EP3764147B1 - Réflecteur à actionneur, scanner optique et actionneur de miroir - Google Patents

Réflecteur à actionneur, scanner optique et actionneur de miroir Download PDF

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Publication number
EP3764147B1
EP3764147B1 EP19764806.6A EP19764806A EP3764147B1 EP 3764147 B1 EP3764147 B1 EP 3764147B1 EP 19764806 A EP19764806 A EP 19764806A EP 3764147 B1 EP3764147 B1 EP 3764147B1
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EP
European Patent Office
Prior art keywords
reflector
actuator
magnetic
rotary axis
magnetic element
Prior art date
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Active
Application number
EP19764806.6A
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German (de)
English (en)
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EP3764147A4 (fr
EP3764147A1 (fr
Inventor
Shogo Kitazawa
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Pioneer Corp
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Pioneer Corp
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Priority to EP23151648.5A priority Critical patent/EP4191319A1/fr
Publication of EP3764147A1 publication Critical patent/EP3764147A1/fr
Publication of EP3764147A4 publication Critical patent/EP3764147A4/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Definitions

  • This invention relates to a reflector with actuator used for scanning with emitted light, an optical scanner including the reflector with actuator, and a mirror actuator.
  • an optical scanner which scans a scanning target region with emitted light from a light source and measures a distance or the like to an object existing in the scanning target region based on a time taken to detect return light from the scanning target region by an optical detector (for example, refer to Patent Document 1).
  • emitted light from the light source is passed through a beam splitter and reflected by a reflector with actuator and emitted to a scanning target region.
  • the reflector with actuator changes a reflecting direction of the emitted light from the light source by rotating a reflector with an actuator and performs a scan.
  • Return light from the scanning target region returns through substantially the same optical path as the emitted light from being reflected by the reflector with actuator to reaching the beam splitter. Then, a portion of the return light is separated from the optical path by the beam splitter and directed to an optical detector.
  • the return light returns through substantially the same optical path as the emitted light, and this is because both of the emitted light from the light source and the return light from the scanning target region are reflected by the same surface of the reflector. Therefore, after the return light is reflected by the reflector with actuator, the beam splitter is necessary in order to separate the return light from the optical path and direct the return light to the optical detector.
  • Patent Document 1 Japanese Unexamined Patent Application Publication No. 2000-275340 US 2009/039715 A1 relates to an oscillator supported for oscillatory motion about an axis.
  • a permanent magnet is installed on the oscillator such that a lengthwise direction of the permanent magnet is perpendicular to the rotary axis.
  • JP 2014 240895 A relates to an optical scanning device in which a magnet is installed on a mirror surface such that its lengthwise direction is perpendicular to the rotary axis.
  • US 2008/068688 A1 relates to an actuator that includes a mass portion of a supporting portion. The actuator further includes a driver for rotating the mass portion.
  • the driver includes a ferromagnet installed on the mass portion, a coil formed along formed along the rotational axis of the first mass portion and the supporting portion, and a voltage application unit for applying voltage to the coil.
  • JP 2010 217782 A relates to an optical device with a rotatable scanning mirror that has two light reflecting sides and is arranged inside a frame-shaped main body. A magnet installed on the main body is configured to form a magnetic field for rotating the scanning mirror with respect to the drive coil.
  • an example of the problems to be solved by the present invention is to provide a reflector with actuator capable of constituting an optical scanner having high utilization efficiency of light, an optical scanner including the reflector with actuator, and a mirror actuator.
  • a reflector with actuator includes a reflector, a first supporting part, a first magnetic element, and a first magnetic actuator.
  • the reflector has reflection regions formed on both surfaces thereof.
  • the first supporting part supports the reflector and defines a first rotary axis of the reflector.
  • the first magnetic element is installed on the reflector at a position displaced from the first rotary axis.
  • the first magnetic actuator acts on the first magnetic element to move the first magnetic element in a direction that rotates the reflector around the first rotary axis.
  • the first magnetic element that is moved by the first magnetic actuator is installed on the reflector at a position displaced from the first rotary axis.
  • the reflector with actuator of the present embodiment can be used as a double-sided reflector. Consequently, when constituting an optical scanner with the reflector with actuator of the present embodiment, it is possible to configure to reflect emitted light on a first surface out of the both surfaces of the reflector and to reflect return light on a second surface out of the both surfaces.
  • the first magnetic element is installed on at least one surface of the reflector.
  • the first rotary axis divides the reflection region into two regions having different lengths in a direction orthogonal to the first rotary axis, and the first magnetic element is installed in a region having the length that is shorter.
  • the reflector with actuator of the present embodiment may include a second supporting part, a second magnetic element, and a second magnetic actuator.
  • the second supporting part supports the reflector so as to define a second rotary axis which is orthogonal to the first rotary axis.
  • the second magnetic element is installed at a position at which the second magnetic element moves, when applied with a magnetic force, in a direction that rotates the reflector around the second rotary axis.
  • the second magnetic actuator applies the magnetic force with respect to the second magnetic element.
  • the reflector with actuator of the present embodiment may include the second supporting part, and the first magnetic element thereof may be an element described below, and the first magnetic actuator thereof may include a pair of actuator portions described below.
  • the second supporting part supports the reflector so as to define the second rotary axis which is orthogonal to the first rotary axis.
  • the first magnetic element is an element which extends in an axis direction of the first rotary axis so as to intersect the second rotary axis.
  • the first magnetic actuator includes the pair of actuator portions which applies magnetic forces to two portions of the first magnetic element that are arranged so as to sandwich the second rotary axis.
  • the pair of actuator portions moves the first magnetic element in a direction that rotates the reflector around the second rotary axis by applying magnetic forces that are different from each other in at least one of magnitude and polarity.
  • an optical scanner includes a light source, an optical detector, and the above-mentioned reflector with actuator.
  • the optical scanner is configured such that emitted light from the light source is reflected by the first surface out of the both surfaces of the reflector of the reflector with actuator so as to be guided to a scanning target region, and return light from the scanning target region is reflected by the second surface out of the both surfaces so as to be guided to the optical detector.
  • the beam splitter since the emitted light and the return light can be separated by the reflector with actuator, the beam splitter is not necessary. Thus, according to the optical scanner of the present embodiment, there is no loss in amount of light due to the beam splitter, and thus it is possible to obtain high utilization efficiency of light.
  • a mirror actuator is constituted with a swing part, a first supporting part, a magnet, and a yoke.
  • a first surface and a second surface arranged on an opposite side of the first surface are reflection surfaces.
  • the first supporting part supports the swing part so as to allow the swinging part to swing around a first swing axis.
  • the magnet is provided in a region of the swing part where no reflection surface is formed.
  • the yoke generates a magnetic field which acts on the magnet.
  • the mirror actuator of the present embodiment it is possible to constitute the optical scanner having high utilization efficiency of light.
  • the magnet is provided on at least one of the first surface and the second surface of the swing part.
  • FIG. 1 is a schematic diagram illustrating an optical scanner according to the first example of the present invention.
  • An optical scanner 1 shown in FIG. 1 includes a light source 11, an optical detector 12, a reflector with actuator 13, a reflection mirror for emitted light 14, a lens for light source 15, a lens for detector 16, a lens for emitted light 17, and a lens for return light 18.
  • the optical scanner 1 is a device which scans a scanning target region with emitted light L11 from the light source 11 and measures a distance or the like to an object existing in the scanning target region based on a time taken to detect return light L12 from the scanning target region by the optical detector 12.
  • the emitted light L11 from the light source 11 passes through the lens for light source 15, is reflected by the reflector with actuator 13 and the reflection mirror for emitted light 14, passes through the lens for emitted light 17, and is emitted to the scanning target region.
  • the reflector with actuator 13 changes a reflecting direction of the emitted light L 1 1 from the light source 11 by rotating a reflector 132 by a first magnetic actuator 131 and a second magnetic actuator 139, details of which are described later, and performs a scan.
  • the reflector 132 in the reflector with actuator 13 is a double-sided reflector having a reflection region formed on both surfaces thereof.
  • the emitted light L11 from the light source 11 is reflected by a first surface 132c out of the both surfaces of the reflector 132 so as to be guided to the scanning target region.
  • the return light L12 from the scanning target region is passed through the lens for return light 18, reflected by a second surface 132d of the reflector with actuator 13, passed through the lens for detector 16 and directed to the optical detector 12.
  • the return light L12 from the scanning target region is reflected by the second surface 132d out of the both surfaces of the reflector 132 so as to be guided to the optical detector 12.
  • a distance or the like to the object is calculated based on a time from when the emitted light L11 is emitted from the light source 11 to when the return light L12 which is the emitted light L11 reflected by the object existing in the scanning target region is detected by the optical detector 12.
  • FIG. 2 is a perspective view illustrating the reflector with actuator schematically shown in FIG. 1 .
  • the reflector with actuator 13 includes the first magnetic actuator 131, the reflector 132 (swing part), an inner frame 133, an outer frame 134, a first supporting part 135, and a first magnetic element 136.
  • the reflector with actuator 13 includes a second supporting part 137, a second magnetic element 138, and a second magnetic actuator 139.
  • the reflector 132, the inner frame 133, the outer frame 134, the first supporting part 135, and the second supporting part 137 are integrally formed by a silicon material.
  • the reflector 132 includes a circular plate portion 132a and a rectangular plate portion 132b, and reflection regions 132a-1 and 132a-2 are formed on both surfaces of the circular plate portion 132a by vapor deposition or the like of gold or aluminum or the like.
  • the emitted light L11 is reflected by the reflection region 132a-1 formed on the circular plate portion 132a. Further, on the second surface 132d, the return light L12 is reflected by the reflection region 132a-2 formed on the circular plate portion 132a.
  • the inner frame 133 is a quadrangular frame formed surrounding the reflector 132
  • the outer frame 134 is a quadrangular frame formed surrounding the inner frame 133.
  • the first supporting units 135 support the reflector 132 from the both sides, and are provided to define a first rotary axis 13a of the reflector 132.
  • the reflector 132 is connected to the inner frame 133 by the pair of first supporting parts 135, and the pair of first supporting parts 135 is a pair of torsion bars which twists around the first rotary axis 13a.
  • the second supporting parts 137 support the reflector 132 from the both sides so as to define a second rotary axis 13b which is orthogonal to the first rotary axis 13a.
  • the above-mentioned inner frame 133 is connected to the outer frame 134 by the pair of second supporting parts 137, and the pair of the second supporting parts 137 is a pair of torsion bars which twists around the second rotary axis 13b.
  • the second supporting parts 137 support, via the inner frame 133, the reflector 132 connected to the inner frame 133.
  • the first magnetic element 136 is a permanent magnet installed on one surface of the reflector 132 at a position displaced from the first rotary axis 13a. Specifically, the first magnetic element 136 is installed on the first surface 132c side of the rectangular plate portion 132b shown also in FIG. 1 .
  • the first magnetic element 136 is a permanent magnet having a rectangular parallelepiped shape that is magnetized such that a N-pole portion and a S-pole portion are arranged in an axis direction of the second rotary axis 13b.
  • the first magnetic element 136 is installed on the rectangular plate portion 132b such that a lengthwise direction thereof is parallel to the first rotary axis 13a. To enable such installation, the rectangular plate portion 132b is formed into a rectangular shape in which a long side thereof extends in parallel to the first rotary axis 13a.
  • the first rotary axis 13a divides both of the reflection regions 132a-1 and 132a-2 into two regions with different lengths in an orthogonal direction D11 with respect to the first rotary axis 13a. Then, the first magnetic element 136 is installed to the region with shorter length in the orthogonal direction D11. That is, the above-mentioned rectangular plate portion 132b is provided on a side of this region with shorter length, and the first magnetic element 136 is installed on the rectangular plate portion 132b.
  • the first magnetic actuator 131 is an electromagnet provided one at a position at which it applies a magnetic force to the first magnetic element 136, and includes a yoke 131a and a coil 131b. This first magnetic actuator 131 applies a magnetic force to the first magnetic element 136, and rotates the reflector 132 around the first rotary axis 13a.
  • the second magnetic elements 138 are both permanent magnets having a rectangular parallelepiped shape similar to the first magnetic element 136, and are installed on an extended plane of the above-mentioned first surface 132c of the reflector 132 so as to rotate the reflector 132 around the second rotary axis 13b when applied with a magnetic force.
  • the second magnetic elements 138 are installed one on each of surfaces of a pair of opposing side portions 133a of the rectangular inner frame 133 on the side same as the side on which the first magnetic element 136 is installed, the pair of opposing side portions 133a extending parallel to the second rotary axis 13b.
  • the second magnetic element 138 is installed on each side portion 133a so that the lengthwise direction thereof is arranged along the lengthwise direction of each side portion 133a, i.e., is arranged parallel to the second rotary axis 13b.
  • the second magnetic actuators 139 are electromagnets which are the same as the above-mentioned first magnetic actuator 131 and are provided one at a position at which it applies a magnetic force to each of the pair of second magnetic elements 138.
  • Each of the second magnetic actuators 139 includes a yoke 139a and a coil 139b.
  • FIG. 3 is an enlarged perspective view of a main portion around the reflector illustrating how a reflector is rotationally driven by the first magnetic actuator and the second magnetic actuator shown in FIG. 2 .
  • FIG. 4 is a side view viewed from an arrow V11 direction in FIG. 2 illustrating how the reflector is rotationally driven by the first magnetic actuator and the second magnetic actuator shown in FIG. 2 .
  • the first magnetic element 136 is a permanent magnet and generates a magnetic field F11.
  • the first magnetic actuator 131 generates a magnetic field F12 with respect to the first magnetic element 136.
  • a driving force F13 with respect to the reflector 132 is generated due to repulsion and attraction between these two magnetic fields F11 and F12.
  • This driving force F13 makes the reflector 132rotated around the first rotary axis 13a defined by the first supporting part 135.
  • a rotation amount at this time is adjusted by controlling magnitude of the magnetic force generated by the first magnetic actuator 131 by a not-shown control unit. Further, a rotation direction is controlled according to a direction of the magnetic field F12 generated by the first magnetic actuator 131.
  • the pair of second magnetic elements 138 are also permanent magnets similar to the first magnetic element 136 and generate a magnetic field F14. At this time, the pair of second magnetic elements 138 are arranged so that the poles with the same polarity face each other. At this time, when the pair of the second magnetic actuators 139 generate the magnetic fields F15 having the opposite directions, driving forces F16 are generated with respect to the respective second magnetic elements 138. At this time, since the respective second magnetic actuators 139 are generating the magnetic fields F15 in the opposite directions, the driving forces F16 generated with respect to the respective second magnetic elements 138 are also directed opposite to each other.
  • the reflector 132 is rotated around the second rotary axis 13b defined by the second supporting parts 137.
  • An amount of rotation at this time is adjusted by controlling magnitude of the magnetic force generated by the second magnetic actuator 139 by a not-shown control unit. Further, a rotation direction is controlled by a direction of the magnetic field F15 generated by the second magnetic actuator 139.
  • a reflector with actuator is different from the one in the above-mentioned first example.
  • a configuration of an optical scanner other than the reflector with actuator is the same as the optical scanner 1 in the first example shown in FIG. 1 .
  • the second example is described focusing on the reflector with actuator which is a difference from the first example, and an explanation of a constitution of the optical scanner which is the same in both examples is omitted.
  • FIG. 5 is a perspective view illustrating the reflector with actuator in the second example.
  • the same reference signs as FIG. 2 are given to constituent elements which are the same as those of the reflector with actuator 13 in the first example shown in FIG. 2 . Overlapping descriptions on those constituent elements which are the same are omitted below.
  • a reflector with actuator 23 in this example includes only one magnetic element 236.
  • the magnetic element 236 is a permanent magnet extending in an axis direction of the first rotary axis 13a so as to intersect the second rotary axis 13b.
  • a magnetic actuator 231 configured to move the magnetic element 236 includes a pair of actuator portions 231a and 231b as described below.
  • the pair of actuator portions 231a and 231b are electromagnets which apply magnetic forces to two portions 236a and 236b of the magnetic element 236 sandwiching the second rotary axis 13b defined by the second supporting part 137.
  • Each actuator portion 231a, 231b includes a yoke 23 1a-1, 231b-1 and a coil 23 1a-2, 231b-2.
  • the pair of actuator portions 231a and 231b are arranged to align in a lengthwise direction of the magnetic element 236 so as to sandwich the second rotary axis 13b between each other.
  • FIG. 6 is an enlarged perspective view of a main portion around the reflector illustrating how the reflector is rotationally driven by the pair of actuator portions shown in FIG. 5 .
  • rotary drive of the reflector 232 around the first rotary axis 13a defined by the first supporting part 135 is explained.
  • This rotary drive is performed when the pair of actuator portions 231a and 231b generate magnetic forces having the same magnitude and the same polarity as each other.
  • the equivalent driving forces F231 are generated in the respective portions 236a and 236b due to repulsion and attraction between a magnetic field F21 of each of the two portions 236a and 236b of the magnetic element 236 and a magnetic field F221, F222a of each actuator portion 231a, 231b.
  • the reflector 232 rotates around the first rotary axis 13a due to these driving forces F231.
  • a rotation amount at this time is adjusted by controlling magnitude of the magnetic force generated by each of the actuator portions 231a and 231b by a not-shown control unit. Further, a rotation direction is controlled by a direction of these magnetic fields F221 and F222a.
  • FIG. 7 is a diagram illustrating a comparative example to compare with the first example and the second example shown in FIGS. 1 to 6 .
  • the comparative example is shown by an optical scanner 5.
  • the optical scanner 5 of the comparative example includes a light source 51, an optical detector 52, a reflector with actuator 53, a beam splitter 54, a lens for light source 55, a lens for detector 56, and a shared lens 57.
  • the optical scanner 5 is a device which scans the scanning target region with the emitted light L51 from the light source 51 and measures a distance or the like to an object existing in the scanning target region based on a time taken to detect return light L52 from the scanning target region by the optical detector 52.
  • the emitted light L51 from the light source 51 passes through the lens for light source 55, passes through the beam splitter 54, is reflected by the reflector with actuator 53, and emitted to the scanning target region.
  • the reflector with actuator 53 performs a scan by changing a reflection direction of the emitted light L51 from the light source 51 by rotating a reflector 532 by a magnetic actuator 531.
  • a magnetic element 536 which receives a magnetic force from the magnetic actuator 531 is arranged on a rear surface 532c of the reflector 532.
  • the reflector with actuator 53 is a single-sided reflector having a reflection region formed on a surface 532d of the reflector 532 on the opposite of the magnetic element 536.
  • the return light L52 from the scanning target region is passed through the lens 57, is reflected by the reflector with actuator 53, is passed through the beam splitter 54 and the lens for detector 56, and is directed to the optical detector 12. Then, in a not-shown control device, a distance or the like to an object existing in the scanning target region is calculated based on a time from when the emitted light 51 is emitted from the light source 51 to when the return light L52 is detected by the optical detector 52.
  • the first magnetic element 136 configured to be moved by the first magnetic actuator 131 is installed at a position on the reflector 132 displaced from the first rotary axis 13a.
  • the magnetic element 236 configured to be moved by the magnetic actuator 231 is installed at a position on the reflector displaced from the first rotary axis 13a.
  • the reflectors with actuator 13 and the reflector with actuator 23 of the first example and the second example can be used as a double-sided reflector by widely using both front and rear surfaces thereof. Consequently, as shown in FIG. 1 , when configuring the optical deflector 1 with the reflector with actuator 13, 23, it is possible to configure such that the emitted light L11 is reflected by the first surface 132c out of the both surfaces and the return light L12 is reflected by the second surface 132d. As a result, in the optical scanner 1, the return light L12 can be guided to the optical detector 52 without using a beam splitter. That is, according to the reflector with actuator 13 and the reflector with actuator 23 of the first example and the second example, it is possible to constitute the optical scanner 1 having high utilization efficiency of light by not using a beam splitter.
  • the emitted light L11 and the return light L12 can be passed though difference paths from each other in the optical scanner 1, it is also possible to prevent stray light from one light to the other or an interference with each other. Moreover, it is possible to perform the most appropriate optical path design to the emitted light L11 and the return light L12 individually in the optical scanner 1.
  • the most appropriate optical path design may include for example, optimization of a reflective film configuration on the reflector 132, 232 and/or optimization of an antireflective film configuration in a lens arranged in each optical path.
  • the first magnetic element 136 and the magnetic element 236 are installed in a region as described below out of the two regions of the reflection regions 132a-1 and 132a-2 divided by the first rotary axis 13a. That is, the first magnetic element 136 and the magnetic element 236 are installed in the region having a shorter length in the orthogonal direction D11.
  • the first magnetic element 136 and the magnetic element 236 are installed in a region which is not a reflection region (a position displaced from the reflection region), a defect such as generation of deformation in the reflection region hardly occurs.
  • the above-mentioned reflector with actuator 13 of the first example includes the second magnetic element 138 and the second magnetic actuators 139 in addition to the first magnetic element 136 and the first magnetic actuator 131.
  • the reflector 132 can be rotated around the two axes of the first rotary axis 13a and the second rotary axis 13b. That is, it is possible to constitute the optical scanner 1 capable of two-dimensionally scanning the scanning target region. Further, since rotation of the reflector 132 around the respective rotary axes 13a and 13b is performed by the magnetic elements and the magnetic actuators corresponding to the respective rotary axes 13a and 13b, rotation of the reflector 13 around the rotary axes 13a and 13b can be easily performed.
  • the magnetic actuator 231 includes the pair of actuator portions 231a and 231b as described below.
  • the pair of actuator portions 231a and 231b applies magnetic forces to the two portions 236a and 236b of the magnetic element 236 that are arranged so as to sandwich the second rotary axis 13b.
  • the rotation of the reflector 232 around the first rotary axis 13a can be controlled by controlling a direction and an intensity of the magnetic forces generated by the pair of actuator portions 231a and 231b while balancing them.
  • the rotation of the reflector 232 around the second rotary axis 13b can be controlled by controlling directions and intensities of the magnetic forces generated by the respective ones of the pair of actuator portions 231a and 231b differently from each other.
  • the present invention is not limited to the examples explained above.
  • the present invention may include other configurations which can achieve the object of the present invention, and the following modifications are also included in the present invention.
  • the reflectors with actuator 13 and 23 which rotate the reflectors 132 and 232 around the two axes are exemplified as an example of the reflector with actuator according to the present invention.
  • the reflector with actuator according to the present invention is not limited to this, and for example, it may include only one set of a magnetic element and a magnetic actuator to rotates the reflector around a single axis.
  • the first magnetic element 136 and the magnetic element 236 which are permanent magnets are exemplified as an example of the first magnetic element according to the present invention.
  • the second magnetic element 138 which is a permanent magnet is exemplified as an example of the second magnetic element according to the present invention.
  • the first magnetic element and the second magnetic element according to the present invention are not limited to these, and may be, for example, a coil in which a driving force is generated when it is applied with an electric current and then applied with a magnetic force.
  • the magnetic actuator which moves the coil may be a permanent magnet.
  • the reflectors 132 and 232 which include the circular plate portion 132a having a reflection region on both surfaces thereof and the rectangular plate portions 132b and 232b are exemplified as examples of the reflector according to the present invention.
  • the reflector according to the present invention is not limited to these.
  • the reflector according to the present invention may have any shape including a simple circular plate shape or rectangular shape, as long as the reflection regions are formed on the both surfaces thereof.
  • one magnetic element 136, 236 is installed on one surface of the reflector 132, 232; however, magnetic elements divided into two may also be used, and/or the magnetic element(s) may be installed on the both surfaces.
  • an opening may be provided at a magnet installation position on the reflector 132, 232, and one magnetic element 136, 236 may be fitted into the opening. In this case, the magnetic element 136, 236 appears on both surfaces of the reflector 132, 232.
  • the magnetic element is installed on the both surfaces or fitted into the opening, it is possible to keep a balanced state with respect to the rotary axis of the reflector even when the reflector 132, 232 are installed vertically, thereby preventing the reflector from being rotated and inclined to one side when, for example, the reflector is not driven.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Claims (9)

  1. Réflecteur avec actionneur (131, 139) comprenant :
    un réflecteur double face ayant une première surface (132c) et une deuxième surface (132d) ; et
    une première partie de support supportant le réflecteur et définissant un premier axe de rotation (13a) du réflecteur,
    caractérisé en ce que le réflecteur avec actionneur comprend en outre un premier élément magnétique (136) qui a la forme d'un rectangle et qui est installé sur le réflecteur à une position décalée par rapport au premier axe de rotation de sorte qu'un sens longitudinal du premier élément magnétique est parallèle au premier axe de rotation ; et
    un premier actionneur magnétique (131) configuré pour agir sur le premier élément magnétique pour déplacer le premier élément magnétique dans un sens qui fait tourner le réflecteur autour du premier axe de rotation.
  2. Réflecteur avec actionneur selon la revendication 1,
    dans lequel le premier élément magnétique est installé sur au moins une de la première surface et de la deuxième surface du réflecteur.
  3. Réflecteur avec actionneur selon la revendication 1,
    dans lequel le premier axe de rotation divise la première surface et la deuxième surface en deux régions ayant des longueurs différentes dans un sens orthogonal au premier axe de rotation, et dans lequel le premier élément magnétique est installé dans une région ayant la longueur qui est la plus courte.
  4. Réflecteur avec actionneur selon la revendication 1, comprenant en outre :
    une deuxième partie de support supportant le réflecteur de manière à définir un deuxième axe de rotation orthogonal au premier axe de rotation ;
    un deuxième élément magnétique installé à une position à laquelle le deuxième élément magnétique est déplacé, lorsqu'on lui applique une force magnétique, dans un sens qui fait tourner le réflecteur autour du deuxième axe de rotation ; et
    un deuxième actionneur magnétique configuré pour appliquer la force magnétique par rapport au deuxième élément magnétique.
  5. Réflecteur avec actionneur selon la revendication 1, comprenant en outre une deuxième partie de support supportant le réflecteur de manière à définir un deuxième axe de rotation orthogonal au premier axe de rotation,
    dans lequel le premier élément magnétique est un élément qui s'étend dans le sens de l'axe du premier axe de rotation de manière à croiser le deuxième axe de rotation, et
    dans lequel le premier actionneur magnétique comprend une paire de parties d'actionneur configurées pour appliquer des forces magnétiques à deux parties du premier élément magnétique qui sont disposées de manière à prendre en sandwich le deuxième axe de rotation.
  6. Réflecteur avec actionneur selon la revendication 5,
    dans lequel la paire de parties d'actionneur déplace le premier élément magnétique dans un sens qui fait tourner le réflecteur autour du deuxième axe de rotation en appliquant les forces magnétiques qui sont différentes les unes des autres dans au moins une des magnitudes et des polarités.
  7. Lecteur optique comprenant :
    une source de lumière ;
    un détecteur optique ; et
    le réflecteur avec actionneur selon la revendication 1,
    dans lequel le lecteur optique est configuré de telle sorte que la lumière émise par la source de lumière est réfléchie par la première surface du réflecteur du réflecteur avec actionneur de manière à être guidée vers une région cible de balayage, et la lumière de retour provenant de la région cible de balayage est réfléchie par la deuxième surface de manière à être guidée vers le détecteur optique.
  8. Actionneur à miroir comprenant :
    une partie oscillante (132, 232) ayant une première surface (132c) et une deuxième surface (132d) disposée sur un côté opposé de la première surface, la première surface et la deuxième surface correspondant à des surfaces de réflexion ; et
    une première partie de support (135) supportant la partie oscillante de manière à permettre à la partie oscillante d'osciller autour d'un premier axe d'oscillation,
    caractérisé en ce que l'actionneur à miroir comprend en outre un aimant (236) qui a la forme d'un rectangle et qui est prévu dans une région de la partie oscillante où la surface de réflexion n'est pas formée de sorte qu'un sens longitudinal de l'aimant est parallèle au premier axe d'oscillation ; et
    une bobine (131a, 139a, 231a-1, 231b-1) qui génère un champ magnétique agissant sur l'aimant.
  9. Actionneur à miroir selon la revendication 8,
    dans lequel l'aimant est prévu sur au moins une de la première surface et de la deuxième surface de la partie oscillante.
EP19764806.6A 2018-03-09 2019-03-06 Réflecteur à actionneur, scanner optique et actionneur de miroir Active EP3764147B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP23151648.5A EP4191319A1 (fr) 2018-03-09 2019-03-06 Réflecteur avec actionneur, scanner optique et actionneur de miroir

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018042733 2018-03-09
PCT/JP2019/008843 WO2019172307A1 (fr) 2018-03-09 2019-03-06 Réflecteur à actionneur, scanner optique et actionneur de miroir

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP23151648.5A Division-Into EP4191319A1 (fr) 2018-03-09 2019-03-06 Réflecteur avec actionneur, scanner optique et actionneur de miroir
EP23151648.5A Division EP4191319A1 (fr) 2018-03-09 2019-03-06 Réflecteur avec actionneur, scanner optique et actionneur de miroir

Publications (3)

Publication Number Publication Date
EP3764147A1 EP3764147A1 (fr) 2021-01-13
EP3764147A4 EP3764147A4 (fr) 2021-11-17
EP3764147B1 true EP3764147B1 (fr) 2023-03-22

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EP19764806.6A Active EP3764147B1 (fr) 2018-03-09 2019-03-06 Réflecteur à actionneur, scanner optique et actionneur de miroir
EP23151648.5A Withdrawn EP4191319A1 (fr) 2018-03-09 2019-03-06 Réflecteur avec actionneur, scanner optique et actionneur de miroir

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Application Number Title Priority Date Filing Date
EP23151648.5A Withdrawn EP4191319A1 (fr) 2018-03-09 2019-03-06 Réflecteur avec actionneur, scanner optique et actionneur de miroir

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US (1) US20210018601A1 (fr)
EP (2) EP3764147B1 (fr)
JP (2) JPWO2019172307A1 (fr)
WO (1) WO2019172307A1 (fr)

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CN116964506A (zh) * 2021-03-02 2023-10-27 日本先锋公司 促动器

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Also Published As

Publication number Publication date
JP2022189903A (ja) 2022-12-22
US20210018601A1 (en) 2021-01-21
EP4191319A1 (fr) 2023-06-07
EP3764147A4 (fr) 2021-11-17
EP3764147A1 (fr) 2021-01-13
WO2019172307A1 (fr) 2019-09-12
JPWO2019172307A1 (ja) 2021-03-11

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