EP3611938B1 - Lautsprecherelement und array-lautsprecher - Google Patents

Lautsprecherelement und array-lautsprecher Download PDF

Info

Publication number
EP3611938B1
EP3611938B1 EP18785140.7A EP18785140A EP3611938B1 EP 3611938 B1 EP3611938 B1 EP 3611938B1 EP 18785140 A EP18785140 A EP 18785140A EP 3611938 B1 EP3611938 B1 EP 3611938B1
Authority
EP
European Patent Office
Prior art keywords
speaker
connection pieces
diaphragm
major surface
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18785140.7A
Other languages
English (en)
French (fr)
Other versions
EP3611938A4 (de
EP3611938A1 (de
Inventor
Kenji Ogata
Yoshifumi Ikeda
Shogo Kurogi
Yasukazu TAKANO
Yoshiyuki Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
I Pex Inc
Original Assignee
I Pex Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by I Pex Inc filed Critical I Pex Inc
Publication of EP3611938A1 publication Critical patent/EP3611938A1/de
Publication of EP3611938A4 publication Critical patent/EP3611938A4/de
Application granted granted Critical
Publication of EP3611938B1 publication Critical patent/EP3611938B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
    • H04R1/40—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Definitions

  • the present disclosure relates to a speaker element and an array speaker.
  • Patent Literature 1 discloses a piezoelectric acoustic transducer that includes a piezoelectric ceramic, a circular metal plate, and a case. In the piezoelectric acoustic transducer, the piezoelectric ceramic and the metal plate are caused to vibrate in the thickness direction of the piezoelectric ceramic by expansion or contraction of the piezoelectric ceramic.
  • the piezoelectric acoustic transducer By disposing protrusions around the metal plate, the piezoelectric acoustic transducer enables the metal plate, during vibration, to transport less stress in a circumferential direction around the perimeter of the metal plate. Therefore, the resonance frequency can be shifted to a much lower side than in conventional piezoelectric acoustic transducers.
  • vibrations of the metal plate are regulated only at the connections between the protrusions and the case. Accordingly, as compared with cases where the entire perimeter of a metal plate is fixed, the metal plate produces less regulated vibrations and thus more freely vibrates in response to vibrations of the piezoelectric ceramic.
  • a standing wave pattern of vibration created in the metal plate (the vibrating body) is independent of an outer shape of the piezoelectric ceramic (the piezoelectric element) to be deformed in accordance with a voltage signal corresponding to a sound (for example, the pattern does not become similar to an outer shape of the piezoelectric ceramic). Therefore, the piezoelectric acoustic transducer poses a problem of outputting disturbed sound waves.
  • the present disclosure has been made in view of the foregoing circumstances, and an objective of the disclosure is to provide a speaker element and an array speaker that can reduce disturbed sound waves to achieve higher sound quality.
  • Such a speaker element according to a first aspect of the present disclosure in particular includes:
  • annular wall may be formed annularly along the outer edge of the major surface of the diaphragm, the annular wall protruding from the major surface in a direction orthogonal to the major surface and being contiguous and flush with the connection pieces.
  • a projection may be disposed on the annular wall in a region being connected to each of the connection pieces, the projection including an inner wall that faces a center of the major surface and protrudes toward the center of the major surface.
  • the projection may protrude in a curved manner as seen from a direction orthogonal to the major surface.
  • the projection may be in a line-symmetrical shape with respect to a virtual straight line extending from the center of the major surface of the diaphragm and dividing each of the connection pieces equally.
  • connection pieces may be equally spaced along the outer edge of the major surface of the diaphragm.
  • connection pieces the number of which is at least six, may be disposed along the outer edge of the major surface of the diaphragm.
  • connection pieces the number of which is twelve, may be disposed along the outer edge of the major surface of the diaphragm.
  • the diaphragm and the piezoelectric element may be circular as seen from a direction orthogonal to the major surface.
  • Such an array speaker according to a second aspect of the present disclosure includes: a plurality of the speaker elements according to the present disclosure, the speaker elements being arranged in a two-dimensional array.
  • the speaker elements the number of which is four, may be adjacent to one another and may be arranged so as to be individually positioned at vertices of a square.
  • the speaker elements may be adjacent to one another and may be arranged so as to be individually positioned at vertices of an equilateral triangle.
  • the array speaker may include an outer frame that surrounds an array of the speaker elements and supports the speaker elements by being connected to the connection pieces which are included in the speaker elements and which connection pieces face the outer frame, and the speaker elements may be connected by linking together the connection pieces that are not connected to the outer frame.
  • the array speaker may include:
  • the array speaker may further include: an extension that extends from an inner edge of the outer frame and is connected to the connection pieces.
  • the array speaker may include: a support frame that surrounds the individual speaker elements and is connected to the connection pieces included in the speaker elements.
  • the thickness of the connection pieces connecting the diaphragm to another member is greater than the sheet thickness of the diaphragm in a region on which the piezoelectric element is layered.
  • the connection pieces can stably support the diaphragm, and therefore, a standing wave pattern of vibration created in the diaphragm can conform to an outer shape of the piezoelectric element, which becomes deformed in accordance with a voltage signal corresponding to a sound.
  • the diaphragm can be prevented from producing unwanted vibrations, and thus disturbed sound waves can be reduced to improve the sound quality.
  • a speaker element 1A is formed on a substrate 2, which is a disk-shaped stack of layers each having a uniform thickness.
  • a disk-shaped diaphragm 3 is formed in a central area including a center O of the substrate 2. The diaphragm 3 is formed to be concentric with the substrate 2.
  • a round surface of the diaphragm 3 on the +z side is designated as a major surface 3A, while a round surface on the -z side is designated as a back surface 3B. Since each of the layers forming the substrate 2 has a uniform thickness, the major surface 3A and the back surface 3B are parallel to each other.
  • An outer frame 4 (a different member), which is ring-shaped and concentric with the diaphragm 3, is disposed around the diaphragm 3 to be spaced apart from the diaphragm 3.
  • connection pieces 5 each protrude outward along the major surface 3A (the back surface 3B) (protruding outward in a direction along the radius of the substrate 2 from the outer edge of the major surface 3A (the back surface 3B) and the end of each connection piece 5 connects with the outer frame 4.
  • the connection pieces 5 are equally spaced by 30 degrees along the outer edge of the major surface 3A and the back surface 3B of the diaphragm 3.
  • the outer frame 4 is fixed to a fixing member (not illustrated).
  • the diaphragm 3 has flexibility to be able to vibrate while being supported by the outer frame 4 via the connection pieces 5. In this way, the diaphragm 3 is supported by a plurality of the equally spaced connection pieces 5. As a result, when compared with cases where the diaphragm 3 is supported all along its perimeter, the diaphragm 3 is more stably supported, the diaphragm 3 vibrates at a greater amplitude, and the resonance frequency of the diaphragm 3 can be set to a lower value.
  • a piezoelectric element 6 is layered on a central area of the back surface 3B of the diaphragm 3.
  • the piezoelectric element 6 becomes deformed in accordance with the voltage to cause the diaphragm 3 to vibrate. Vibrations of the diaphragm 3 make a sound.
  • the diaphragm 3 with the disposed connection pieces 5 and the piezoelectric element 6 form the speaker element 1A.
  • the piezoelectric element 6 is circular as seen from a direction (the z-axis direction) orthogonal to the major surface 3A and the back surface 3B of the diaphragm 3 and is concentric with the substrate 2 and the diaphragm 3.
  • the substrate 2 is made of a silicon-on-insulator (SOI) substrate.
  • SOI substrate is a wafer containing an oxide film, that is, a semiconductor substrate having a laminated structure made of a BOX layer constituting a buried oxide film and a silicon (SOI) layer constituting a semiconductor layer on the BOX layer.
  • the BOX layer is formed of a silicon oxide film (SiO 2 ) and has a thickness of, for example, several micrometers.
  • An SOI substrate is used for manufacturing semiconductors made of layers each having a uniform thickness.
  • the substrate 2 is formed by layering an Si support layer 10, which includes a base wafer and the BOX layer.
  • the Si active layer 11 is formed of silicon (Si) and has a thickness of, for example, 150 ⁇ m.
  • the diaphragm 3 is made of the Si active layer 11, while the outer frame 4 and the connection pieces 5 are made of the Si support layer 10 and the Si active layer 11.
  • the connection piece 5 protrudes in the +z direction from the major surface 3A of the diaphragm 3, and the thickness of the connection piece 5 along the z-axis direction of the diaphragm 3 is greater than the sheet thickness of the diagram 3 in a region on which the piezoelectric element 6 is layered.
  • the connection pieces 5 can more stably support the diaphragm 3.
  • the connection piece 5 is as thick as the outer frame 4 and is contiguous and flush with the outer frame 4. As a result, local stress to be created is reduced and the connection pieces 5 are less likely to be damaged.
  • annular wall 7 which is a wall shaped like a ring, is formed along the outer edge of the major surface 3A of the diaphragm 3.
  • the annular wall 7 protrudes in the +z direction from the major surface 3A of the diaphragm 3 and is contiguous and flush with the connection pieces 5. Since the annular wall 7 is contiguous with the connection pieces 5 supporting the diaphragm 3, a relative positional relationship between connection pieces 5 varies to a minimum extent, and the connection pieces 5 can more stably support the diaphragm 3.
  • the piezoelectric element 6, or specifically a first electrode layer 12, a piezoelectric element layer 13, and a second electrode layer 14 are layered on the Si active layer 11.
  • the first electrode layer 12 is formed of an electrically conductive member such as platinum or gold, and has a thickness of 1 ⁇ m or less.
  • the piezoelectric element layer 13 is formed of a piezoelectric material to expand and contract under the application of a voltage, and has a thickness of several micrometers. Examples of an employed material for the piezoelectric body include lead zirconate titanate (Pb (Zr, Ti) O 3 : PZT).
  • the second electrode layer 14 is formed of an electrically conductive member such as platinum or gold, and has a thickness of 1 ⁇ m or less.
  • a signal system is connected to the speaker element 1A for supplying a voltage signal corresponding to a sound to be produced.
  • the signal system includes a sound signal output device 20 and a signal modulator 21.
  • the sound signal output device 20 outputs a voltage signal corresponding to a sound to be reproduced by the speaker element 1A.
  • the frequency of the voltage signal falls within an audible range.
  • the signal modulator 21 modulates a voltage signal output by the sound signal output device 20 with a predetermined modulation frequency.
  • a predetermined modulation frequency examples include a frequency around 40 kHz.
  • Examples of an employed modulation method for the signal modulator 21 include amplitude modulation (AM).
  • the voltage signal modulated by the signal modulator 21 is applied to the piezoelectric element 6 to be a voltage signal between the second electrode layer 14 and the first electrode layer 12. This voltage signal causes the piezoelectric element 6 to vibrate and a sound wave is generated.
  • the piezoelectric element layer 13 expands in the xy directions indicated by arrows.
  • the Si active layer 11 does not expand, with the result that the piezoelectric element 6 is curved to project in the -z direction.
  • the piezoelectric element layer 13 may expand or contract conversely to what is described above, depending on the polarity of piezoelectric element layer 13. If this is the case, the piezoelectric element layer 13 is curved in the directions opposite to those indicated in FIGS. 4A and 4B .
  • the foregoing voltage signal oscillates between positive and negative voltages.
  • the piezoelectric element layer 13 alternates between the states illustrated in FIGS. 4A and 4B to vibrate. Such vibration generates a sound wave traveling in the +z direction.
  • the speaker element 1A provides a greater vibration displacement of the diaphragm 3 because the diaphragm 3 is supported via the connection pieces 5. Hence, the electromechanical coupling coefficient measured when the diaphragm 3 is caused to vibrate with a voltage applied to the piezoelectric element 6 can be increased.
  • the thickness of the connection pieces 5 connecting the diaphragm 3 to the outer frame 4 is greater than the sheet thickness of the diaphragm 3 in a region on which the piezoelectric element 6 is layered.
  • the connection pieces 5 themselves are prevented from deforming and can stably support the diaphragm 3, and therefore, a standing wave pattern of vibration created in the diaphragm 3 can conform to an outer shape of the piezoelectric element 6, which becomes deformed in accordance with a voltage signal corresponding to a sound (for example, the pattern can be similar to an outer shape of the piezoelectric element 6).
  • the frequency when compared with a speaker element in which the diaphragm 3 is supported all along its perimeter (a speaker element having no opening between the diaphragm 3 and the outer frame 4), the frequency can be set to a lower band, and furthermore, the diaphragm 3 is prevented from producing unwanted vibrations, and thus disturbed sound waves can be reduced to improve the sound quality.
  • connection pieces 5 is twelve in the present embodiment. However, the number may not always be twelve in the present disclosure.
  • the number of the connection pieces 5 may be three to ten as shown in FIGS. 5A, 5B , 5C, and 5D ; provided that the connection pieces 5 are equally spaced along the circumference of the diaphragm 3.
  • FIGS. 5A to 5D each show a stress distribution generated on the diaphragm 3.
  • FIG. 5A shows that, when the number of the connection pieces 5 is three (spaced by 120 degrees), the stress distribution differs between radial directions.
  • FIG. 5B shows that, when the number of the connection pieces 5 is four (spaced by 90 degrees), the stress distribution differs between radial directions.
  • FIG. 5C shows that, when the number of the connection pieces 5 is six (spaced by 60 degrees), the stress varies uniformly without regard to radial directions.
  • FIG. 5D shows ten connection pieces 5 (spaced by 36 degrees).
  • the stress with respect to a direction along a radius of the diaphragm 3 varies more uniformly as the number of the connection pieces 5 increases.
  • connection pieces 5 When the number of the connection pieces 5 is at least six, the stress with respect to radial directions varies uniformly without regard to radial directions. Hence, desirably at least six connection pieces 5 are disposed along the outer edge of the major surface 3A of the diaphragm 3.
  • the piezoelectric element 6 is disposed on the back surface 3B, but this is not restrictive in the present disclosure.
  • the piezoelectric element 6 may be disposed on the major surface 3A as illustrated in FIG. 6 .
  • the speaker element may be manufactured by, for example, using micro-electromechanical systems (MEMS) technology, which is a semiconductor manufacturing technology for micro-machining, to produce the speaker element 1A except the piezoelectric element 6, namely the diaphragm 3, the outer frame 4, the connection pieces 5, and the annular wall 7, and then bonding the piezoelectric element 6, which is made of, for example, a ceramic, onto the back surface 3B of the diaphragm 3 that has been produced.
  • MEMS micro-electromechanical systems
  • connection pieces 5 are still capable of stably supporting the diaphragm 3 because the connection pieces 5 are formed to be thicker than other portions of the diaphragm 3.
  • a speaker element 1B according to the present embodiment is the same as the speaker element 1A according to Embodiment 1 above except that the annular wall 7 is different in shape from the annular wall in the foregoing embodiment.
  • the annular wall 7 in the speaker element 1B includes a projection 7A disposed in a region connected to the connection piece 5.
  • the projection 7A is disposed such that the inner wall facing the center O of the major surface 3A of the diaphragm 3 protrudes toward the center of the major surface 3A. Specifically, as illustrated in FIG. 9 , the projection 7A protrudes in a curved manner as seen from the z-axis direction. In other words, the length from the inner wall of the projection 7A to the center O continuously varies.
  • the projection 7A is in a line-symmetrical shape with respect to a virtual straight line A extending from the center O of the major surface 3A of the diaphragm 3 and dividing the connection piece 5 equally.
  • the projection 7A starts protruding at a position distant from the virtual straight line A by L2 and reaches a maximum protrusion whose length is L1 on the virtual straight line A.
  • the projection 7A has the shortest length from its inner wall to the center O at a position where the length of the protrusion is represented by L1.
  • the shape of the projection 7A is not limited to the one illustrated in FIG. 9 .
  • a portion of the projection 7A raised from the inner wall as seen from the z-axis direction may be partly cut off (for example, the raised portion may be partly straight).
  • the projection 7A may be in any shape as long as a stress locally caused on the diaphragm 3, such as the stress caused on the regions B1 and B2, can be reduced.
  • the projection 7A can reduce a stress locally caused on the diaphragm 3.
  • the diaphragm 3 can produce stable vibrations, and a sound corresponding to a voltage signal given to the piezoelectric element 6 can be reproduced with greater fidelity.
  • the diaphragm 3 is protected from damage that may be caused by a locally created stress.
  • An array speaker 100A which is described in the present embodiment, includes a plurality of the speaker elements 1A arranged in a two-dimensional array as illustrated in FIG. 12 .
  • the array speaker 100A as a whole is disk-shaped, and an annular outer frame 4 is disposed on the outermost circumference thereof.
  • the outer frame 4 is fixed to a fixing member (not illustrated).
  • the plurality of the speaker elements 1A is arranged in an area surrounded by an inner circumferential wall of the outer frame 4.
  • the plurality of the speaker elements 1A is arranged such that sounds are produced in the same +z direction.
  • the speaker elements 1A are arranged such that every three speaker elements 1A adjacent to one another are positioned at vertices of an equilateral triangle.
  • the outer frame 4 supports the speaker elements 1A by being connected to those connection pieces 5 which are included in the speaker elements 1A and which face the outer frame 4.
  • the connection pieces 5 included in each speaker element 1A are used to connect adjacent speaker elements 1A. In this way, the speaker elements 1A are structured to support one another.
  • connection pieces 5 Since twelve connection pieces 5 are spaced by 30 degrees around each speaker element 1A, the connection pieces 5 are at the same positions between any adjacent speaker elements 1A when the speaker elements 1A are positioned at vertices of an equilateral triangle. Therefore, the speaker elements 1A can be easily connected by linking together those connection pieces 5 which are at the same positions.
  • connection pieces 5 are disposed on the inner edge of the outer frame 4.
  • the lengths of the connection pieces 5 are kept as uniform as possible, and the supported speaker elements 1A remain well-balanced.
  • the speaker elements 1A are directly connected to each other, and thus the plurality of the speaker elements 1A to produce sounds in the same +z direction can be closely arranged, whereby higher directivity is achieved.
  • the number of the arranged speaker elements 1A is six in the present embodiment, but the number is not limited to six in the present disclosure.
  • the number of the speaker elements 1A may be less than six, or may be seven or more.
  • the speaker elements 1B (see FIG. 8 ) may be arranged.
  • An array speaker 100B according to the present embodiment also includes a plurality of the speaker elements 1A arranged in a two-dimensional array as illustrated in FIG. 13 . While the array speaker 100A according to Embodiment 3 above includes the speaker elements 1A arranged such that adjacent speaker elements 1A are positioned at vertices of an equilateral triangle, the array speaker 100B includes four speaker elements 1A, which are adjacent to one another and are arranged to be positioned at vertices of a square.
  • the array speaker 100B as a whole is square-shaped, and an annular outer frame 4 is disposed on the outermost perimeter with the inner wall of the outer frame 4 including semicircular portions each protruding toward the speaker elements 1A.
  • the outer frame 4 is fixed to a fixing member (not illustrated).
  • the plurality of the speaker elements 1A is arranged in an area surrounded by the inner wall of the outer frame 4.
  • the outer frame 4 supports the speaker elements 1A by being connected to those connection pieces 5 which are included in the speaker elements 1A and which face the outer frame 4.
  • a circular auxiliary member 8 is placed among the speaker elements 1A adjacent to one another.
  • the auxiliary member 8 supports the speaker elements 1A by being connected to those connection pieces 5 which are included in the speaker elements 1A and which face the auxiliary member 8.
  • the speaker elements 1A in the array speaker 100B can be more stably supported because the connection pieces 5 are connected not only to the outer frame 4 fixed to a fixing member but also to the auxiliary member 8 fixed to a fixing member. Note that the auxiliary member 8 may not necessarily be fixed to a fixing member.
  • extensions 4A each being connected to the connection pieces 5, being semicircular or quadrant-like, and being an equivalent of the auxiliary member 8, are disposed on the inner edge of the outer frame 4.
  • the lengths of the connection pieces 5 are kept as uniform as possible, and the supported speaker elements 1A remain well-balanced.
  • connection pieces 5 are spaced by 30 degrees around each speaker element 1A as described above, the connection pieces 5 are at the same positions between any adjacent speaker elements 1A when the speaker elements 1A are positioned at vertices of a square. Therefore, the speaker elements 1A can be easily connected by linking together those connection pieces 5 which are at the same positions.
  • the plurality of the speaker elements 1A is arranged such that sounds are produced in the same +z direction, which makes the array speaker 100B an array speaker having a high directivity. Furthermore, the speaker elements 1A producing sounds in the same direction are directly connected to each other so as to be closely arranged, whereby higher directivity is achieved.
  • the number of the arranged speaker elements 1A is four in the present embodiment, but the number is not limited to four in the present disclosure.
  • the number of the speaker elements 1A may be less than four, or may be five or more.
  • the speaker elements 1B may be arranged.
  • connection pieces 5 included in each speaker element 1A are used to connect adjacent speaker elements 1A, as illustrated in FIG. 14 .
  • triangular auxiliary members 8 are used to connect the connection pieces 5 included in the speaker elements 1A adjacent to each other.
  • the auxiliary members 8 are fixed to a fixing member (not illustrated).
  • the speaker elements 1A in the array speaker 100C can be more stably supported because the connection pieces 5 are connected not only to the outer frame 4 fixed to a fixing member but also to the auxiliary members 8 fixed to a fixing member.
  • the auxiliary members 8 may not necessarily be fixed to a fixing member.
  • connection pieces 5 are disposed on the inner edge of the outer frame 4.
  • the lengths of the connection pieces 5 are kept as uniform as possible, and the supported speaker elements 1A remain well-balanced.
  • the array speaker 100D includes four speaker elements 1A adjacent to one another, the speaker elements 1A being arranged to be positioned at vertices of a square.
  • the array speaker 100D further includes a support frame 9.
  • the support frame 9 surrounds the individual speaker elements 1A and is connected to the connection pieces 5 included in the speaker elements 1A.
  • the support frame 9 is fixed to a fixing member (not illustrated). In addition, the support frame 9 is placed between the speaker elements 1A, and thus connected to all the connection pieces 5 included in the speaker elements 1A to support the speaker elements 1A. Since all the connection pieces 5 are supported by the support frame 9 included in the array speaker 100D, the speaker elements 1A can be more stably supported.
  • the diaphragm 3 is disk-shaped in the foregoing embodiments, but this is not restrictive in the present disclosure.
  • the diaphragm 3 may be like an oval plate or may be in a rectangular or any other polygonal shape.
  • PZT is used as the piezoelectric material, but another piezoelectric material may be used. Any other piezoelectric material, such as BaTiO 3 or PbTiO 3 , or a piezoelectric single crystal, such as quartz or lithium niobate, may be used.
  • AM Amplitude modulation
  • FM frequency modulation
  • the present disclosure can be applied to a speaker which is attached to any of a variety of electrical apparatuses including portable devices such as smart phones, and which is needed to reproduce sounds with high directivity.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Obtaining Desirable Characteristics In Audible-Bandwidth Transducers (AREA)

Claims (16)

  1. Lautsprecherelement (1A) mit:
    einer Membran (3) mit einer Vielzahl von Verbindungsstücken (5), die an einer Außenkante einer Hauptfläche (3A) der Membran (3) angeordnet sind, wobei die Verbindungsstücke (5) entlang der Hauptfläche (3A) nach außen vorstehen und mit einem anderen Bauteil verbunden sind; und
    einem piezoelektrischen Element (6), das auf die Membran (3) geschichtet ist und sich beim Anlegen einer Spannung verformt, um die Membran (3) in Schwingung zu versetzen,
    dadurch gekennzeichnet, dass
    die Verbindungsstücke (5) an einer Verformung gehindert werden, indem eine Dicke der Verbindungsstücke (5) entlang einer Richtung senkrecht zur Hauptfläche (3A) größer als eine Bahndicke der Membran (3) ist in einem Bereich ist, auf dem das piezoelektrische Element (6) geschichtet ist und
    die Verbindungsstücke (5) von der Hauptfläche (3A) in einer Richtung senkrecht zur Hauptfläche (3A) vorstehen.
  2. Lautsprecherelement (1A) nach Anspruch 1,
    wobei eine ringförmige Wand (7) ringförmig entlang der Außenkante der Hauptfläche (3A) der Membran (3) gebildet ist, wobei die ringförmige Wand (7) von der Hauptfläche (3A) in einer Richtung senkrecht zur Hauptfläche (3A) vorsteht und angrenzend und bündig ist mit den Verbindungsstücken (5), entlang Oberflächen der jeweiligen Verbindungsstücke (5), die parallel zu der Hauptfläche (3A) liegen.
  3. Lautsprecherelement (1A) nach Anspruch 2,
    wobei ein Vorsprung (7A) an der ringförmigen Wand (7) in einem Bereich angeordnet ist, der mit jedem der Verbindungsstücke (5) verbunden ist, wobei der Vorsprung (7A) eine Innenwand umfasst, die einer Mitte der Hauptfläche (3A) zugewandt ist und zur Mitte der Hauptfläche (3A) vorragt.
  4. Lautsprecherelement (1A) nach Anspruch 3,
    wobei der Vorsprung (7A), gesehen aus einer Richtung senkrecht zu der Hauptfläche (3A), in einer gekrümmten Weise hervorsteht.
  5. Lautsprecherelement (1A) nach Anspruch 4,
    wobei der Vorsprung (7A) eine liniensymmetrische Form in Bezug auf eine virtuelle gerade Linie hat, die sich von der Mitte der Hauptfläche (3A) der Membran (3) erstreckt und jedes der Verbindungsstücke (5) gleich teilt.
  6. Lautsprecherelement (1A) nach einem der Ansprüche 1 bis 3,
    wobei die Verbindungsstücke (5) entlang der Außenkante der Hauptfläche (3A) der Membran (3) gleichmäßig beabstandet sind.
  7. Lautsprecherelement (1A) nach Anspruch 6,
    wobei die Verbindungsstücke (5), deren Anzahl mindestens sechs beträgt, entlang der Außenkante der Hauptfläche (3A) der Membran (3) angeordnet sind.
  8. Lautsprecherelement (1A) nach Anspruch 7,
    wobei die Verbindungsstücke (5), deren Anzahl zwölf beträgt, entlang der Außenkante der Hauptfläche (3A) der Membran (3) angeordnet sind.
  9. Lautsprecherelement (1A) nach einem der Ansprüche 1 bis 8,
    wobei die Membran (3) und das piezoelektrische Element (6) aus einer Richtung senkrecht zur Hauptfläche (3A) gesehen kreisförmig sind.
  10. Array-Lautsprecher mit:
    einer Vielzahl der Lautsprecherelemente (1A) nach einem der Ansprüche 1 bis 9,
    wobei die Lautsprecherelemente (1A) in einer zweidimensionalen Anordnung angeordnet sind.
  11. Array-Lautsprecher nach Anspruch 10,
    wobei die Lautsprecherelemente (1A), deren Anzahl vier beträgt, nebeneinander liegen und so angeordnet sind, dass sie einzeln an Eckpunkten eines Quadrats positioniert sind.
  12. Array-Lautsprecher nach Anspruch 10,
    wobei die Lautsprecherelemente (1A), deren Anzahl drei beträgt, nebeneinander liegen und so angeordnet sind, dass sie einzeln an Scheitelpunkten eines gleichseitigen Dreiecks positioniert sind.
  13. Array-Lautsprecher nach einem der Ansprüche 10 bis 12 mit:
    einem äußeren Rahmen (4), der eine Anordnung der Lautsprecherelemente (1A) umgibt und die Lautsprecherelemente (1A) trägt, indem er mit den Verbindungsstücken (5) verbunden ist, die in den Lautsprecherelementen (1A) enthalten sind, wobei diese Verbindungsstücke (5) dem äußeren Rahmen (4) zugewandt sind,
    wobei die Lautsprecherelemente (1A) verbunden werden, indem die Verbindungsstücke (5) miteinander verbunden werden, die nicht mit dem äußeren Rahmen (4) verbunden sind.
  14. Array-Lautsprecher nach einem der Ansprüche 10 bis 12 mit:
    einem äußeren Rahmen (4), der eine Anordnung der Lautsprecherelemente (1A) umgibt und die Lautsprecherelemente (1A) trägt, indem er mit den Verbindungsstücken (5) verbunden ist, die in den Lautsprecherelementen (1A) enthalten sind, wobei diese Verbindungsstücke (5) dem äußeren Rahmen (4) zugewandt sind; und
    einem Hilfselement (8), das in einer Lücke zwischen den Lautsprecherelementen (1A) angeordnet ist und die Lautsprecherelemente (1A) trägt, indem es mit den Verbindungsstücken (5) verbunden ist, die in den Lautsprecherelementen (1A) enthalten sind, wobei diese Verbindungsstücke (5) dem Hilfselement (8) zugewandt sind.
  15. Array-Lautsprecher nach Anspruch 13 oder 14, der ferner umfasst:
    eine Verlängerung (4A), die sich vom Außenrahmen (4) erstreckt und mit den Verbindungsstücken (5) verbunden ist.
  16. Array-Lautsprecher nach einem der Ansprüche 10 bis 12 mit:
    einem Tragrahmen (9), der die einzelnen Lautsprecherelemente (1A) umgibt und mit den in den Lautsprecherelementen (1A) enthaltenen Verbindungsstücken (5) verbunden ist.
EP18785140.7A 2017-04-13 2018-04-03 Lautsprecherelement und array-lautsprecher Active EP3611938B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017079686A JP6790981B2 (ja) 2017-04-13 2017-04-13 スピーカ素子及びアレイスピーカ
PCT/JP2018/014286 WO2018190200A1 (ja) 2017-04-13 2018-04-03 スピーカ素子及びアレイスピーカ

Publications (3)

Publication Number Publication Date
EP3611938A1 EP3611938A1 (de) 2020-02-19
EP3611938A4 EP3611938A4 (de) 2020-04-29
EP3611938B1 true EP3611938B1 (de) 2022-05-04

Family

ID=63792603

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18785140.7A Active EP3611938B1 (de) 2017-04-13 2018-04-03 Lautsprecherelement und array-lautsprecher

Country Status (3)

Country Link
EP (1) EP3611938B1 (de)
JP (1) JP6790981B2 (de)
WO (1) WO2018190200A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022133757A (ja) 2021-03-02 2022-09-14 ローム株式会社 制御システムおよび制御方法
CN118540642A (zh) * 2023-02-22 2024-08-23 天津大学 具有应力释放缝隙的mems扬声器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3123435B2 (ja) 1996-07-29 2001-01-09 株式会社村田製作所 圧電型電気音響変換器
JP5525351B2 (ja) * 2010-06-29 2014-06-18 太平洋セメント株式会社 圧電発音体
CN103814586B (zh) * 2011-09-22 2016-10-26 松下知识产权经营株式会社 指向性扬声器
JP2014086941A (ja) * 2012-10-25 2014-05-12 Nec Casio Mobile Communications Ltd 電気音響変換器及び電子機器
JP2017079686A (ja) 2015-10-30 2017-05-18 東洋ゴム工業株式会社 人工土壌粒子の製造方法

Also Published As

Publication number Publication date
WO2018190200A1 (ja) 2018-10-18
JP6790981B2 (ja) 2020-11-25
JP2018182533A (ja) 2018-11-15
EP3611938A4 (de) 2020-04-29
EP3611938A1 (de) 2020-02-19

Similar Documents

Publication Publication Date Title
US8509462B2 (en) Piezoelectric micro speaker including annular ring-shaped vibrating membranes and method of manufacturing the piezoelectric micro speaker
US10484796B2 (en) Speaker device and method for manufacturing speaker device
JP2004524574A (ja) 集積化した音響トランスジューサを有する表示基板
US20060113879A1 (en) Piezoelectric micro acoustic sensor based on ferroelectric materials
JP2019114958A (ja) 電気音響変換器
JP7460343B2 (ja) トランスデューサ
EP3611938B1 (de) Lautsprecherelement und array-lautsprecher
WO2023130914A1 (zh) 电子设备及声学换能器
JPWO2013099512A1 (ja) 振動装置，音響発生装置，スピーカーシステム，電子機器
WO2021024865A1 (ja) 圧電素子
KR101765000B1 (ko) 지향성 스피커용 압전 트랜스듀서 및 이를 포함하는 지향성 스피커
KR101765006B1 (ko) 지향성 스피커용 압전 트랜스듀서 및 이를 포함하는 지향성 스피커
JP2011182298A (ja) Ｍｅｍｓトランスデューサおよび超音波パラメトリックアレイスピーカー。
KR200168498Y1 (ko) 박막형 초음파발생트랜스듀서
JP2012217013A (ja) 発振装置及び電子機器
JP2012165308A (ja) 超音波トランスデューサー
WO2024087998A1 (zh) 压电mems换能器及其加工方法、封装结构及电子设备
JP2011182299A (ja) Ｍｅｍｓトランスデューサとその製造方法
JP7253094B1 (ja) 圧電スピーカ
CN213991016U (zh) 压电式麦克风
JP2011139267A (ja) 圧電型発音装置
JP2023056253A (ja) トランスデューサ
US20230051555A1 (en) Transducer and driving method thereof, and system
JPH1056689A (ja) 圧電発音体
JP2022158212A (ja) 音波スピーカ装置

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20191025

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

REG Reference to a national code

Ref country code: DE

Ref legal event code: R079

Ref document number: 602018035055

Country of ref document: DE

Free format text: PREVIOUS MAIN CLASS: H04R0007060000

Ipc: H04R0001400000

A4 Supplementary search report drawn up and despatched

Effective date: 20200330

RIC1 Information provided on ipc code assigned before grant

Ipc: H04R 17/00 20060101ALI20200324BHEP

Ipc: H04R 1/40 20060101AFI20200324BHEP

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: I-PEX INC.

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20211111

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: I-PEX INC.

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1490428

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220515

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602018035055

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: NL

Ref legal event code: FP

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1490428

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220504

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220905

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220804

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220805

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220804

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220904

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602018035055

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

26N No opposition filed

Effective date: 20230207

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20230403

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230403

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20230430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230403

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220504

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230403

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230403

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230403

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20240418

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240418

Year of fee payment: 7