EP3653755A1 - Fabrication d'un corps moulé par dépôt d'aérosols - Google Patents

Fabrication d'un corps moulé par dépôt d'aérosols Download PDF

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Publication number
EP3653755A1
EP3653755A1 EP18206021.0A EP18206021A EP3653755A1 EP 3653755 A1 EP3653755 A1 EP 3653755A1 EP 18206021 A EP18206021 A EP 18206021A EP 3653755 A1 EP3653755 A1 EP 3653755A1
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EP
European Patent Office
Prior art keywords
layers
layer
shaped body
mechanical stresses
intermediate layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18206021.0A
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German (de)
English (en)
Inventor
Carsten Schuh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to EP18206021.0A priority Critical patent/EP3653755A1/fr
Publication of EP3653755A1 publication Critical patent/EP3653755A1/fr
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness

Definitions

  • the present invention relates to a method for producing a shaped body, in which a plurality of layers of material lying one above the other are built up by means of an aerosol deposition process in a plurality of successive substeps, an intermediate layer being applied between the deposition of two adjacent material layers to reduce mechanical stresses in the shaped body.
  • the invention further relates to a molded article produced by this method.
  • the aerosol deposition method is a novel method for producing dense inorganic layers, eg metallic or ceramic layers.
  • a suitable powder is first converted into an aerosol.
  • a coarse vacuum generated in the coating chamber usually between 1 mbar and 50 mbar
  • the resulting pressure difference accelerate the aerosol particles in a nozzle to several 100 m / s and deposit them on a substrate.
  • the aerosol particles are broken up into fragments in the sub-micrometer range, which are arranged in a dense and well-adhering layer. Subsequent sintering of the layer at high temperatures is not necessary, which is an important advantage of the aerosol deposition process over alternative production processes.
  • the aerosol separation process can usually be carried out completely at room temperature.
  • aerosol separation appears to be unsuitable for being able to produce larger layer thicknesses, ie layer thicknesses greater than, for example, 100 ⁇ m. It depends on the material of the deposited layer, at which layer thicknesses the layer is typically detached.
  • Aluminum oxide Al 2 O 3
  • zirconium oxide which can compensate or reduce the induced mechanical stresses somewhat better, layer thicknesses of up to approx. 150 ⁇ m are possible.
  • the aerosol separation process seems unsuitable to serve as a generative manufacturing process ( English: Additive Manufacturing ).
  • a plurality of material layers lying one above the other are built up in a plurality of successive substeps by means of an aerosol deposition method.
  • aerosol particles are solidified into a solid layer.
  • layers of material are applied with an intermediate layer for reducing mechanical stresses in the molded body.
  • the intermediate layers consist of a different material than the deposited material layers.
  • the aerosol particles which typically have a speed of over 100 m / s when they strike the substrate on which they are deposited, locally cause a plastic deformation of the substrate. As a rule, this leads to mechanical stresses in the substrate and often also in the deposited layer. As a result, deformations in the layer composite and, in some cases, flaking of the layer usually occur.
  • the core point of the invention is the structure of the molded body to be produced in a plurality of material layers lying one above the other and the provision of an intermediate layer in each case between two adjacent material layers.
  • the material layers form the actual constructive building material of the later three-dimensional body and are therefore also referred to in the context of this patent application as "constructive material layers". They largely contribute to a predetermined desired function of this body. Examples of such a function are mechanical strength, electrical insulation, piezoelectric activity or acting as a diffusion barrier.
  • the material layers preferably have an average density between 1 ⁇ m and 20 ⁇ m.
  • the intermediate layers have the function of reducing intrinsically mechanical stresses in the molded body. This is achieved by one or more of the following properties, which the intermediate layers advantageously have: Firstly, a high elastic compliance of the intermediate layers is to be mentioned, as is usually the case, for example, with polymers or porous inorganic materials.
  • the intermediate layers advantageously have a high irreversible plastic deformability.
  • Such a property typically have metals, in particular noble metals, and alloys.
  • the property of relieving mechanical stresses occurring in the shaped body can be achieved by changing the dipole moment and, associated with this, the geometry of the crystal structures.
  • Piezoelectric materials are suitable for this as the material for the intermediate layers.
  • the intermediate layer can also be adapted to the adjoining material layer or can be matched to the fact that this results in a solid-solid phase transition with a change in the crystal structure.
  • the volume of the unit cell is also changed. Examples of such a change in the unit cell in the (constructive) material layer is the change from high quartz to deep quartz, from ⁇ -Al 2 O 3 to ⁇ -Al 2 O 3 or from unstabilized to partially stabilized ZrO 2 .
  • the intermediate layers preferably have an average thickness between 0.5 ⁇ m and 5 ⁇ m.
  • the intermediate layers can be deposited by means of the aerosol deposition process. This has the advantage that the same system that is used for the deposition of the material layers can also be used for the production of the intermediate layers. In particular, the molded body under construction does not have to be moved out of the deposition chamber between the individual sub-steps, since the intermediate layers can be deposited in principle in the same deposition chamber.
  • the intermediate layers can also be applied to the structural material layers by means of a spray process, for example a suspension or solution-based spray process.
  • a spraying process is useful, for example, if the material of the intermediate layer that is to be applied is not available at all or only with great effort as a powder, as is required for the aerosol separation process.
  • annealing of the intermediate layers can have an advantageous effect.
  • annealing generally describes the heating of a material over a longer period of time. With such a method it is possible, for example, to control or optimize the distribution of mechanical stresses in a component. Typically, the temperature at which a material is annealed ranges between 50% and 70% of its melting temperature.
  • Annealing the material layers generally also has an advantageous effect in that annealing reduces the mechanical stresses induced in the molded body due to the aerosol separation.
  • a molded body consists of the following layer sequence: substrate - first intermediate layer - first material layer - second intermediate layer - second material layer - third intermediate layer - third material layer, etc.
  • the mechanical stresses in the deposited layers are relatively low and, for example, no visible Deformations and layer detachments are present, it may be sufficient to complete all sub-steps of the manufacturing process to be carried out one after the other and then to anneal the deposited material and intermediate layers in a final process step.
  • relatively high mechanical stresses are generated in the deposited layers or the substrate due to the aerosol deposition process, it may be advantageous or even necessary to carry out several tempering steps.
  • a first tempering step can take place, for example, after the deposition of the first intermediate layer and the first material layer, a second tempering step after the deposition of the second intermediate layer and the second material layer, a third tempering step after the deposition of the third intermediate layer and the third material layer, etc.
  • a structural material layer lies "on top" during the tempering step, that is to say if the intermediate layer (s) to be tempered is / are located between structural material layers.
  • connection layer can be applied between the deposition of the material layers and the application of the intermediate layers in order to further reduce mechanical stresses and / or to improve the material bond between a material layer and an intermediate layer.
  • a connection view can be applied to both sides of the intermediate layer; However, it is also possible, for example, to apply a connecting layer to the adjacent material layer only on one side of the intermediate layer.
  • connection layer can have the function of providing doping atoms for the intermediate layer or the material layer.
  • the connecting layer can have doping atoms which diffuse significantly from a certain temperature, which is usually above room temperature, into the intermediate layer or the material layer. As a result, potential mechanical stresses in the intermediate layer or the material layer are further reduced or compensated for.
  • connection layer can have the function of improving a material connection between the intermediate layer and the connection layer with the material layer.
  • a tempering step is carried out which enables the dopants to diffuse from the connection layer into the intermediate layer and / or the material layer or the material connection between the two layers.
  • the connecting layers preferably have an average thickness between 0.05 ⁇ m and 1 ⁇ m.
  • connection layer can also be produced by means of a spray process, in particular a suspension- or solution-based spray process.
  • the connection layer can also be deposited on the material layer or the intermediate layer by means of an aerosol deposition process.
  • the first material layer can be deposited on a substrate, which consists for example of glass or metal. In these cases, however, it appears advantageous not to deposit directly on the glass or metal substrate, but rather to provide an intermediate layer first.
  • a substrate which consists for example of glass or metal.
  • a polyimide film such as the DuPont film known under the brand name "Kapton".
  • the invention also relates to such a molded body which has a plurality of material layers lying one above the other, which were built up by means of an aerosol separation process.
  • the molded body has a plurality of intermediate layers for reducing mechanical stresses, an intermediate layer being located between two adjacent material layers.
  • the intermediate layers exist made of a different material than the deposited material layers.
  • the molded body can optionally also have a connecting layer between a material layer and an adjacent intermediate layer, the connecting layer having the function of further reducing mechanical stresses in the molded body and / or improving the material bond between the material layer and the intermediate layer.
  • the material layer can consist of aluminum oxide (Al 2 O 3 ) and, belonging to it, the intermediate layer can consist of a piezoelectric material.
  • a piezoelectric material is a so-called soft piezoceramic material, such as lead zirconate titanate doped with neodymium, Pb 1-x Nd x (Zr, Ti) O 3 .
  • a second example of an advantageous material combination is zirconium oxide for the material layer and a metal, for example steel, for the intermediate layer.
  • a third example of an advantageous material combination is tungsten as a constructive material layer and a nickel-based alloy (for example known by the company Special Metals Corp. under the brand "Inconel").
  • solder materials are suitable for the optional connection layer, for example.
  • a solder material is understood to mean an alloy that consists of a certain mixing ratio of metals; mainly lead, tin, zinc, silver and copper.
  • a solder material is used to solder suitable metals and alloys such as copper, bronze, brass, tombac, nickel silver, silver, gold, hard lead, zinc, aluminum but also iron by superficially connecting or alloying with them as a melt and after Solidify cooling.
  • the alloyability of the solder material with the material or intermediate layers is the prerequisite for a permanent, firm and integral solder connection.
  • the melting point of the respective solder material is generally lower than that of the materials to be joined.
  • Solder materials appear suitable to enable an intermetallic connection in the molded body if they have a low-melting phase.
  • the present invention has the following advantages: Complex three-dimensional structures and bodies can be created.
  • structures and bodies can be created with materials that cannot be produced with dense and / or homogeneous structures by melting or sintering.
  • incongruent melting substances eg tungsten
  • refractory metals eg tungsten
  • refractory alloys e.g. tungsten
  • high-temperature ceramics such as zirconium oxide or aluminum oxide
  • materials which, due to their sensitivity or chemical reactivity in oxygen-containing or moist atmospheres, cannot be processed in a cost-effective manner using alternative process techniques can be processed using the aerosol separation technique. It can also be used to produce composites from several materials that are not compatible with each other physico-chemically, in particular at high melting or sintering temperatures or a wide range of application temperatures. Chemical reactive materials such as oxides with carbides or oxides with nitrides or materials with large differences in the coefficient of thermal expansion are to be mentioned here, for example.
  • the above-mentioned shaped bodies can be used, for example, to protect scintillation material (e.g. cesium iodide) against moisture, since hermetically sealed layers, i.e. Layers that are impervious to moisture are needed.
  • scintillation material e.g. cesium iodide
  • hermetically sealed layers i.e. Layers that are impervious to moisture are needed.
  • the aforementioned moldings can also be used as wear protection.
  • components of a ball bearing are loaded with a 500 ⁇ m thick multilayer protective layer, which consists of a dense molded body produced according to the invention.
  • the aforementioned moldings can also be used as corrosion protection.
  • a microsystem ( English: Microelectromechanical Systems, MEMS ) is understood to mean a miniaturized device, an assembly or a component, the components of which have the smallest dimensions in the range of 1 micrometer and interact as a system.
  • a microsystem usually consists of one or more sensors, actuators and control electronics on a substrate or chip. The size of the individual components is in the range of a few micrometers.
  • the Fig. 1 shows a molded body 1, which shows three constructive material layers A 1 - A 3 , two intermediate layers B 1 , B 2 and four connecting layers C 1 - C 4 .
  • the first material layer A1 was deposited on a substrate by means of an aerosol deposition process (the substrate is in Fig. 1 Not shown).
  • a first joint layer C also by means of a Aerosolabscheidevons applied to the first material layer A1.
  • a first intermediate layer B 1 and again a connection layer, namely a second connection layer C 2 were deposited.
  • the first intermediate layer B 1 is also deposited by means of an aerosol deposition process.
  • a second constructive material layer A 2 follows.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
EP18206021.0A 2018-11-13 2018-11-13 Fabrication d'un corps moulé par dépôt d'aérosols Withdrawn EP3653755A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP18206021.0A EP3653755A1 (fr) 2018-11-13 2018-11-13 Fabrication d'un corps moulé par dépôt d'aérosols

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18206021.0A EP3653755A1 (fr) 2018-11-13 2018-11-13 Fabrication d'un corps moulé par dépôt d'aérosols

Publications (1)

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EP3653755A1 true EP3653755A1 (fr) 2020-05-20

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158933A (ja) * 2003-11-25 2005-06-16 National Institute Of Advanced Industrial & Technology 半導体または液晶製造装置部材およびその製造方法
WO2010076864A1 (fr) * 2008-12-29 2010-07-08 ブラザー工業株式会社 Élément piézoélectrique
DE102012224377A1 (de) * 2012-12-27 2014-07-03 Robert Bosch Gmbh Verfahren zum Herstellen eines galvanischen Elements und galvanisches Element
US20150218053A1 (en) * 2014-02-04 2015-08-06 Ngk Insulators, Ltd. Multilayer body, method for manufacturing multilayer body, and method for manufacturing powder

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158933A (ja) * 2003-11-25 2005-06-16 National Institute Of Advanced Industrial & Technology 半導体または液晶製造装置部材およびその製造方法
WO2010076864A1 (fr) * 2008-12-29 2010-07-08 ブラザー工業株式会社 Élément piézoélectrique
DE102012224377A1 (de) * 2012-12-27 2014-07-03 Robert Bosch Gmbh Verfahren zum Herstellen eines galvanischen Elements und galvanisches Element
US20150218053A1 (en) * 2014-02-04 2015-08-06 Ngk Insulators, Ltd. Multilayer body, method for manufacturing multilayer body, and method for manufacturing powder

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
RAHUL C. ET AL: "Reliability of ferroelectric multilayer PZT thick films fabricated by aerosol depositionn", FERROELECTRICS, vol. 470, no. 1, 20 October 2014 (2014-10-20), pages 183 - 193, XP002789117, Retrieved from the Internet <URL:https://doi.org/10.1080/00150193.2014.923253> [retrieved on 20190220], DOI: 10.1080/00150193.2014.923253 *

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