EP3623630B1 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP3623630B1 EP3623630B1 EP18194308.5A EP18194308A EP3623630B1 EP 3623630 B1 EP3623630 B1 EP 3623630B1 EP 18194308 A EP18194308 A EP 18194308A EP 3623630 B1 EP3623630 B1 EP 3623630B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- heat exchanger
- vacuum pump
- disk
- oil
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012546 transfer Methods 0.000 claims description 45
- 238000001816 cooling Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 238000005461 lubrication Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 5
- 238000007654 immersion Methods 0.000 description 11
- 238000005086 pumping Methods 0.000 description 11
- 230000006835 compression Effects 0.000 description 9
- 238000007906 compression Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004382 potting Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/809—Lubricant sump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
Claims (13)
- Pompe à vide (10), en particulier pompe à vide à vis, comportant
au moins un rotor (28) pouvant être mis en rotation pour refouler un gaz de processus,
un système à huile pour la lubrification et/ou la régulation en température du rotor (28) et/ou d'un engrenage (42),
un ou plusieurs disques (54) qui sont disposés de telle sorte que le disque (54) respectif est plongé dans un remplissage d'huile du système à huile pendant le fonctionnement de la pompe à vide et tourne avec le rotor (28) et/ou avec un élément d'engrenage (43), et
un échangeur de chaleur (34) pour le système à huile, qui est disposé de manière à se trouver au moins partiellement dans le remplissage d'huile pendant le fonctionnement de la pompe à vide (10),
le ou les disques (54) étant réalisé(s) et disposé(s) de manière à provoquer, suite à sa ou leur rotation, un flux au moins sensiblement unidirectionnel (88) dans le remplissage d'huile au moins dans la zone de l'échangeur de chaleur (34),
caractérisée en ce que
la pompe à vide (10) comprend une portion de boîtier (14) pour le remplissage d'huile, et la portion de boîtier (14) présente une ouverture par laquelle l'échangeur de chaleur (34) est introduit ou peut être introduit dans la portion de boîtier (14) et/ou en être retiré. - Pompe à vide (10) selon la revendication 1,
caractérisée en ce que
l'échangeur de chaleur (34) s'étend le long d'un axe longitudinal et le disque (54) est disposé parallèlement à l'axe longitudinal de sorte que le flux dans le remplissage d'huile s'étend sensiblement le long de l'échangeur de chaleur (34). - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
l'échangeur de chaleur (34) entoure au moins partiellement le disque (54). - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
la pompe à vide (10) comprend deux rotors (28, 30) disposés en parallèle et couplés par un engrenage, dont un seul porte au moins un disque (54) pour la rotation dans le remplissage d'huile dans la zone de l'échangeur de chaleur (34). - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
l'échangeur de chaleur (34) fait partie d'un système de régulation de température comprenant un dispositif de chauffage et/ou un dispositif de refroidissement pour l'échangeur de chaleur (34). - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
l'échangeur de chaleur (34) présente un corps de transfert de chaleur (74) comprenant un matériau à base d'aluminium et/ou au moins une conduite (72) comprenant un acier inoxydable pour un fluide d'échange de chaleur. - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
une ouverture pour l'échangeur de chaleur (34) est disposée au moins sensiblement à un emplacement le plus profond d'un volume intérieur d'une portion de boîtier (14). - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
au moins un aimant (85) est disposé sur l'échangeur de chaleur (34). - Pompe à vide (10) selon la revendication 8,
caractérisée en ce que
au niveau de l'échangeur de chaleur (34), le disque (54) définit une zone d'amenée (80), une zone d'écoulement longitudinale (84) et/ou une zone d'évacuation (82) pour le flux d'huile (88), l'aimant (85) étant disposé dans l'une desdites zones. - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
l'échangeur de chaleur (34) présente une pluralité d'échancrures et/ou de saillies (86) orientées au moins sensiblement le long d'un trajet d'écoulement (88) provoqué par le disque (54). - Pompe à vide (10) selon la revendication 10,
caractérisée en ce que
les échancrures et/ou les saillies (86) ou une partie de celles-ci sont disposées en oblique par rapport à un axe longitudinal de l'échangeur de chaleur (34). - Pompe à vide (10) selon l'une au moins des revendications précédentes, caractérisée en ce que
l'échangeur de chaleur (34) et/ou un corps de transfert de chaleur (74) de l'échangeur de chaleur (34) définit avec sa géométrie sensiblement une trajectoire annulaire pour le flux d'huile, concentrique au disque (54). - Procédé pour faire fonctionner une pompe à vide (10), en particulier une pompe à vide à vis, comportant
au moins un rotor (28) mis en rotation pour refouler un gaz de processus, un système à huile pour la lubrification et/ou la régulation de température du rotor (28) et/ou d'un engrenage (42),
un ou plusieurs disques (54) qui sont disposés de telle sorte que le disque (54) respectif est plongé dans un remplissage d'huile du système à huile et tourne avec le rotor (28) et/ou avec un élément d'engrenage (43),
un échangeur de chaleur (34) pour le système à huile, qui est disposé de manière à se trouver au moins partiellement dans le remplissage d'huile, et une portion de boîtier (14) pour le remplissage d'huile, présentant une ouverture par laquelle l'échangeur de chaleur (34) est introduit ou peut être introduit dans la portion de boîtier (14) et/ou en être retiré,
le ou les disques (54) provoquant, suite à sa ou leur rotation, un flux au moins sensiblement unidirectionnel (88) dans le remplissage d'huile au moins dans la zone de l'échangeur de chaleur (34).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18194308.5A EP3623630B1 (fr) | 2018-09-13 | 2018-09-13 | Pompe à vide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18194308.5A EP3623630B1 (fr) | 2018-09-13 | 2018-09-13 | Pompe à vide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP3623630A1 EP3623630A1 (fr) | 2020-03-18 |
| EP3623630B1 true EP3623630B1 (fr) | 2020-07-29 |
Family
ID=63579213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP18194308.5A Active EP3623630B1 (fr) | 2018-09-13 | 2018-09-13 | Pompe à vide |
Country Status (1)
| Country | Link |
|---|---|
| EP (1) | EP3623630B1 (fr) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2167495B (en) * | 1984-11-20 | 1988-11-09 | Boc Group Plc | Improvements in mechanical pumps |
| JPS61212688A (ja) * | 1985-03-18 | 1986-09-20 | Hitachi Ltd | 横形ロ−タリ圧縮機 |
| DE102014107709A1 (de) * | 2014-06-02 | 2015-12-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| DE102016011395A1 (de) * | 2016-09-21 | 2018-03-22 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Schraubenkompressor für ein Nutzfahrzeug |
-
2018
- 2018-09-13 EP EP18194308.5A patent/EP3623630B1/fr active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3623630A1 (fr) | 2020-03-18 |
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