at a first end to said anchoring block, and at a second end to said element inertial, each said elastic blade being deformable essentially in an XY plane perpendicular to said first direction Z, the structure carrying this anchoring block by a flexible suspension which allows the mobility of the anchoring block according to five degrees of freedom.

L'invention concerne encore un oscillateur d'horlogerie comportant au moins un tel mécanisme résonateur.The invention also relates to a clock oscillator comprising at least one such resonator mechanism.

L'invention concerne encore un mouvement d'horlogerie comportant au moins un tel oscillateur et/ou un tel mécanisme résonateur.The invention also relates to a clock movement comprising at least one such oscillator and/or such a resonator mechanism.

L'invention concerne encore une montre comportant un tel mouvement d'horlogerie, et/ou un tel oscillateur, et/ou un tel mécanisme résonateur.The invention also relates to a watch comprising such a clock movement, and/or such an oscillator, and/or such a resonator mechanism.

L'invention concerne le domaine des résonateurs d'horlogerie, et tout particulièrement ceux qui comportent des lames élastiques faisant fonction de moyens de rappel pour la marche de l'oscillateur, et la protection antichoc de tels mécanismes à guidages flexibles.The invention relates to the field of watchmaking resonators, and particularly those which include elastic blades acting as return means for the operation of the oscillator, and the shock protection of such mechanisms with flexible guides.

Arrière-plan de l'inventionBackground of the invention

On obtient de très bonnes performances avec des oscillateurs d'horlogerie comportant des lames élastiques constituant un guidage flexible, et notamment des résonateurs à lames croisées. L'utilisation d'un pivot à guidage flexible permet de remplacer le pivot d'un balancier ainsi que son ressort spiral. Ceci a l'avantage de supprimer les frottements de pivots et donc d'augmenter le facteur de qualité du résonateur. Comme la masse inertielle, notamment un balancier, est suspendue au guidage flexible, généralement mais non limitativement en silicium, il est nécessaire de prévoir un dispositif antichoc afin que les lames ne cassent pas lors d'une chute.Very good performance is obtained with watchmaking oscillators comprising elastic blades constituting flexible guidance, and in particular resonators with crossed blades. The use of a flexible guided pivot makes it possible to replace the pivot of a balance wheel as well as its spiral spring. This has the advantage of eliminating pivot friction and therefore increasing the quality factor of the resonator. As the inertial mass, in particular a balance wheel, is suspended from the flexible guide, generally but not limited to silicon, it is necessary to provide an anti-shock device so that the blades do not break during a fall.

Une façon de réaliser cet antichoc a été présenté dans la demande CH 715526 au nom de ETA Manufacture Horlogère Suisse. On insère entre le pivot flexible et la platine une structure flexible (appelée antichoc) qui autorise les mouvements du balancier selon tous les degrés de liberté (translations X, Y, Z et rotations X, Y) excepté la rotation Z du balancier qui est autorisée par le pivot flexible, et on ajoute des butées mécaniques afin de limiter la course du balancier. Lors de chocs importants, cet antichoc permet au balancier de se déplacer jusqu'aux butées mécaniques, tout en préservant le pivot flexible silicium d'une casse. Lors de micro chocs, la rigidité de l'antichoc est suffisamment élevée pour que le balancier ne touche pas les butées mécaniques. Dans la demande CH 715526 , l'antichoc et le pivot flexible sont réalisés en une seule pièce monolithique en silicium. Ceci présente des avantages en terme de simplicité de fabrication et d'assemblage. Néanmoins le silicium est un matériau fragile, si bien que, lors de chocs très violents, il peut arriver que la pièce se casse car la contrainte maximale est dépassée.A way to achieve this anti-shock was presented in the application CH 715526 on behalf of ETA Manufacture Horlogère Suisse. A flexible structure (called anti-shock) is inserted between the flexible pivot and the plate which allows the movements of the balance according to all degrees of freedom (translations X, Y, Z and rotations X, Y) except the rotation Z of the balance which is authorized by the flexible pivot, and mechanical stops are added to limit the travel of the balance wheel. During significant shocks, this anti-shock allows the balance to move to the mechanical stops, while preserving the flexible silicon pivot from breakage. During micro shocks, the rigidity of the shock absorber is high enough so that the balance does not touch the mechanical stops. In the request CH 715526 , the shock absorber and the flexible pivot are made in a single monolithic silicon piece. This has advantages in terms of simplicity of manufacturing and assembly. However, silicon is a fragile material, so much so that, during very violent shocks, the part may break because the maximum stress is exceeded.

Il est ainsi nécessaire d'améliorer encore la protection antichoc de tels oscillateurs, tout en assurant la rigidité en torsion de leur suspension. La tenue au chocs dépend aussi de cette rigidité en torsion; en effet, lors de chocs hors plan, la contrainte subie par les lames atteint rapidement des valeurs très importantes, ce qui réduit d'autant la course que peut parcourir la pièce avant de céder. Les amortisseurs de chocs pour les pièces d'horlogerie se déclinent dans de nombreuses variantes. Cependant, ils ont essentiellement pour but de protéger les pivots fragiles de l'axe, et non pas les éléments élastiques, tel que classiquement le ressort spiral.It is therefore necessary to further improve the shock protection of such oscillators, while ensuring the torsional rigidity of their suspension. Shock resistance also depends on this torsional rigidity; in fact, during out-of-plane impacts, the stress suffered by the blades quickly reaches levels very high values, which reduces the distance that the part can travel before giving way. Shock absorbers for timepieces come in many variations. However, their main purpose is to protect the fragile pivots of the axis, and not the elastic elements, such as conventionally the spiral spring.

Le document EP3054357A1 au nom de ETA Manufacture Horlogère Suisse SA décrit un oscillateur horloger comportant une structure et des résonateurs primaires distincts, déphasés temporellement et géométriquement, comportant chacun une masse rappelée vers la structure par un moyen de rappel élastique. Cet oscillateur comporte des moyens de couplage pour l'interaction des résonateurs primaires, comportant des moyens moteurs pour entraîner en mouvement un mobile lequel comporte des moyens d'entraînement et de guidage agencés pour entraîner et guider un moyen de commande articulé avec des moyens de transmission, chacun articulé, à distance du moyen de commande, avec une masse d'un résonateur primaire. Les résonateurs primaires et le mobile sont agencés de telle façon que les axes des articulations de deux quelconques des résonateurs primaires et l'axe d'articulation du moyen de commande ne sont jamais coplanaires.The document EP3054357A1 in the name of ETA Manufacture Horlogère Suisse SA describes a watch oscillator comprising a structure and distinct primary resonators, temporally and geometrically phase-shifted, each comprising a mass recalled towards the structure by an elastic return means. This oscillator comprises coupling means for the interaction of the primary resonators, comprising motor means for driving in movement a mobile which comprises drive and guide means arranged to drive and guide a control means articulated with transmission means , each articulated, at a distance from the control means, with a mass of a primary resonator. The primary resonators and the mobile are arranged in such a way that the axes of the joints of any two of the primary resonators and the articulation axis of the control means are never coplanar.

Le document EP3035127A1 au nom de SWATCH GROUP RESEARCH & DEVELOPMENT Ltd décrit un oscillateur d'horlogerie comportant un résonateur constitué par un diapason lequel comporte au moins deux parties mobiles oscillantes, fixées à un élément de liaison par des éléments flexibles dont la géométrie détermine un axe de pivotement virtuel de position déterminée par rapport à une plaque, et autour duquel oscille la partie mobile respective, dont le centre de masse est confondu en position de repos avec l'axe de pivotement virtuel respectif.The document EP3035127A1 in the name of SWATCH GROUP RESEARCH & DEVELOPMENT Ltd describes a watchmaking oscillator comprising a resonator constituted by a tuning fork which comprises at least two oscillating mobile parts, fixed to a connecting element by flexible elements whose geometry determines a virtual pivot axis of determined position relative to a plate, and around which the respective movable part oscillates, the center of mass of which coincides in the rest position with the respective virtual pivot axis.

Pour au moins une partie mobile, les éléments flexibles sont constitués de lames élastiques croisées à distance l'une de l'autre dans deux plans parallèles, dont les projections des directions sur un des plans parallèles se croisent au niveau de l'axe de pivotement virtuel de la partie mobile.For at least one mobile part, the flexible elements are made up of crossed elastic blades at a distance from each other in two parallel planes, including the projections of the directions on one of the planes parallel intersect at the level of the virtual pivot axis of the mobile part.

De nouvelles architectures de mécanismes permettent de maximiser le facteur de qualité d'un résonateur, par l'utilisation d'un guidage flexible avec l'utilisation d'un échappement à ancre avec un très petit angle de levée, selon la demande CH01544/16 au nom de ETA Manufacture Horlogère Suisse et ses dérivées, dont les enseignements sont directement utilisables dans la présente invention, et dont le résonateur peut encore être amélioré en ce qui concerne sa sensibilité aux chocs, selon certaines directions particulières. Il s'agit donc de protéger les lames de la rupture en cas de chocs. On se rend compte que les systèmes antichocs proposés à ce jour pour les résonateurs à guidages flexibles, protègent les lames de chocs dans certaines directions seulement, mais pas dans toutes les directions, ou alors qu'ils présentent le défaut de laisser bouger légèrement l'encastrement du pivot flexible selon sa rotation d'oscillation, ce qui est à éviter autant que possible.New mechanism architectures make it possible to maximize the quality factor of a resonator, through the use of flexible guidance with the use of an anchor escapement with a very small lifting angle, according to application CH01544/16 in the name of ETA Manufacture Horlogère Suisse and its derivatives, the lessons of which can be directly used in the present invention, and whose resonator can be further improved with regard to its sensitivity to shocks, according to certain particular directions. This is therefore to protect the blades from breakage in the event of impact. We realize that the anti-shock systems proposed to date for resonators with flexible guides protect the shock blades in certain directions only, but not in all directions, or that they present the defect of allowing the blade to move slightly. embedding of the flexible pivot according to its oscillation rotation, which should be avoided as much as possible.

La demande CH00518/18 ou la demande EP18168765.8 au nom de ETA Manufacture Horlogère Suisse décrit un mécanisme résonateur d'horlogerie, comportant une structure portant, par une suspension flexible, un bloc d'ancrage auquel est suspendu un élément inertiel oscillant selon un premier degré de liberté en rotation RZ, sous l'action d'efforts de rappel exercés par un pivot flexible comportant des premières lames élastiques chacune fixée audit élément inertiel et audit bloc d'ancrage, la suspension flexible étant agencée pour autoriser une certaine mobilité du bloc d'ancrage selon tous les degrés de liberté autres que le premier degré de liberté en rotation RZ selon lequel seul est mobile l'élément inertiel pour éviter toute perturbation de son oscillation, et la rigidité de la suspension selon le premier degré de liberté en rotation RZ est très fortement supérieure à la rigidité du pivot flexible selon ce même premier degré de liberté en rotation RZ.Application CH00518/18 or application EP18168765.8 in the name of ETA Manufacture Horlogère Suisse describes a watch resonator mechanism, comprising a structure carrying, by a flexible suspension, an anchoring block from which is suspended an inertial element oscillating according to a first degree of freedom in rotation RZ, under the action of restoring forces exerted by a flexible pivot comprising first elastic blades each fixed to said inertial element and to said anchoring block, the flexible suspension being arranged to allow a certain mobility of the anchoring block according to all other degrees of freedom that the first degree of freedom in rotation RZ according to which only the inertial element is mobile to avoid any disturbance of its oscillation, and the rigidity of the suspension according to the first degree of freedom in rotation RZ is very much greater than the rigidity of the pivot flexible according to this same first degree of freedom in rotation RZ.

La demande EP3561607A1 au nom de ETA Manufacture Horlogère Suisse décrit un mécanisme résonateur d'horlogerie selon le préambule de la revendication indépendante annexée.Requirement EP3561607A1 on behalf of ETA Manufacture Horlogère Suisse describes a clock resonator mechanism according to the preamble of the appended independent claim.

Résumé de l'inventionSummary of the invention

L'invention se propose d'optimiser la protection antichoc d'un tel oscillateur, tout en assurant les rigidités en torsion requises de la suspension, notamment pour un mécanisme résonateur selon CH00518/18 ou la demande EP18168765.8 au nom de ETA Manufacture Horlogère Suisse, ou pour un résonateur similaire à guidages flexibles.The invention aims to optimize the shock protection of such an oscillator, while ensuring the required torsional rigidities of the suspension, in particular for a resonator mechanism according to CH00518/18 or the request EP18168765.8 in the name of ETA Manufacture Horlogère Suisse, or for a similar resonator with flexible guides.

En améliorant la rigidité en torsion de la suspension, on améliore aussi la protection des lames contre une rupture en cas de chocs. Un bon résonateur rotatif à guidage flexible, qui constitue un pivot flexible et définit un axe de pivotement virtuel, doit être à la fois très flexible pour la rotation d'oscillation selon un premier degré de liberté en rotation RZ, et aussi très rigide selon les autres degrés de liberté (X, Y, Z, RX, RY) de façon à éviter des mouvements parasites du centre de masse du résonateur. En effet, de tels mouvements parasites peuvent provoquer des erreurs de marche, si l'orientation du résonateur change dans le champ de gravité (on parle d'erreur aux positions). La suspension de l'encastrement du pivot doit être très rigide selon le degré de liberté de l'oscillation, pour ne pas perturber l'isochronisme du résonateur, et pour ne pas dissiper de l'énergie via des mouvements dus aux forces de réaction.By improving the torsional rigidity of the suspension, we also improve the protection of the blades against breakage in the event of impacts. A good rotary resonator with flexible guidance, which constitutes a flexible pivot and defines a virtual pivot axis, must be both very flexible for oscillation rotation according to a first degree of freedom in rotation RZ, and also very rigid according to the other degrees of freedom (X, Y, Z, RX, RY) so as to avoid parasitic movements of the center of mass of the resonator. Indeed, such parasitic movements can cause walking errors if the orientation of the resonator changes in the gravity field (we speak of a position error). The suspension of the pivot embedding must be very rigid depending on the degree of freedom of the oscillation, so as not to disturb the isochronism of the resonator, and not to dissipate energy via movements due to reaction forces.

L'invention se propose de réaliser un antichoc amélioré pour un oscillateur à guidage flexible, de mieux gérer les rigidités en torsion de la suspension, et en conséquence de limiter la course de déplacement hors plan des lames d'un résonateur à lames, et donc d'assurer une meilleure tenue du système.The invention proposes to produce an improved shock absorber for a flexible guided oscillator, to better manage the torsional rigidities of the suspension, and consequently to limit the out-of-plane movement stroke of the blades of a blade resonator, and therefore to ensure better performance of the system.

A cet effet, l'invention concerne un mécanisme résonateur à lames selon la revendication 1.To this end, the invention relates to a blade resonator mechanism according to claim 1.

L'invention concerne encore un oscillateur d'horlogerie comportant au moins un tel mécanisme résonateur.The invention also relates to a clock oscillator comprising at least one such resonator mechanism.

L'invention concerne encore un mouvement d'horlogerie comportant au moins un tel mécanisme résonateur.The invention also relates to a clock movement comprising at least one such resonator mechanism.

L'invention concerne encore une montre comportant un tel mouvement d'horlogerie, et/ou un tel mécanisme résonateur.The invention also relates to a watch comprising such a clock movement, and/or such a resonator mechanism.

Description sommaire des dessinsSummary description of the drawings

D'autres caractéristiques et avantages de l'invention apparaîtront à la lecture de la description détaillée qui va suivre, en référence aux dessins annexés, où :

  • la figure 1 représente, de façon schématisée, et en vue en plan, un mécanisme résonateur à lames élastiques proche de l'invention, comportant une masse inertielle suspendue à un bloc d'ancrage par un pivot flexible comportant deux niveaux parallèles de lames élastiques, les directions selon lesquelles s'étendent ces lames se croisant, en projection, au niveau d'un axe de pivotement virtuel de cet élément inertiel, selon la demande selon la demande CH00518/18 ou la demande EP18168765.8 au nom de ETA Manufacture Horlogère Suisse, et dont les enseignements sont utilisables dans le cas de la présente invention; ce mécanisme résonateur est représenté dans une configuration particulière, où il comporte deux tables de translation agencées pour autoriser une liberté restreinte à des masses intermédiaires que comporte le résonateur entre le bloc d'ancrage et la fixation à une platine; on remarque que chacune de ces tables de translation comporte des éléments élastiques longilignes dont la direction est sensiblement dirigée vers l'axe de pivotement au niveau du pivot virtuel défini par les lames élastiques; l'élément inertiel porte ici une masse inertielle sous la forme d'un balancier avec des visselottes d'ajustement, et porte encore un élément saillant, de type cheville ou similaire, agencé pour coopérer avec un mécanisme d'échappement non représenté, et notamment avec une ancre, voire directement avec une roue d'échappement ; ce mécanisme comporte encore des butées supérieur et inférieure pour limiter la course de la masse inertielle et protéger les lames du guidage flexible ;
  • la figure 2 représente, de façon schématisée, et en perspective, l'amélioration selon l'invention d'un mécanisme résonateur selon la figure 1; le mécanisme résonateur, représenté après dépose des éléments de liaison à une structure fixe de la montre, est un ensemble composite réalisé dans au moins deux matériaux distincts, et qui comporte, d'une part le pivot flexible, qui est réalisé dans un premier matériau, et d'autre part la suspension flexible, qui est réalisée dans un deuxième matériau, le pivot flexible étant maintenu dans une pince élastique intégrée à la suspension flexible ;
  • la figure 3 représente, de façon schématisée et en vue en plan, un détail du mécanisme selon l'invention de la figure 2, montrant l'interaction entre la pince élastique de la suspension flexible et du bloc d'ancrage du pivot flexible ;
  • la figure 4 représente, de façon similaire à la figure 2, un mécanisme proche de l'invention et similaire à celui de la figure 1, comportant deux tables de translation avec des lames élastiques rectilignes, sur deux niveaux superposés et parallèles;
  • la figure 5 représente, de façon schématisée, et en perspective, un détail de la variante de la figure 4, montrant une telle table de translation avec des lames élastiques rectilignes, sur deux niveaux superposés et parallèles ;
  • la figure 6 représente, de façon similaire à la figure 5, une autre variante d'un mécanisme similaire, mais dont les tables de translation comportent des tiges flexibles rectilignes à section sensiblement carrée ;
  • la figure 7 est un schéma-blocs représentant une montre comportant un mouvement comportant, d'une part un tel mécanisme résonateur, et d'autre part un mécanisme oscillateur comportant un tel mécanisme résonateur.
Other characteristics and advantages of the invention will appear on reading the detailed description which follows, with reference to the appended drawings, where:
  • there figure 1 represents, schematically, and in plan view, a resonator mechanism with elastic blades close to the invention, comprising an inertial mass suspended from an anchoring block by a flexible pivot comprising two parallel levels of elastic blades, the directions according to which extend these blades crossing each other, in projection, at the level of a virtual pivot axis of this inertial element, according to the request according to the application CH00518/18 or the request EP18168765.8 in the name of ETA Manufacture Horlogère Suisse, and whose teachings can be used in the case of the present invention; this resonator mechanism is shown in a particular configuration, where it comprises two translation tables arranged to allow freedom restricted to intermediate masses that the resonator comprises between the anchoring block and the attachment to a plate; we note that each of these translation tables comprises elongated elastic elements whose direction is substantially directed towards the pivot axis at the level of the virtual pivot defined by the elastic blades; the inertial element here carries an inertial mass in the form of a balance wheel with adjustment screws, and also carries an element projecting, pin type or similar, arranged to cooperate with an escape mechanism not shown, and in particular with an anchor, or even directly with an escape wheel; this mechanism also includes upper and lower stops to limit the travel of the inertial mass and protect the blades of the flexible guide;
  • there figure 2 represents, schematically and in perspective, the improvement according to the invention of a resonator mechanism according to the figure 1 ; the resonator mechanism, shown after removal of the connecting elements to a fixed structure of the watch, is a composite assembly made from at least two distinct materials, and which comprises, on the one hand, the flexible pivot, which is made from a first material , and on the other hand the flexible suspension, which is made of a second material, the flexible pivot being held in an elastic clamp integrated into the flexible suspension;
  • there Figure 3 represents, schematically and in plan view, a detail of the mechanism according to the invention of the figure 2 , showing the interaction between the elastic clamp of the flexible suspension and the anchoring block of the flexible pivot;
  • there Figure 4 represents, similarly to the figure 2 , a mechanism close to the invention and similar to that of the figure 1 , comprising two translation tables with rectilinear elastic blades, on two superimposed and parallel levels;
  • there Figure 5 represents, in a schematic way, and in perspective, a detail of the variant of the Figure 4 , showing such a translation table with rectilinear elastic blades, on two superimposed and parallel levels;
  • there Figure 6 represents, similarly to the Figure 5 , another variation of a similar mechanism, but whose tables of translation comprise rectilinear flexible rods with a substantially square section;
  • there Figure 7 is a block diagram representing a watch comprising a movement comprising, on the one hand such a resonator mechanism, and on the other hand an oscillator mechanism comprising such a resonator mechanism.

Description détaillée des modes de réalisation préférésDetailed description of the preferred embodiments

L'invention concerne un mécanisme résonateur d'horlogerie, qui constitue une variante des résonateurs décrits dans la demande CH00518/18, ou la demande EP18168765.8 au nom de ETA Manufacture Horlogère Suisse, ou la demande CH 715526 ou de la demande EP 3561607 au nom de ETA Manufacture Horlogère Suisse, dont l'homme du métier saura combiner les caractéristiques avec celles propres à la présente invention.The invention relates to a clockwork resonator mechanism, which constitutes a variant of the resonators described in application CH00518/18, or application EP18168765.8 in the name of ETA Manufacture Horlogère Suisse, or the request CH 715526 or request EP 3561607 in the name of ETA Manufacture Horlogère Suisse, whose characteristics a person skilled in the art will know how to combine with those specific to the present invention.

L'invention part du constat selon lequel le silicium (ou le silicium et/ou un oxyde de silicium) est le matériau le plus adapté pour le pivot flexible, mais pas pour l'antichoc. En effet, afin de remplir son rôle d'antichoc, la structure doit être capable de grandes déformations avec accumulation élevée d'énergie élastique. Certains matériaux métalliques sont plus adaptés que le silicium pour cette fonction. Par exemple, le matériau NiP est plus adapté que le silicium. En effet, le module d'Young vaut 90GPa pour le NiP contre 150GPa pour le Si, et la contrainte maximale 1700MPa pour le NiP contre 1000MPa pour le Si. Cela signifie que la déformation maximale autorisée est trois fois plus grande pour le NiP que pour le Si.The invention is based on the observation that silicon (or silicon and/or silicon oxide) is the most suitable material for the flexible pivot, but not for the shock absorber. Indeed, in order to fulfill its anti-shock role, the structure must be capable of large deformations with high accumulation of elastic energy. Some metallic materials are more suitable than silicon for this function. For example, NiP material is more suitable than silicon. Indeed, the Young's modulus is 90GPa for NiP compared to 150GPa for Si, and the maximum stress is 1700MPa for NiP compared to 1000MPa for Si. This means that the maximum authorized deformation is three times greater for NiP than for the If.

L'invention consiste donc réaliser le pivot dans un premier matériau, notamment en silicium ou équivalent, et de réaliser l'antichoc dans un deuxième matériau, notamment du nickel phosphore NiP ou équivalent, ce deuxième matériau ayant des propriétés physiques très différentes du premier matériau.The invention therefore consists of making the pivot in a first material, in particular silicon or equivalent, and of making the anti-shock in a second material, in particular nickel phosphorus NiP or equivalent, this second material having very different physical properties from the first material .

La difficulté consiste à assembler les deux pièces sans pour autant ajouter une masse trop importante à l'endroit de l'assemblage. Afin d'y parvenir nous proposons d'utiliser un assemblage élastique, avec ou sans colle. Un exemple de réalisation pratique est présenté dans les figures 2 et 3.The difficulty lies in assembling the two parts without adding too much mass at the assembly point. To achieve this we suggest using an elastic assembly, with or without glue. An example of practical implementation is presented in the figure 2 And 3 .

Ce mécanisme résonateur 100 d'horlogerie comporte, tel que visible sur la figure 1, une structure 1 et un bloc d'ancrage 30, auquel est suspendu au moins un élément inertiel 2 qui est agencé pour osciller selon un premier degré de liberté en rotation RZ autour d'un axe de pivotement D s'étendant selon une première direction Z. Cet élément inertiel 2 est soumis à des efforts de rappel exercés par un pivot flexible 200 comportant une pluralité de lames élastiques 3 sensiblement longitudinales, chacune fixée, à une première extrémité au bloc d'ancrage 30, et à une deuxième extrémité à l'élément inertiel 2. Chaque lame élastique 3 est déformable essentiellement dans un plan XY perpendiculaire à la première direction Z.This resonator mechanism 100 of clockwork comprises, as visible on the figure 1 , a structure 1 and an anchoring block 30, from which is suspended at least one inertial element 2 which is arranged to oscillate according to a first degree of freedom in rotation RZ around a pivot axis D extending in a first direction Z. This inertial element 2 is subjected to restoring forces exerted by a flexible pivot 200 comprising a plurality of substantially longitudinal elastic blades 3, each fixed, at a first end to the anchoring block 30, and at a second end to the inertial element 2. Each elastic blade 3 is deformable essentially in a plane XY perpendicular to the first direction Z.

Le bloc d'ancrage 30 est suspendu à la structure 1 par une suspension flexible 300, qui est agencée pour autoriser la mobilité du bloc d'ancrage 30 selon cinq degrés de liberté flexibles de la suspension qui sont :

  • un premier degré de liberté en translation selon la première direction Z,
  • un deuxième degré de liberté en translation selon une deuxième direction X orthogonale à la première direction Z,
  • un troisième degré de liberté en translation selon une troisième direction Y orthogonale à la deuxième direction X et à la première direction Z,
  • un deuxième degré de liberté en rotation RX autour d'un axe s'étendant selon la deuxième direction X,
  • et un troisième degré de liberté en rotation RY autour d'un axe s'étendant selon la troisième direction Y.
The anchor block 30 is suspended from the structure 1 by a flexible suspension 300, which is arranged to allow the mobility of the anchor block 30 according to five flexible degrees of freedom of the suspension which are:
  • a first degree of freedom in translation in the first direction Z,
  • a second degree of freedom in translation in a second direction X orthogonal to the first direction Z,
  • a third degree of freedom in translation in a third direction Y orthogonal to the second direction X and the first direction Z,
  • a second degree of freedom in rotation RX around an axis extending in the second direction X,
  • and a third degree of freedom in rotation RY around an axis extending in the third direction Y.

Selon l'invention, le mécanisme résonateur 100 est un ensemble composite réalisé dans au moins deux matériaux distincts, et qui comporte, d'une part le pivot flexible 200, qui est réalisé dans un premier matériau caractérisé par un premier module de Young E1 et par une première limite élastique Sigma1 et par une première ténacité G1, et d'autre part la suspension flexible 300, qui est réalisée dans un deuxième matériau caractérisé par un deuxième module de Young E2 et par une deuxième limite élastique Sigma2 et par une deuxième ténacité G2.According to the invention, the resonator mechanism 100 is a composite assembly made from at least two distinct materials, and which comprises, on the one hand, the flexible pivot 200, which is made from a first material characterized by a first Young's modulus E1 and by a first elastic limit Sigma1 and by a first toughness G1, and on the other hand the flexible suspension 300, which is made of a second material characterized by a second Young's modulus E2 and by a second elastic limit Sigma2 and by a second toughness G2.

Par ténacité on entend ici la ténacité G = K1 c^2/E, où K1c est la ténacité à la rupture et E le module d'Young. Une ténacité G élevée signifie que la pièce est capable d'emmagasiner plus d'énergie élastique avant de rompre.By toughness we mean here the toughness G = K1 c^2/E, where K1c is the breaking toughness and E is the Young's modulus. A high G toughness means that the part is able to store more elastic energy before breaking.

Plus particulièrement, la valeur de la deuxième ténacité G2 est supérieure à dix fois la valeur de la première ténacité G1. Plus particulièrement encore, la valeur de la deuxième ténacité G2 est supérieure à quatre-vingt fois la valeur de la première ténacité G1. C'est le cas lorsque le premier matériau est du silicium et/ou un oxyde de silicium, et lorsque le deuxième matériau est du NiP, le rapport G2/G1 est voisin de 100 ;More particularly, the value of the second toughness G2 is greater than ten times the value of the first toughness G1. Even more particularly, the value of the second toughness G2 is greater than eighty times the value of the first toughness G1. This is the case when the first material is silicon and/or silicon oxide, and when the second material is NiP, the G2/G1 ratio is close to 100;

Plus particulièrement, le rapport Sigma2 / E2 est au moins double du rapport Sigma1 / E1.Most notably, the Sigma2/E2 ratio is at least twice the Sigma1/E1 ratio.

Plus particulièrement, la valeur du premier module de Young E1 est supérieure ou égale à 1,5 fois la valeur du deuxième module de Young E2.More particularly, the value of the first Young's modulus E1 is greater than or equal to 1.5 times the value of the second Young's modulus E2.

Plus particulièrement, la valeur de la deuxième limite élastique Sigma2 est supérieure ou égale à 1,5 fois la valeur de la première limite élastique Sigma1More particularly, the value of the second elastic limit Sigma2 is greater than or equal to 1.5 times the value of the first elastic limit Sigma1

Plus particulièrement, au moins un élément inertiel 2 est solidaire du pivot flexible 200.More particularly, at least one inertial element 2 is integral with the flexible pivot 200.

Plus particulièrement, la suspension flexible 300 est solidaire de la structure 1.More particularly, the flexible suspension 300 is integral with the structure 1.

Plus particulièrement, le pivot flexible 200 est amovible par rapport à la suspension flexible 300.More particularly, the flexible pivot 200 is removable relative to the flexible suspension 300.

Plus particulièrement, la suspension flexible 300 comporte des éléments faisant pince, notamment des mâchoires 939, pour immobiliser le pivot flexible 200. Avantageusement ces mâchoires 939 constituent les éléments de préhension d'une pince élastique 930. La figure 3 montre sous le repère 938 la position de repos de cette pince.More particularly, the flexible suspension 300 comprises gripper elements, in particular jaws 939, to immobilize the flexible pivot 200. Advantageously, these jaws 939 constitute the gripping elements of an elastic gripper 930. Figure 3 shows under the mark 938 the rest position of this clamp.

Plus particulièrement, la suspension flexible 300 comporte au moins une poche 933 qui est apte à recevoir de la colle pour immobiliser le pivot flexible 200.More particularly, the flexible suspension 300 comprises at least one pocket 933 which is capable of receiving glue to immobilize the flexible pivot 200.

Plus particulièrement, la jonction entre la suspension flexible 300 et le pivot flexible 200 est réalisée sur le bloc d'ancrage 30, qui comporte de préférence des reliefs 309 de forme complémentaire au profil des éléments 939.More particularly, the junction between the flexible suspension 300 and the flexible pivot 200 is made on the anchoring block 30, which preferably includes reliefs 309 of a shape complementary to the profile of the elements 939.

De façon particulière la pince 930 est suspendue à une masse intermédiaire 305, qui est elle-même suspendue à la structure 1 ou à une autre masse intermédiaire 303.In particular, the clamp 930 is suspended from an intermediate mass 305, which is itself suspended from the structure 1 or from another intermediate mass 303.

Cet assemblage élastique a l'avantage de minimiser la masse ajoutée.This elastic assembly has the advantage of minimizing the added mass.

Plus particulièrement, le rapport Sigma2 / E2 est au moins triple du rapport Sigma1 / E1.More specifically, the Sigma2/E2 ratio is at least three times the Sigma1/E1 ratio.

Plus particulièrement, le premier matériau est du silicium et/ou un oxyde de silicium.More particularly, the first material is silicon and/or silicon oxide.

Plus particulièrement, le deuxième matériau est du nickel-phosphore NiP.More specifically, the second material is nickel-phosphorus NiP.

Notamment, la ténacité du silicium est presque 100 fois plus faible que celle de tous les alliages de nickel. Un couple avec le premier matériau qui est du silicium et/ou un oxyde de silicium, et le deuxième matériau qui est du nickel-phosphore NiP, est particulièrement avantageux pour l'application d'antichoc recherchée Et la dissipation (pertes) du NiP est plus grande que celle du silicium, ce qui constitue un avantage supplémentaire.Notably, the toughness of silicon is almost 100 times lower than that of all nickel alloys. A couple with the first material which is silicon and/or a silicon oxide, and the second material which is nickel-phosphorus NiP, is particularly advantageous for the desired anti-shock application And the dissipation (losses) of the NiP is larger than that of silicon, which constitutes an additional advantage.

Naturellement d'autres alliages que le nickel phosphore NiP peuvent présenter un rapport limite élastique sigma / module d'Young E qui est suffisamment élevé pour remplir les conditions de l'invention. Dans le cas d'espèce le nickel phosphore NiP présente l'avantage majeur de pouvoir être mis en forme de façon précise avec la méthode « LIGA » (Lithographie Galvano-Abformung), avec une géométrie parfaite et des tolérances serrées parfaitement compatibles avec les exigences horlogères. Pour l'application particulière illustrée par les figures, la suspension flexible 300 est avantageusement, mais non limitativement, réalisée dans une planche en nickel-phosphore NiP d'une épaisseur comprise entre 180 et 420 micromètres.Naturally, alloys other than nickel phosphorus NiP can have a sigma elastic limit / Young E modulus ratio which is sufficiently high to meet the conditions of the invention. In this case, nickel phosphorus NiP has the major advantage of being able to be shaped precisely with the “LIGA” method (Lithography Galvano-Abformung), with perfect geometry and tight tolerances perfectly compatible with the requirements. watchmakers. For the particular application illustrated by the figures, the flexible suspension 300 is advantageously, but not limited to, made from a nickel-phosphorus NiP board with a thickness of between 180 and 420 micrometers.

La figure 3 décrit l'assemblage du pivot flexible 200 avec la suspension flexible 300, et montre la zone d'assemblage de façon détaillée, et décrit aussi la procédure d'assemblage. L'assemblage se fait en trois temps : tout d'abord la pince élastique 930 (notamment en NiP) est écartée afin de pouvoir insérer le bloc d'ancrage 30 (notamment en silicium) dans les mâchoires 939; ensuite la pince 930 est relâchée de sorte que ses mâchoires 939 saisissent et bloquent les reliefs 309 du bloc d'ancrage 30; enfin, seulement si nécessaire, de la colle est insérée dans au moins une poche 933 entre la pince 930 et le bloc d'ancrage 30.There Figure 3 describes the assembly of the flexible pivot 200 with the flexible suspension 300, and shows the assembly area in detail, and also describes the assembly procedure. The assembly is done in three stages: firstly the elastic clamp 930 (in particular in NiP) is moved aside in order to be able to insert the anchoring block 30 (in particular in silicon) in the jaws 939; then the clamp 930 is released so that its jaws 939 grip and block the reliefs 309 of the anchoring block 30; finally, only if necessary, glue is inserted into at least one pocket 933 between the clamp 930 and the anchoring block 30.

La pince élastique 930 est conçue afin que la force de serrage soit importante. Il est donc important de veiller à ce que la pression hertzienne ne dépasse pas la contrainte maximale au contact entre la mâchoire 939 et le relief 309 du bloc d'ancrage 30 en silicium. Pour cette raison, la forme de la mâchoire 939 épouse celle du relief 309, afin que la différence de rayon de courbure soit aussi faible que possible. Le fait de donner une certaine souplesse à la mâchoire 939 lui permet de se déformer légèrement pour s'accommoder des erreurs de géométries éventuelles entre la pince 930 et le bloc d'ancrage 30.The 930 elastic clamp is designed so that the clamping force is significant. It is therefore important to ensure that the Hertzian pressure does not exceed the maximum stress at the contact between the jaw 939 and the relief 309 of the silicon anchoring block 30. For this reason, the shape of the jaw 939 matches that of relief 309, so that the difference in radius of curvature is as small as possible. The fact of giving a certain flexibility to the jaw 939 allows it to deform slightly to accommodate possible geometric errors between the clamp 930 and the anchoring block 30.

La poche 933 prévue pour la colle est constituée, d'une part d'au moins une zone large où il est facile d'insérer la colle, ainsi que d'autre part au moins une zone plus étroite qui aide à la répartition de la colle par capillarité.The pocket 933 provided for the glue is made up, on the one hand of at least one wide zone where it is easy to insert the glue, as well as on the other hand at least one narrower zone which helps in the distribution of the glue. glue by capillary action.

L'utilisation de la souplesse en torsion d'une table de translation permet de mieux gérer les rigidités en torsion de la suspension. Pour ce faire, on oriente les lames des tables XY de manière à ce que la direction de plus grande flexibilité en torsion vise l'axe de rotation du résonateur. On gère leur souplesse en torsion en rapprochant les lames les unes des autres.Using the torsional flexibility of a translation table makes it possible to better manage the torsional rigidities of the suspension. To do this, we orient the blades of the XY tables so that the direction of greatest torsional flexibility targets the axis of rotation of the resonator. Their torsional flexibility is managed by bringing the blades closer to each other.

Ainsi, la suspension flexible 300 comporte, avantageusement, entre le bloc d'ancrage 30 et une première masse intermédiaire 303, laquelle est fixée à la structure 1 directement ou par l'intermédiaire d'une plaque 301 flexible selon la première direction Z, une table de translation transversale 32 à guidage flexible, et qui comporte des lames transversales 320 ou des tiges flexibles transversales 1320, rectilignes et s'étendant selon la deuxième direction X et en symétrie autour d'un axe transversal D2 croisant l'axe de pivotement D.Thus, the flexible suspension 300 comprises, advantageously, between the anchoring block 30 and a first intermediate mass 303, which is fixed to the structure 1 directly or via a flexible plate 301 in the first direction Z, a transverse translation table 32 with flexible guidance, and which comprises transverse blades 320 or transverse flexible rods 1320, rectilinear and extending in the second direction X and in symmetry around a transverse axis D2 crossing the pivot axis D .

Dans une réalisation particulière non limitative, et tel qu'illustré par les figures, la suspension flexible 300 comporte encore, entre le bloc d'ancrage 30 et une deuxième masse intermédiaire 305, une table de translation longitudinale 31 à guidage flexible, et qui comporte des lames longitudinales 310 ou des tiges flexibles longitudinales, rectilignes et s'étendant selon la troisième direction Y et en symétrie autour d'un axe longitudinal D1 croisant l'axe de pivotement D. Et, entre la deuxième masse intermédiaire 305 et la première masse intermédiaire 303, la table de translation transversale 32 à guidage flexible comporte des lames transversales 320 ou des tiges flexibles transversales, rectilignes et s'étendant selon la deuxième direction X et en symétrie autour de l'axe transversal D2 croisant l'axe de pivotement D.In a particular non-limiting embodiment, and as illustrated by the figures, the flexible suspension 300 further comprises, between the anchoring block 30 and a second intermediate mass 305, a longitudinal translation table 31 with flexible guidance, and which comprises longitudinal blades 310 or longitudinal flexible rods, rectilinear and extending in the third direction Y and in symmetry around a longitudinal axis D1 crossing the pivot axis D. And, between the second intermediate mass 305 and the first mass intermediate 303, the table transverse translation 32 with flexible guidance comprises transverse blades 320 or transverse flexible rods, rectilinear and extending in the second direction X and in symmetry around the transverse axis D2 crossing the pivot axis D.

Plus particulièrement, l'axe longitudinal D1 croise l'axe transversal D2, et en particulier l'axe longitudinal D1, l'axe transversal D2, et l'axe de pivotement D sont concourants.More particularly, the longitudinal axis D1 crosses the transverse axis D2, and in particular the longitudinal axis D1, the transverse axis D2, and the pivot axis D are concurrent.

De façon plus particulière, la table de translation longitudinale 31 et la table de translation transversale 32 comportent chacune au moins deux lames ou tiges flexibles, chaque lame ou tige étant caractérisée par son épaisseur selon la deuxième direction X quand la lame ou tige s'étend selon la troisième direction Y ou inversement, par sa hauteur selon la première direction Z, et par sa longueur selon la direction selon laquelle s'étend la lame ou tige, la longueur étant au moins cinq fois plus grande que la hauteur, la hauteur étant au moins aussi grande que l'épaisseur, et plus particulièrement au moins cinq fois plus grande que cette épaisseur, et plus particulièrement encore au moins sept fois plus grande que cette épaisseur.More particularly, the longitudinal translation table 31 and the transverse translation table 32 each comprise at least two flexible blades or rods, each blade or rod being characterized by its thickness in the second direction according to the third direction Y or vice versa, by its height according to the first direction Z, and by its length according to the direction in which the blade or rod extends, the length being at least five times greater than the height, the height being at least as great as the thickness, and more particularly at least five times greater than this thickness, and more particularly still at least seven times greater than this thickness.

Plus particulièrement, la table de translation transversale 32 comporte au moins deux lames ou tiges flexibles transversales, parallèles entre elles et de même longueur. Les figures 1 et 4 illustrent une variante proche de l'invention avec quatre lames transversales parallèles, et, plus particulièrement, chacune constituée de deux demi-lames agencées sur deux niveaux superposées, et s'étendant dans le prolongement l'une de l'autre selon la première direction Z. Ces demi-lames peuvent être, ou bien entièrement libres l'une par rapport à l'autre, ou bien solidarisées par collage ou similaire, ou par croissance de SiO2 dans le cas d'une exécution en silicium, ou similaire. Naturellement, la table de translation longitudinale 31, quand elle existe puisqu'elle est facultative, peut obéir au même principe de construction. La figure 6 illustre une variante avec des tiges flexibles, groupées en deux niveaux de deux tiges, de section sensiblement carrée ; une autre variante comporte des tiges flexibles circulaires. Le nombre, la disposition, et la section de ces lames ou tiges, peuvent varier sans s'écarter de la présente invention.More particularly, the transverse translation table 32 comprises at least two transverse flexible blades or rods, parallel to each other and of the same length. THE figures 1 And 4 illustrate a variant close to the invention with four parallel transverse blades, and, more particularly, each consisting of two half-blades arranged on two superimposed levels, and extending in the extension of one another in the first direction Z. These half-blades can be either entirely free with respect to each other, or else joined together by gluing or the like, or by growth of SiO 2 in the case of an execution in silicon, or the like. Naturally, the longitudinal translation table 31, when it exists since it is optional, can obey the same construction principle. There Figure 6 illustrates a variant with flexible rods, grouped in two levels of two rods, of substantially square section; another variation has circular flexible rods. The number, arrangement, and section of these blades or rods may vary without departing from the present invention.

Plus particulièrement, les lames ou tiges transversales de la table de translation transversale 32 ont un premier plan de symétrie, qui est parallèle à l'axe transversal D2, et qui passe par l'axe de pivotement D.More particularly, the blades or transverse rods of the transverse translation table 32 have a first plane of symmetry, which is parallel to the transverse axis D2, and which passes through the pivot axis D.

Plus particulièrement, les lames ou tiges transversales de la table de translation transversale 32 ont un deuxième plan de symétrie, qui est parallèle à l'axe transversal D2, et orthogonal à l'axe de pivotement D.More particularly, the blades or transverse rods of the transverse translation table 32 have a second plane of symmetry, which is parallel to the transverse axis D2, and orthogonal to the pivot axis D.

Plus particulièrement, les lames ou tiges transversales de la table de translation transversale 32 ont un troisième plan de symétrie, qui est perpendiculaire à l'axe transversal D2, et parallèle à l'axe de pivotement D.More particularly, the blades or transverse rods of the transverse translation table 32 have a third plane of symmetry, which is perpendicular to the transverse axis D2, and parallel to the pivot axis D.

Plus particulièrement, les lames ou tiges transversales de la table de translation transversale 32 s'étendent sur au moins deux niveaux parallèles entre eux, chaque niveau étant perpendiculaire à l'axe de pivotement D.More particularly, the blades or transverse rods of the transverse translation table 32 extend over at least two levels parallel to each other, each level being perpendicular to the pivot axis D.

Plus particulièrement, l'agencement des lames ou tiges transversales de la table de translation transversale 32 est identique sur chacun des niveaux.More particularly, the arrangement of the blades or transverse rods of the transverse translation table 32 is identical on each of the levels.

Plus particulièrement, les lames transversales ou tiges flexibles rectilignes 320 sont des lames plates dont la hauteur est au moins cinq fois plus grande que leur épaisseur.More particularly, the transverse blades or rectilinear flexible rods 320 are flat blades whose height is at least five times greater than their thickness.

Plus particulièrement, les lames transversales ou tiges flexibles rectilignes 320 sont des tiges de section carrée ou circulaire dont la hauteur est égale à l'épaisseur.More particularly, the transverse blades or rectilinear flexible rods 320 are rods of square or circular section whose height is equal to the thickness.

Plus particulièrement, la table de translation longitudinale 31 comporte au moins deux lames ou tiges flexibles longitudinales, parallèles entre elles et de même longueur.More particularly, the longitudinal translation table 31 comprises at least two longitudinal flexible blades or rods, parallel to each other and of the same length.

Plus particulièrement, les lames ou tiges longitudinales de la table de translation longitudinale 31 ont un premier plan de symétrie, qui est parallèle à l'axe longitudinal D1, et qui passe par l'axe de pivotement D.More particularly, the blades or longitudinal rods of the longitudinal translation table 31 have a first plane of symmetry, which is parallel to the longitudinal axis D1, and which passes through the pivot axis D.

Plus particulièrement, les lames ou tiges longitudinales de la table de translation longitudinale 31 ont un deuxième plan de symétrie, qui est parallèle à l'axe longitudinal D1, et orthogonal à l'axe de pivotement D.More particularly, the blades or longitudinal rods of the longitudinal translation table 31 have a second plane of symmetry, which is parallel to the longitudinal axis D1, and orthogonal to the pivot axis D.

Plus particulièrement, les lames ou tiges longitudinales de la table de translation longitudinale 31 ont un troisième plan de symétrie, qui est perpendiculaire à l'axe longitudinal D1, et parallèle à l'axe de pivotement D.More particularly, the blades or longitudinal rods of the longitudinal translation table 31 have a third plane of symmetry, which is perpendicular to the longitudinal axis D1, and parallel to the pivot axis D.

Plus particulièrement, les lames ou tiges transversales de la table de translation longitudinale 31 s'étendent sur au moins deux niveaux parallèles entre eux, chaque niveau étant perpendiculaire à l'axe de pivotement D.More particularly, the blades or transverse rods of the longitudinal translation table 31 extend over at least two levels parallel to each other, each level being perpendicular to the pivot axis D.

Plus particulièrement, l'agencement des lames ou tiges transversales de la table de translation longitudinale 31 est identique sur chacun des niveaux.More particularly, the arrangement of the blades or transverse rods of the longitudinal translation table 31 is identical on each of the levels.

Plus particulièrement, les lames longitudinales ou tiges flexibles rectilignes 310 sont des lames plates dont la hauteur est au moins cinq fois plus grande que leur épaisseur.More particularly, the longitudinal blades or rectilinear flexible rods 310 are flat blades whose height is at least five times greater than their thickness.

Plus particulièrement, les lames longitudinales ou tiges flexibles rectilignes 310 sont des tiges de section carrée ou circulaire dont la hauteur égale à l'épaisseur.More particularly, the longitudinal blades or rectilinear flexible rods 310 are rods of square or circular section whose height equals the thickness.

De façon particulière, le mécanisme résonateur 100 comporte des moyens de butée axiale comportant au moins une première butée axiale supérieure et une deuxième butée axiale inférieure pour limiter la course en translation de l'élément inertiel 2 au moins selon la première direction Z, les moyens de butée axiale étant agencés pour coopérer en appui de butée avec l'élément inertiel 2 pour la protection des lames longitudinales 3 au moins contre les chocs axiaux selon la première direction Z, et le deuxième plan de symétrie est sensiblement à égale distance de la première butée axiale 7 et de la deuxième butée axiale 8.In particular, the resonator mechanism 100 comprises axial stop means comprising at least a first upper axial stop and a second lower axial stop to limit the translational travel of the inertial element 2 at least in the first direction Z, the means axial stop being arranged to cooperate in stop support with the inertial element 2 for the protection of the longitudinal blades 3 at least against axial shocks in the first direction Z, and the second plane of symmetry is substantially equidistant from the first axial stop 7 and the second axial stop 8.

Dans une variante particulière, le mécanisme résonateur 100 comporte une plaque fixée sur la structure 1 ou monobloc avec elle, comportant au moins une lame flexible 302 s'étendant dans un plan perpendiculaire à l'axe de pivotement D et fixée à la première masse intermédiaire 303, et qui est agencée pour autoriser une mobilité de la première masse intermédiaire 303 selon la première direction Z. Plus particulièrement, la plaque 301 comporte au moins deux telles lames flexibles coplanaires. Une telle plaque 301 est toutefois facultative si la hauteur des lames des tables de translation XY est faible par rapport à la hauteur des lames flexibles 3, en particulier inférieure au tiers de la hauteur des lames flexibles 3, et notamment si ces tables de translation comportent des tiges flexibles comme sur la figure 6.In a particular variant, the resonator mechanism 100 comprises a plate fixed on the structure 1 or in one piece with it, comprising at least one flexible blade 302 extending in a plane perpendicular to the pivot axis D and fixed to the first intermediate mass 303, and which is arranged to allow mobility of the first intermediate mass 303 in the first direction Z. More particularly, the plate 301 comprises at least two such coplanar flexible blades. Such a plate 301 is however optional if the height of the blades of the translation tables XY is low compared to the height of the flexible blades 3, in particular less than a third of the height of the flexible blades 3, and in particular if these translation tables include flexible rods as on the Figure 6 .

Comme exposé ci-dessus, la technologie utilisée pour la fabrication permet d'obtenir deux lames distinctes dans la hauteur d'un wafer silicium, ce qui favorise la souplesse en torsion de la table sans l'assouplir pour la translation. Et le mécanisme résonateur 100 peut ainsi avantageusement comporter au moins deux ensembles élémentaires superposés, qui regroupent chacun un niveau du bloc d'ancrage 30, et/ou d'une embase de l'au moins un élément inertiel 2, et du pivot flexible 200 ou de la suspension flexible 300 lesquels forment toujours un ensemble composite, et/ou de la première masse intermédiaire 303, et/ou de la table de translation transversale 32, et/ou d'un élément sécable utilisé seulement lors de l'assemblage et détruit avant la mise en service de l'oscillateur; chaque ensemble élémentaire peut être assemblé à au moins un autre ensemble élémentaire par collage ou similaire, par assemblage mécanique, ou par croissance de SiO2 dans le cas d'une exécution en silicium, ou similaire.As explained above, the technology used for manufacturing makes it possible to obtain two distinct blades in the height of a silicon wafer, which promotes the torsional flexibility of the table without softening it for translation. And the resonator mechanism 100 can thus advantageously comprise at least two superimposed elementary assemblies, which each group together a level of the anchoring block 30, and/or a base of the at least one inertial element 2, and of the flexible pivot 200 or the flexible suspension 300 which always form a composite assembly, and/or the first intermediate mass 303, and/or the transverse translation table 32, and/or a breakable element used only during assembly and destroyed before the oscillator is put into service; each elementary assembly can be assembled with at least one other elementary assembly by bonding or the like, by mechanical assembly, or by growth of SiO 2 in the case of an execution in silicon, or the like.

Plus particulièrement, un tel ensemble élémentaire comporte encore au moins un niveau de la deuxième masse intermédiaire 305 et/ou de la table de translation longitudinale 31.More particularly, such an elementary assembly also comprises at least one level of the second intermediate mass 305 and/or of the longitudinal translation table 31.

L'invention concerne encore un mécanisme oscillateur 500 d'horlogerie comportant un tel mécanisme résonateur 100 d'horlogerie, et un mécanisme d'échappement 400, agencés pour coopérer l'un avec l'autre.The invention also relates to a clockwork oscillator mechanism 500 comprising such a clockwork resonator mechanism 100, and an escapement mechanism 400, arranged to cooperate with one another.

L'invention concerne encore un mouvement d'horlogerie 1000 comportant au moins un tel mécanisme oscillateur 500 et/ou au moins un mécanisme résonateur 100.The invention also relates to a clock movement 1000 comprising at least one such oscillator mechanism 500 and/or at least one resonator mechanism 100.

L'invention concerne encore une montre 2000 comportant au moins un tel mouvement 1000 et/ou au moins un mécanisme oscillateur 500 et/ou au moins un tel mécanisme résonateur 100.The invention also relates to a watch 2000 comprising at least one such movement 1000 and/or at least one oscillator mechanism 500 and/or at least one such resonator mechanism 100.

Claims (20)

  1. Horological resonator mechanism (100), comprising a structure (1) and an anchor unit (30) from which is suspended at least one inertial element (2) which is arranged to oscillate with a first degree of rotational freedom RZ about a pivot axis (D) extending in a first direction Z, said inertial element (2) being subjected to return forces exerted by a flexure pivot (200) comprising a plurality of substantially longitudinal elastic strips (3), each fixed at a first end to said anchor unit (30), and at a second end to said inertial element (2), each said elastic strip (3) being deformable essentially in a plane XY perpendicular to said first direction Z, wherein said anchor unit (30) is suspended from said structure (1) by a flexible suspension (300), which is arranged to allow said anchor unit (30) to move in five flexible degrees of freedom of the suspension which are a first degree of translational freedom in said first direction Z, a second degree of translational freedom in a second direction X orthogonal to said first direction Z, a third degree of translational freedom in a third direction Y orthogonal to said second direction X and to said first direction Z, a second degree of rotational freedom RX about an axis extending in said second direction X, and a third degree of rotational freedom RY about an axis extending in said third direction Y, characterised in that said resonator mechanism (100) is a composite assembly made of at least two different materials, and which comprises, on the one hand, said flexure pivot (200), which is made of a first material characterised by a first Young's modulus E1 and by a first yield strength Sigma1 and by a first modulus of rigidity G1, and, on the other hand, said flexible suspension (300), which is made of a second material characterised by a second Young's modulus E2 and by a second yield strength Sigma2 and by a second modulus of rigidity G2.
  2. Resonator mechanism (100) according to claim 1, characterised in that the value of said second modulus of rigidity G2 is greater than ten times the value of said first modulus of rigidity G1.
  3. Resonator mechanism (100) according to claim 1 or 2, characterised in that the ratio Sigma2 / E2 is at least twice the ratio Sigma1 / E1.
  4. Resonator mechanism (100) according to one of claims 1 to 3, characterised in that the value of said first Young's modulus E1 is greater than or equal to 1.5 times the value of said second Young's modulus E2.
  5. Resonator mechanism (100) according to one of claims 1 to 4, characterised in that the value of said second yield strength Sigma2 is greater than or equal to 1.5 times the value of said first yield strength Sigma1.
  6. Resonator mechanism (100) according to one of claims 1 to 5, characterised in that said at least one inertial element (2) is integral with said flexure pivot (200).
  7. Resonator mechanism (100) according to one of claims 1 to 6, characterised in that said flexible suspension (300) is integral with said structure (1).
  8. Resonator mechanism (100) according to one of claims 1 to 7, characterised in that said flexure pivot (200) is capable of being removed from said flexible suspension (300).
  9. Resonator mechanism (100) according to one of claims 1 to 8, characterised in that said flexible suspension (300) comprises clamping elements (939) to immobilise said flexure pivot (200).
  10. Resonator mechanism (100) according to one of claims 1 to 9, characterised in that said flexible suspension (300) comprises at least one pocket (933) capable of receiving adhesive to immobilise said flexure pivot (200).
  11. Resonator mechanism (100) according to one of claims 1 to 10, characterised in that the junction between said flexible suspension (300) and said flexure pivot (200) is made on said anchor unit (30).
  12. Resonator mechanism (100) according to one of claims 1 to 11, characterised in that the ratio Sigma2 / E2 is at least three times the ratio Sigma1 / E1.
  13. Resonator mechanism (100) according to one of claims 1 to 12, characterised in that said first material is silicon and/or a silicon oxide.
  14. Resonator mechanism (100) according to one of claims 1 to 13, characterised in that said second material is nickel-phosphorus NiP.
  15. Resonator mechanism (100) according to one of claims 1 to 14, characterised in that said flexible suspension (300) comprises, between said anchor unit (30) and a first intermediate mass (303), which is attached to said structure (1) directly or by means of a plate that is flexible in said first direction Z, a transverse translation stage (32) with flexure bearing and comprising transverse strips or transverse flexible rods (320, 1320), which are rectilinear and extend in said second direction X and symmetrically about a transverse axis (D2) intersecting said pivot axis (D).
  16. Resonator mechanism (100) according to claim 15, characterised in that said flexible suspension (300) comprises, between said anchor unit (30) and a second intermediate mass (305), a longitudinal translation stage (31) with flexure bearing, and comprising longitudinal strips or longitudinal flexible rods (310, 1310), which are rectilinear and extend in said third direction Y and symmetrically about a longitudinal axis (D1) intersecting said pivot axis (D), and comprises said transverse translation stage (32) between said second intermediate mass (305) and said first intermediate mass (303).
  17. Resonator mechanism (100) according to claim 16, characterised in that said longitudinal axis (D1) intersects said transverse axis (D2).
  18. Resonator mechanism (100) according to claim 16 or 17, characterised in that said longitudinal translation stage (31) and said transverse translation stage (32) each comprise at least two said flexible strips or rods, each said strip or rod being characterised by its thickness in said second direction X when said strip or rod extends in said third direction Y or conversely, by its height in said first direction Z and by its length in the direction in which said strip or rod extends, said length being at least five times greater than said height, said height being at least as great as said thickness.
  19. Horological movement (1000) comprising at least one resonator mechanism (100) according to one of claims 1 to 18, and/or at least one horological oscillator mechanism (500) comprising a horological resonator mechanism (100) according to one of claims 1 to 18 and an escapement mechanism (400), which are arranged to cooperate with one another.
  20. Watch (2000) comprising at least one movement (1000) according to claim 19 and/or at least one resonator mechanism (100) according to one of claims 1 to 18.
EP21212441.6A 2021-12-06 2021-12-06 Shock protection of a resonator mechanism with rotatable flexible guiding Active EP4191346B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP21212441.6A EP4191346B1 (en) 2021-12-06 2021-12-06 Shock protection of a resonator mechanism with rotatable flexible guiding
US17/812,456 US20230176522A1 (en) 2021-12-06 2022-07-14 Shock protection of a resonator mechanism with rotary flexure bearing
JP2022134701A JP7407250B2 (en) 2021-12-06 2022-08-26 Shock protection of resonator mechanisms with rotating deflection bearings
CN202211089846.8A CN116224741A (en) 2021-12-06 2022-09-07 Shock protection for resonator mechanism with rotating compliant bearing

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EP21212441.6A EP4191346B1 (en) 2021-12-06 2021-12-06 Shock protection of a resonator mechanism with rotatable flexible guiding

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EP4191346A1 EP4191346A1 (en) 2023-06-07
EP4191346B1 true EP4191346B1 (en) 2024-06-26

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CH15446A (en) 1897-10-08 1898-06-15 Paul Suess Actiengesellschaft Book-shaped container with a device for collecting and organizing postcards or the like
EP3035127B1 (en) 2014-12-18 2017-08-23 The Swatch Group Research and Development Ltd. Clock oscillator with tuning fork
EP3054357A1 (en) 2015-02-03 2016-08-10 ETA SA Manufacture Horlogère Suisse Clock oscillator mechanism
EP3438762A3 (en) * 2017-07-28 2019-03-13 The Swatch Group Research and Development Ltd Timepiece oscillator having flexible guides with wide angular travel
EP3557333B1 (en) 2018-04-16 2020-11-04 Patek Philippe SA Genève Method for manufacturing a timepiece mainspring
CH714922A2 (en) 2018-04-23 2019-10-31 Eta Sa Mft Horlogere Suisse Shockproof protection of a rotational flexible guiding clock resonator mechanism.
EP3561607B1 (en) 2018-04-23 2022-03-16 ETA SA Manufacture Horlogère Suisse Collision protection of a resonator mechanism with rotatable flexible guiding
CH715526A2 (en) 2018-11-08 2020-05-15 Eta Sa Mft Horlogere Suisse Shock protection of a resonator mechanism with flexible rotary guide.

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CN116224741A (en) 2023-06-06
JP2023084084A (en) 2023-06-16
US20230176522A1 (en) 2023-06-08
JP7407250B2 (en) 2023-12-28
EP4191346A1 (en) 2023-06-07

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