EP2666340A2 - Source de décharge coplanaire diélectrique pour un traitement de surface sous pression atmosphérique - Google Patents

Source de décharge coplanaire diélectrique pour un traitement de surface sous pression atmosphérique

Info

Publication number
EP2666340A2
EP2666340A2 EP11852212.7A EP11852212A EP2666340A2 EP 2666340 A2 EP2666340 A2 EP 2666340A2 EP 11852212 A EP11852212 A EP 11852212A EP 2666340 A2 EP2666340 A2 EP 2666340A2
Authority
EP
European Patent Office
Prior art keywords
discharge source
grooves
electrodes
coplanar discharge
coplanar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11852212.7A
Other languages
German (de)
English (en)
Other versions
EP2666340B1 (fr
Inventor
Wolfgang Viöl
Dennis Hoffmeister
Roland Damm
Stephan Wieneke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochschule fuer Angewandte Wissenschaft und Kunst Hildesheim Holzminden Gottingen
Original Assignee
Hochschule fuer Angewandte Wissenschaft und Kunst Hildesheim Holzminden Gottingen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochschule fuer Angewandte Wissenschaft und Kunst Hildesheim Holzminden Gottingen filed Critical Hochschule fuer Angewandte Wissenschaft und Kunst Hildesheim Holzminden Gottingen
Publication of EP2666340A2 publication Critical patent/EP2666340A2/fr
Application granted granted Critical
Publication of EP2666340B1 publication Critical patent/EP2666340B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric

Definitions

  • the invention relates to a coplanar dielectric discharge source having two elongate electrodes which have a common dielectric shield and which are parallel to each other and parallel to a free surface of the shield.
  • a discharge source typically provides a plasma due to an electrical discharge through a gas.
  • the gas discharge is dielectrically impeded.
  • Such a dielectric barrier often allows the gas discharge to be ignited and maintained at atmospheric pressure in a working gas or air.
  • other reactive species are generated by a gas discharge, which are not necessarily to be described as plasma. Therefore, it is deliberately not restricted to a plasma source.
  • two electrodes are not diametrically opposed by gas volume, but both electrodes are under the same surface of a dielectric.
  • an object with a surface to be treated which is brought into the vicinity of the surface of the dielectric in front of the electrodes, does not act as a counterelectrode.
  • a surface opposite the free surface of the dielectric is much less bombarded with ions than one with a surface of a surface acting as a counter electrode of the gas discharge to a plasma or generally to be treated with reactive species from a gas discharge.
  • a coplanar dielectric discharge source therefore lends itself to surface treatment under atmospheric pressure even from sensitive surfaces, such as those of biological material, including human skin.
  • the treatment of biological materials by means of a dielectric discharge source at atmospheric pressure is z. B. from DE 103 24 926 B3 basically known.
  • a dielectric discharge source with two elongate electrodes which run parallel to each other and are each arranged within a hollow fiber of dielectric material.
  • the two electrodes function as an electrode or counter electrode for a dielectrically impeded gas discharge which forms over the dielectric of the hollow fibers.
  • EP 1 534 099 A1 it is known to pretreat an electrically poorly conductive surface by means of a dielectrically impeded discharge under atmospheric pressure for a coating.
  • this surface is that of a finger or toe nail.
  • WO 2009/140509 A1 discloses a microchannel plasma apparatus in which plasma-driving electrodes are embedded in a flat body made of an oxide parallel to one another. Parallel to the electrodes and between them, microchannels are inserted into a surface of the molding. The two adjacent to a microchannel electrodes, which are isolated from the channel by the oxide, each individually be driven to generate plasma in the channel.
  • a planar electrode is provided in the oxide shaped body, and a counterelectrode faces the parallel microchannels in the one surface of the molded body and, in turn, opposite the channels, which are electrically insulated.
  • the invention has for its object to provide a dielectric Koplanarentladungsario that is particularly well suited for forming a mobile hand-held device for surface treatments at atmospheric pressure, in particular low-stimulus planar treatments of biological material, but also simple Lacktechnischsvornessen of electrically poorly conductive substrates such. As plastics to perform.
  • the object of the invention is achieved by a coplanar dielectric discharge source having the features of independent claim 1.
  • the claims 2 to 11 relate to preferred embodiments of the new Koplanarentladungs provoke.
  • Claims 12 and 13 are directed to specific uses of the new coplanar discharge source.
  • the shield has grooves in the free surface transverse to the electrodes.
  • the course of the grooves transversely to the electrodes means that the grooves are not aligned parallel to the grooves and extend as short a path as possible from one electrode to the other electrode.
  • the grooves can also run diagonally to the electrodes; which is not preferred.
  • the grooves or grooves result in a modulation of the electric field across the free surface which facilitates the ignition of the gas discharge over the entire area of the grooved free surface.
  • the gas discharge and thus the resulting plasma or other reactive species are distributed evenly over the free surface of the dielectric and thus allow a uniform large-scale treatment.
  • the grooves prevent in the case of placing the free surface of the dielectric on a surface to be treated a full-surface investment of the free surface on the surface.
  • the grooves still form channels with a defined free cross section, in which the gas discharge can continue to take place.
  • the grooves in the free surface of the dielectric in the new coplanar discharge source extend at least from one of the electrodes to the other electrode. It is preferred if the grooves extend across the full width of the shielding transversely to the main direction of extension of the electrodes.
  • the grooves run parallel to one another and thus in the projection onto the free surface perpendicular to the electrodes. This implies that the grooves have a straight course.
  • a lateral spacing of the grooves is typically 0.5 to 2 times the width of the grooves. It is preferred if the lateral spacing of the grooves is the same size as the width of the grooves.
  • the width of the grooves is in a typical range of 0.2 to 3 mm, preferably a width of 0.8 to 1, 2 mm, ie about 1 mm.
  • the depth of the grooves is typically in a range of 0.2 to 2 mm. Preferably, the depth is 0.3 to 0.7 mm, ie about 0.5 mm.
  • the grooves generally have a rectangular free cross section; but also a slightly trapezoidal free cross-section is possible. Less preferred is a triangular or semicircular free cross section of the grooves.
  • the electrodes in the new coplanar discharge source preferably run in a straight line at a distance of 2 to 20 mm from each other and also to the free surface of the dielectric. These two distances are particularly preferably 8 to 12 mm, ie about 1 cm.
  • the electrodes are regularly each longer than their lateral distance, preferably by a multiple.
  • the prerequisites for generating a defined dielectrically impeded discharge over the free surface are particularly good in the case of the new coplanar discharge source. They therefore make it possible to operate an AC voltage source for applying the AC voltage required for the gas discharge between the two electrodes also from batteries or other accumulators.
  • the new coplanar discharge source can have a pulsed AC voltage source which applies a bipolar AC voltage of high-frequency pulse packets in the form of decaying sinusoidal oscillations between the electrodes.
  • the natural frequency of these sinusoidal oscillations may be in a typical range of 10 kHz to 200 kHz, for example about 40 kHz, while a repetition frequency of the pulse packets is in a typical range of 200 Hz to 10 kHz and can also be varied within this range to be optimal Conditions provided by the applied bipolar alternating high voltage for each desired treatment of a surface at atmospheric pressure.
  • the amplitude of the alternating high voltage is typically in the kilovolt range. It is about 35 kV at the beginning of the pulse packets.
  • An AC voltage source with the electrical parameters defined above can easily be part of a battery-powered or accumulator-operated hand-held device, so that the new coplanar discharge source can be used simply and mobile.
  • Preferred uses of the new coplanar discharge source are the treatment of biological material, particularly human skin, and the paint pretreatment of surfaces of poorly electrically conductive materials, particularly plastics such as plastic bumpers and plastic housings, particularly motor vehicles, in preparation for repainting.
  • Fig. 1 is a cross-section through the basic structure of the new Koplanarentladungs- source.
  • Fig. 2 is a longitudinal section through the basic structure of FIG. 1.
  • the new coplanar discharge source 10 which is shown in FIGS. 1 and 2, has two elongate electrodes 1 arranged parallel to each other at a fixed distance.
  • the electrodes 1 are embedded in a solid 1 1 of a dielectric 2, which forms a dielectric shield 12 of the electrodes.
  • a free surface 13 of the shield 12 which is opposite to an object 4 with a surface 14 to be treated, 1 grooves 5 are provided transversely to the course of the electrodes.
  • the grooves 5 extend over the entire width of the shield 12 parallel to each other. Their width is about the same as their lateral distance and is in each case about 1 mm.
  • the depth of the grooves 5 is at a rectangular free cross section of the grooves 5 is about 0.5 mm.
  • the width and depth of the grooves 5 are not shown to scale in FIG. This also applies to the distance of the electrodes 1 from each other and to the surface 13, which is in each case about 1 cm.
  • the grooves 5 deform the electric field across the free surface 13 upon application of a voltage between the electrodes 1 to an AC voltage source 15 (shown only in FIG. 1). This deformation of the electric field leads to a lighter ignition of the gas discharge in the region of the grooves 5 and prevents extinction of the gas discharge even when the coplanar discharge source 10 with the free surface 13 on the surface 14 of treating object 4 is placed.
  • an electrical discharge is also formed, which is hindered by the dielectric 2, but primarily in the regions between the regions of the surface 13 in front of both electrodes and the directly opposite regions of the surface 14 of the object 4.
  • the AC voltage source applies a pulsed alternating high voltage between the two electrodes 1.
  • the maximum amplitude of this alternating high voltage is 35 kV.
  • the alternating high voltage consists of pulse clocks whose repetition frequency can be varied between 200 Hz and 10 kHz.
  • the waveform of the individual pulse packets is a decaying sine wave with a natural frequency of about 40 kHz.
  • the new coplanar discharge source is also particularly suitable for low-irritation treatment of biological material, such as human skin, because in principle no relevant current flows through the surface to be treated and no relevant ion bombardment also takes place. Rather, a sliding discharge 3 occurs, which propagates from the grooves 5 over the entire free surface 15 of the dielectric shield 12 in front of the electrodes 1.
  • the new coplanar discharge source is in a paint pretreatment of surfaces of poorly electrically conductive materials, such as plastics.
  • the coplanar discharge source may be used to treat plastic bumpers or plastic rearview mirror housings or other plastic parts of automobiles before repainting.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

La présente invention concerne une source de décharge coplanaire diélectrique (10) pour un traitement de surface sous pression atmosphérique, laquelle source comprend deux électrodes allongées (1) qui présentent un blindage commun (12) en matériau diélectrique (2) et qui s'étendent parallèlement l'une à l'autre et parallèlement à une surface libre (13) du blindage (12). Selon l'invention, le blindage (12) présente dans cette surface libre (13) des rainures (5) qui s'étendent de manière transversale aux électrodes (1).
EP11852212.7A 2011-01-21 2011-12-01 Source de décharge coplanaire diélectrique pour un traitement de surface sous pression atmosphérique Not-in-force EP2666340B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011000261A DE102011000261A1 (de) 2011-01-21 2011-01-21 Dielektrische Koplanarentladungsquelle für eine Oberflächenbehandlung unter Atmosphärendruck
PCT/EP2011/071463 WO2012097904A2 (fr) 2011-01-21 2011-12-01 Source de décharge coplanaire diélectrique pour un traitement de surface sous pression atmosphérique

Publications (2)

Publication Number Publication Date
EP2666340A2 true EP2666340A2 (fr) 2013-11-27
EP2666340B1 EP2666340B1 (fr) 2016-12-14

Family

ID=46320859

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11852212.7A Not-in-force EP2666340B1 (fr) 2011-01-21 2011-12-01 Source de décharge coplanaire diélectrique pour un traitement de surface sous pression atmosphérique

Country Status (3)

Country Link
EP (1) EP2666340B1 (fr)
DE (1) DE102011000261A1 (fr)
WO (1) WO2012097904A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013112316A1 (de) * 2013-11-08 2015-05-13 Epcos Ag Piezoelektrischer Transformator und Gegenelektrode
DE102015108884A1 (de) 2015-06-04 2016-12-08 Hochschule für Angewandte Wissenschaft und Kunst - Hildesheim/Holzminden/Göttingen Vorrichtung zur Plasmabehandlung von insbesondere bandförmigen Objekten
DE102016118569A1 (de) * 2016-09-30 2018-04-05 Cinogy Gmbh Elektrodenanordnung zur Ausbildung einer dielektrisch behinderten Plasmaentladung
CN109831866B (zh) * 2017-11-23 2023-10-20 核工业西南物理研究院 一种双环电极共面放电等离子体发生装置
WO2021151123A1 (fr) 2020-01-21 2021-07-29 Luong Thi Hong Lien Unité de génération de plasma et dispositif à plasma portatif contenant celle-ci
DE102021124377A1 (de) * 2021-09-21 2023-03-23 Cinogy Gmbh Elektrodenanordnung für eine Plasmaentladung

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DE19717698A1 (de) * 1997-04-26 1998-10-29 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Reinigung von Aktivierung von elektrischen Leiterbahnen und Platinenoberflächen
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
US6441553B1 (en) * 1999-02-01 2002-08-27 Sigma Technologies International, Inc. Electrode for glow-discharge atmospheric-pressure plasma treatment
KR100464902B1 (ko) * 2001-02-12 2005-01-05 (주)에스이 플라즈마 대기압에서 저온 플라즈마를 발생시키는 장치
DE10238931C1 (de) 2002-08-24 2003-07-31 Fh Hildesheim Holzminden Goe Verfahren und Vorrichtung zur Vorbereitung eines Finger- oder Fußnagels für eine Beschichtung, insbesondere Lackierung
DE10324926B3 (de) 2003-06-03 2005-02-03 Fachhochschule Hildesheim/Holzminden/Göttingen Vorrichtung zur Behandlung eines lebende Zellen enthaltenden biologischen Materials mit einem durch eine Gasentladung erzeugten Plasma
US20070119828A1 (en) * 2003-12-08 2007-05-31 Ngk Insulators , Ltd. Plasma generating electrode, its manufacturing method, and plasma reactor
DE102006011312B4 (de) * 2006-03-11 2010-04-15 Fachhochschule Hildesheim/Holzminden/Göttingen - Körperschaft des öffentlichen Rechts - Vorrichtung zur Plasmabehandlung unter Atmosphärendruck
US20080179286A1 (en) * 2007-01-29 2008-07-31 Igor Murokh Dielectric plasma chamber apparatus and method with exterior electrodes
DE102007030915A1 (de) 2007-07-03 2009-01-22 Cinogy Gmbh Vorrichtung zur Behandlung von Oberflächen mit einem mittels einer Elektrode über ein Feststoff-Dielektrikum durch eine dielektrische behinderte Gasentladung erzeugten Plasma
US8890409B2 (en) * 2008-05-14 2014-11-18 The Board Of Trustees Of The University Of Illnois Microcavity and microchannel plasma device arrays in a single, unitary sheet
EP2180768A1 (fr) * 2008-10-23 2010-04-28 TNO Nederlandse Organisatie voor Toegepast Wetenschappelijk Onderzoek Appareil et procédé pour traiter un objet

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See references of WO2012097904A2 *

Also Published As

Publication number Publication date
EP2666340B1 (fr) 2016-12-14
DE102011000261A1 (de) 2012-07-26
WO2012097904A2 (fr) 2012-07-26
WO2012097904A3 (fr) 2013-07-18

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