EP3736447A1 - Vacuum pump and method for monitoring a vacuum pump - Google Patents

Abstract

The invention relates to a vacuum pump or a vacuum system comprising at least one vacuum pump, the vacuum pump being assigned an inertial measuring unit which comprises at least one inertial sensor which is designed to detect movements of the vacuum pump and / or the orientation of the vacuum pump and related measurement data and / or provide information obtained by evaluating this measurement data.

Description

The invention relates to a vacuum pump, in particular a turbo-molecular vacuum pump. The invention also relates to a vacuum system with at least one vacuum pump, in particular with a turbo-molecular vacuum pump. The invention also relates to a method for monitoring a vacuum pump or a vacuum system comprising at least one vacuum pump.

In the context of this disclosure, a vacuum system is to be understood, for example, as an arrangement of one or more vacuum pumps and one or more vacuum chambers or recipients to be evacuated. Such an arrangement is sometimes referred to as a pumping station.

In many technical fields and also in the field of vacuum technology, condition monitoring, ie the acquisition and evaluation of status information about the individual components of a vacuum system or an individual vacuum pump, is becoming increasingly important in practice. The goals associated with condition monitoring are extremely diverse and range, for example, from increasing the service life of a vacuum pump to simplifying and improving the maintenance and service of the vacuum pump and vacuum system to improving the operational options for the operator and increasing customer friendliness by providing vacuum pumps and Information relating to the vacuum system. In this context, the customer is usually understood to be the operator of the vacuum pump or of a vacuum system comprising the vacuum pump, who purchases the vacuum pump from the pump manufacturer. Against this background Condition monitoring can also play an important role with regard to possible disputes between the pump manufacturer and operator, e.g. due to warranty claims and complaints.

The object of the invention is therefore to create the simplest, most reliable and inexpensive possible way of monitoring the status of a vacuum pump or of a vacuum system comprising at least one vacuum pump.

This object is achieved in each case by the features of the independent claims.

In the vacuum pump according to the invention and in the vacuum system according to the invention, which comprises at least one vacuum pump, an inertial measuring unit assigned to the vacuum pump is provided according to the invention, which comprises at least one inertial sensor which is designed to detect movements of the vacuum pump and / or the orientation of the vacuum pump and provide related measurement data and / or information obtained by evaluating these measurement data.

An inertial measuring unit, which is also referred to in the technical field as an IMU (IMU = Inertial Measurement Unit), is a spatial arrangement of several inertial sensors. An inertial sensor can be, for example, an acceleration sensor or a rotation rate sensor. A rotation rate sensor is also referred to as a gyroscope sensor or a gyroscopic sensor. Such inertial sensors are nowadays in use en masse and are available on the market in a wide variety of designs and qualities.

An acceleration sensor typically supplies linear acceleration values for a translational movement with respect to a translation axis. A rotation rate sensor typically supplies angular velocities related to an axis of rotation. By integrating the acceleration values of an acceleration sensor twice, path information can be obtained, that is to say information about the path covered in relation to a reference position or reference position. By integrating the angular velocities of a rotation rate sensor once, information on the angle of rotation can be obtained, that is to say information about a respective angle of rotation covered in relation to a reference position or reference orientation. For this reason, inertial sensors are typically used for navigation tasks, for example for drones. But inertial sensors are also used in large numbers for other applications, for example as sensors in mobile phones or for measuring vibrations on buildings and machines.

Inertial sensors available on the market can be designed in such a way that they directly deliver acceleration or speed signals (i.e. raw measured values or raw data), which consequently do not require any further preparation or processing in order to provide information relating to the respective acceleration or speed directly from the inertial sensor itself receive. The inertial measuring unit used according to the invention, which can comprise one or more inertial sensors, can consequently directly provide one or more acceleration or speed signals. Alternatively, however, the inertial measuring unit can also be designed and, for this purpose, in particular equipped with appropriate electronics, so that basically any signal preparation and processing and storage of either the "raw data" or information obtained therefrom can take place.

The “position” of an object, in particular a vacuum pump, is to be understood in the context of this disclosure as its position and orientation in a respective coordinate system. A translation of the object changes its position and a rotation of the object changes its orientation. A movement of the object can include only translations with respect to one, two or three translation axes or exclusively rotations with respect to one, two or three rotation axes or both translations and rotations, in particular with respect to all six possible degrees of freedom.

In the context of this disclosure, “movements” of an object, in particular a vacuum pump, are to be understood, among other things, to include vibrations or oscillations of the vacuum pump.

The movement of an object, in particular a vacuum pump, also leads to a sound emission in the vicinity of the object. Vibrations or oscillations also typically lead to undesirably emitted sound levels. The resulting sound pressure or sound level or the sound spectrum of the object can be recorded with a sound pressure sensor or a sound level frequency sensor, in particular a microphone. In the context of this disclosure, for the sake of simplicity, the general term “inertial sensor” also applies synonymously for sound pressure or sound level sensors, even if these are not separately mentioned again as a special embodiment.

The measurement data that are provided according to the invention by the at least one inertial sensor of the inertial measuring unit assigned to the vacuum pump, in particular integrated into the vacuum pump, can be raw measurement data, in particular acceleration or speed signals generated directly by the inertial sensor. These raw measurement data can, for example, be stored in the vacuum pump and thus, for example, be kept available for later evaluation. Immediate signal processing, especially in real time, is therefore not required here. As an alternative or in addition, the measurement data provided can also be processed measurement data, for example by means of a device belonging to the inertial measurement unit Electronics - obtained from the signals supplied directly by the inertial sensor through conditioning or processing.

In a preferred embodiment of the invention, the inertial measuring unit assigned to the vacuum pump, preferably integrated into the vacuum pump, consequently comprises one or more inertial sensors, each of which directly supplies an acceleration signal or a speed signal.

In the monitoring method according to the invention, movements of the vacuum pump and / or its orientation and / or movements of the vacuum system are recorded by means of the inertial measuring unit of the vacuum pump before, during and / or after operation of the vacuum pump or the vacuum system, and the relevant measurement data are obtained and / or by evaluating these measurement data Information provided. As already mentioned in connection with the vacuum pump according to the invention and the vacuum system according to the invention, these measurement data can be raw measurement data from the inertial sensor and / or processed measurement data.

The monitoring according to the invention includes in particular the acquisition or detection or recognition of states or changes in state of the vacuum pump and / or the vacuum system as well as the provision and / or storage of related state information.

According to the invention it is possible, but not mandatory, to evaluate the measurement data during operation and to intervene in the ongoing operation of the vacuum pump and / or the vacuum system as a reaction to this evaluation. Thus, according to the invention, it is possible, for example, to merely store the measurement data or information obtained through their evaluation during the operation of the vacuum pump and to evaluate them at a later point in time, for example in the event of service or during a regular maintenance appointment.

According to the invention, the inertial measuring unit can be integrated into the vacuum pump. Alternatively, the inertial measuring unit can be integrated into an external accessory part that can be detachably attached to the pump. For example, the inertial measuring unit can be integrated into an electronics housing of the vacuum pump, which is arranged outside the actual pump housing of the vacuum pump and, in particular, is detachably connected to the vacuum pump. The processing or evaluation of the measurement data can take place in the mentioned accessory part, in the electronics housing or in drive electronics of the vacuum pump. The drive electronics can be located in the electronics housing mentioned. Both as an accessory part and as an integrated solution, the inertial measuring unit can be connected to a display, output, evaluation, data forwarding or other data processing unit with connectors, wired or wirelessly.

Further possible embodiments of the invention, namely the vacuum pump according to the invention and the vacuum system according to the invention and the monitoring method according to the invention, are given below.

According to an exemplary embodiment of the invention, the vacuum pump is assigned a control device connected to the inertial measuring unit, which control device is designed to evaluate the measurement data from the inertial measuring unit.

According to a further exemplary embodiment of the invention, the vacuum pump is assigned an output device via which the measurement data of the inertial measurement unit and / or information obtained by evaluating these measurement data can be output or called up. This output device can be, for example, a data interface of the vacuum pump or an accessory connection of the vacuum pump, also referred to as an accessory port. Alternatively or additionally, the output can also be wireless. Furthermore, according to an exemplary embodiment of the invention, it can be provided that the vacuum pump is assigned a storage device which is designed to store the measurement data of the inertial measurement unit and / or information obtained by evaluating this measurement data.

As already mentioned in connection with the inertial measuring unit, the control device and / or the storage device can be integrated in the vacuum pump, in an electronics housing of the vacuum pump, in an accessory part of the vacuum pump or in a data storage and processing device connected via data forwarding to a possibly remote location his. The invention can consequently make use of infrastructures such as edge, cloud and / or fog computing.

The control device can be integrated into the inertial measuring unit. Alternatively, it is possible that the inertial measuring unit forms part of the control device. The storage device can be integrated in the control device or in the inertial measuring unit or provided separately therefrom.

The inertial measuring unit and / or the control device and / or the storage device can be integrated into drive electronics of the vacuum pump.

The inertial measuring unit preferably comprises a spatial arrangement of a plurality of inertial sensors, the inertial measuring unit in particular comprising two or three acceleration sensors, each of which is assigned one of three translation axes of the vacuum pump that are perpendicular to one another in pairs, and / or two or three rotation rate sensors, each of which comprises one of three perpendicularly in pairs is assigned to mutually extending axes of rotation of the vacuum pump.

The inertial measuring unit can be designed, for example, as a MEMS (MEMS = micro-electro-mechanical system) or a component of a MEMS or be designed as an optical system.

The construction and the mode of operation of such inertial measuring units and also other specific configurations of inertial measuring units or IMUs are - as already mentioned above - familiar to the person skilled in the art, so that they do not need to be discussed in more detail.

According to the invention, the inertial measuring unit can in principle be attached at any point on the vacuum pump. Depending on the specific design of the vacuum pump as well as depending on the respective application, one or certain points of the vacuum pump can prove to be particularly advantageous for the arrangement of the inertial measuring unit. According to the invention, a possible location for arranging the inertial measuring unit is a vacuum feed-through of the vacuum pump. Such vacuum feedthroughs are known in principle. A vacuum feedthrough of a vacuum pump can for example be formed by a circuit board. According to the invention, the inertial measuring unit can be arranged on such a board which forms a vacuum feedthrough. In this way, existing vacuum pumps can be retrofitted with an inertial measuring unit with comparatively little effort and at relatively low cost. Another advantage is that for such an arrangement of the inertial measuring unit, series production of vacuum pumps only needs to be changed relatively slightly.

However, it is also entirely possible to apply the inertial measuring unit, or any other desired sensor (eg temperature measuring sensor), to its own circuit board fastened within the pump. This board can then be connected to another board or a vacuum feed-through or a board as a vacuum feed-through, for example detachably by means of a cable (eg with a plug-in connection), partially detachable (eg with a clamp-cut connection), or non-detachable (eg soldered).

According to an exemplary embodiment of the monitoring method according to the invention, it is provided that one or more items of status information of the vacuum pump and / or the vacuum system are determined on the basis of the measurement data. According to the invention, the or each piece of status information can be output via an output device of the vacuum pump and / or stored in a storage device of the vacuum pump.

Status information can, for example, only be a “snapshot” of the vacuum pump or one or more predetermined components of the vacuum pump. Alternatively, status information can reflect the behavior over time or the development over time of the vacuum pump or of a respective component, in particular in relation to one or more parameters or signals of the vacuum pump or of the respective component. In this case, the inertial measurement unit repeatedly provides the measurement data with basically any predetermined or predeterminable temporal resolution.

According to a possible embodiment of the invention, the orientation of the vacuum pump in space and / or the orientation of the vacuum pump relative to one or more other components of the vacuum system is determined as status information of the vacuum pump and / or the vacuum system.

In this context, the control device of the vacuum pump can be designed to either allow or prevent an operational start of the vacuum pump as a function of the determined orientation of the vacuum pump. The vacuum pump can determine for itself whether it is oriented that an operation would be impermissible and make it impossible for a user to inadvertently initiate an impermissible start of operation.

Alternatively or additionally, the determined orientation of the vacuum pump can be taken into account when evaluating a frequency spectrum relating to vibrations of the vacuum pump and / or of the vacuum system. The fact that the vibration behavior of a vacuum pump is dependent on the orientation of the pump in space can be used here. As a result, the vibration behavior can be specifically evaluated and assessed depending on the determined orientation of the vacuum pump.

According to a further exemplary embodiment of the invention, the orientation of the vacuum pump is only stored in the event of special, predetermined events. The determined orientation is not actively used here in the sense that, depending on the determined orientation, there is active intervention in the ongoing operation of the pump, but the mere storage of the information serves a passive use of this information. An event in the sense of this exemplary embodiment can be, for example, energizing the vacuum pump, starting the vacuum pump, starting one or more specified components - with the exception of the vacuum pump itself - of a vacuum system that includes the vacuum pump, or changing the installation position of the vacuum pump. The stored information can then be used at a later time, e.g. can be used for an evaluation in the event of service or a complaint.

According to a further exemplary embodiment of the invention, the vacuum pump comprises a rotor set in rotation during operation by means of a drive motor, an imbalance of the rotor and / or a vibration state of the vacuum pump and / or the vacuum system being determined as status information of the vacuum pump and / or the vacuum system .

The rotor unbalance and / or the vibration state is preferably determined repeatedly during operation of the vacuum pump. In this way, the temporal behavior of the rotor unbalance or the vibration state, in particular the temporal development of the vibration behavior of the vacuum pump, for example, monitored and recorded, i.e. can be saved for later evaluation.

Here, for example, at least one measure of a change over time, in particular a rate of change, of the rotor unbalance and / or of the oscillation state can be calculated. In particular, this takes place in relation to a respective basic state of the rotor unbalance and / or the oscillation state determined at a constant operating speed of the rotor.

The basic state can be determined in the event of one or more one-off events such as the final production test, the initial start-up of a vacuum system or during the acceptance or the first start of production of a vacuum system in such a way that this basic state is saved and used as a permanent reference basis for the im further operation taking place recordings of status information can serve.

According to an exemplary embodiment of the invention, a reaction is triggered when a relative or absolute limit value is exceeded. In particular, a warning is issued. The limit value is, for example, a limit value for the rotor unbalance and / or for the vibration state or a limit value for a change in the rotor unbalance and / or the vibration state over time. For example, the oscillation amplitudes can be determined over time, and a compensation curve can be computed from these support points, the local slope of which represents a measure of the change in the oscillation behavior over time, that of an evaluation or again can be subjected to a temporal consideration. Furthermore, the support points can be evaluated in detail with the aid of statistical procedures such as trend or distribution analyzes, stability or outlier analyzes.

Alternatively or additionally, according to a further exemplary embodiment, when a relative or absolute limit value for the rotor unbalance and / or for the vibration state is approached, or when a relative or absolute limit value for a temporal change in the rotor unbalance and / or the vibration state is approached, an estimated value for the next The maintenance date of the vacuum pump is calculated or a currently planned maintenance interval is adjusted.

According to a further embodiment of the invention, a measure for a utilization reserve of the vacuum pump is calculated, e.g. based on an initial value of 100% set when the vacuum pump was delivered, from which the countdown is made while the vacuum pump is in operation. Furthermore, as an alternative or in addition, a recommendation value for a time until the next maintenance of the vacuum pump can be calculated and kept available via a data interface or output directly via an output unit. This takes place in particular taking into account the previous usage profile of the vacuum pump and thus individually for each individual vacuum pump.

When determining the rotor unbalance and / or the vibration behavior, the evaluation of the measurement data of the inertial measuring unit can be limited to movements in the radial direction - based on the axis of rotation of the rotor.

The determination of the rotor unbalance and / or the vibration state consequently represents a powerful diagnostic tool with which both the operator and the manufacturer of the vacuum pump have a wide range of options for checking and monitoring of the functionality and operational safety of the vacuum pump.

According to the invention, the determined rotor unbalance and / or the determined vibration behavior can be evaluated in the sense that this parameter of the vacuum pump is evaluated as a change index. In this context, this parameter, e.g. the rotor imbalance, one of preferably several predefined KPIs (KPI = Key Performance Indicator). In particular, the parameter can form a so-called health KPI, which allows an assessment of the current functional state of the vacuum pump.

According to the invention, the rotor unbalance can be evaluated by the 1st harmonic, which corresponds to the frequency of the operating speed of the rotor. The higher harmonics can also be used for this evaluation of the rotor imbalance. But this is not absolutely necessary.

According to the invention, methods from the field of Fourier analysis can be used to evaluate the measurement data, for example an FFT (FFT = Fast Fourier Transform). Such an FFT can, for example, be created on the basis of a digital time signal. Furthermore, according to the invention, special methods of digital signal processing can be used in the evaluation of the measurement data, for example a Görtzel algorithm or another type of discrete Fourier transformation. A Görtzel algorithm allows the calculation of individual discrete spectral components of the frequency spectrum. In this way, for example, the so-called running peak can be considered when evaluating the measurement data.

As far as the signal processing during the evaluation of the measurement data is concerned, the invention enables a comparatively simple procedure, in particular does without successively tuning through frequencies and without the use of so-called frequency filter circuits.

The above-mentioned options for evaluating the measurement data can be combined with one another and are not restricted to specific causes for vibrations in the vacuum pump. Vibrations of the vacuum pump can for example be caused by a rotor imbalance, but also by external sources, for example by other pumps or components having moving parts of the respective vacuum system to which the vacuum pump provided with the inertial measuring unit belongs.

According to a further embodiment of the invention, a state of vibration of the vacuum pump and / or of the vacuum system can be determined as status information of the vacuum pump and / or the vacuum system. In particular, a frequency spectrum relating to vibrations of the vacuum pump and / or of the vacuum system is determined.

Vibrations of the vacuum pump during operation arise in particular when the vacuum pump comprises a rotor which is set in rotation during operation by means of a drive motor. As already mentioned, vibrations of the vacuum pump can also have other, for example external, but also other internal causes. The invention is consequently not restricted to such vacuum pumps which comprise a rotor which is set in rotation during operation by means of a drive motor. So-called scroll vacuum pumps, for example, do not have a rotor that rotates during operation, but rather one or more other moving components that perform what is known as an orbiting movement. The invention can also be used in connection with such vacuum pumps.

As already mentioned, according to the invention the determination of a frequency spectrum of the vacuum pump can include methods from the field of Fourier analysis, for example a so-called FFT (FFT = Fast Fourier Transform). The acquisition of the frequency spectrum can be limited to individual frequencies or frequency bands. The storage of a determined frequency spectrum can be limited to the storage of certain points, areas or sections of the frequency spectrum, for example in such a way that only a certain number of the relatively highest peaks are saved.

If an oscillation state of the vacuum pump and / or the vacuum system is determined as state information, then it can be provided in particular that the oscillation state is determined and in particular stored while the vacuum pump is running up. The oscillation state is thus determined during an initial operating phase of the vacuum pump, during which the speed of the rotor increases. In particular, the oscillation state can additionally be determined after the run-up with the rotor running at operating speed.

Preferably, resonance states of the vacuum pump and / or the vacuum system are determined in this case, that is to say while the vacuum pump is running up. The pump acts here as a stimulator. How the pump and the system respond to the excitation provides information about existing resonances over a broad frequency spectrum, in particular from 0 Hz up to the operating speed. Information relating to such resonance states can be used, for example, for output to or for retrieval by an external device, e.g. a system control of the vacuum system, and in this way e.g. made available to the operator of the vacuum system.

The aforementioned procedure for determining resonance states can be used not only when a vacuum pump is started up, but also vice versa Cycle or process end of a vacuum system and thus be used when the vacuum pump is running down or running down. This method may require additional operating time, for example additional measuring time after or at the intended end of the process to determine the vibration state with the rotor still running at operating speed, possibly with at least a portion of the process gas flow still active. Furthermore, the venting of the vacuum system may be delayed, in particular actively controlled, so that the vacuum pump can decelerate optimally in order to achieve the best possible resonance measurement.

Potential advantages of the measurement in the run-down compared to a determination during the run-up of the vacuum pump are, for example, a lower potential electromagnetic and mechanical interference spectrum for the inertial measuring unit, which is usually arranged spatially close by the drive motor, which is not active at all or only with low braking power instead of maximum power their signal lines.

Another advantage is that at the end of the cycle or process, the status information is determined during a stable, thermally steady state of the vacuum pump and the vacuum system. The previous operating sequence typically takes place in the same way and thus generates a long-term stable basis for comparison of the recorded operating states. Unwanted influences or the variability of unspecific, rarely occurring conditions and their effects on the status information can be significantly reduced. The "cold start" of a system, that is to say the first run-up of the vacuum pump and the vacuum system at the beginning of an operating day or also the first operating cycle after a longer process pause, is mentioned here as an example.

Finally, the organizational advantage should be mentioned of receiving as current status information as possible at the end of a possibly longer operating sequence or a batch, which provides the user / operator with the best possible over the remaining usage reserve before the potential start of another possibly longer one, possibly planned later Of the operational sequence or a batch.

Alternatively or additionally, the operational reliability and / or the service life of the vacuum pump and / or the vacuum system can be increased according to the invention with the aid of the determined resonance states by removing the vacuum pump and / or the vacuum system at a predetermined point in time, in particular when the speed of the rotor is that of a Approaches the resonance state, a warning is issued or the speed of the rotor is automatically adjusted. Operation of the vacuum pump in a resonance state can hereby be avoided.

The determination of a vibration state of the vacuum pump and / or the vacuum system can alternatively or additionally also be used according to the invention to automatically change the speed of the rotor of the vacuum pump if, based on the vibration state determined by a control device of the vacuum pump or from a system controller of the vacuum system, one or more further vacuum pumps are recognized within the vacuum system, which are operated with at least approximately the same operating speed as the vacuum pump. In this way, undesirable beat conditions can be prevented.

The determination of a vibration state of the vacuum pump and / or the vacuum system can also be used according to a further embodiment of the invention to monitor one or more predetermined parameters of the vacuum pump and / or one or more signals from one or more sensors of the vacuum pump based on the determined vibration state. This monitoring can take place in particular with regard to the behavior over time of the parameter or parameters or the signal or signals.

Such monitoring is preferably carried out based on a setpoint state of the vacuum pump and / or the vacuum system determined in a learning phase, with a control device of the vacuum pump subsequently checking whether the monitored parameter (s) and / or the monitored signal (s) correspond to the Correspond to the target state or not. If, during this check, a deviation from the target state - taking into account given tolerances - is detected, then this change in the relevant parameter or signal is subjected to an evaluation and / or evaluation, preferably taking into account given criteria.

The aforementioned learning to determine the target state is preferably carried out automatically.

According to the invention, such learning can also be carried out in a very general way, i.e. independently of the determination of a vibration state and also independently of a monitoring based on it, e.g. mentioned above, in order to provide a, in particular permanent, basis for comparison for any measurements carried out with the aid of the inertial measuring unit.

According to a further exemplary embodiment of the invention, one or more special events are determined as status information of the vacuum pump and / or of the vacuum system. The event or events determined, ie information or data relating to the event or events, can be output via an output device of the vacuum pump and / or stored in a storage device of the vacuum pump.

It can be provided that the permanently determined measurement data are only buffered and only stored when an event actually occurs. What is rated as an "event" depends on the respective application and can be specified by certain criteria. Predefined limit values, e.g. for the oscillation amplitude measured as a parameter, the exceeding of which is assessed as the occurrence of an event. According to the invention, one or more limit values can be assigned to any parameters or signals.

One embodiment of the invention is that the vacuum pump comprises a rotor set in rotation during operation by means of a drive motor, and that as a special event during operation of the vacuum pump, an axial displacement of the rotor between a first axial position and a second axial position is detected becomes. For example, the first axial position is a so-called fore-vacuum position of the rotor and the second axial position is a so-called high-vacuum position.

Such displacements of the rotor, which are also referred to as jumps, are known in principle to the person skilled in the art. This phenomenon, observed in practice, occurs in particular in the case of hybrid-bearing rotors of turbo-molecular vacuum pumps. Hybrid mounting means that a magnetic bearing, in particular a passive, repulsive radial bearing with permanent magnets, is located on the high vacuum side (HV side) of the pump between the rotor and a stator of the pump. On the other hand, on the fore-vacuum side (W-side), the rotor is mounted by means of a roller bearing, in particular a ball bearing. The bearing concept identifies the magnetic bearing as a floating bearing with a radial and the roller bearing as a fixed bearing with a radial and axial bearing effect in relation to the axis of rotation.

The cause of a "rotor jump" is an operational heating of the rotor and the resulting axial thermal expansion of the rotor along its axis of rotation, which leads to a change in the axial relative position on the floating bearing side between a rotor-side magnetic bearing package and a stator-side magnetic bearing package of the magnetic bearing between the rotor and stator . This change leads to a change in the system-related, undesirably occurring axial repulsive forces of the magnetic bearing in a magnetic bearing, with the result that at a certain point in time the rotor executes a sudden movement in the direction of the high vacuum side. This movement is made possible and limited by the axial backlash on the fixed bearing side for technical reasons. The backlash is composed in particular of the rolling bearing play, in particular the bearing clearance or the operating play, and the elasticities of the other adjacent components, in particular a vibration isolating and / or damping elastomer bearing embedding.

When the rotor cools down, it is also possible to jump back to the fore-vacuum side; in particular, this takes place when the vacuum pump cools down after the vacuum system has been shut down or stopped. The temperature and thus the thermal expansion of the stator components, which are arranged between the bearing points, which varies depending on the operating state, also influences the axial displacement of the magnetic bearing components on the floating bearing side, but this influence is usually less than that of the rotor due to the lower temperature changes during operation. Due to the joint heating during operation, partial amounts of the expansion of the rotor and stator components may compensate each other, but this depends to a large extent on the choice of material, e.g. the respective expansion coefficient, as well as on the type of cooling devices that may be arranged primarily on the stator.

The event of the rotor jump can in particular be described as a change in sign of the axial bearing load carried in the fixed bearing. This bearing load sets is made up of the weight force of the rotor, which varies in strength depending on the spatial orientation or assembly orientation of the vacuum pump, and the axial repulsive force caused by the magnetic bearing. The maximum axial repulsive force of the magnetic bearing in limit operating states such as the operation of the vacuum pump with a rotor at maximum temperature and a very well cooled stator or the first, "fully cooled" start of the vacuum pump at minimum temperatures as the other extreme is usually greater than the absolute weight of the Rotor. Correspondingly, rotor jumps occur independently of the spatial orientation of the pump during certain operating phases, in particular after a brief warm-up phase or after the vacuum pump has been shut down, regularly once per phase.

During the manufacture or maintenance of a vacuum pump, the so-called "setting" of the hybrid bearing can be done in such a way that at a standard temperature the direction and amount of the axial repulsive forces are adjusted to a value optimally selected for later operation of the vacuum pump with the help of mechanical control and setting means or devices is changed. This is done in particular through the mechanical variation of the axial distance between the floating and fixed bearings on the stator side by auxiliary devices such as the addition of washers or the adjustment of pretensioned, self-locking thread adjustment elements.

A setting can be used to ensure various goals, in particular the maximum axial bearing forces should be kept low in all possible operating states in order to increase the rolling bearing service life, and it can also be an objective to carry out the necessary rotor jump safely at a specific operating time, e.g. during warming up . In this context, therefore, one speaks of a “jumping” of the rotor which was previously “running on the fore-vacuum side” and then “running on the high-vacuum side”, or vice versa.

Since such rotor jumps each result in a (brief) movement of the vacuum pump, such an event can be detected by means of the inertial measuring unit according to the invention. For example, in a later evaluation, e.g. It is possible to check the proportion of the total operating hours of the pump that the rotor was on the fore-vacuum side and the proportion of the rotor that was in the high vacuum position. The comparison of the rotor temperature and individual or several pump body temperatures can be used to determine the bearing loads that are prevalent in the respective state and caused by the axial repulsive forces of the magnetic bearing, which are added as an additional component to the usual static and dynamic bearing loads of the roller bearing. The point of the rotor jump can also be assessed in this way; in particular, a message can be generated if maintenance is necessary for readjustment or revision of the bearing setting.

Alternatively or in addition, according to the invention, a movement of the vacuum pump as a whole can be detected as a special event. This movement can be analyzed, for example, with regard to the direction and amount of translations and / or rotations of the vacuum pump. The movement of the vacuum pump can be analyzed, for example, while the vacuum pump is operating in mobile or so-called semi-mobile vacuum systems.

Due to the gyroscopic forces, the speed of rotation rate changes that do not take place coaxially with respect to the axis of rotation of the rotor of the vacuum pump plays a decisive role in the radial bearing load of a rotating system such as a vacuum pump. The analysis of the rate of rotation can therefore be used to provide information and / or warnings about the permissible speed the rate of rotation change during operation of the vacuum pump. The permissible loads and thus the rate of change can be defined at different levels depending on the direction of rotation. Information can be output for each spatial axis or as a calculated, resulting comparison value.

In vacuum pumps with non-contact magnetic bearings, the consumption of the radial and, if applicable, axial bearing gap is typically the limiting factor for defining the permissible changes in rotation rate as well as the translation speed changes. Especially with vacuum pumps with hybrid bearings, a direct measurement of the backup bearing gap is hardly possible during operation. Direction-dependent monitoring of the changes in motion, both rotationally and translationally, enables status information to be provided as to the load area in which the magnetic bearing is located and whether there is sufficient safety reserve for the warning or error thresholds.

Other possible special events that can be determined according to the invention are changes in the installation position of the vacuum pump, so-called "shocks", which are events which each lead to a predetermined acceleration limit value being exceeded for a short time. Such shocks can occur, for example, by hitting valves or slides used in the vacuum system, by hitting the vacuum pump or by other mechanical effects on the vacuum system or on the vacuum pump, for example when the vacuum pump or the vacuum system falls.

According to the invention, the measurement data and / or the information obtained therefrom can be used in a variety of ways. For example, the data / information can only be stored in the vacuum pump, in such a way that only the manufacturer of the vacuum pump has access to this data / information.

Alternatively, the data / information can be made available to the operator of the vacuum pump or of a vacuum system comprising the vacuum pump. As already mentioned elsewhere, in practice this operator is often a customer of the manufacturer of the vacuum pump.

In general, it can be provided according to the invention that the measurement data and / or the information obtained by evaluating these measurement data can only be output or retrieved if an authorization is present. This can take place in particular via an interface of the vacuum pump or an accessory connection of the vacuum pump. The required authorization can be provided, for example, by the manufacturer of the vacuum pump. Some operators of the vacuum pump can consequently be granted access to the data / information, while other operators can be denied.

As an alternative or in addition, the data / information can be output to a system control of a vacuum system comprising the vacuum pump and / or can be called up by this system control. Access to the data / information does not therefore have to be done directly via the vacuum pump, but can take place via the system control, in which the vacuum pump is integrated, in particular via its control device.

Fig. 1

eine perspektivische Ansicht einer Turbomolekularpumpe,

Fig. 2

eine Ansicht der Unterseite der Turbomolekularpumpe von Fig. 1,

Fig. 3

einen Querschnitt der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie A-A,

Fig. 4

eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie B-B,

Fig. 5

eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie C-C, und

Fig. 6

ein mögliches Ausführungsbeispiel einer erfindungsgemäßen Vakuumpumpe als Bestandteil eines erfindungsgemäßen Vakuumsystems.

In the following, the invention is described by way of example on the basis of advantageous embodiments with reference to the accompanying figures. They show, each schematically:

Fig. 1

a perspective view of a turbo molecular pump,

Fig. 2

a view of the bottom of the turbo molecular pump of Fig. 1 ,

Fig. 3

a cross section of the turbo molecular pump along the in Fig. 2 shown section line AA,

Fig. 4

a cross-sectional view of the turbo molecular pump along the line in FIG Fig. 2 shown section line BB,

Fig. 5

a cross-sectional view of the turbo molecular pump along the line in FIG Fig. 2 shown section line CC, and

Fig. 6

a possible embodiment of a vacuum pump according to the invention as part of a vacuum system according to the invention.

In the Fig. 1 The turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se. The gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.

In the orientation of the vacuum pump, the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111. The housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also FIG Fig. 3 ).

Several connections 127 for accessories are provided on the electronics housing 123. In addition, a data interface 129, e.g. according to the RS485 standard, and a power supply connection 131 is arranged on the electronics housing 123.

There are also turbomolecular pumps that do not have an electronic housing attached in this way, but are connected to external drive electronics.

A flood inlet 133, in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded. In the area of the lower part 121 there is also a sealing gas connection 135, which is also referred to as a purging gas connection, via which purging gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump. Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant which can be passed into the vacuum pump for cooling purposes. Other existing turbo-molecular vacuum pumps (not shown) are operated exclusively with air cooling.

The lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141. The vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were. In addition, the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown. Embodiments of the vacuum pump can also be implemented in which the underside 141 does not face downwards but rather to the side or can be arranged facing upwards. In principle, any angle is possible.

Other existing turbo-molecular vacuum pumps (not shown), which are in particular larger than the pump shown here, cannot be operated in an upright position.

At the bottom 141, which in Fig. 2 is shown, various screws 143 are also arranged, by means of which components of the vacuum pump not specified here are attached to one another. For example, a bearing cap 145 is attached to the underside 141.

Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbo-molecular vacuum pumps (not shown), which are in particular larger than the pump shown here.

In the Figures 2 to 5 a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.

Like the sectional views of the Figures 3 to 5 show, the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.

A rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.

The turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119. A rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage. The stator disks 157 are held at a desired axial distance from one another by spacer rings 159.

The vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping. There are other turbo-molecular vacuum pumps (not shown) that do not have Holweck pump stages.

The rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-shell-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested inside one another.

The active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pumping stage following the turbo molecular pumps. The radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with it this a second Holweck pumping stage. The radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.

At the lower end of the Holweck rotor sleeve 163, a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173. In addition, a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. As a result, the nested Holweck pump stages are connected in series with one another. At the lower end of the radially inner Holweck rotor sleeve 165, a connection channel 179 to the outlet 117 can also be provided.

The aforementioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposing lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.

For the rotatable mounting of the rotor shaft 153, a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.

In the area of the roller bearing 181, a conical injection molded nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181. The injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store. In other existing turbo-molecular vacuum pumps (not shown), instead of an injection nut, a Spray screw be provided. Since different designs are thus possible, the term "spray tip" is also used in this context.

The operating medium storage comprises a plurality of absorbent disks 187 stacked on top of one another, which are provided with an operating medium for the roller bearing 181, e.g. with a lubricant.

During operation of the vacuum pump 111, the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function. The roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.

The permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction. The ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside. The magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially. The rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside. The stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119. The ring magnets 195 on the rotor side are parallel to the axis of rotation 151 by means of a cover element coupled to the carrier section 201 207 set. The stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. A plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.

An emergency or retainer bearing 215 is provided inside the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented. The backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation. The radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.

The vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149. The armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217. A permanent magnet arrangement can be arranged radially on the outside or embedded in the section of the rotor shaft 153 extending through the motor stator 217. Between the motor stator 217 and the section of the rotor 149 extending through the motor stator 217, an intermediate space 219 is arranged which comprises a radial motor gap over which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can influence each other magnetically.

The motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125. A sealing gas, which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135. The electric motor 125 can protect against process gas, e.g. protected against corrosive components of the process gas. The engine compartment 137 can also be evacuated via the pump outlet 117, i. The vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.

A so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the motor compartment 217 from the Holweck pump stages located radially outside.

Fig. 6 is based on the representation of the Fig. 3 and shows the turbo-molecular vacuum pump according to the invention, which is also referred to below simply as a turbo-molecular pump or as a turbo pump, in a cross section through the turbo pump according to the invention, which corresponds to the cross section of FIG Fig. 3 corresponds.

As in the embodiment of Fig. 6 shown, the invention can consequently be used in connection with a turbo molecular pump, as described above with reference to FIG Figs. 1 to 5 has been described.

The turbo pump 11 according to the invention consequently has a rotor 49 with a shaft 53 which, during operation, is set in rotation about an axis of rotation 51 by means of an electric motor 25.

The rotor 49 is provided with a hybrid bearing. On the VV side (in Fig. 6 below) a roller bearing 81 is provided for the rotor 49. On the AGM side (in Fig. 6 above) the rotor 49 is supported by a permanent magnetic bearing 83 which has a rotor-side bearing half 91 and a stator-side bearing half 93.

The vacuum pump 11 has an outer housing 19 which is connected to a lower part 21. On the HV side, that is to say at the pump inlet, the housing 19 has a so-called star in the region of an inlet flange 13, which comprises several radial struts 105 which converge in the center, that is to say on the axis of rotation 51.

An electronics housing 23 is detachably attached to the outside of the housing 19 and the lower part 21. In the electronics housing 23 there is, among other things, control and drive electronics (not shown) for the vacuum pump 11, in particular for the electric motor 25, but also for possible other components (not shown) of the vacuum pump 11 such as sensors etc.

The electronics housing 23 is connected via electrical plug-in contacts, the pump-side contacts being formed on a circuit board 22 serving as a vacuum feed-through in the area of the lower part 21 of the vacuum pump 11.

In the exemplary embodiment shown here, the vacuum pump 11 according to the invention is part of a vacuum system 12, which is only indicated schematically here by a dashed line. The vacuum system 12 can form, for example, a pumping station which comprises a vacuum chamber to be evacuated by means of the vacuum pump 11 and a backing pump (not shown) assigned to the vacuum pump 11.

In principle, the vacuum system 12 can have any complex structure and, for example, comprise one or more vacuum chambers and, in addition to the vacuum pump according to the invention, one or more further vacuum pumps, which may or may not be designed according to the invention. The vacuum system 12 can be designed to be mobile or semi-mobile.

The vacuum system 12 has a system controller 24 by means of which all parts and components of the vacuum system 12 can be controlled and which enables an exchange of control signals and data.

The vacuum pump 11 according to the invention can be connected to the system controller 24, for example, via a data interface 29 which is formed on the electronics housing 23 of the vacuum pump 11. As Fig. 6 shows, an accessory port 27 is also provided on this electronics housing 23.

The vacuum pump 11 according to the invention is designed to carry out one or more exemplary embodiments of the monitoring method according to the invention. The vacuum system 12 according to the invention is also designed to carry out one or more exemplary embodiments of the monitoring method according to the invention.

According to the invention, the vacuum pump 11 is provided with an inertial measuring unit 14 which is permanently attached to a component part of the pump 11. In order to illustrate that it is possible within the scope of the invention to arrange an inertial measuring unit 14 at different points on the vacuum pump 11, FIG Fig. 6 Purely by way of example, two different locations are shown.

According to a possible embodiment according to the invention, the inertial measuring unit 14 is arranged on the aforementioned star comprising a plurality of radial struts 105 at the pump inlet, specifically centrally with respect to the axis of rotation 51. Alternatively, an eccentric arrangement of the inertial measuring unit 14 on the star of the vacuum pump 11 can also be provided.

According to another exemplary embodiment according to the invention, the inertial measuring unit 14 is attached to the mentioned circuit board 22, which forms a vacuum feed-through on the lower part 21 of the pump 11.

In principle, it is possible according to the invention to arrange more than one inertial measuring unit 14 on the vacuum pump 11.

Like the enlarged, schematic illustration top left in Fig. 6 shows, the inertial measuring unit 14 comprises several - in this example six - inertial sensors 16. In a preferred embodiment - as already mentioned as an example in the introductory part - three acceleration sensors and three rotation rate sensors are provided in order to in this way all six possible degrees of freedom of movements of the vacuum pump 11 to cover.

As far as possible applications of the vacuum pump 11 according to the invention and the vacuum system 12 according to the invention and in particular possible monitoring methods are concerned, which with the above with reference to FIG Fig. 6 described vacuum pump 11 according to the invention or the described vacuum system 12 can be carried out, reference is made to the introductory part to avoid repetition.

The invention thus creates a simple, reliable and inexpensive option for monitoring the status of vacuum pumps and vacuum systems on the basis of measurement data from an inertial measuring unit assigned to the vacuum pump.

List of reference symbols

111, 11

Turbo molecular pump

113, 13

Inlet flange

115

Pump inlet

117

Pump outlet

119, 19th

casing

121.21

Lower part

123, 23

Electronics housing

125, 25

Electric motor

127.27

Accessory connection

129, 29

Data interface

131

Power supply connection

133

Flood inlet

135

Sealing gas connection

137

Engine compartment

139

Coolant connection

141

bottom

143

screw

145

Bearing cap

147

Mounting hole

148

Coolant line

149, 49

rotor

151, 51

Axis of rotation

153. 53

Rotor shaft

155

Rotor disk

157

Stator disc

159

Spacer ring

161

Rotor hub

163

Holweck rotor sleeve

165

Holweck rotor sleeve

167

Holweck stator sleeve

169

Holweck stator sleeve

171

Holweck gap

173

Holweck gap

175

Holweck gap

179

Connection channel

181, 81

roller bearing

183, 83

Permanent magnet bearings

185

Injection nut

187

disc

189

commitment

191, 91

rotor-side bearing half

193, 93

stator-side bearing half

195

Ring magnet

197

Ring magnet

199

Bearing gap

201

Beam section

203

Beam section

205, 105

radial strut

207

Cover element

209

Support ring

211

Fastening ring

213

Disc spring

215

Emergency or fishing camp

217

Motor stator

219

Space

221

Wall

223

Labyrinth seal

12

Vacuum system

14th

Inertial measurement unit

16

Inertial sensor

18th

Control device

20th

Storage facility

22nd

Vacuum feed-through, board

24

System control of the vacuum system

Claims (15)

Vacuum pump (11), in particular turbo-molecular vacuum pump, or vacuum system (12) with at least one vacuum pump (11), in particular turbo-molecular vacuum pump,
with an inertial measuring unit (14) assigned to the vacuum pump (11), which comprises at least one inertial sensor (16), in particular an acceleration sensor or rotation rate sensor, which is designed to measure movements of the vacuum pump (11) and / or the orientation of the vacuum pump (11) to record and to provide related measurement data, in particular as raw measurement data and / or as processed measurement data, and / or information obtained by evaluating these measurement data. Vacuum pump (11) according to claim 1, the vacuum pump (11) being assigned a control device (18) connected to the inertial measuring unit (14), which is designed to evaluate the measurement data of the inertial measuring unit (14), and / or the vacuum pump (11) is assigned an output device, in particular an interface (29) or an accessory connection (27) via which the measurement data of the inertial measurement unit (14) and / or information obtained by evaluating this measurement data can be output or called up, and / or the vacuum pump (11) being assigned a storage device (20) which is designed to store the measurement data of the inertial measurement unit (14) and / or information obtained by evaluating this measurement data. Vacuum pump (11) according to claim 1 or 2,
wherein the inertial measuring unit (14) comprises a spatial arrangement of several inertial sensors (16), in particular the inertial measuring unit (14) having two or three acceleration sensors, each of which is assigned one of three translation axes of the vacuum pump (11) running perpendicular to each other, and / or two or comprises three rotation rate sensors, each of which is assigned one of three axes of rotation of the vacuum pump (11) running in pairs perpendicular to one another. Vacuum pump (11) according to one of the preceding claims, wherein the inertial measuring unit (14) is designed as a MEMS (micro-electro-mechanical system) or is a component of a MEMS or is designed as an optical system, and / or wherein the inertial measuring unit (14) is integrated into a vacuum feedthrough (22) of the vacuum pump (11), in particular the inertial measuring unit (14) being arranged on a board forming the vacuum feedthrough (22). Method for monitoring a vacuum pump (11) according to one of the preceding claims, or for monitoring a vacuum system (12) which comprises at least one vacuum pump (11) according to one of the preceding claims,
wherein before, during and / or after an operation of the vacuum pump (11) or the vacuum system (12) movements of the vacuum pump (11) and / or its orientation and / or movements of the vacuum system (12) by means of the inertial measuring unit (14) of the vacuum pump ( 11) and related measurement data, in particular as raw measurement data of the inertial sensor (16) and / or as processed measurement data, and / or information obtained by evaluating these measurement data are provided. Method according to claim 5, one or more pieces of status information of the vacuum pump (11) and / or of the vacuum system (12) being determined on the basis of the measurement data, in particular wherein the or each status information is output via an output device (27, 29) of the vacuum pump (11) and / or is stored in a storage device (20) of the vacuum pump (11). Method according to claim 5 or 6,
wherein the orientation of the vacuum pump (11) in space and / or relative to one or more other components of the vacuum system (12) is determined as status information of the vacuum pump (11) and / or the vacuum system (12). Method according to claim 7, wherein the control device (18) of the vacuum pump (11) is designed to either allow or prevent an operating start of the vacuum pump (11) depending on the determined orientation of the vacuum pump (11), and / or wherein the determined orientation of the vacuum pump (11) is taken into account when evaluating an oscillation of the vacuum pump (11) and / or of the vacuum system (12) related frequency spectrum, and / or wherein the orientation of the vacuum pump (11) is only stored in the event of special, predetermined events, in particular when the vacuum pump (11) is energized, when the vacuum pump (11) starts operating, at the start of operation of predetermined components - with the exception of the vacuum pump (11) - of a vacuum system comprising the vacuum pump (11) (12), and / or when changing the installation position of the vacuum pump (11). Method according to one of Claims 5 to 8,
wherein the vacuum pump (11) comprises a rotor (49) set in rotation during operation by means of a drive motor (25), and wherein, as status information of the vacuum pump (11) and / or of the vacuum system (12), an imbalance of the rotor (49) and / or a vibration state of the vacuum pump (11) and / or of the vacuum system (12) is determined. Method according to claim 9,
the rotor unbalance and / or the oscillation state being determined repeatedly during operation of the vacuum pump (11), and - At least one measure of a change over time, in particular a rate of change, of the rotor unbalance and / or the vibration state is calculated, in particular based on a respective basic state of the rotor unbalance and / or the vibration state determined at constant operating speed of the rotor (49), - If a relative or absolute limit value for the rotor unbalance and / or the vibration state or for a temporal change in the rotor unbalance and / or the vibration state is exceeded, a reaction is triggered, in particular a warning is issued, or
when approaching a relative or absolute limit value for the rotor unbalance and / or the vibration condition or for a temporal change in the rotor unbalance and / or the vibration condition, an estimated value for the next maintenance date of the vacuum pump (11) is calculated or a currently planned maintenance interval is adjusted, - A measure for a utilization reserve of the vacuum pump (11) is calculated, and / or - A recommended value for a time until the next maintenance of the vacuum pump (11) is calculated and output, in particular taking into account the previous usage profile of the vacuum pump (11). Method according to one of Claims 5 to 10,
whereby a state of vibration of the vacuum pump (11) and / or of the vacuum system (12) is determined as state information of the vacuum pump (11) and / or of the vacuum system (12), in particular whereby vibrations of the vacuum pump (11) and / or of the vacuum system ( 12) the relevant frequency spectrum is determined, in particular wherein the vacuum pump (11) comprises a rotor (49) set in rotation during operation by means of a drive motor (25). Method according to claim 11, wherein the oscillation state during a run-up of the vacuum pump (11), i.e. with increasing speed of a rotor (49) of the vacuum pump (11), in particular also after run-up with the rotor running at the operating speed, and / or while the vacuum pump is running down or coasting down ( 11), i.e. with decreasing speed of a rotor (49) of the vacuum pump (11), is determined and in particular stored, in particular with resonance states of the vacuum pump (11) and / or the vacuum system (12) being determined, in particular with these resonance states relevant information is provided for output to or for retrieval by an external device, in particular a system controller (24) of the vacuum system (12), and / or with a warning from the vacuum pump (11) and / or from the vacuum system (12) issued or automatically the speed of the rotor (49) is adjusted in order to avoid operation of the vacuum pump (11) in a resonance state, and / or wherein the speed of the rotor (49) is changed automatically when one or more further vacuum pumps are recognized by a control device (18) of the vacuum pump (11) or by a system controller (24) of the vacuum system (12) based on the determined vibration state that are operated at at least approximately the same operating speed as the vacuum pump (11) in order to prevent states of beating, and / or one or more predetermined parameters of the vacuum pump (11) and / or the signals of one or more sensors of the vacuum pump (11), in particular with regard to their temporal behavior, being monitored based on the determined vibration state, in particular with reference to one in one, in particular automatic, learning phase determined target state of the vacuum pump (11) and / or the vacuum system (12), wherein following the learning phase a control device (18) of the vacuum pump (11) checks whether the monitored parameter or parameters and / or the or the monitored signals correspond to the desired state or not, and if this check detects a deviation from the desired state, this change in the relevant parameter or signal is subjected to an evaluation and / or assessment, in particular with regard to predetermined criteria. Method according to one of Claims 5 to 12, one or more special events being determined as status information of the vacuum pump (11) and / or of the vacuum system (12), in particular wherein the event or events via an output device (27, 29) of the vacuum pump (11) are output and / or stored in a storage device (20) of the vacuum pump (11). Method according to claim 13,
wherein the vacuum pump (11) comprises a rotor (49) set in rotation during operation by means of a drive motor (25) and, as a special event during operation of the vacuum pump (11), an axial displacement of the rotor (49) between a first axial position , in particular a fore-vacuum position, and a second axial position, in particular a high-vacuum position, is detected, and / or where a movement of the vacuum pump (11) as a whole is detected as a special event, in particular this movement in terms of direction and amount is analyzed by translations and / or rotations of the vacuum pump. Method according to one of Claims 5 to 14,
wherein the measurement data and / or information obtained by evaluating these measurement data can only be output or retrieved if authorization is available, in particular via an interface (29) or an accessory connection (27) of the vacuum pump (11), and / or wherein the measurement data and / or information obtained by evaluating this measurement data is output to a system control (24) of a vacuum system (12) comprising the vacuum pump (11) and / or can be called up by this system control (24), in particular via an interface (29) or an accessory connection (27) the vacuum pump (11).

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