EP3912436B1 - Dispositif de traitement au plasma et procédé d'adaptation de la taille d'une surface d'appui du dispositif de traitement au plasma adapté à la taille de la surface à traiter - Google Patents

Dispositif de traitement au plasma et procédé d'adaptation de la taille d'une surface d'appui du dispositif de traitement au plasma adapté à la taille de la surface à traiter Download PDF

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Publication number
EP3912436B1
EP3912436B1 EP19835621.4A EP19835621A EP3912436B1 EP 3912436 B1 EP3912436 B1 EP 3912436B1 EP 19835621 A EP19835621 A EP 19835621A EP 3912436 B1 EP3912436 B1 EP 3912436B1
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Prior art keywords
electrode
size
electrode unit
plasma treatment
treated
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EP19835621.4A
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German (de)
English (en)
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EP3912436A1 (fr
Inventor
Dirk Wandke
Ronny Lettke
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Cinogy GmbH
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Cinogy GmbH
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/30—Medical applications
    • H05H2245/34—Skin treatments, e.g. disinfection or wound treatment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/60—Portable devices

Definitions

  • the invention relates to a plasma treatment arrangement for carrying out a dielectric barrier plasma discharge on a surface to be treated, with a flat electrode unit having a treatment side and a control unit which supplies at least one electrode of the electrode unit with a high-voltage alternating potential for plasma generation between the at least one electrode and supplies the required power to a counter-electrode that forms a reference potential, the at least one electrode that receives the high-voltage alternating potential being shielded with a flat dielectric at least on the treatment side, and the flat electrode unit being designed to adapt the size of its contact surface on the surface to be treated to the Reduce the size of the surface to be treated.
  • the invention also relates to a method for adapting the size of a contact surface of a flat electrode unit, which has one treatment side, of a plasma treatment arrangement for carrying out a dielectric barrier plasma discharge on a surface to be treated to the size of the surface to be treated, the at least one electrode of the electrode unit having a control unit is supplied with a high-voltage alternating potential for the power required for plasma generation between the at least one electrode and a counter-electrode forming a reference potential, the at least one electrode that receives the high-voltage alternating potential is shielded with a flat dielectric at least on the treatment side and the contact surface of the electrode unit is reduced to adapt to the size of the surface to be treated.
  • Plasma treatment arrangements for carrying out a dielectric barrier plasma discharge on a surface to be treated are known in numerous embodiments.
  • a prerequisite for the formation of a plasma on the surface to be treated is the supply of high-voltage alternating potentials to at least one electrode of the electrode unit plasma treatment arrangement.
  • the electrode unit can have one or more electrodes that are supplied with the alternating voltage potential, with either a ground electrode being provided or the surface to be treated serving as a counter-electrode if the material of the surface to be treated is sufficiently conductive.
  • An example of a counter-electrode forming a reference potential is the treatment of the human or animal body, which, as a "floating" counter-electrode, forms an only slightly fluctuating reference potential.
  • the electrode unit itself has a counter-electrode at reference potential, an alternating field is created between the at least one electrode driven by the high-voltage alternating potential and the counter-electrode, which leads to plasma formation on the surface of the electrode unit.
  • the plasma treatment that can be achieved in this way is less intensive than when the surface to be treated is used as a counter electrode.
  • the bearing surface can be provided with spacers in order to define a gas space or air space for the formation of the plasma between the surface to be treated and the dielectric shielding the electrode.
  • an electrode unit which consists of a spirally wound narrow strip in which at least one electrode extends in the longitudinal direction of the strip.
  • the reduction in size of the essentially circular contact surface is achieved by shortening the spirally wound strip by cutting off a strip length forming the outer turn(s).
  • the remaining electrode unit is contacted at the cut end so that it is safe to touch.
  • a similar arrangement is through DE 10 2017 104 852 A1 known, in which the spiral-shaped strip can form a square or rectangular electrode unit and is provided with predetermined breaking points at which the strip length can also be shortened by tearing it off.
  • the contact-safe contacting of the strip takes place at the tear-off point.
  • the DE 10 2017 111 902 A1 discloses a support arrangement for generating a dielectric barrier plasma discharge.
  • the bearing surface consists of a large number of sections connected to one another, which can be separated at a corresponding predetermined separating line.
  • the US2015/157870A1 discloses an arrangement in which plasma is generated between electrodes, the plasma field being allowed to exit through holes in one of the electrodes to effect surface treatment.
  • the contact surface is unchangeable.
  • the WO 216/183672 A1 discloses a blast furnace intended to be heated by means of an electrode protruding into the furnace.
  • a measuring device is provided, which is designed to determine the length of the electrode through the reflections of electromagnetic signals.
  • the WO 2018/093261 A1 discloses an electrode arrangement for generating a dielectric barrier plasma, the electrode arrangement having a high-voltage electrode and a reference electrode mentioned there.
  • the aim of this arrangement should be to neutralize the electric field that occurs during the plasma treatment and to reduce the electromagnetic radiation. A reduction of a bearing surface is not intended.
  • the DE 10 2015 118 372 A1 also discloses an electrode arrangement for generating a dielectric barrier plasma, in which case an electrode is said to be designed in the form of a create. A reduction of a bearing surface is not provided here either.
  • One problem with the electrode units that can be reduced in size is that after the reduction in the contact area of the electrode unit, the area output has to be adjusted manually and depends on the experience of the operator.
  • the invention is therefore based on the object of enabling improved adaptation of the surface power even in the case of electrode units that can be reduced in size.
  • a plasma treatment arrangement of the type mentioned at the outset is characterized according to the invention in that the control unit includes a device for determining the size of the adapted contact surface and a control device for setting the power to be delivered to the at least one electrode as a function of the determined size of the contact surface having.
  • control unit Determines the size of the reduced surface area and accordingly the power to be delivered to the at least one electrode is set as a function of the determined size of the contact surface.
  • the control unit is designed with a device for determining the size of the adapted contact surface and with a control device for setting the power to be delivered accordingly to the at least one electrode, so that the electrical power required for plasma generation can be adapted to the contact surface of the electrode unit that is now present it is possible that the strength of the plasma per area is approximately the same for all the contact areas that have been set. In this way it is possible to prevent an effective plasma from being produced due to insufficient electrical power or damage to the surface to be treated occurring due to too strong a plasma, which could lead to painful consequences, in particular on body surfaces.
  • the control unit is preferably designed and set up in such a way that the size of the contact surface of the electrode unit is determined after the electrode unit has been connected to the control unit, in particular after it has been functionally connected to the control unit.
  • the size of the contact surface can be determined in a number of ways, contact surface always meaning the effective contact surface of the electrode unit.
  • the device for determining the size of the contact surface can be a Length detection arrangement be of the strip.
  • an electrical test signal can be sent to the electrode by the control unit, which is coupled into the electrode with as little loss as possible at the first end and is reflected at the other end, the second end. In this way, a wave formed at the input frequency was superimposed on the electrode with a corresponding reflected wave.
  • the control device therefore requires a frequency generator with which the respective frequency or wavelength can be adjusted continuously. What is also needed is a detector of the electrical signal to detect (initial) extinction.
  • the control unit must be able to read the frequency or the wavelength at which the cancellation took place.
  • the electrical parameters can be adjusted in accordance with the determined length of the strip and the size of the contact surface thus determined, in order to achieve as constant a surface power as possible for the formation of the plasma.
  • control device it is possible, starting from the control device, to capture the reduced electrode unit with a camera and to determine the size of the reduced electrode unit with a corresponding image evaluation and then to adjust the power supplied by the control unit.
  • the electrode unit consists of a plurality of sections with electrodes of the same structure, between which there are predetermined separating lines, so that the contact surface is reduced by separating one or more sections
  • the sections can have different codes, which are read by the control unit with a reading detector are readable.
  • the codes can be designed in any form, for example mechanically in the form of elevations or depressions, optically in the form of barcodes, QR codes, etc., magnetically with permanent magnets or electronically.
  • the use of transponders in the sections is particularly suitable for electronic training.
  • a first embodiment of a plasma treatment arrangement according to the invention is in the Figures 1 to 5 shown.
  • An electrode unit 4 is connected to a housing 1 that is closed so that it is safe to touch and consists of a lower housing part 2 and an upper housing part 3, thereby producing an electrical contact.
  • the electrode unit 4 consists of essentially identical sections 5 which are connected to one another via predetermined separating lines 6 .
  • the sections 5 are flat sections which are formed on their upper side and underside by a dielectric 7 which has through-openings 8 in the embodiment shown.
  • the sections 5 are rectangular in design and have flat adhesive tabs 10 on their longitudinal edges 9, which are perpendicular to the predetermined dividing lines 6, with which the electrode unit 4 is attached to the surface to be treated, for example the skin of a human or animal body can.
  • the section 5 furthest away from the housing 1 is provided with a further adhesive tab 10a running parallel to the predetermined separating lines 6 .
  • FIG. 2 shows the housing 1 with a removed upper housing part 3, so that only the lower housing part is visible.
  • a control unit 11 which, via two high-voltage coils 12a, 12b, introduces two high-voltage signals into the electrode unit 4 via associated lines 13a, 13b.
  • a detection device 14 with which an electrical signal can be routed to at least one of the lines 13a, 13b as long as no high-voltage signal is routed via this line 13a, 13b.
  • FIG. 1 next to upright side walls of the lower housing part 2, screw receptacles 15 can be seen, via which the upper housing part 3 can be screwed onto the lower housing part.
  • FIG 3 clarifies a plan view of the arrangement in the lower housing part 2 and a horizontal section through the electrode unit 4.
  • a voltage supply 16 can be connected to the housing 1 and supplies the control unit 11 in the housing 1 with voltage.
  • the control unit contains a microcontroller 17 which generates high-frequency control pulses which are processed in a signal-shaping stage 18 in such a way that high-frequency pulse trains are present at the outputs of the two high-voltage coils 12a, 12b, each of which has a high-frequency oscillation with a strongly damped amplitude.
  • the pulse repetition frequency is usually between 1 kHz and 20 MHz.
  • figure 3 shows schematically that the output signals of the high-voltage coils 12a, 12b, which are secondary coils of a high-voltage transformer, are each connected to a sub-electrode 19a, 19b of an electrode 19.
  • the sub-electrodes extend mirror-symmetrically to a center line 20 of the sections 5 in the longitudinal direction of the electrode unit 4.
  • the width of the sub-electrodes 19a, 19b is reduced in steps in the area of the predetermined separating lines 6.
  • the partial electrodes 19a, 19b are provided with - here circular - openings 21, which are aligned with the through-openings 8 of the dielectric, but have a larger diameter, so that the through-openings 8 of the dielectric extend through the electrode 19 and form a through-channel which also a wall formed by the dielectric 7 at the level of the electrode 19 having. This ensures that a fluid, in particular a liquid, can be conducted through the passage openings without the liquid coming into contact with the electrode 19 .
  • the electrode unit 4 is therefore also suitable for placement on a wound on human or animal skin, with wound secretion being able to be discharged through the passage openings.
  • the electrode 19, which--as shown--can be formed by two or more sub-electrodes 19a, 19b, is embedded in the dielectric 7 and is therefore shielded so that it cannot be touched, in particular towards the surface to be treated.
  • the supply of the electrode with the high-frequency high-voltage potentials leads to the formation of a high-voltage field between the electrode 19 and the surface to be treated, which acts as a counter-electrode (ground electrode).
  • the two sub-electrodes 19a and 19b are supplied with opposite high-voltage signals, which lead to a sum signal of zero.
  • the electrode 19 is formed with two sub-electrodes, it is not absolutely necessary for the implementation of the invention. This can also be implemented with a one-piece electrode 19 .
  • the sub-electrode is also possible for the sub-electrode to be controlled in such a way that one sub-electrode receives a high-frequency AC voltage signal, while the other electrode forms a counter-electrode as a ground electrode.
  • This embodiment is expedient if the surface to be treated is not suitable as a counter-electrode due to the material of the body having the surface is, for example, because the required conductivity is lacking.
  • the sub-electrodes do not necessarily have to be as in figure 3 shown, be arranged side by side, but can also be layered one below the other in an arrangement known per se, so that a dielectric layer comes to lie between the two electrodes.
  • figure 4 shows an arrangement in which the electrode unit 4 is formed by only two sections 5 attached to one another, so that the electrode unit 4 is opposite to the electrode unit 4 from figure 3 forms a significantly smaller contact surface (not shown) of the surface to be treated.
  • the size of the contact surface is determined by means of the detection device 14 when the electrode unit 4 is connected to the control unit 11 in the housing 1.
  • the detection device 14 directs an electrical signal to at least one of the sub-electrodes 19a, 19b.
  • the electrical signal of the detection device 14 is reflected at the free end of the sub-electrodes 19a, 19b, that is to say at the section 5 which is removed at the end, so that the emitted signal is superimposed on the reflected signal.
  • the detection device 14 can be designed in such a way that it emits a continuous harmonic electrical signal whose frequency (wavelength) can be adjusted. The frequency is then adjusted in such a way that an initial cancellation of the sum signal can be detected. Extinction takes place when the length of the electrode unit 4 corresponds to a quarter wavelength. The length of the electrode unit 4 can thus be determined via the set wavelength at which the sum signal is extinguished for the first time. Since the length of the electrode unit 4 is proportional to the contact surface in the electrode unit 4 shown, the microcontroller 17 as the control device of the control unit 11 can set the amplitude of the control signal - and thus the electrical power available for the plasma field - as a function of the size of the contact surface will.
  • the electrode unit 4 of figure 4 with another electric Power supplied as the electrode unit 4 according to figure 3 Accordingly, the electrode unit 4 of figure 4 with another electric Power supplied as the electrode unit 4 according to figure 3 .
  • the for the small electrode unit 4 according to figure 4 resulting arrangement is in figure 5 illustrated in a perspective view.
  • the external voltage supply 16 shown is not mandatory. It is also possible to set up a self-sufficient power supply in the housing, which is fed from rechargeable or non-rechargeable batteries, the high-frequency AC voltage signals being generated in a known manner by a chopper or by a pulsed-type oscillating circuit. Furthermore, it is possible to already feed high-voltage signals to the control unit 11, although this requires the use of high-voltage-safe lines.
  • the electrode unit 40 again consists of essentially the same sections 50, which can be constructed in the same way as the sections 5 of the first embodiment.
  • the sections 50 each have a different mechanical coding 22 on their respective front edges, which may lie on a predetermined dividing line 6 .
  • the mechanical coding results from the presence or absence of an increase at four predetermined positions of the front edge of the sections 50.
  • These mechanical codings 22 interact with the feeler lever 23 in the housing 1.
  • the position of the sensing lever is recognized by the detection device 14, which can thus determine which section 50 is in contact with the control unit 11 in the housing 1.
  • the electrode unit 40 was shortened by separating at least one section 50 at the end of the electrode unit 4 which is opposite the section 50 with the adhesive tab 10a on the end face. Thus, by identifying the portion 50 that contacts the control unit 11 of the housing 1, the length of the remaining electrode unit 40 can be determined. Accordingly, the control unit 11 controls the electric power that is fed to the electrode 19 .
  • the electrode 19 is shown as a single electrode. Of course, in this embodiment too, an electrode 19 can be formed from two or more sub-electrodes 19a, 19b.
  • the feeler lever 23 interacting with the mechanical codes 22 are like that Figures 7 to 9 illustrate two-armed levers which are rotatably mounted on a common axis and have a downwardly bent probe tip 25 directed towards the electrode unit 40 .
  • the probe tip 25 is pressed down onto the surface of the section 50 pushed into the housing 1 by a compression spring 26 acting from below beyond the axis 24 .
  • the raising of the probe tips 25 - and thus the change in the position of the probe lever 23 can be detected in a conventional manner, for example by making contact on the probe tip 25 remote lever arm. It is also possible to detect using a light barrier 27, as shown in figure 8 is indicated. If only one light barrier is present, the interruption of the light beam by one of the levers can also indicate that contact has taken place between the control unit 11 of the housing 1 and the electrode unit 4 in order to carry out the size determination at this point in time before a high-voltage signal is applied to the electrode 19 is conducted.
  • the determination of the size of the electrode unit 4 during or immediately after the contacting of the electrode unit 4 with the control unit 11 on the housing 1 is essential within the scope of the present invention.
  • the electrode unit 4 is in the form of a spirally wound strip formed which can be cut off at any point in order to reduce the usable contact area of the electrode unit 4.
  • the end of the strip, from which a piece has been cut off, is inserted into a receiving slot of the housing 1 and can be contacted there by means of a rocker 28, for example by a metal cutting contact of the rocker cutting through the dielectric 7 and making conductive contact with the electrode 19 within the dielectric 7 produces.
  • the rocker can be locked using a slide 29 so that a high-voltage safe connection is possible.
  • the case 1 may be provided with a control unit 11 in the same manner as the case 1 in the above embodiments.
  • the configuration of the electrode unit 4 shown as an example is not a prerequisite for the third embodiment, since other electrode shapes, for example with a linearly straight strip, are also possible as the electrode unit.
  • a camera 30 is provided in the housing 1 as a detection device 14 and is aimed at the surface of the electrode unit 4 so that the size of the connected electrode unit 4 can be determined by means of an image evaluation.
  • the electrode unit 4 can be provided with spacer projections 31 molded into the dielectric 7 on its contact surface towards the surface to be treated, which, when it rests on the surface to be treated, keeps gas spaces free in which the dielectrically impeded plasma can form.
  • the figures 12 and 13 illustrate the arrangement of the camera 30 above the top of the electrode unit 4.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrotherapy Devices (AREA)
  • Power Engineering (AREA)

Claims (10)

  1. Dispositif de traitement au plasma pour réaliser une décharge de plasma à barrière diélectrique sur une surface à traiter, comprenant une unité d'électrodes (4) plane présentant un côté de traitement et une unité de commande (11) qui fournit à au moins une électrode (19) de l'unité d'électrodes (4) un potentiel alternatif haute tension pour une puissance nécessaire à la production de plasma entre ladite au moins une électrode (19) et une contre-électrode formant un potentiel de référence,
    dans lequel ladite au moins une électrode (19) recevant le potentiel alternatif haute tension est protégée au moins vers le côté de traitement par un diélectrique plan (7), et l'unité d'électrodes plane est réalisée pour réduire mécaniquement la taille de sa surface d'appui sur la surface à traiter pour l'adapter à la taille de la surface à traiter, caractérisé en ce que l'unité de commande (11) comprend un moyen (14) pour déterminer la taille de la surface d'appui adaptée et un moyen de commande pour régler la puissance à délivrer à ladite au moins une électrode (19) en fonction de la taille déterminée de la surface d'appui.
  2. Dispositif de traitement selon la revendication 1, caractérisé en ce que l'unité d'électrodes (4) plane est réalisée sous la forme d'une bande avec au moins une électrode de largeur prédéfinie s'étendant dans le sens longitudinal entre une première extrémité et une deuxième extrémité, la longueur de la bande déterminant la taille de la surface d'appui, et en ce que le moyen de détermination de la taille de la surface d'appui comprend un ensemble de détection (14) pour détecter la longueur de la bande.
  3. Dispositif de traitement au plasma selon la revendication 2, caractérisé en ce que l'ensemble de détection (14) est réalisé pour déterminer la longueur de la bande à l'aide d'un signal électrique de test transporté sur ladite au moins une électrode.
  4. Dispositif de traitement au plasma selon la revendication 3, caractérisé en ce que l'électrode (19) est réalisée pour réfléchir à la deuxième extrémité le signal électrique de test injecté à la première extrémité.
  5. Dispositif de traitement au plasma selon la revendication 4, caractérisé en ce que l'ensemble de détection (14) comprend un générateur de fréquence qui est conçu pour générer un signal électrique de test et qui comprend un moyen de réglage pour régler en continu la fréquence du signal de test et un moyen de détection pour déterminer l'amplitude du signal de test.
  6. Dispositif de traitement au plasma selon la revendication 5, caractérisé en ce que le générateur de fréquence est réalisé pour générer un signal électrique de test sous la forme d'ondes harmoniques continues.
  7. Dispositif de traitement au plasma selon la revendication 1, caractérisé en ce que l'unité de commande (11) présente un ensemble de caméra avec au moins une caméra (30) et un moyen d'évaluation pour déterminer la longueur et/ou la surface de l'unité d'électrodes.
  8. Dispositif de traitement au plasma selon la revendication 1, caractérisé en ce que l'unité d'électrodes (4, 40) est constituée d'une pluralité de sections (5, 50) ayant des électrodes de même structure, entre lesquelles existent des lignes de séparation de consigne (6), de sorte que la réduction de la surface d'appui s'effectue par séparation d'une ou de plusieurs sections (5, 50).
  9. Dispositif de traitement au plasma selon la revendication 8, caractérisé en ce que les sections (50) portent des codages différents (22) pour lesquels l'unité de commande comprend un détecteur de lecture, et en ce que la connexion de l'unité d'électrodes (4) à l'unité de commande (11) est prévue sur la section (50) dont une ou plusieurs sections ont été séparées.
  10. Procédé pour adapter à la taille d'une surface à traiter la taille d'une surface d'appui d'une unité d'électrodes (4) plane, présentant un côté de traitement, d'un dispositif de traitement au plasma pour réaliser une décharge de plasma à barrière diélectrique sur la surface à traiter,
    dans lequel un potentiel alternatif haute tension pour une puissance nécessaire à la production de plasma entre ladite au moins une électrode (19) et une contre-électrode formant un potentiel de référence est amené à ladite au moins une électrode (19) de l'unité d'électrodes (4) à l'aide d'une unité de commande (11),
    ladite au moins une électrode (19) recevant le potentiel alternatif haute tension est protégée, au moins vers le côté de traitement, par un diélectrique plan (7), et
    la surface d'appui de l'unité d'électrodes (4) est réduite mécaniquement pour l'adapter à la taille de la surface à traiter,
    caractérisé en ce qu'à l'aide de l'unité de commande (11), la taille de la surface d'appui réduite mécaniquement est déterminée et la puissance à délivrer à ladite au moins une électrode (19) est réglée en correspondance en fonction de la taille déterminée de la surface d'appui.
EP19835621.4A 2019-01-16 2019-12-16 Dispositif de traitement au plasma et procédé d'adaptation de la taille d'une surface d'appui du dispositif de traitement au plasma adapté à la taille de la surface à traiter Active EP3912436B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019101063.2A DE102019101063B4 (de) 2019-01-16 2019-01-16 Plasma-Behandlungsanordnung und Verfahren zur Anpassung der Größe einer Auflagefläche der Plasma-Behandlungsanordnung an die Größe der zu behandelnden Oberfläche
PCT/DE2019/101096 WO2020147880A1 (fr) 2019-01-16 2019-12-16 Dispositif de traitement au plasma et procédé d'adaptation de la taille d'une surface d'appui du dispositif de traitement au plasma adapté à la taille de la surface à traiter

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EP3912436A1 EP3912436A1 (fr) 2021-11-24
EP3912436B1 true EP3912436B1 (fr) 2022-12-14

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US (1) US20220172929A1 (fr)
EP (1) EP3912436B1 (fr)
JP (1) JP7482534B2 (fr)
CN (1) CN113491173B (fr)
DE (1) DE102019101063B4 (fr)
ES (1) ES2939502T3 (fr)
WO (1) WO2020147880A1 (fr)

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DE102016118569A1 (de) * 2016-09-30 2018-04-05 Cinogy Gmbh Elektrodenanordnung zur Ausbildung einer dielektrisch behinderten Plasmaentladung

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JP2010277902A (ja) 2009-05-29 2010-12-09 Ngk Insulators Ltd プラズマ処理装置
DE102010044252B4 (de) * 2010-09-02 2014-03-27 Reinhausen Plasma Gmbh Vorrichtung und Verfahren zur Erzeugung einer Barriereentladung in einem Gasstrom
DE102011105713B4 (de) 2011-06-23 2014-06-05 Cinogy Gmbh Elektrodenanordnung für eine dielektrisch behinderte Gasentladung
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DE102018105511B4 (de) * 2018-03-09 2019-10-17 Eberhard Karls Universität Tübingen Medizinische Fakultät Vorrichtung zur Erzeugung eines Plasmas zur Wundbehandlung sowie System mit einer solchen Vorrichtung

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CN113491173A (zh) 2021-10-08
DE102019101063A1 (de) 2020-07-16
WO2020147880A1 (fr) 2020-07-23
CN113491173B (zh) 2024-03-22
ES2939502T3 (es) 2023-04-24
EP3912436A1 (fr) 2021-11-24
JP7482534B2 (ja) 2024-05-14
JP2022517814A (ja) 2022-03-10
DE102019101063B4 (de) 2021-02-25
US20220172929A1 (en) 2022-06-02

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