EP3719430A1 - Installation de séchage continu et procédé de séchage de pièces - Google Patents

Installation de séchage continu et procédé de séchage de pièces Download PDF

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Publication number
EP3719430A1
EP3719430A1 EP19181902.8A EP19181902A EP3719430A1 EP 3719430 A1 EP3719430 A1 EP 3719430A1 EP 19181902 A EP19181902 A EP 19181902A EP 3719430 A1 EP3719430 A1 EP 3719430A1
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EP
European Patent Office
Prior art keywords
zone
conveying
workpieces
drying system
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19181902.8A
Other languages
German (de)
English (en)
Inventor
Jonas Burkart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eisenmann SE
Original Assignee
Eisenmann SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eisenmann SE filed Critical Eisenmann SE
Publication of EP3719430A1 publication Critical patent/EP3719430A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0413—Heating with air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0426—Cooling with air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/001—Handling, e.g. loading or unloading arrangements
    • F26B25/003—Handling, e.g. loading or unloading arrangements for articles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B2210/00—Drying processes and machines for solid objects characterised by the specific requirements of the drying good
    • F26B2210/12—Vehicle bodies, e.g. after being painted

Definitions

  • the invention relates to a continuous drying system and a method for drying workpieces, in particular vehicle bodies.
  • Workpieces and other vehicle bodies are usually dried in a continuous dryer after a coating process.
  • a continuous dryer has a heating zone in which the workpieces to be dried are heated.
  • the coating hardens while the workpieces are heated.
  • the heat input into the workpieces can be brought about by means of radiation or warm air, for example.
  • the dryer also has a cooling zone which is arranged behind the heating zone in the conveying direction of the workpieces.
  • the cooling zone reduces the temperature of the heated workpieces so that the workpieces can be processed further directly after the drying process.
  • the cooling zone is arranged directly next to the heating zone.
  • the heating zone and the cooling zone are arranged on one level.
  • the workpieces can continuously pass through the zones of the continuous dryer.
  • the exchange of air and the different temperatures of the heating zone and cooling zone cause the water vapor contained in the warm air to condense in the cooling zone.
  • the exchange of air leads to high heat losses in the heating zone.
  • An air lock or some other separating device is therefore often arranged between the heating zone and the cooling zone, which reduces the exchange of air between the zones.
  • the reduction in air exchange lowers the risk of condensation forming in the cooling zone and lowers the heat losses of the tunnel dryer.
  • the object of the invention is therefore to provide a continuous drying system for drying workpieces, in which a compact, space-saving and flexible arrangement of the cooling zone and heating zone that can be inserted into existing building structures is implemented.
  • the invention follows the principle of arranging the heating zone and the cooling zone in different levels so that the cooling zone is arranged completely above the heating zone.
  • the cooling zone can completely or partially cover the heating zone, but can also be arranged completely offset in the longitudinal or transverse direction of the heating zone be.
  • the cooling zone can be arranged directly above the heating zone, so that the housing of the heating zone and the housing of the cooling zone adjoin one another. This results in a particularly space-saving design and thus a particularly efficient use of space in the continuous drying system.
  • the cooling zone is arranged above the heating zone in such a way that the housing of the heating zone and the housing of the cooling zone are spaced apart from one another in order to allow sufficient access to the heating zone and the cooling zone for maintenance purposes. This distance is preferably 1.9 meters to 2.3 meters.
  • the transfer unit arranged in the conveying zone bridges the different heights of the heating zone and the cooling zone.
  • the conveying zone causes less air exchange between the heating zone and the cooling zone, since the conveying zone acts as a buffer zone between the heating zone and the cooling zone.
  • the air flowing past the separator from the dryer is distributed in the conveying zone. This reduces the partial pressure of water vapor in the warm air. As a result, the condensation of the water vapor contained in the warm air in the cooling zone is inhibited.
  • the flow of the hot air is slowed down by the volume of the space in the conveying zone and the flow deflections in the conveying zone. This reduces the volume flow of the warm air entering the cooling zone.
  • the transfer unit of the conveyor zone can in particular be a chain or belt lifting station, but a scissor lifting table is also conceivable.
  • the transfer unit is to be designed in such a way that the vertical offset between the heating zone and the cooling zone can be quickly compensated for during operation in order to achieve a time-efficient operation of the continuous drying system.
  • an essentially airtight separation is understood to mean that no or only a slight exchange of air takes place between the adjacent zones, provided that there is no excessive pressure difference between the two zones.
  • a lifting gate or a wing gate for example, can be used as the separating device.
  • the airtight separation is only interrupted when a workpiece passes through the door.
  • One more better airtightness is achieved by a lock with two gates.
  • the separating device is designed as an air curtain generating device which comprises nozzles arranged in rows or a matrix or a longitudinal nozzle.
  • air is blown out of the nozzles or from the nozzle under high pressure in order to generate an air curtain, that is to say an essentially closed surface perpendicular to the conveying direction of the workpieces.
  • an air curtain that is to say an essentially closed surface perpendicular to the conveying direction of the workpieces. This allows two areas to be separated from each other in an atmospheric way without having to use moving parts such as gates.
  • the workpieces are conveyed from one area to the other and pass through the air curtain.
  • other gas mixtures or a clean gas can also emerge from the nozzle or nozzles.
  • the continuous drying system additionally has a conveyor device arranged in the heating zone with the conveying direction F and a conveyor device arranged in the cooling zone with the conveying direction G for conveying the workpieces through the heating zone and the cooling zone.
  • the conveying directions F and G can be directed in opposite directions.
  • the cooling zone can be arranged directly above the heating zone, which enables a particularly short overall length of the continuous drying system. If the conveying directions F and G are directed in the same way, the heating and cooling zones must be arranged one behind the other in the conveying direction.
  • the continuous drying system can be integrated particularly well into linear production systems.
  • arrangements can also be considered in which the conveying directions F and G do not run (anti-) parallel, but at an angle to one another.
  • roller conveyors and chain conveyors come into consideration as conveying devices. Rail-based skidless conveyor systems are particularly advantageous with regard to the flexibility of the conveyor speeds.
  • the continuous drying system additionally has a second separating device between the conveying zone and the cooling zone, which is the conveying zone at least essentially airtight separates from the cooling zone, but allows the workpieces to pass through.
  • the second separating device further reduces the air exchange already described between the heating zone and the cooling zone, which further reduces the risk of condensate formation in the cooling zone.
  • the continuous drying system additionally has a third separating device arranged at the entry of the heating zone, which separates the heating zone from the surroundings of the continuous drying area at least essentially airtight, but enables the workpieces to pass through. This reduces the heat loss from the heating zone to the environment. Furthermore, the separation created thereby between the heating zone and the surroundings prevents the penetration of particles and contaminants from the surroundings into the heating zone.
  • the separating device is an air curtain generating device which is set up to generate an air curtain during operation.
  • the heating zone, cooling zone and conveying zone can be atmospherically separated from one another without having to use moving components such as gates.
  • the degree of separation is high in the entire conveying operation, even while the workpieces pass through the separation device.
  • the continuous drying system also has a suction device with which air can be sucked out of the conveying zone.
  • the air that can be sucked off by means of the suction device can be fed to at least one of the first or third air curtain generating devices via a respective feed line.
  • the suction device removes heat from the air that flows from the heating zone into the conveying zone. This reduces the hot air volume flow flowing into the cooling zone and thus the risk of condensation in the cooling zone.
  • the temperature in the conveying zone can be influenced and adjusted with the suction device.
  • an arrangement of the suction device at the entrance of the conveying zone lowers the temperature in the conveying zone. This leads to increased cooling of the workpieces in the conveying zone, so that the The length of the cooling zone can be shortened.
  • an arrangement of the suction device at the exit of the conveying zone leads to a higher temperature in the conveying zone, so that a lower part of the conveying zone fulfills the function of the heating zone. This can shorten the length of the heating zone.
  • suction device Another advantage of the suction device is that the atmospheric separation requirements for the first and second separation devices are lower. For example, the air pressure with which air exits the nozzles of the air curtain generating device can be reduced.
  • the arrangement of the suction device at the outlet of the conveying zone in the area of a flow deflection is particularly effective.
  • the warm rising air is slowed down in the area of the flow deflection and collects in the upper area of the housing of the conveying zone. A large part of the warm air can thus be extracted at a single extraction point.
  • the warm air flowing out of the heating zone is recovered by feeding the warm air sucked out of the conveying zone to the air curtain generating device.
  • heat losses from the heating zone are reduced and the continuous drying system can be operated in an energy-efficient manner.
  • air curtains can also be arranged in one plane, each of which is arranged rotated by 90 ° to one another.
  • a plurality of air curtains arranged directly one behind the other are also conceivable in order to achieve a high degree of separation and thus a low air exchange between the heating zone and the cooling zone.
  • the continuous drying system has several suction devices with which air can be sucked out of the conveying zone, and a collecting channel in which the air sucked out of the conveying zone can be brought together and from which the sucked air is at least one of the first or third air curtain generating devices can be supplied via a supply line.
  • several suction devices have the advantage that the air flowing past the first separating device from the heating zone is suctioned off particularly effectively.
  • each individual suction device can thereby be lowered and the overall size reduced, since the air volume flow sucked off by the respective suction device is smaller. In this way, local negative pressure points caused by the suction device can be avoided. Furthermore, the distributed arrangement of the multiple suction devices and different suction volume flows of the individual suction devices can influence the temperature distribution in the conveying zone. In this way, for example, areas with higher and areas with lower temperatures can be created in the conveying zone.
  • the main advantage of the collecting duct is that the air which can be fed to the air curtain generating device is uniformly temperature-controlled. In this way, the heat of the air that is sucked off at a warmer point in the conveying zone can be transferred to the colder air that is sucked off. This avoids cold spots in the heating zone caused by cold blown air.
  • the respective supply line or the collecting duct has a conditioning unit, with which the air supplied to at least the first or third air curtain generating device can be conditioned.
  • the conditioning unit cleans and / or dehumidifies and / or heats the air given off by the air curtain generating devices so that it is particularly clean and has a low level of humidity.
  • the air heated by the conditioning unit helps to ensure that the heating temperature T1 required in the heating zone is reached. If the temperature of the air blown in by the air curtain generating devices is substantially below the temperature T1, this leads to undesirable heat losses and to cold areas in the heating zone.
  • the continuous drying system has a fan which is set up to convey air into the conveying zone in order to prevent a negative pressure from developing there to counteract.
  • the suction of air from the conveying zone could otherwise create a negative pressure in the conveying zone, which could lead to an increased influx of hot air from the heating zone into the conveying zone.
  • the sucked air flow is balanced out, so that a negative pressure in the conveying zone and thus an inflow of hot air from the heating zone is avoided. This also reduces the volume flow of the warm air flowing into the cooling zone.
  • a passive opening can be provided in the housing of the conveying zone.
  • air can flow from the outside into the conveying zone through the opening in order to compensate for the negative pressure in the conveying zone.
  • the opening must be dimensioned based on the required supply air flows so that sufficient supply air can flow into the conveying zone.
  • the continuous drying system has a rapid take-off unit arranged between the heating zone and the conveying zone and / or between the conveying zone and the cooling zone, which removes the workpieces from the heating zone into the conveying zone and / or from the conveying zone into the cooling zone in cycles.
  • the rapid withdrawal unit can in particular comprise a roller conveyor which has a higher conveying speed than the conveying speed of the conveying devices of the heating zone and the cooling zone.
  • the conveying devices of the cooling zone and the heating zone convey the workpieces preferably continuously through the respective zone.
  • the transfer unit of the conveyor zone only transfers the workpieces from the heating zone to the cooling zone in a clocked manner.
  • the workpiece is drawn off from the conveyor to the transfer unit at a speed that is higher than the speed of the conveyors of the heating zone and the cooling zone. This creates a gap between the withdrawn workpiece and the subsequent workpiece, which is still on the conveyor the heating zone.
  • the distance between the individual workpieces on the conveying device can thus be selected to be small, without the conveying device having to be stopped between the cycles of the transfer unit.
  • the reverse principle applies to the transfer from the conveying zone to the cooling zone.
  • the gap that arises between the last workpiece transferred to the conveyor of the cooling zone and the following workpiece is closed with the quick-release unit. This enables a small distance between the individual workpieces, which allows a high total throughput and thus a high level of economy of the system.
  • a single conveyor can convey the workpieces through the heating zone, conveying zone and cooling zone.
  • An S-conveyor is particularly conceivable.
  • the use of a single conveyor to convey the workpieces through all zones of the continuous drying system enables, above all, a continuous conveying operation through the entire continuous drying system and thus also a high conveyor speed without the need for a cyclic transfer unit and quick-release units.
  • the Figure 1 shows a continuous drying system 10 according to the invention for drying workpieces 12.
  • the continuous drying system 10 has a heating zone 16 surrounded by a first housing 14 and a cooling zone 20 surrounded by a second housing 18.
  • the cooling zone 20 is arranged at a distance d between the housing 18 of the cooling zone 20 and the housing 14 of the heating zone 16 above the heating zone 16 and partially covers the heating zone 16.
  • the cooling zone 20 is the heating zone 16 completely covered.
  • the distance d can in particular be between 1.9 m and 2.3 m in order to allow sufficient maintenance access to the cooling zone 20 and heating zone 16.
  • the cooling zone 20 is in the Figure 1 shown shorter than the heating zone 16, but the cooling zone 20 and the heating zone 16 can be of the same length, or the cooling zone 20 can also be longer than the heating zone 16.
  • a conveying zone 22 surrounded by a third housing 21 is arranged behind the heating zone 16 in the conveying direction F.
  • a transfer unit 24 is arranged in the conveying zone 22, which transfers the workpieces 12 from the level of the heating zone 16 to the level of the cooling zone 20.
  • a separating device 26 is arranged at the entry into the heating zone 16, which separates the heating zone 16 from the surroundings of the continuous dry location. Further separation devices 28, 30 are arranged at the entry and exit of the conveying zone 22. The separating devices 28, 30 prevent warm air from flowing in from the heating zone 16 into the cooling zone 20.
  • the separating devices 26, 28, 30 comprise nozzles arranged in rows. During operation, air is blown out of the nozzles or from the nozzle under high pressure in order to generate an air curtain, that is to say an essentially closed surface.
  • the continuous drying system 10 has suction devices 32, 34 arranged on the housing 21 of the conveying zone 22.
  • the suction devices 32, 34 include regulating units 35 which regulate the suction volume flow and a common fan 37 arranged in the collecting line 44 for generating a negative pressure.
  • the control units 35 can be manually or electrically controlled flaps.
  • a conditioning unit 46 is also arranged in the collecting line 44, with which the extracted air is cleaned and dehumidified. In addition, the conditioning unit 46 can heat the extracted air.
  • the conditioned air drawn off can be fed to the separating devices 26, 28 via feed lines 38, 40.
  • a fan 42 is used to convey fresh air into the conveying zone 22.
  • the workpieces 12 are first conveyed by means of a conveying device 39 with a conveying direction F through the separating device 26 at the entry of the heating zone 16 into the heating zone 16. There the workpieces 12 are heated to a temperature T1, whereby the Coatings of the workpieces 12 are cured.
  • the workpieces 12 pass through a separating device 28 arranged at the exit of the heating zone 16 and in the process enter the conveying zone 22.
  • the transfer unit 24 arranged in the conveying zone 22 bridges the different heights of the heating zone 16 and the cooling zone 20 by the transfer unit 24 lifting the respective workpiece 22 from the entry of the conveying zone 22 to the exit of the conveying zone 22.
  • a rapid withdrawal unit 41 not shown, withdraws the workpieces 12 from the conveying device of the heating zone 16 onto the transfer unit 24.
  • the suction devices 32, 34 suck off the hot air flowing past the separating device 26 from the heating zone 16 in order to reduce the risk of condensation in the cooling zone 20.
  • a negative pressure is generated in the conveying zone 22, as a result of which a pressure gradient is generated between the heating zone 16 and the conveying zone 22. This has the consequence that the warm air of the heating zone 16 flows into the conveying zone and into the cooling zone.
  • the fan 42 conveys fresh air or ambient air (e.g. from a production hall) into the conveying zone 22.
  • the extracted warm air is used in an energy-efficient manner in that the air is directed into a collecting duct 44 and fed to the separating devices 26, 28.
  • a conditioning unit 46 is provided in order to clean, dehumidify and heat the extracted air.
  • the respective workpiece 12 is conveyed by a conveying device 43 with a conveying direction G through the separating device 30 and conveyed into the cooling zone 20.
  • the temperature of the workpieces 12 is cooled to a temperature T2 ⁇ T1, so that the workpieces 12 can be processed further after leaving the continuous drying system 10.
  • a rapid withdrawal unit 41 withdraws the workpieces 12 from the transfer unit 24 and places the workpieces 12 on the conveying device of the cooling zone 20.
  • FIG. 11 shows a cross section of the FIG Figure 1 conveying zone 22 shown along the in Figure 1 Section line II-II shown.
  • Three suction devices 32, 34 suck air from the Conveyor zone 22.
  • the two suction devices 32 are arranged laterally on the conveying zone 22 and the third suction device 34 is arranged on the upper side of the conveying zone 22.
  • FIG 3 shows the essentially in Figure 1 Continuous drying system 10 shown, but in contrast to Figure 1 the cooling zone 20 is arranged without a gap above the heating zone 16, so that the housing 14 of the heating zone 16 and the housing 18 of the cooling zone 20 are directly adjacent to one another. As a result, the overall height of the continuous drying system 10 compared to the continuous drying system 10 of the Figure 1 reduced.
  • the Figure 4 shows the in Figure 1 heating zone 16, cooling zone 20 and conveying zone 22 shown.
  • a further conveying zone 48 surrounded by a housing 25 is arranged in front of heating zone 16 in conveying direction F.
  • a transfer unit 24 is also arranged in the further conveying zone 48.
  • the workpieces 12 are fed to the further conveying zone 48 at a height which is the same as the height of the cooling zone 20.
  • the supply of workpieces 12 into the continuous drying system 10 and the removal of the workpieces 12 from the continuous drying system 10 are thus at the same level.
  • the different levels of the workpiece feed and the heating zone 16 are bridged by means of the transfer unit 24 by lowering the workpieces 12.
  • Such an arrangement of the heating zone 16 and the cooling zone 20 means that the floor area used for the continuous drying system 10 is small, while the access to the heating zone 16 and cooling zone 20 for maintenance purposes is compared to that in FIG Figures 1 and 3 arrangements shown is facilitated.
  • the arrangement of a further conveying zone 48 in front of the heating zone 16 has the advantage that a higher degree of separation of the continuous drying system 10 from the environment is effected in order to reduce the penetration of particles and impurities into the heating zone 16 and to reduce heat losses from the heating zone 16.
  • the Figure 5 shows the continuous drying system 10 with two conveyor zones 22, 48 from FIG Figure 4 .
  • the direction in which the workpieces 12 are fed into the continuous drying system 10 is in contrast to FIG Figure 4 opposite to the conveying direction F.
  • the direction of conveyance G of the workpieces 12 through the cooling zone 20 and the direction of removal of the workpieces 12 from the continuous drying system 10 are also opposite to the direction of conveyance F.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
EP19181902.8A 2018-06-25 2019-06-24 Installation de séchage continu et procédé de séchage de pièces Withdrawn EP3719430A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102018115235.3A DE102018115235A1 (de) 2018-06-25 2018-06-25 Durchlauftrockenanlage und Verfahren zum Trocknen von Werkstücken

Publications (1)

Publication Number Publication Date
EP3719430A1 true EP3719430A1 (fr) 2020-10-07

Family

ID=67003240

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Application Number Title Priority Date Filing Date
EP19181902.8A Withdrawn EP3719430A1 (fr) 2018-06-25 2019-06-24 Installation de séchage continu et procédé de séchage de pièces

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Country Link
US (1) US20190390905A1 (fr)
EP (1) EP3719430A1 (fr)
CN (1) CN110624796A (fr)
DE (1) DE102018115235A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114777434B (zh) * 2022-05-12 2023-01-13 武汉芯致半导体有限公司 一种硅片清洗用干燥处理装置及其处理方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10354165B3 (de) * 2003-11-19 2004-11-04 EISENMANN Maschinenbau KG (Komplementär: Eisenmann-Stiftung) Vorrichtung und Verfahren zur Aushärtung einer Beschichtung in einem Schutzgas
US20060055091A1 (en) * 2002-07-18 2006-03-16 Martin Doll Device for controlling the temperature of objects
US20080115384A1 (en) * 2004-05-25 2008-05-22 Josef Krizek Method and Device for Drying Objects, Especially Painted Vehicle Bodies
DE102006057158A1 (de) * 2006-12-01 2008-06-05 Eisenmann Anlagenbau Gmbh & Co. Kg Verfahren und Vorrichtung zum Trocknen von Gegenständen
US20080229608A1 (en) * 2004-05-25 2008-09-25 Josef Krizek Method and Device for Drying Painted Vehicle Bodies
US20110162576A1 (en) * 2008-07-29 2011-07-07 Durr Systems Gmbh Paint shop for painting objects to be painted

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007007478B3 (de) * 2007-02-15 2008-05-29 Eisenmann Anlagenbau Gmbh & Co. Kg Vorrichtung zum Trocknen von Gegenständen, insbesondere von lackierten Fahrzeugkarosserien
DE102015214711A1 (de) * 2015-07-31 2017-02-02 Dürr Systems Ag Behandlungsanlage und Verfahren zum Behandeln von Werkstücken
CN206803703U (zh) * 2017-06-07 2017-12-26 赵斌 一种分级加热的烘干设备

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060055091A1 (en) * 2002-07-18 2006-03-16 Martin Doll Device for controlling the temperature of objects
DE10354165B3 (de) * 2003-11-19 2004-11-04 EISENMANN Maschinenbau KG (Komplementär: Eisenmann-Stiftung) Vorrichtung und Verfahren zur Aushärtung einer Beschichtung in einem Schutzgas
US20080115384A1 (en) * 2004-05-25 2008-05-22 Josef Krizek Method and Device for Drying Objects, Especially Painted Vehicle Bodies
US20080229608A1 (en) * 2004-05-25 2008-09-25 Josef Krizek Method and Device for Drying Painted Vehicle Bodies
DE102006057158A1 (de) * 2006-12-01 2008-06-05 Eisenmann Anlagenbau Gmbh & Co. Kg Verfahren und Vorrichtung zum Trocknen von Gegenständen
US20110162576A1 (en) * 2008-07-29 2011-07-07 Durr Systems Gmbh Paint shop for painting objects to be painted

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Publication number Publication date
CN110624796A (zh) 2019-12-31
DE102018115235A1 (de) 2020-01-02
US20190390905A1 (en) 2019-12-26

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