EP4121582A1 - Croissance galvanique de nanofils - Google Patents

Croissance galvanique de nanofils

Info

Publication number
EP4121582A1
EP4121582A1 EP21710472.8A EP21710472A EP4121582A1 EP 4121582 A1 EP4121582 A1 EP 4121582A1 EP 21710472 A EP21710472 A EP 21710472A EP 4121582 A1 EP4121582 A1 EP 4121582A1
Authority
EP
European Patent Office
Prior art keywords
electrolyte
distributor
nanowires
outlets
outlet side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21710472.8A
Other languages
German (de)
English (en)
Inventor
Olav Birlem
Florian DASSINGER
Sebastian Quednau
Farough ROUSTAIE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanowired GmbH
Original Assignee
Nanowired GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanowired GmbH filed Critical Nanowired GmbH
Publication of EP4121582A1 publication Critical patent/EP4121582A1/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/04—Wires; Strips; Foils
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/006—Nanostructures, e.g. using aluminium anodic oxidation templates [AAO]

Definitions

  • the invention relates to the galvanic growth of nanowires.
  • the invention relates to a method and an arrangement for providing a plurality of nanowires on a surface.
  • nanowires can be obtained via galvanic processes or by means of processes known from thin-film technology. What many known processes have in common is that they require complex machines and, in particular, are therefore usually only (can) used in laboratories and clean rooms. In particular, most of the known methods are not suitable for industry.
  • nanowires obtained vary greatly in terms of their properties and, in particular, of their quality.
  • the nanowires from different growth processes often differ considerably, even if the same or the same machines, starting materials and / or formulations are used.
  • the quality of nanowires often depends, in particular, on the skill of the user of a corresponding arrangement or the user of a corresponding method, on environmental influences and / or simply on chance. All of this is made more difficult by the fact that nanowires are structures that in some cases cannot be visualized even with a light microscope. Therefore, extensive investigations may be necessary in order to be able to determine the properties described (and in particular the fluctuations in these) at all.
  • a method for providing a plurality of nanowires is presented on a surface.
  • the method comprises: a) providing an electrolyte distributor, b) providing a film with a large number of continuous pores, c) arranging the film between the surface and an outlet side of the electrolyte distributor, d) introducing a liquid electrolyte into the electrolyte distributor, so that the liquid electrolyte is delivered to the foil at the outlet side of the electrolyte distributor, and e) applying an electrical voltage between the liquid electrolyte and the surface, so that the nanowires in the pores of the foil are grown from the liquid electrolyte onto the surface.
  • Steps a) to c) are preferably carried out before steps d) and e).
  • Steps a) and b) can be carried out one after the other or simultaneously in any order, in particular also simultaneously with step c).
  • Steps d) and e) can be carried out in any order, one after the other or at the same time.
  • nanowires can be produced.
  • a nanowire is understood here to mean any material body that has a wire-like shape and a size in the range from a few nanometers to a few micrometers.
  • a nanowire can, for example, have a circular, oval or polygonal base.
  • a nanowire can have a hexagonal base area. All nanowires are preferably formed from the same material.
  • the nanowires preferably have a length in the range from 100 nm [nanometers] to 100 gm [micrometers], in particular in the range from 500 nm to 30 gm. Furthermore, the nanowires preferably have a diameter in the range from 10 nm to 10 ⁇ m, in particular in the range from 30 nm to 2 ⁇ m.
  • the term diameter refers to a circular base area, with a comparable definition of a diameter being used for a base area that differs therefrom. It is particularly preferred that all of the nanowires used have the same length and the same diameter. The method described can be used for a wide variety of nanowire materials.
  • the surface on which the nanowires are to be grown is preferably designed to be electrically conductive. If the surface is part of an otherwise non-electrically conductive body (such as a substrate), the electrical conductivity can e.g. B. can be achieved by metallization. So z. B. a non-electrically conductive substrate can be coated with a thin layer of metal. In particular, an electrode layer can be produced by the metallization. Depending on the material of the surface and / or the electrode layer, it can be useful to provide an adhesive layer between the surface and the electrode layer, which provides adhesion between the surface and the electrode layer.
  • the substrate can in particular be a silicon substrate.
  • the surface can in particular be the surface of a body which is provided with electrically conductive structures. This can in particular be a silicon chip or a so-called printed circuit board (PCB).
  • PCB printed circuit board
  • the nanowires can be grown galvanically on the surface in pores of a film.
  • An electrolyte is used for this purpose.
  • the nanowires can be provided over a particularly large area and particularly reliably if the electrolyte is distributed particularly evenly over the foil.
  • a particularly uniform distribution of the electrolyte over the foil can be achieved in the described method by the electrolyte distributor, which is provided in step a).
  • the electrolyte distributor preferably has at least one inlet and a plurality of outlets on the outlet side.
  • the electrolyte distributor is intended and set up to distribute a liquid electrolyte from the at least one inlet to the outlets. Because the electrolyte distributor has a Having a plurality of outlets, the electrolyte can be distributed particularly evenly over the outlet side. A multiplicity of outlets is to be understood as meaning at least three outlets.
  • the electrolyte distributor preferably has 100 to 1000 outlets.
  • the outlets preferably each have a diameter in the range from 0.1 to 2 mm.
  • the outlets are arranged on an outlet side of the electrolyte distributor.
  • the inlet or inlets of the electrolyte distributor are preferably arranged on an inlet side of the electrolyte distributor opposite the outlet side.
  • the outlets are preferably formed perpendicular to the outlet side. This means that one direction of flow of the electrolyte through the outlets is perpendicular to the outlet side. This means that the electrolyte can be dispensed particularly evenly on the outlet side.
  • the outlets are preferably arranged in a regular pattern on the outlet side. This allows the electrolyte to be dispensed evenly on the outlet side.
  • outlets can be arranged in the form of a grid, it being preferred that all rows of the grid each have the same size, all columns of the grid each have the same size and / or all rows of the grid have the same size as all columns of the grid.
  • the electrolyte manifold 400 may have outlets arranged in 20 rows and 20 columns.
  • step b) the film is provided with the multitude of continuous pores.
  • the film is preferably formed with a plastic material, in particular with a polymer material.
  • the film is connected to the surface in such a way that the film does not slip. This could reduce the quality of the grown nanowires.
  • the fact that the pores of the film are continuous is preferably implemented in such a way that the pores form continuous channels from an upper side of the film to a lower side of the film.
  • the pores are designed to be cylindrical.
  • the pores it is also possible for the pores to be designed as channels with a curved course.
  • a pore can, for example, have a circular, oval or polygonal base area.
  • a pore can have a hexagonal base area.
  • the pores are preferably designed to be uniform (ie the pores preferably do not differ in terms of size, shape, arrangement and / or spacing from adjacent pores).
  • the pores are preferably (in particular completely) filled with the electrodeposited material. This gives the nanowires the size, shape and arrangement of the pores.
  • the film can therefore also be referred to as a “template”, “template film” or “stencil”.
  • the foil is arranged between the surface and the electrolyte distributor, preferably in such a way that the foil rests against the surface.
  • the foil is preferably applied to the electrolyte distributor in such a way that a liquid electrolyte can be delivered to the foil with the electrolyte distributor.
  • the film can on the one hand be applied to the surface and on the other hand to be applied to the outlet side of the electrolyte distributor.
  • one or more intermediate layers permeable to the electrolyte to be arranged between the film and the outlet side of the electrolyte distributor.
  • a sponge can be placed on the one hand against the foil and on the other hand against the outlet side of the electrolyte distributor.
  • step d) the liquid electrolyte is preferably introduced into the inlet or into at least one of the inlets of the electrolyte distributor. As a result, the liquid electrolyte is dispensed at the outlets and, to that extent, given off to the foil.
  • step e) an electrical voltage is applied between the liquid electrolyte and the surface, so that the nanowires in the pores of the film are grown from the liquid electrolyte onto the surface.
  • the electrical voltage is preferably applied between an electrode and the surface.
  • the electrode is preferably in contact with the electrolyte in such a way that there is a continuous conduction path through the electrolyte from the electrode to the surface. This allows the nanowires to be grown galvanically onto the surface.
  • the method for copper as the material of the nanowires is preferably carried out at room temperature.
  • the applied voltage is preferably between 0.01 V and 2 V [volts], in particular 0.2 V.
  • the electrolyte for nanowires made of copper is in particular a mixture of CuS0 4 [copper sulfate], H2SO4 [sulfuric acid] and H2O [water ] preferred.
  • a current density of 1.5 mA / cm 2 [milliamps per square centimeter] (direct current) is preferred used over a growth period of 20 minutes.
  • nanowires can be of particularly high quality. will hold. Over a particularly large surface, these can also be grown particularly uniformly in terms of length, diameter, structure, density (ie average distance between neighboring nanowires) and material composition.
  • the method described is also not restricted to use in a laboratory, since it does not require any micro-assembly handling in particular. Processes that work with heavy ion bombardment, for example, are limited to a research facility, since an ion accelerator is a fixed, large-scale facility.
  • an electrolyte manifold comprising:
  • At least one inlet a film with a multitude of through pores, which is applied to the electrolyte distributor in such a way that a liquid electrolyte can be delivered to the film with the electrolyte distributor, and an electrode for applying an electrical voltage between the liquid electrolyte and the surface, so that the nanowires in the pores of the foil can grow from the liquid electrolyte onto the surface when the foil is applied to the surface.
  • the particular advantages and design features of the method described above can be used and transferred to the described arrangement, and vice versa.
  • the method described is preferably carried out with the arrangement described.
  • the described arrangement is preferably determined and set up to carry out the described method.
  • the surface is not part of the arrangement.
  • the assembly can be brought into contact with the surface in order to grow the nanowires onto the surface.
  • the foil is applied to the electrolyte distributor in such a way that a liquid electrolyte can be delivered to the foil with the electrolyte distributor.
  • the foil can be placed directly on the outlet side of the electrolyte distributor.
  • the foil is applied to the interlayer.
  • the electrolyte distributor has, for example, a sponge as an intermediate layer which is applied to the outlet side of the electrolyte distributor, the film is preferably applied to the sponge and, to that extent, to the electrolyte distributor.
  • the electrode is preferably arranged in such a way that there is a continuous conduction path through the electrolyte from the electrode to the surface when the electrolyte is delivered to the foil with the electrolyte distributor.
  • the electrode can be part of the electrolyte distributor.
  • the electrolyte distributor comprises at least two inlets, each of the inlets being connected to a respective group of the outlets, and the groups of the outlets being different from one another.
  • Each of the inlets is connected to a respective group of the outlets, the groups of outlets being different from one another.
  • a group of outlets comprises at least two and at most all outlets.
  • the groups can overlap each other.
  • An outlet can belong to one, several or all groups.
  • the electrolyte can also have outlets, which do not belong to any group - such outlets are, however, irrelevant for the functioning of the electrolyte distributor and are therefore not further considered here.
  • electrolyte distributor has two inlets and four outlets, the following groups can be provided, for example:
  • inlet 1 is connected to outlets 1 and 2 (group 1); Inlet 2 is connected to outlets 3 and 4 (group 2).
  • inlet 1 is connected to outlets 1, 2 and 3 (group 1); Inlet 3 is connected to outlets 1, 2 and 4 (group 2).
  • inlet 1 is connected to outlets 1, 2, 3 and 4 (group 1); Inlet 3 is connected to outlets 1, 2 and 3 (group 2).
  • the electrolyte distributor preferably has more than four outlets.
  • the electrolyte By arranging the outlets in groups, the electrolyte can be dispensed in zones at the outlet side. Depending on which of the inlets the electrolyte is introduced into, the electrolyte is dispensed in correspondingly different areas of these zones on the outlet side of the electrolyte distributor.
  • differently sized and / or differently shaped areas of a surface can be overgrown with nanowires. For example, if an area of the surface is to be covered with nanowires that is smaller than the outlet side of the electrolyte distributor, the release of the electrolyte can be limited to a corresponding sub-area of the outlet side of the electrolyte distributor.
  • this sub-area preferably corresponds to the part of the surface to be overgrown. Otherwise, the electrolyte is preferably released with the next larger sub-area of the outlet side of the electrolyte distributor, which covers the entire part of the surface to be covered with growth.
  • the design of the electrolyte distributor enables the electrolyte to be dispensed in a targeted manner. In this way, on the one hand, the consumption of the electrolyte can be reduced because the electrolyte is not released into areas in which it is not needed. It has been found, however, that the design of the electrolyte distributor also contributes to improving the quality of the nanowires. In particular, it has been found that, due to the design of the electrolyte distributor, particularly uniform nanowires can be produced. This is because the amount of electrolyte released on the foil has an influence on the properties of the nanowires produced.
  • electrolyte is provided in an area that is larger than the part of the surface to be covered, more electrolyte is available for the nanowire growth in the edge areas than in the center of the part of the surface to be covered. This can mean that the nanowires in the edge areas differ from the nanowires in the center. This can be prevented by the design of the electrolyte distributor.
  • the electrolyte can be fed individually to each of the inlets to be used.
  • the inlets are separably connected to an overall inlet via an inlet manifold.
  • the inlet manifold preferably has a respective valve for each inlet.
  • the electrolyte can thus be introduced into the electrolyte distributor through the entire inlet and distributed via the inlet distributor to the inlets whose valve is open.
  • By opening and closing the individual valves of the inlet manifold it is possible to determine from which group or groups the outlets the electrolyte is delivered.
  • the outlet side of the electrolyte distributor is flat.
  • the electrolyte distributor is particularly suitable for the galvanic growth of nanowires.
  • the nanowires are preferably grown on a flat surface. Accordingly, it is advantageous that the outlet side of the electrolyte distributor is flat. If a curved surface is to be covered with nanowires, a sponge is preferably arranged between the surface and the outlet side of the electrolyte distributor. The sponge can compensate for the curvature of the surface.
  • the electrolyte distributor comprises a distribution element with a respective distribution section for each of the groups of outlets, the respective inlet being connected to the corresponding group of outlets via the corresponding distribution section.
  • the distribution element is preferably designed as a distribution plate.
  • the Ver subsections are preferably designed as cavities within the distribution element. Each of the distribution sections is preferably connected directly or indirectly to the corresponding inlet.
  • An indirect connection is present when a further element is provided between a connection section and the corresponding inlet, through which the electrolyte can flow from the inlet to the distribution section.
  • Each of the distribution sections is preferably connected directly or indirectly to the corresponding outlets. It is preferred that each of the distribution sections is directly connected to the corresponding outlets in such a way that the outlets are designed as openings in the distribution element which extend between the corresponding distribution section and the surroundings of the distribution element.
  • the electrolyte distributor comprises a pre-distribution element, via which the respective inlet is connected to the corresponding distribution section of the distribution element.
  • the distribution element is indirectly connected to the inlets via the pre-distribution element.
  • the electrolyte can be conducted from the inlets into the corresponding distribution sections of the distribution element.
  • the electrolyte can be dispensed more evenly on the outlet side due to the pre-distribution element. This is because the electrolyte can be delivered more evenly to the distribution sections via the pre-distribution element than directly from the inlets. As a result, the flow rate of the electrolyte is more even within the distribution element.
  • the electrolyte distributor is preferably constructed in layers: a first layer is formed by the predistribution element and a second layer is formed by the distribution element.
  • outlets of the electrolyte distributor are formed in a cover of the electrolyte distributor.
  • the electrolyte distributor is preferably built up in layers: a first layer is formed by the pre-distribution element, a second layer is formed by the distribution element and a third layer is formed by the cover. educated. The distribution element rests on the one hand against the pre-distribution element and on the other hand against the cover.
  • the outlets are formed in the cover.
  • the distribution element preferably has a plurality of holes which are designed and arranged in accordance with the outlets. Electrolyte can thus exit the distribution element through a hole and pass the cover through the corresponding outlet.
  • the material of the outlet side can have an influence on the growth of the nanowires. Depending on the electrolyte used and / or depending on the material of the nanowires to be grown, a different material of the outlet side can consequently be advantageous.
  • the cover can be exchanged more easily compared to the distribution element. Because of the cover, the electrolyte distributor can therefore be used particularly flexibly. The cover can also be replaced more easily than the distribution element in the event of wear and / or contamination.
  • the outlet side of the electrolyte distributor is designed as an electrode.
  • the electrolyte distributor can be used particularly well for the galvanic growth of nanowires. In this way, an electrical voltage can be applied between the outlet side and a surface to be overgrown with nanowires. Another electrode is not required, which reduces the structural effort.
  • the outlets are formed in a cover of the electrolyte distributor.
  • the cover is preferably formed on a metal and can be used as the electrode. Deposits can form during galvanic growth of the nanowires come to the cover. To clean the cover, it can be detached from the distribution element. The cover can also be replaced more easily than, for example, the distribution element. This is also advantageous because the material of the electrode can have an influence on the growth of the nanowires.
  • the electrolyte distributor comprises a guide device for guiding a movement of the electrolyte distributor perpendicular to the outlet side.
  • the electrolyte distributor can be used particularly well for the galvanic growth of nanowires.
  • a body to be covered with nanowires can be arranged below the electrolyte distributor, a film can be applied to the surface of the body to be covered and the electrolyte distributor - guided by the guide device - can be applied to the film.
  • the guide device is preferably designed to interact with a counterpart that is arranged, for example, in a housing within which the electrolyte distributor can be used.
  • the housing is not part of the electrolyte manifold.
  • the guide device can consist of one or more guide rods that can be performed as a counterpart in the corresponding recordings.
  • the electrolyte distributor comprises a sponge which rests against the outlet side of the electrolyte distributor.
  • the sponge On its first side, the sponge can take up the electrolyte from the outlet side of the electrolyte distributor on its side opposite the first release the second side again, especially on a foil for galvanic growth of nanowires.
  • the delivery of the electrolyte can be evened out by the sponge.
  • Fig. 1 a cross-sectional view of an electrolyte distributor for an arrangement according to the Invention
  • FIG. 3 a flow chart of a method according to the invention for providing a plurality of nanowires on a surface using the arrangement from FIG. 2 with the electrolyte distributor from FIG. 1.
  • FIG. 1 shows an electrolyte distributor 1 with two inlets 2 a, 2 b and a large number of outlets 3.
  • the outlets 3 are arranged on an outlet side 4 of the electrolyte distributor 1.
  • the outlet side 4 is flat.
  • a first of the inlets 2a is connected to a first group 5a of the outlets 3.
  • a second of the inlets 2b is connected to a second group 5b of the outlets 3.
  • the groups 5a, 5b are different from one another.
  • the electrolyte distributor 1 has a distribution element 6 and a pre-distribution element 8.
  • the distribution element 6 has a respective distribution section 7a, 7b for each of the groups 5a, 5b of the outlets 3.
  • the inlets 2a, 2b are via the Vorverteilele element 8 with the corresponding distribution section 7a, 7b of the distribution element 6 and via the distribution sections 7a, 7b of the Distribution element 6 is connected to the corresponding group 5a, 5b of the outlets 3.
  • the second distribution section 7b is shown partially to the right of the first distribution section 7a and partially to the left of it in the cross-sectional view of FIG. 1. This is due to the cross-sectional representation.
  • the two parts of the second distribution section 7b shown are connected to one another outside the plane of the section.
  • the outlets are formed in a cover 9 of the electrolyte distributor 1.
  • the cover 9 is designed as an electrode 10, as a result of which the outlet side 4 is designed as the electrode 10.
  • the electrolyte distributor 1 comprises a guide device 11 for guiding a movement of the electrolyte distributor 1 perpendicular to the outlet side 4.
  • FIG. 2 shows an arrangement 12 for providing a multiplicity of nanowires 14 on a surface 15.
  • a body 19 with the surface 15 is shown. Neither the body 19 nor the surface 15 belong to the arrangement 12.
  • the arrangement 12 comprises an electrolyte distributor 1, which is designed as shown in FIG. 1 and also has a sponge 13 which is attached to the Outlet side 4 of the electrolyte distributor 1 is applied.
  • the electrolyte distributor 1 is shown in simplified form in FIG. 2. Only the electrode 10 on the outlet side 4, the guide device 11 and the sponge 13, which are each part of the electrolyte distributor 1, are shown.
  • the arrangement 12 further comprises a film 16 with a large number of continuous pores 17.
  • the film 16 is applied to the electrolyte distributor 1 in such a way that a liquid electrolyte can be delivered to the film 16 with the electrolyte distributor 1.
  • the film 16 is applied to the sponge 13 of the electrolyte distributor 1 for this purpose.
  • the electrode 10 is suitable for applying an electrical voltage between the liquid electrolyte and the surface 15, so that the nanowires 14 in the pores 17 of the film 16 can be grown from the liquid electrolyte onto the surface 15.
  • the voltage can be applied with a current and voltage source 18.
  • the electrolyte distributor 1 can be moved, guided by the guide device 11, perpendicular to the outlet side 4. Above the electrolyte distributor 1, receptacles 23 are shown, with which the guide device 11 interacts. The electrolyte distributor 1 can be pressed against the foil 16 with a predetermined pressure by means of a spring 22.
  • FIG. 3 shows a flow chart of a method for providing a large number of nanowires 14 on a surface 15. The method is described with reference to the reference symbols from FIGS. 1 and 2. The method comprises: a) providing the electrolyte distributor 1 from FIG.
  • the method can in particular be carried out with the arrangement from FIG. 2.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Powder Metallurgy (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

L'invention concerne un procédé de fourniture d'un grand nombre de nanofils (14) sur une surface (15), comprenant : a) la fourniture d'un distributeur d'électrolyte (1), b) la fourniture d'un film (16) ayant un grand nombre de pores continus (17), c) la disposition du film (16) entre la surface (15) et un côté sortie (4) du distributeur d'électrolyte (1), d) l'introduction d'un électrolyte liquide dans le distributeur d'électrolyte (1), de sorte que l'électrolyte liquide soit distribué sur le film (16) du côté sortie (4) du distributeur d'électrolyte (1), et e) l'application d'une tension électrique entre l'électrolyte liquide et la surface (15), de sorte que, dans les pores (17) du film (16), les nanofils (14) croissent et sortent de l'électrolyte liquide en surface (15).
EP21710472.8A 2020-03-18 2021-03-08 Croissance galvanique de nanofils Pending EP4121582A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020107514.6A DE102020107514A1 (de) 2020-03-18 2020-03-18 Galvanisches Wachstum von Nanodrähten
PCT/EP2021/055803 WO2021185619A1 (fr) 2020-03-18 2021-03-08 Croissance galvanique de nanofils

Publications (1)

Publication Number Publication Date
EP4121582A1 true EP4121582A1 (fr) 2023-01-25

Family

ID=74859936

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21710472.8A Pending EP4121582A1 (fr) 2020-03-18 2021-03-08 Croissance galvanique de nanofils

Country Status (7)

Country Link
EP (1) EP4121582A1 (fr)
JP (1) JP2023518077A (fr)
KR (1) KR20230019071A (fr)
CN (1) CN115698387A (fr)
DE (1) DE102020107514A1 (fr)
TW (1) TW202200847A (fr)
WO (1) WO2021185619A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021126435A1 (de) 2021-10-12 2023-04-13 Nanowired Gmbh Wachstum von Nanodrähten
WO2023202931A1 (fr) 2022-04-21 2023-10-26 Biotronik Se & Co. Kg Jonction à énergie réduite et automatisable au moyen d'un nanocâblage pour la mise en contact de composants électriques et mécaniques d'implants actifs et de surveillance

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1884578A1 (fr) * 2006-07-31 2008-02-06 MPG Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Méthode de fabrication d'une structure poreuse d'oxide d'aluminium auto-organisée, article nanoporeux, et nano-objet.
DE102017104906A1 (de) 2017-03-08 2018-09-13 Olav Birlem Anordnung und Verfahren zum Bereitstellen einer Vielzahl von Nanodrähten
EP3592697B1 (fr) * 2017-03-08 2022-09-14 NanoWired GmbH Dispositif et procédé de mise à disposition d'une pluralité de nanofils
DE102017104905A1 (de) 2017-03-08 2018-09-13 Olav Birlem Anordnung und Verfahren zum Bereitstellen einer Vielzahl von Nanodrähten sowie Galvanikkapsel

Also Published As

Publication number Publication date
WO2021185619A1 (fr) 2021-09-23
JP2023518077A (ja) 2023-04-27
KR20230019071A (ko) 2023-02-07
DE102020107514A1 (de) 2021-09-23
TW202200847A (zh) 2022-01-01
CN115698387A (zh) 2023-02-03

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