EP3830394A1 - Dichtungsanordnung - Google Patents

Dichtungsanordnung

Info

Publication number
EP3830394A1
EP3830394A1 EP19744825.1A EP19744825A EP3830394A1 EP 3830394 A1 EP3830394 A1 EP 3830394A1 EP 19744825 A EP19744825 A EP 19744825A EP 3830394 A1 EP3830394 A1 EP 3830394A1
Authority
EP
European Patent Office
Prior art keywords
seal
annular
longitudinal
aperture
annular seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19744825.1A
Other languages
English (en)
French (fr)
Inventor
Sivabalan KAILASAM
Alan HOLBROOK
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of EP3830394A1 publication Critical patent/EP3830394A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K5/00Casings; Enclosures; Supports
    • H02K5/04Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/06Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00Sealing arrangements in rotary-piston machines or engines
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00Sealing arrangements in rotary-piston machines or engines
    • F01C19/005Structure and composition of sealing elements such as sealing strips, sealing rings and the like; Coating of these elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001Radial sealings for working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001Radial sealings for working fluid
    • F04C27/003Radial sealings for working fluid of resilient material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005Axial sealings for working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/06Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure

Definitions

  • the field of the invention relates to a seal assembly for a rotating machine, a rotating machine and method.
  • Rotating machines such as compressors or pumps, need to be carefully designed and manufactured in order for the moving parts to cooperate with each other accurately.
  • Providing effective seals to seal the machine is problematic, particularly when fluid flow is encouraged by a pressure difference between the machine and ambient environment.
  • existing approaches can assist, they have undesired consequences. Accordingly, it is desired to provide an improved seal.
  • a seal assembly for a rotating machine comprising shell stators defining at least one pumping chamber and end pieces mountable at either end of the shell stators, the seal assembly comprising: at least one annular seal; and at least one longitudinal seal, the annular seal defining an aperture for receiving the longitudinal seal therewithin, the annular seal being configured to reduce a size of the aperture upon compression of the annular seal.
  • stator configurations have a stator arrangement which have an axial split-line along the stator which is formed from, typically, a pair of shell stators (stator halves), and these shell stators are then received between a pair of end plates.
  • This configuration provides a rotating machine which is more conveniently assembled and requires a seal along the axial split-line of the shell stators, as well as an annular seal between the stator and the end plates.
  • the interface between the longitudinal seal and the annular seal is sometimes referred to as a T-joint.
  • a one-piece seal can be used to seal both the shell stator to shell stator interface and between the stator and the end plates, such a seal is complex and difficult to mould.
  • the seal may be for a rotating machine.
  • the rotating machine may comprise shell stators which define or provide one or more pumping chambers.
  • the rotating machine may comprise end pieces which may be mountable at either end of the shell stators.
  • the seal may comprise one or more annular seals.
  • the seal may comprise one or more longitudinal seals.
  • the annular seal may define or provide an aperture or opening. The aperture may receive or retain the longitudinal seal.
  • the annular seal may be configured or arranged to reduce or shrink the aperture when the annular seal is compressed.
  • a multi-component seal assembly which benefits from simplicity of manufacture and ease of assembly, but which also provides for the sealing effectiveness of a one-piece seal due to the improved sealing between the annular seal and the longitudinal seal as the aperture which receives the longitudinal seal reduces in size to improve the effectiveness of the seal when the annular seal is compressed.
  • the annular seal is configured to reduce the size of the aperture upon compression of the annular seal between the shell stators and the end piece. Accordingly, the size or dimension of the aperture may be reduced in response to compression of the annular seal by the shell stators and the end piece.
  • the annular seal is configured, upon compression of the annular seal between the shell stators and the end piece in a longitudinal direction, to extend in a radial direction to reduce the size of the aperture.
  • the annular seal when the annular seal is compressed in the direction along which the longitudinal seals extend, the annular seal extends or expands in a radial direction which is generally transverse to the longitudinal direction which reduces the size of the aperture. ln one embodiment, the annular seal is configured to reduce the size of the aperture to compress the longitudinal seal. Accordingly, the reduction in size of the aperture compresses or squeezes the longitudinal seal therewithin.
  • the annular seal is deformable. Accordingly, the material from which the annular seal is made may deform or flow from one configuration to another in response to a force.
  • the annular seal is an elastomer.
  • the aperture is shaped to fit the longitudinal seal.
  • the aperture may be dimensioned to match the external shape of the longitudinal seal.
  • the annular seal is shaped to constrict the aperture upon compression of the annular seal. Accordingly, the annular seal may constrict, narrow, contract or tighten the aperture against the longitudinal seal when the annular seal is squeezed.
  • a surface defining the aperture is shaped to compress the longitudinal seal uniformly. Accordingly, the aperture may be shaped to extend uniformly when the annular seal is squeezed to compress and apply a uniform pressure along the length of the longitudinal seal within the aperture.
  • the surface defining the aperture is recessed or concave.
  • each annular seal comprises a pair of the apertures.
  • two or more apertures may be provided, each of which may receive a respective longitudinal seal.
  • the annular seal comprises annular faces shaped to engage with the shell stators and the end piece. Accordingly, the seal may be shaped to fit with the shell stators and end piece to facilitate compression of the annular seal.
  • the annular faces are planar.
  • the annular seal comprises opposing, planar annular faces.
  • the annular seal has a generally rectangular cross-section.
  • the longitudinal seal is deformable.
  • the longitudinal seal comprises an elastic and/or a ductile material.
  • the longitudinal seal comprises a metal and/or an elastomer.
  • the longitudinal seal is configured to form radial protrusions upon compression. Accordingly, the longitudinal seal may form or create radial or annular protrusions on its external surface when compressed by the annular seal.
  • the longitudinal seal is configured to form at least one radial protrusion within the aperture upon compression by the shell stators.
  • the longitudinal seal may form or create radial or annular protrusions on its external surface when compressed by the shell stators. This provides for enhanced sealing between the longitudinal seal and the annular seal.
  • the longitudinal seal is configured to form at least one radial protrusion extending within the aperture upon compression by the shell stators. Accordingly, the longitudinal seal may extend to fill the aperture during
  • the longitudinal seal is dimensioned to form the at least one radial protrusion within a void defined by the aperture upon compression by the shell stators.
  • the longitudinal seal is configured to form at least one radial protrusion bearing against an external annular face of the annular seal upon compression by the annular seal. Accordingly, the longitudinal seal may form or create a radial or annular protrusion which bears or urges against an external face of the annular seal when compressed. This provides for further sealing between the longitudinal seal and the annular seal and also locks the longitudinal seal in place to prevent movement during thermal cycling.
  • a rotating machine comprising: shell stators defining at least one pumping chamber; end pieces mountable at either end of the shell stator; and the seal assembly of the first aspect and its embodiments.
  • At least one of the shell stators and the end pieces comprise a member configured to restrict outward radial deformation of the annular seal upon compression of the annular seal. This helps to prevent the material of the annular seal from flowing at this radially outermost surface and encourages the material to flow into the aperture to improve the sealing between the longitudinal seal and the annular seal.
  • a method comprising: providing at least one annular seal; providing at least one longitudinal seal, the annular seal defining an aperture for receiving the longitudinal seal therewithin; and
  • the method comprises compressing the annular seal between shell stators and an end piece to reduce the size of the aperture. In one embodiment, the method comprises compressing the annular seal between the shell stators and the end piece in a longitudinal direction to extend the annular seal in a radial direction to reduce the size of the aperture.
  • the method comprises compressing the longitudinal seal by reducing the size of the aperture.
  • the annular seal is deformable.
  • the annular seal is an elastomer.
  • the method comprises shaping the aperture to fit the longitudinal seal.
  • the method comprises shaping the annular seal to constrict the aperture upon compression of the annular seal.
  • the method comprises shaping a surface defining the aperture to compress the longitudinal seal uniformly upon compression of the annular seal.
  • the surface defining the aperture is recessed.
  • the method comprises providing a pair of the apertures.
  • the method comprises shaping annular faces of the annular seal to engage with the shell stators and the end piece.
  • the annular faces are planar.
  • the annular seal comprises opposing, planar annular faces. In one embodiment, the annular seal has a generally rectangular cross-section.
  • the longitudinal seal is deformable.
  • the longitudinal seal comprises at least one of an elastic and a ductile material.
  • the longitudinal seal comprises at least one of a metal and an elastomer.
  • the method comprises forming radial protrusions on the longitudinal seal upon compression.
  • the method comprises forming at least one radial protrusion within the aperture upon compression by the shell stators.
  • the method comprises forming at least one longitudinal protrusion extending within the aperture upon compression by the shell stators.
  • the method comprises dimensioning the longitudinal seal to form the at least one longitudinal protrusion within a void defined by the aperture upon compression by the shell stators.
  • the method comprises configuring the longitudinal seal to form at least one radial protrusion bearing against an external annular face of the annular seal upon compression by the annular seal.
  • the method comprises restricting outward radial deformation of the annular seal upon compression of the annular seal.
  • Figure 1 illustrates schematically a housing of a rotating machine according to one embodiment
  • Figure 2 illustrates a seal assembly for sealing the housing according to one embodiment
  • Figures 3A to 3C show schematically the steps for incorporating the seal assembly into the housing according to one embodiment
  • Figure 4 illustrates an aperture profile according to one embodiment.
  • Embodiments provide a sealing arrangement for a multi-component housing of a rotating machine such as a pump or a compressor.
  • the housing or stator of a rotating machine may be formed from multiple component parts, shells or end plates which need to be sealed upon assembly.
  • the stator is formed by bringing together two or more stator housing parts or shells which are then retained between a pair of end plates.
  • the stator housing parts typically require one or more longitudinal seals along their joining faces, with each end plate requiring an annular seal between that end plate and the stator housing parts.
  • each annular seal has an aperture which receives each longitudinal seal.
  • Compression of the annular seal between the end plate and the stator housing parts causes the apertures within which the longitudinal seals are received to contract, which provides for improved sealing between the longitudinal seal and the annular seal.
  • the compression of the annular seal causes it to deform, with the seal material flowing in response.
  • the flow of the seal material causes the aperture to reduce in size, thereby compressing the longitudinal seal to improve sealing.
  • compression of the longitudinal seal by the stator housing parts causes the longitudinal seal material to flow, expanding into the aperture within the annular seal, which also improves sealing.
  • the compression of the aperture during compression of the annular seal causes the material of the longitudinal seal to flow further to form an annular protrusion around an external face of the annular seal. This again improves the sealing and helps prevent movement of the seals during thermal cycling.
  • FIG. 1 illustrates schematically a housing 10 of a rotating machine, according to one embodiment.
  • the housing 10 comprises a pair of shell stators 12, 14 and a pair of end plates 16, 18.
  • the shell stators 12, 14 define recesses which receive components of the rotating machine.
  • the shell stators 12, 14 are brought together to retain the components in those recesses.
  • the end plates 16, 18 are then brought to retain the shell stators 12, 14. This provides for particularly convenient assembly of the rotating machine.
  • Figure 2 illustrates a seal assembly 20 for sealing the housing 10 according to one embodiment.
  • the seal assembly 20 has a pair of longitudinal seals 22, 24 and a pair of annular seals 26, 28.
  • the longitudinal seals in this example are O-ring cords with a circular cross- section and are made of an elastomer material.
  • the annular seals 26, 28 are ring-shaped.
  • the annular seals 26, 28 are square ring-shaped with curved corners.
  • Major faces 26A, 26B, 28A, 28B are provided which abut against major faces of the end plates 16, 18 and the adjacent faces of the shell stators 12, 14.
  • the annular seals 26, 28 have planar faces, a constant thickness and are made of an elastomer.
  • the annular seals 26, 28 have apertures 26C, 26D, 28C, 28D into which the longitudinal seals 22, 24 are received.
  • the apertures 26C, 26D, 28C, 28D are shaped and dimensioned to fit the external surface of the longitudinal seals 22, 24.
  • longitudinal seals 22, 24 are of constant, circular cross-section, it will be appreciated that they may be provided with alternative cross-sections such as square, triangular, oval, etc, and they may be of non- uniform cross-section. Also, the longitudinal seals 22, 24 need not be made of an elastomer but may simply be deformable; for example, made of a metal.
  • annular seals 26, 28 are made of an elastomer, it will be appreciated that they may be made of any material which is deformable.
  • major faces 26A, 26B, 28A, 28B in this example are planar, it will be appreciated that they may be any shape which is suitable for engaging with the major faces of the end plates 16, 18 and the adjacent faces of the shell stators Seal Assembly
  • FIGS 3A to 3C show schematically the steps for incorporating the seal assembly 20 into the housing 10 according to one embodiment.
  • the shell stator 14 is provided, into which components (not shown) of the rotating machine are assembled.
  • the longitudinal seals 22, 24 are placed, typically in seal grooves (not shown) extending along the joining face of shell stator 14.
  • the shell stator 12 is brought into close contact with the longitudinal seals 22, 24.
  • the annular seals 26, 28 are received by protruding portions of the longitudinal seals 22, 24 and these protruding portions pass through the apertures 26C, 26D, 28C, 28D.
  • the end plates 16, 18 are positioned in proximity to the annular seals 26, 28.
  • the shell stators 12, 14 are clamped together, which compresses the longitudinal seals 22, 24 radially.
  • the longitudinal seals 22, 24 deform and material flows out of the constricting volume between the shell stators 12, 14 and creates annular protrusions 24A within the apertures 26C, 26D, 28C, 28D which improves sealing between the annular seals 26, 28 and the
  • the end plates 16, 18 are brought together to compress the annular seals 26, 28 in the longitudinal direction.
  • This causes the annular seals 26, 28 to deform and for material to flow in the radial direction, which reduces the size of the apertures 26C, 26D, 28C, 28D and radially compresses the longitudinal seal 22, 24 which improves sealing between the annular seals 26, 28 and the longitudinal seals 22, 24.
  • This compression of the longitudinal seal 22, 24 causes material to flow in the longitudinal direction, which causes radial protrusions 24B to form adjacent the major faces 26A, 28A of the annular seals 26, 28 which improves sealing between the annular seals 26, 28 and the longitudinal seals 22, 24.
  • apertures 26C, 26D, 28C, 28D are defined by a planar surface to provide a constant aperture diameter through the annular seals 26, 28, it will be appreciated that non-planar surfaces may be provided.
  • a concave surface may be provided, as illustrated in Figure 4, in order to provide for more uniform compression of the longitudinal seals 22, 24 within the aperture.
  • end plates 16, 18 have voids 16A, 18A into which the longitudinal seals 22, 24 project
  • the longitudinal length of the longitudinal seals 22, 24 may be shorter such that they only extend part way through the apertures 26C, 26D, 28C, 28D, which would obviate the need for the voids 16A, 18A in the end plates 16, 18.
  • embodiments provide an elastomer gasket and O-ring cord combination to provide a T-joint sealing arrangement for metal, plated or coated clam pumps.
  • the O-ring cord would clamped by gasket to provide required sealing at any contact surfaces.
  • the clamping within the arrangement would be immune to the surface fiction coefficient of any clamp.
  • pumps which have an axial split-line along the stators require a seal at each end of the split-line, which is referred to as a T joint.
  • Embodiments clamp the O-ring cord within a gasket which would be immune to high temperature and surface friction.
  • the O-ring cord is the interlink between both gaskets. It will be appreciated that the cord and the gasket can have different shapes or
  • the O-ring cord is placed between clamshells.
  • the clamshells are spaced by a tool.
  • gaskets are placed on both ends.
  • An end plate is placed both ends but not torqued up.
  • the clamshells are torqued in sequence so those clamshells are well aligned and the O-ring cord sandwiched to create the seal.
  • the O-ring cord might fill the gasket hole (interconnection) due to compression.
  • the end plates are torqued up in sequence.
  • the interconnection hole will minimise in size and grip the O-ring cord, thus providing T-joint sealing.
  • the O-ring cord is trapped within the gasket thus preventing T-joint sealing failure on low friction surfaces.
  • Embodiments use 2 body elastomers to create a T-joint sealing with plated or coated surface clamshells which have a lower surface friction coefficient.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Gasket Seals (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Motor Or Generator Frames (AREA)
  • Auxiliary Devices For And Details Of Packaging Control (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Sealing Devices (AREA)
EP19744825.1A 2018-07-30 2019-07-15 Dichtungsanordnung Withdrawn EP3830394A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1812396.8A GB2575987A (en) 2018-07-30 2018-07-30 Seal assembly
PCT/GB2019/051970 WO2020025924A1 (en) 2018-07-30 2019-07-15 Seal assembly

Publications (1)

Publication Number Publication Date
EP3830394A1 true EP3830394A1 (de) 2021-06-09

Family

ID=63518311

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19744825.1A Withdrawn EP3830394A1 (de) 2018-07-30 2019-07-15 Dichtungsanordnung

Country Status (6)

Country Link
EP (1) EP3830394A1 (de)
JP (1) JP2021532316A (de)
CN (1) CN112654767B (de)
GB (1) GB2575987A (de)
TW (1) TWI803674B (de)
WO (1) WO2020025924A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11680567B1 (en) * 2020-02-27 2023-06-20 Parker-Hannifin Corporation Hydraulic gear pump with axial compensation
GB2622602B (en) * 2022-09-22 2024-10-16 Edwards Ltd Sealing gasket
TW202417343A (zh) * 2022-09-22 2024-05-01 英商愛德華有限公司 密封墊片
WO2024062214A1 (en) * 2022-09-22 2024-03-28 Edwards Limited Sealing gasket

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Publication number Priority date Publication date Assignee Title
GB1425193A (en) * 1973-05-09 1976-02-18 Boc International Ltd Rotary compressors
JP2541869Y2 (ja) * 1993-03-10 1997-07-23 アネルバ株式会社 漏れ探し装置
US6409180B1 (en) * 2000-04-21 2002-06-25 Perkinelmer, Inc. Metallic seal
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
US6948715B2 (en) * 2002-07-29 2005-09-27 Cooper Cameron Corporation Seal assembly with accumulator ring
EP1660796B1 (de) * 2003-08-26 2014-04-09 General Electric Company Dichtungsträger für eine rotationsmaschine und nachrüstverfahren
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
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DE102010001345B4 (de) * 2010-01-28 2013-09-19 Trelleborg Sealing Solutions Germany Gmbh Drehdurchführung
JP5385826B2 (ja) * 2010-03-10 2014-01-08 株式会社アルバック 気密容器、真空ポンプ
GB201021266D0 (en) * 2010-12-14 2011-01-26 Crane John Uk Ltd Seals
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
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GB2559134B (en) * 2017-01-25 2020-07-29 Edwards Ltd Pump assemblies with stator joint seals

Also Published As

Publication number Publication date
JP2021532316A (ja) 2021-11-25
GB201812396D0 (en) 2018-09-12
TW202012789A (zh) 2020-04-01
TWI803674B (zh) 2023-06-01
WO2020025924A1 (en) 2020-02-06
GB2575987A (en) 2020-02-05
CN112654767A (zh) 2021-04-13
CN112654767B (zh) 2022-09-20

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