EP3596759A2

EP3596759A2 - Actuator device and method for operating an actuator device

Info

Publication number: EP3596759A2
Application number: EP18714726.9A
Authority: EP
Inventors: René Schnetzler; Thomas Schiepp; Harald Eckhardt
Original assignee: ETO Magnetic GmbH
Current assignee: ETO Magnetic GmbH
Priority date: 2017-03-15
Filing date: 2018-03-15
Publication date: 2020-01-22
Also published as: WO2018167242A3; US11569436B2; DE102017105531A1; WO2018167242A2; US20200303622A1

Abstract

The invention relates to an actuator device, comprising at least one actuator element (10a; 10b; 10d; 10e; 10f), which consists at least partially of a magnetically shape-changing material and which is at least provided to cause a movement of at least one actuation element (12a; 12e; 12f) by means of a contraction in at least one direction of movement (14a), and a magnetic contraction unit (18a; 18b; 18c; 18g) which is configured to provide a magnetic field acting upon the actuator element (10a; 10b; 10d; 10e; 10f) in order to generate a contraction of the actuator element (10a; 10b; 10d; 10e; 10f). It is proposed that field lines (20a) of the magnetic field are at least aligned substantially parallel to the direction of movement (14a) in the region of the actuator element (10a; 10b; 10d; 10e; 10f).

Description

Actuator device and method for operating a

actuator device

The invention is based on an actuator device according to the preamble of claim 1 and a method for operating an actuator device according to the preamble of claim 20.

From DE 10 2005 038 891 A1 is an actuator device, in particular for a

Injection device of the automotive industry, known, which has an actuator element made of a magnetically variable material and a magnet unit for influencing the actuator element. In this case, however, the actuator element is formed from a material in which a magnetic field aligned parallel to the direction of movement of an actuating element leads to an elongation of the actuator element, while a magnetic field aligned perpendicular to the direction of movement leads to a contraction of the actuator element. However, such a configuration requires relatively high

magnetic switching fields and limits a maximum achievable by means of the actuator element stroke movement.

The object of the invention is in particular to provide a generic device with improved properties in terms of efficiency. The object is solved by the characterizing features of claims 1 and 20, while advantageous embodiments and further developments of the invention can be taken from the dependent claims.

Advantages of the invention

The invention is based on an actuator device having at least one actuator element, which at least partially, preferably at least a large part and especially , -

Preferably, completely, consists of a magnetically deformable material, and which is at least provided to cause by means of a contraction movement of at least one, advantageously exactly one, actuating element in at least one direction of movement, and with a magnetic contraction unit, which is provided to a , Advantageously repeated and magnetically induced, contraction of the actuator element to provide a force acting on the actuator element, in particular directly, magnetic field.

It is proposed that field lines of the magnetic field, which in particular causes a contraction of the actuator element, are aligned in the region of the actuator element at least substantially parallel to the direction of movement. Through this

Embodiment, an actuator device with improved properties in terms of efficiency, in particular energy efficiency, power efficiency, space efficiency, switching efficiency and / or cost efficiency, can be provided. In particular, a particularly small magnetic switching field and at the same time a advantageously large stroke can be achieved. In addition, advantageously, a switching speed can be increased. Furthermore, a particularly compact

Actuator device can be provided.

In this context, an "actuator device" is to be understood as meaning in particular at least one part, in particular a subassembly, of an actuator Advantageously, the actuator device and / or the actuator is at least for use in a valve, in particular a pneumatic valve and preferably an inline valve, and / or or a valve system with a valve block and a plurality of valves arranged in the valve block, in particular pneumatic valves and preferably in-line valves, for example for use in sorting plants, in particular seed sorting plants and / or rice sorting plants Alternatively or additionally, the actuator device and / or the actuator can also be used be in a fluid pump and / or a, in particular fast-switching switch, such as a circuit breaker and / or a changeover switch, be provided in particular, the actuator device can also the actuating element, such as a control body, a n

Closure body, a valve needle and / or a valve stem, and / or, advantageously designed as an outer housing, actuator housing, in particular at least for receiving the actuator element, the contraction unit and / or the actuating element, , ,

include. The term "provided" is to be understood to mean in particular specially designed and / or equipped.Assuming that an object is intended for a specific function should in particular mean that the object fulfills this specific function in at least one application and / or operating state and / At least 55%, advantageously at least 65%, preferably at least 75%, particularly preferably at least 85% and particularly advantageously at least 95% are to be understood as meaning the expression "for at least a large part".

Furthermore, under an "actuator element" in particular one, in particular with the

Actuator be operatively connected element, which is particularly intended to implement an external stimulus, such as an electrical signal, a thermal signal, a mechanical signal and / or advantageously at least one magnetic signal in a movement. In particular, the actuator element is formed at least partially variable in shape and in particular provided to change a shape depending on the external stimulus.

Preferably, a volume of the actuator element is constant. In the present case, the actuator element is at least provided to a magnetic signal of

To convert contraction unit into a contraction movement and thereby

in particular to cause a movement of the actuating element in the direction of movement, preferably such that the actuating element moves into an open position. In addition, the actuator element is advantageously elongated and defines in particular a longitudinal direction. Preferably, the actuator element is provided for a contraction in the longitudinal direction of the actuator element. Preferably, the longitudinal extension direction of the actuator element is at least substantially parallel to the direction of movement. This is particularly advantageous

Actuator element is provided by means of a contraction in the

Longitudinal direction of the actuator element to cause a movement of the actuating element in the direction of movement. Advantageously, the actuator element, in particular an axial end and / or an end face of the actuator element, contacts the actuating element indirectly and / or preferably directly. Furthermore, that is

Actuator particularly advantageous integrally formed. An "elongated object" should be understood to mean in particular an object, wherein a smallest, the object just still enclosing, in particular imaginary cuboid at least one, in particular longest, edge and / or side has, which around - -

at least 10%, advantageously by at least 25% and more preferably by at least 50% greater than at least one other, in particular second longest, edge and / or side of the cuboid. A "longitudinal extension direction" of an object, in particular an elongated object, is to be understood to mean, in particular, a direction of maximum extension of the object. "At least substantially parallel" is to be understood as meaning in particular an orientation of a direction relative to a reference direction, in particular in a plane. wherein the direction relative to the reference direction has a deviation, in particular less than 8 °, advantageously less than 5 ° and particularly advantageously less than 2 °. Under "one piece" should in this

Connection in particular at least cohesively connected and / or understood to be trained with each other. The material bond can be produced for example by an adhesive process, a Anspritzprozess, a welding process, a soldering process and / or another process. Advantageously, however, should be understood as being integrally formed in one piece and / or in one piece. Furthermore, a "magnetically deformable material" is to be understood as meaning in particular a material which can be influenced by means of a, in particular external, magnetic field and is advantageously provided in at least one operating state to change a material property and / or a shape at least as a function of the magnetic field Furthermore, under a "contraction unit", in particular one, advantageously the

Actuator at least partially and preferably at least a large part encompassing, magnetic unit, advantageously coil unit, in particular with at least one magnetic element understood, which is intended to provide in at least one operating state, in particular acting on the actuator element, magnetic field and / or produce and thereby in particular to influence and / or to effect a deformation, in particular at least one contraction, of the actuator element. The fact that an object "influences" another object should in this context be understood in particular to mean that the further object has and / or assumes a different state, form and / or position in the absence and / or inactivity of the object as in the presence and / or activity of the object. Preferably, the contraction unit is thereto

intended to cause a contraction of the actuator element in the longitudinal direction of the actuator element. Advantageously, the contraction unit is intended to , ,

a contraction of the actuator element in the longitudinal extension direction of the actuator element to provide a force acting on the actuator magnetic field whose field lines are aligned at least substantially parallel to the Längssestreckungsnchtung of the actuator element. Particularly preferably, the contraction unit is provided, in particular by means of the magnetic field, in at least one application state to cause a contraction of the actuator element and thereby a movement of the

Actuator in the direction of movement, preferably the open position to produce. In addition, the contraction unit is advantageously arranged at least to a large extent in a vicinity of the actuator element. A "near zone" is to be understood in particular as meaning a spatial area which is formed by points which are less than a third, preferably less than a quarter, preferably less than one sixth and particularly preferably less than one tenth of a minimum longitudinal extension of the actuator element of one Reference point and / or a reference component, in particular the actuator element, are removed and / or each of a distance of at most 20 mm, preferably at most 10 mm and more preferably of at most 5 mm from a reference point and / or a reference component, in particular the actuator element, Furthermore, a "coil unit" is to be understood as meaning in particular a unit having at least one coil and / or an interconnection of a plurality of coils. In addition, "a region of an object" is to be understood as meaning, in particular, a volume of a smallest imaginary cuboid which just completely encloses the object.

Preferably, the actuator element is at least provided to transmit a tensile force on the actuating element, whereby in particular an advantageous switching action can be achieved. In particular, the actuator element is at least provided to cause a pulling movement of the actuating element in the direction of movement by means of a contraction. In particular, the actuator element, advantageously a first axial end facing the actuating element and / or a

Actuator facing first end face of the actuator element, in addition to the actuating element connected, in particular indirectly and / or directly and preferably immobile. In addition, the actuator element, advantageously a the

Actuator opposite second axial end and / or the actuator opposite the second end face of the actuator element, immovable and / or fixed, in particular relative to the actuator housing, and advantageous to - -

fixed to the actuator housing. The expression "motion-resistant" is to be understood in particular as meaning that a movement of the actuator element leads to a simultaneous and advantageously uniform movement of the actuating element Alternatively or additionally, however, the actuator element could also be provided to transmit a pressure force to the actuating element.

The magnetically deformable material could, for example, a

correspond to magnetostrictive material. However, the magnetically deformable material is advantageously a magnetically active and / or active shape memory material, in particular a magnetic shape memory material, and particularly preferably a magnetic shape memory alloy (also known as MSM material = magnetic shape memory). The magnetically deformable material preferably contains nickel, manganese and gallium. In this way, in particular a particularly simple deformation can be realized with an advantageously large moving distance.

It is also proposed that the magnetically deformable material is monocrystalline. In this way, in particular, a mechanical load capacity of the material can be increased and / or an advantageously large lifting effect can be achieved.

A particularly small magnetic switching field and / or an advantageously large stroke can be achieved, in particular, if the magnetically deformable material has a tetragonal crystal structure with the lattice constants a, b = a and c, where c / a <1, and the magnetically deformable material has a magnetic anisotropy, wherein the magnetic permeability in the direction of the c-axis is higher than along the a-axis and the b-axis. In particular, this is magnetic

dimensionally variable material along the, in particular short, c-axis easily magnetizable. In addition, in this case, in particular, the c-axis rotates when a magnetic field is applied in the direction of the field lines of the magnetic field, which leads to a contraction and / or shortening of the actuator element, in particular in the magnetic field caused by the contraction unit.

Preferably, the magnetic field, in particular the contraction unit, causes a change in length of the actuator element in the direction of movement of at least 2%, preferably of at least 5% and more preferably of at least 7%, whereby a particularly advantageous switching behavior with clearly defined , ,

Operating positions can be achieved. In particular, a longitudinal extent of the actuator element between a basic shape and a, in particular smallest possible, contraction shape in this case vary by at least 3%, preferably by at least 5% and particularly preferably by at least 7%. Furthermore, it is proposed that the actuator element be rigid with the

Actuating element is connected, in particular cohesively, preferably by means of a welded connection and / or an adhesive connection, or non-positively and / or positively, preferably by means of a clamping connection. In this way, in particular, an advantageous connection between the actuator element and the actuating element can be created.

In a further embodiment of the invention, it is proposed that the

Contraction unit for providing the magnetic field comprises at least one, advantageously exactly one, designed as an air coil magnetic element. The magnetic element preferably surrounds the actuator element at least partially and preferably at least to a large extent. In particular, the contraction unit can also be designed as an air coil. In this context, an "air coil" should be understood to mean, in particular, an inductive component, in particular a coil, which is free of a magnetic core

Inductance of the contraction unit can be reduced, which in particular a particularly fast-switching actuator device can be provided.

It is also proposed that the contraction unit be used to provide the

Magnetic field at least one, advantageously exactly one, designed as a tape reel

Magnetic element comprises. The magnetic element preferably surrounds the actuator element at least partially and preferably at least to a large extent. In particular, the contraction unit can also be designed as a tape reel. In this context, a "tape coil" is to be understood in particular as an inductive component, in particular a coil, which consists in particular of at least one electrical conductor, preferably with an oblong and in particular rectangular cross section, and in particular at least one turn and advantageously a plurality of Particularly preferably, the reel consists of at least a large part of a wound sheet and / or - -

several wound sheets. This can be advantageous in particular

uniform magnetic field can be provided.

In a further embodiment of the invention, it is proposed that the

Contraction unit for providing the magnetic field at least one, advantageously exactly one, consisting of stacked and preferably joined tension discs existing

Magnetic element comprises. The clamping discs can advantageously slotted formed and particularly advantageous integrally connected to each other.

The magnetic element preferably surrounds the actuator element at least partially and preferably at least to a large extent. In particular, the

Contraction unit also made of stacked and preferably joined

Be designed clamping discs. In this way, in particular a magnetic element can be provided with advantageous resilient and / or restoring properties.

Alternatively or additionally, it is proposed that the contraction unit for

Provision of the magnetic field at least one, advantageously exactly one, designed as a spiral coil magnetic element and / or at least one, advantageously exactly one, designed as a permanent magnet magnetic element comprises, which may be mounted in particular movable relative to the actuator element. In this way, in particular an advantageous flexibility can be achieved. In addition, in particular an existing and / or required space can be optimally utilized. If the contraction unit has an inductance of at most 10 mH, preferably of at most 100 μΗ and particularly preferably of at most 100 nH, in particular a switching time of the actuator device can advantageously be reduced.

In addition, it is proposed that the contraction unit has at least one flux concentrator, which is intended to increase the magnetic field, in particular the contraction unit, acting on the actuator element. In this way, in particular, a magnetic field acting on the actuator element can be increased, whereby advantageously an inductance and / or impedance of the contraction unit can be reduced.

Advantageously, the flux concentrator is arranged in an axial end region of the actuator element, in particular a near region of an axial end of the actuator element, as a result of which, in particular, an action of the flux concentrator can be optimized. , ,

Advantageously, the flux concentrator is arranged in a vicinity of the first axial end of the actuator element and / or the first end face of the actuator element and particularly preferably at least partially between the actuator element and the actuating element. Particularly advantageously, the contraction unit can also have at least two, in particular separate, flow concentrators, which are advantageous in

opposite axial end portions of the actuator element are arranged.

In a further embodiment of the invention, it is proposed that the

Actuator having an elongation unit, which to a, in particular indirect and / or immediate and preferably repeated, stretching of the

Aktorelements, in particular in a contraction movement of the actuator element opposite direction and preferably in the longitudinal direction of the

Actuator element is provided. Under a "stretching unit" should in this

Connection in particular one, advantageously the actuator element at least partially and preferably at least a major embracing, mechanical and / or magnetic unit, in particular with at least one expansion element, understood, which is intended, in at least one operating state a

Deformation, in particular at least one strain, to influence the actuator and / or effect. In particular, the expansion unit is provided for a bias and / or return of the actuator element. Preferably, the

Expansion unit provided to an elongation of the actuator element in the

To effect longitudinal direction of the actuator element. Particularly preferably, the expansion unit is provided to effect in at least one application state an elongation of the actuator element and / or a movement of the actuating element in a direction of movement opposite direction of movement, preferably a closed position. Advantageously, the stretching unit and / or the

Actuator thereby at least provided a compressive force on the

To transmit actuating element, preferably such that the actuating element moves in the further direction of movement and / or is held in the closed position. In particular, a force exerted by the expansion unit on the actuator element and / or the actuating force is less than a force exerted by the contraction unit on the actuator element, so that an actuation and / or an activity of the contraction unit to a movement of the actuating element in the

Direction of movement leads. In addition, the stretching unit is advantageous for at least one - -

Most arranged in a vicinity of the actuator element. In addition, the expansion unit can preferably be formed at least partially in one piece with the contraction unit. In this context, it is to be understood, in particular, that the objects have at least one common component and / or at least one component of the object and / or the object in one piece with at least one component However, all the components of the object are preferably formed in one piece with at least one component of the further object, whereby in particular a repeatedly and / or resealable switching actuator device can be provided.

It is further proposed that the expansion unit at least one, advantageously exactly one, designed as an elastic element expansion element, in particular a

Spring element and preferably a compression spring and / or a spiral spring comprises, which in particular has an operative connection with the actuating element. The expansion element could for example be connected to the actuator element and in particular cause a direct expansion of the actuator element. In this case, however, the expansion unit is particularly preferably provided in at least one

Application state, a movement of the actuating element in the further

Movement direction, preferably the closed position, to effect and thereby a

Elongation of, in particular with the actuating element immovably connected actuator element to effect. Advantageously, the expansion element contacts the

Actuator to directly and causes in particular a movement of the actuating element in the further direction of movement, in particular the

Closed position. This can in particular a particularly fast-switching

Actuator device can be provided. In addition, in the case of a one-piece design of the contraction unit with the expansion unit an almost space-neutral

Actuator device can be achieved.

Alternatively or additionally, it is proposed that the expansion unit comprises at least one, advantageously exactly one, designed as a permanent magnet expansion element, which in particular has an operative connection with the actuator element. In particular, the expansion element is provided in this case, to an elongation of - -

Actuator element acting on the actuator element further magnetic field

whose field lines are at least substantially perpendicular to

Movement direction of the actuating element and / or are aligned to the longitudinal direction of the actuator element. In this case, the expansion unit is particularly preferably provided to effect an expansion of the actuator element in at least one application state, by means of the further magnetic field, and thereby to generate a movement of the actuating element in the further movement direction, preferably the closed position. In this case, the actuator element is thus at least provided to convert a magnetic signal of the expansion unit into an expansion movement and thereby in particular to cause a movement of the actuating element in the further direction of movement, preferably such that the

Actuator moved to the closed position. In this context, the term "at least substantially perpendicular" is intended to define, in particular, an orientation of a direction relative to a reference direction, wherein the direction and the

Reference direction, in particular viewed in one plane, an angle in particular between 82 ° and 98 °, advantageously between 85 ° and 95 ° and more preferably between 88 ° and 92 °. In this way, in particular, an advantageously robust actuator device can be provided, wherein a service life and / or a fatigue strength can advantageously be increased. According to a further embodiment of the invention, it is proposed that the

Actuator having a detection unit which is provided to detect at least one correlated with the movement of the actuating element actuating characteristic, whereby in particular an advantageous detection and / or detection of a switching operation can be achieved. The detection unit could, for example, at least one sensor designed as a camera, in particular a CCD camera, for detecting the actuation characteristic, at least one as an acceleration sensor

trained sensor and / or at least one sensor designed as a magnetic field sensor, such as a sensor based on the anisotropic magnetoresistive effect sensor, in particular an AMR sensor, one on the

Giant magnetoresistance effect based sensor, in particular a GMR sensor, and / or a Hall sensor having. However, an advantageously cost-effective and / or space-optimized detection can be achieved, in particular, if the detection unit for detecting the actuation parameter has at least one - -

Sensor coil formed sensor. An "actuating characteristic" is to be understood in particular as meaning a parameter which is in particular associated with the

Movement of the actuating element and advantageously a deformation of the actuator element is correlated. Preferably, the detection unit and / or a further unit, advantageously the actuator device, close at least on the basis of the actuation characteristic to a movement of the actuating element and / or a movement of the

Detecting actuator. Advantageously, the detection unit is to do so

intended to detect a deformation of the actuator element, in particular directly and / or indirectly. The actuation characteristic could, for example, correspond to a position, in particular, a relative and / or an absolute position, of the actuation element. Preferably, however, it is proposed that the actuation parameter is an induced voltage caused by a deformation of the actuator element and / or an induced current caused by a deformation of the actuator element, whereby in particular an advantageously simple and / or cost-effective detection unit can be provided.

Furthermore, the invention relates to a valve system having a valve block and a plurality of in the valve block, in particular in recesses of the valve block, arranged and advantageously aligned parallel valves, in particular pneumatic valves and preferably inline valves, each having at least one actuator with the aforementioned actuator device, wherein the valves , in particular adjacent valves, a minimum distance, in particular a grid, of at most 10 mm, preferably of at most 8.5 mm and more preferably of at most 7 mm. As a result, in particular an efficiency, in particular a

Energy efficiency, power efficiency, space efficiency, switching efficiency and / or cost efficiency. In particular, a particularly small magnetic switching field and at the same time a advantageously large stroke can be achieved. In addition, advantageously, a switching speed can be increased.

Further, a valve system can be provided with an advantageously small pitch, which in particular allows use in sorting and an improved sorting function can be achieved.

In addition, the invention is based on a method for operating an actuator device, which has at least one actuator element, which at least partially, preferably - -

at least a major part and particularly preferably completely, consists of a magnetically deformable material, wherein the actuator element is contracted by means of a force acting on the actuator element, in particular directly acting magnetic field and by means of the contraction of the actuator element movement at least one, advantageously exactly one, actuating element in at least a direction of movement is effected.

It is proposed that field lines of the magnetic field, which in particular causes a contraction of the actuator element, be aligned in the region of the actuator element at least substantially parallel to the direction of movement. As a result, in particular an efficiency, in particular an energy efficiency, a power efficiency, a space efficiency, a switching efficiency and / or a cost efficiency, can be improved. In particular, a particularly small magnetic switching field and at the same time a advantageously large stroke can be achieved. In addition, advantageously, a switching speed can be increased. Furthermore, a particularly compact

Actuator device can be provided.

The actuator device and the method for operating the actuator device should not be limited to the application and embodiment described above. In particular, the actuator device and the method for operating the

Actuator device to fulfill a function described herein have a number differing from a number of individual elements, components and units mentioned herein.

drawings

Further advantages emerge from the following description of the drawing. In the drawings, embodiments of the invention are shown. The drawings, the description and the claims contain numerous features in combination. The person skilled in the art will expediently also consider the features individually and combine them into meaningful further combinations.

It shows: an actuator with an actuator device in a schematic

Side View, - -

2 shows the actuator with the actuator device in an operating state,

FIG. 3 shows an actuator element of the actuator device and a contraction unit of FIG

Actuator device in a detailed representation,

Fig. 4 shows another embodiment of an actuator device with a

Actuator element and a contraction unit,

Fig. 5 shows another embodiment of an actuator device with a

Contraction unit comprising a magnetic element consisting of stacked tension discs,

6a-b one of the clamping disks of the magnetic element of Figure 5,

Fig. 7 shows a further embodiment of an actuator device with a

Actuator element and an expansion unit,

Fig. 8 shows a further embodiment of an actuator device with a

Actuator element and an expansion unit,

9 shows a valve with a further actuator device in a schematic

Side View,

Fig. 10 shows another embodiment of a valve with another

Actuator device in a frontal view and

Fig. 1 1 a valve system with a plurality of actuator devices in one

schematic view.

Description of the embodiments

Figures 1 and 2 show an exemplary actuator 40a with an actuator device in a schematic view.

The actuator device comprises an actuator housing 48a. The actuator housing 48a is formed as an outer housing. The actuator housing 48a is in the present case, for example, cylindrical, in particular circular cylindrical, formed. The actuator housing 48a is formed at least substantially closed. The actuator housing 48a is designed as a receiving unit and in particular provided to receive and / or store at least a majority of the components required for operation of the actuator 40a. - -

In the present case, the actuator housing 48a is formed at least in two parts. In this case, the actuator housing 48a has at least two housing parts 50a, 52a which are in particular separate and can be connected to one another by means of a press connection. A first

Housing part 50a of the housing parts 50a, 52a is formed as a basic element. The first housing part 50a defines a first cover side of the, in particular cylindrical, actuator housing 48a to at least a large part. A second housing part 52a of the housing parts 50a, 52a is designed as a cover. The second housing part 52a defines a second cover side and a lateral surface of the, in particular cylindrical, actuator housing 48a. In addition, the second housing part 52a at least partially defines the first cover side of the, in particular cylindrical, actuator housing 48a. Alternatively, it is conceivable to form an actuator housing cuboidal and / or cube-shaped. In addition, an actuator housing could also be integrally formed. In addition, it is conceivable in principle to dispense with an actuator housing.

The actuator housing 48a further has at least one passage opening 54a. The passage opening 54a is on a first housing part 50a

opposite side and / or in the region of the second cover side of the, in particular cylindrical, actuator housing 48 a arranged. The passage opening 54a is arranged in a central region of the second cover side of the actuator housing 48a.

In addition, the actuator device comprises at least one actuating element 12a. In the present case, the actuator device comprises exactly one actuating element 12a. The actuating element 12a is designed as a control body. The actuator 12a is at least partially disposed within the actuator housing 48a. The

Actuating element 12a is arranged centrally within the actuator housing 48a. The actuating element 12a is associated with the passage opening 54a. The

Actuating element 12a is at least partially led out of the actuator housing 48a through the passage opening 54a. A portion of the operating member 12a led out of the actuator housing 48a defines a positioning portion of the actuator

Actuating element 12a. The actuating element 12a is movably mounted relative to the actuator housing 48a. The actuating element 12a is in a movement direction 14a and in the movement direction 14a opposite another

Movement direction 16a movable. The direction of movement 14a is rectilinearly directed by the passage opening 54a in the direction of the first housing part 50a, while - -

the further direction of movement 16a is rectilinearly directed by the first housing part 50a in the direction of the passage opening 54a. Alternatively, however, an actuator device could also have a different number of actuators, such as at least two actuators. In addition, an actuating element could also be designed as a closure body, valve needle or valve tappet or the like.

Furthermore, the actuator device has at least one actuator element 10a. In the present case, the actuator device comprises exactly one actuator element 10a.

In principle, however, an actuator device could also have a different number

Have actuator elements, such as at least two actuator elements and / or at least three actuator elements.

The actuator element 10a is arranged completely within the actuator housing 48a. The actuator element 10a is arranged centrally within the actuator housing 48a. The

Actuator element 10a is integrally formed. The actuator element 10a is formed as a solid body. The actuator element 10a is at least substantially strip-shaped and / or cuboid. The actuator element 10a is elongated and has a, in particular in Figures 1 and 2 vertically arranged longitudinal extent. The longitudinal extent of the actuator element 10a defines a longitudinal direction of extension of the actuator element 10a. In an operating state, the actuator element 10a is arranged such that the longitudinal extension direction of the actuator element 10a is aligned parallel to the movement direction 14a and the further movement direction 16a.

In addition, the actuator element 10a is formed variable in shape. The actuator element 10a consists of a magnetically deformable material. The actuator element 10a consists of a magnetically deformable shape memory material. in the

In the present case, the actuator element 10a consists of a magnetic

Shape memory alloy. The magnetic shape memory alloy contains nickel, manganese and gallium. The actuator element 10a consists of a nickel-manganese-gallium alloy. The magnetically deformable material is monocrystalline. Thus, the actuator element 10a is formed in the present case as a single crystal.

Furthermore, the magnetically deformable material is present in a martensitic phase relevant to the MSM effect in a tetragonal crystal structure. In this case, the magnetically deformable material on the lattice constants a, b = a and c, wherein - -

c / a <1. In addition, the magnetically deformable material has a magnetic anisotropy, wherein the c-axis has a higher magnetic permeability than the a-axis and the b-axis, whereby the magnetically deformable material and / or the actuator element 10 a along the, in particular short, c Axis is easier to magnetize. Upon application of a magnetic field, the c-axis rotates in the direction of the field lines of the magnetic field, which in particular leads to a contraction and / or shortening of the actuator element 10a in the direction of the field lines. In the present case, such a magnetic field causes a change in length of the actuator element 10a in the

Longitudinal direction of the actuator element 10a of at least 3%. Alternatively, however, an actuator element could also consist of a nickel-manganese-gallium-containing alloy, an iron-palladium alloy and / or an iron-palladium-containing alloy. In addition, an actuator element could also be used as foam, as polycrystal and / or as

Be formed composite structure, in the latter case, nickel, manganese and gallium components can be embedded in a matrix. Furthermore, an actuator element could in principle also consist of a magnetostrictive material.

The magnetically deformable shape memory material used is a magnetically active material. This material has the property that in response to an applied magnetic field having a defined minimum field strength and a defined direction deformation and / or shape change, in the present case in at least one operating state in particular a

Contraction movement in the longitudinal direction of the actuator element 10a, takes place. After a reduction and / or a deactivation of the magnetic field, however, a movement does not automatically take place back into the basic shape and / or initial shape. Rather, the actuator element 10a remains even after the reduction and / or the

Deactivating the magnetic field in the current, in particular stretched and / or contracted form, in particular at least in a state in which no external stimulus other than pure gravity and / or ambient pressure acts on the actuator element 10a.

In addition, the magnetically deformable shape memory material has the property that in response to a mechanical force having a defined minimum thickness and a defined direction takes place, in particular mechanical, deformation and / or shape change. To a deformation and / or - -

Form change of the actuator element 10a must be an internal force of the

Actuator element 10a, in the present case, in particular due to a relatively high hysteresis of a material used, overcome. Also in this case, after a reduction and / or an interruption of the mechanical force and / or a mechanical stress, a movement does not automatically take place back into a basic shape and / or initial shape. The actuator element 10a would thus also in this case, in particular without resetting external stimulus, after the reduction and / or the interruption of the mechanical force and / or the mechanical

Stress in the current form remain. In the present case, the actuator element 10a can thus be influenced and in particular deformed, at least by means of a magnetic field and / or a mechanical force.

The actuator element 10a is further associated with the actuator 12a. The

Actuator element 10a has an operative connection with the actuating element 12a. In this case, the actuator element 10a is arranged on a side of the actuating element 12a which is opposite the adjusting section of the actuating element 12a. The actuator element 10a and the actuating element 12a are arranged directly one behind the other. In the present case, the actuator element 10a supports the actuating element 12a movably in the direction of movement 14a and the further direction of movement 16a.

For this purpose, the actuator element 10a contacts the actuating element 12a directly. In the present case, a contact, in particular the actuating element 12a

facing, the first axial end of the actuator element 10a, the actuating element 12a, in particular the the actuating portion opposite side of the actuating element 12a. The first axial end of the actuator element 10a defines a movable end of the actuator element 10a. The actuator element 10a is also immobile with the actuating element 12a and in particular rigidly connected, whereby the actuator element 10a can transmit a tensile force on the actuating element 12a.

In addition, the actuator element 10a contacts the actuator housing 48a directly. In the present case contacted, in particular the first axial end

opposite, second axial end of the actuator element 10a, the first housing part 50a. The second axial end of the actuator element 10a is fixed relative to the second

Actuator 48a arranged and defines a stationary end of the actuator element - -

10a. In the present case, the second axial end of the actuator element 10a is fixed to the first housing part 50a, for example by means of a clamping connection and / or a welded connection.

A maximum movement distance of the actuator element 10a and / or the

Actuator 12a along the direction of movement 14a and the other

Movement direction 16a corresponds in the present case at least 3% of a maximum longitudinal extent of the actuator element 10a. In addition, corresponds to a maximum

Movement distance of the actuator element 10a and / or the actuating element 12a along the direction of movement 14a and the further direction of movement 16a at most 20% of a maximum longitudinal extent of the actuator element 10a. Alternatively, it is conceivable to connect an actuator element by means of another connection method with an actuator housing and / or with an actuating element, such as by means of an adhesive connection or the like. In addition, an actuator element could in principle also be indirectly connected to an actuating element and / or an actuator housing. Furthermore, it is conceivable to dispense with a connection between an actuator element and an actuating element. In this case, an actuator element could be

Contact actuator only, for example, for the transmission of

Compressive forces.

In the present case, the actuator element 10a is provided to cause a movement of the actuating element 12a in the direction of movement 14a by means of a contraction in the longitudinal extension direction of the actuator element 10a and in particular a tensile force transmitted thereby to the actuating element 12a.

For this purpose, the actuator device comprises a magnetic contraction unit 18a. The contraction unit 18a is disposed within the actuator housing 48a. The

Contraction unit 18a is arranged in a vicinity of the actuator element 10a. The contraction unit 18a completely surrounds the actuator element 10a. The

Contraction unit 18a is immovable relative to the actuator element 10a. The

Contraction unit 18a is actively controllable and has an operative connection with a supply electronics (not shown) of the actuator device. The contraction unit 18a is intended to provide a magnetic field acting on the actuator element 10a. The contraction unit 18a is provided to influence a deformation of the actuator element 10a, in particular by means of the magnetic field. in the , -

In the present case, the contraction unit 18a is provided for by means of the

Magnetic field to cause a contraction of the actuator element 10a and thereby to generate a movement of the actuating element 12a in the direction of movement 14a. In this case, the contraction unit 18a is provided to provide a magnetic field whose field lines 20a are aligned in the region of the actuator element 10a at least substantially parallel to the direction of movement 14a (see also FIG.

For this purpose, the contraction unit 18a comprises at least one magnetic element 22a. In the present case, the contraction unit 18a comprises exactly one magnetic element 22a. The magnetic element 22a is formed as a coil unit. The magnetic element 22a is formed as a single coil. The magnetic element 22a has a coil axis which is aligned parallel to the longitudinal extension direction of the actuator element 10a. The magnetic element 22a has a plurality of turns, in this case in particular between 5 and 25 turns. The magnetic element 22a is designed as an air coil and thus free of a magnetic core. The magnetic element 22a is further formed in the present case as a tape reel (see in particular Figure 3). The magnetic element 22a consists of a single wound sheet. In an operating state in which the magnetic element 22a is energized, generates

Magnetic element 22a, the magnetic field whose field lines 20a are aligned in the region of the actuator element 10a at least substantially parallel to the direction of movement 14a, whereby the actuator element 10a is contracted (see Figure 2). Alternatively, a contraction unit could comprise a plurality of magnetic elements. In addition, it is conceivable, a

Form magnetic element as a spiral coil or the like. It is also conceivable, a contraction unit and / or at least one magnetic element outside of one

Actuator housing to arrange. In particular, for the realization of a repeatedly and / or wiederhohlbar switching actuator device, the actuator device further comprises an expansion unit 32a. The stretching unit 32a is designed in the present case as a mechanical expansion unit. The expansion unit 32a is passively formed and in particular free of an active control option. The stretching unit 32a is within the

Actuator 48a arranged. The stretching unit 32a is arranged in a vicinity of the actuator element 10a. The stretching unit 32a completely surrounds the actuator element 10a. The stretching unit 32a is between the actuator element 10a and the - -

Contraction unit 18a arranged. The stretching unit 32a is arranged concentrically to the contraction unit 18a. The stretching unit 32a is provided for stretching the actuator element 10a. In the present case, the expansion unit 32a is at a bias voltage of the actuator element 10a, in particular before a contraction of the actuator element 10a by the contraction unit 18a, and / or to a provision of the actuator element 10a, in particular temporally after a contraction of the actuator element 10a by the contraction unit 18a, intended. The expansion unit 32a is provided in the present case, an elongation of the actuator element 10a in

Longitudinal direction of the actuator element 10a to effect. For this purpose, the stretching unit 32a comprises at least one expansion element 34a. In the present case, the expansion unit 32a comprises exactly one expansion element 34a. The expansion element 34a is formed as an elastic element. The

Expansion element 34a is designed as a spring element, in the present case in particular as a spiral spring and / or compression spring. The expansion element 34a has a central axis, which is aligned parallel to the longitudinal extension direction of the actuator element 10a.

The expansion element 34a also has an operative connection with the actuating element 12a. In the present case, a first axial end of the expansion element 34a contacts the actuating element 12a, in particular the positioning section

opposite side of the actuating element 12a. Further, a, in particular the first axial end of the expansion element 34a opposite, second axial end of the expansion element 34a contacts the actuator housing 48a, in particular the first housing part 50a. The expansion element 34a is between the

Actuator 12a and the actuator housing 48a clamped. The expansion element 34a is provided to apply a compressive force to the

To transmit actuator 12a. In the present case, the expansion element 34a is provided to transmit a pressure force to the actuating element 12a in such a way that the actuating element 12a moves in the further direction of movement 16a, in particular after a contraction of the actuator element 10a by the contraction unit 18a. The expansion element 34a is thus provided to effect, in at least one application state, a movement of the actuating element 12a in the further direction of movement 16a and thereby one, in particular - -

mechanical, stretching of, in particular with the actuating element 12a

immovably connected to act actuator element 10a. One of that

Expansion element 34a force applied to the actuating element 12a is less than a force exerted on the actuator element 10a by the contraction unit 18a, so that actuation and / or activity of the contraction unit 18a results in movement of the actuating element 12a in the direction of movement 14a. Alternatively, however, an expansion unit could also be formed magnetically. In addition, it is conceivable to use a mechanical-magnetic stretching unit. Furthermore, it is conceivable to form an expansion unit and a contraction unit at least partially in one piece with each other, whereby in particular a space efficiency can be further improved. In addition, an expansion unit could also have several

Have expansion elements. In addition, at least one expansion element could also be embodied as any elastic element deviating from a spring element, for example as a silicone element and / or rubber element. Furthermore, the actuator device in the present case comprises a detection unit 38a. The detection unit 38a is provided to detect at least one operating characteristic correlated with the movement of the actuating element 12a. in the

In the present case, the detection unit 38a is provided to indirectly detect a deformation of the actuator element 10a. For this purpose, the detection unit 38a comprises at least one sensor 56a. In the present case, the detection unit 38a comprises exactly one sensor 56a. The sensor 56a is arranged in a vicinity of the actuator element 10a. The sensor 56a is disposed inside the actuator housing 48a. The sensor 56a is at least partially formed integrally with the contraction unit 18a. The sensor 56a is identical to the magnetic element 22a in the present case. The sensor 56a is for detecting the

Actuating characteristic provided. The actuation characteristic in the present case is an induced voltage caused by a deformation of the actuator element 10a and / or an effect due to a deformation of the actuator element 10a

Induced current. The detection unit 38a is provided to transmit a signal, in particular detected by the sensor 56a, to an evaluation unit (not shown) of the actuator device. The evaluation unit is provided depending on which of the - -

Detection unit 38a signal to detect a movement of the actuating element 12a. Alternatively, it is conceivable to a detection unit and / or a

Completely dispense evaluation unit. In addition, a sensor could also be arranged outside of an actuator housing. Furthermore, a detection unit could also comprise a plurality of sensors, whereby in particular an advantageously exact detection of a movement of an actuating element can be achieved.

FIGS. 4 to 11 show further exemplary embodiments of the invention. The following descriptions and the drawings are essentially limited to the differences between the embodiments, with respect to the same components, in particular with respect to components with the same reference numerals, in principle also to the drawings and / or the description of the other

Embodiments, in particular of Figures 1 to 3, can be referenced. To distinguish the embodiments of the letter a is the reference numerals of the embodiment in the figures 1 to 3 adjusted. In the exemplary embodiments of FIGS. 4 to 11, the letter a is replaced by the letters b to h.

FIG. 4 shows a further embodiment of the invention. The embodiment of Figure 4, the letter b is adjusted. The further embodiment of Figure 4 differs from the previous embodiment, at least substantially by a configuration of a contraction unit 18b. In the present case, the contraction unit 18b comprises for providing a

Magnetic field for contraction of an actuator element 10b designed as a spiral spring magnetic element 24b.

In addition, the contraction unit 18b comprises at least one flux concentrator 28b, 30b. In the present case, the contraction unit 18b comprises two flux concentrators 28b, 30b. The flux concentrators 28b, 30b are made of iron. The flux concentrators 28b, 30b are arranged directly opposite one another with respect to the actuator element 10b. The flux concentrators 28b, 30b are arranged in opposite axial end regions of the actuator element 10b. The flux concentrators 28b, 30b do not form a completely closed magnetic circuit.

A first flux concentrator 28b of the flux concentrators 28b, 30b is in one

Close range of a first axial end of the actuator element 10b arranged. The first , -

Flux concentrator 28b is between the actuator element 10b and a

Actuator (not shown) arranged. The first flux concentrator 28b is formed integrally with the actuating element in the present case. In addition, the first flux concentrator 28b is immovably connected to the actuator element 10b. A second flux concentrator 30b of the flux concentrators 28b, 30b is in one

Close range of a second axial end of the actuator element 10b arranged. The second flux concentrator 30b is between the actuator element 10b and a

Actuator (not shown) arranged.

The flux concentrators 28b, 30b are provided to increase a magnetic field of the magnetic element 24b acting on the actuator element 10b. Alternatively, it is conceivable to dispense with at least one of the flux concentrators. In addition, one could

Contraction unit also have a different number of flux concentrators, such as at least four, at least six and / or at least eight

Flux concentrators. In addition, it is conceivable to form flux concentrators made of a material deviating from iron. In addition, it is conceivable to completely dispense with flux concentrators.

FIGS. 5 to 6b show a further exemplary embodiment of the invention. The embodiment of Figures 5 to 6b, the letter c is adjusted. The further embodiment of Figures 5 to 6b differs from the previous one

Embodiments at least substantially by an embodiment of a contraction unit 18c.

In the present case, the contraction unit 18 c comprises for providing a

Magnetic field for contraction of an actuator element (not shown) consisting of a stacked and joined clamping discs 58c existing magnetic element 26c. The magnetic element 26c comprises, by way of example, three clamping disks 58c. The clamping discs 58c are integrally connected. For this purpose, each of the clamping discs 58c is slotted and executed bent (see Figures 6a and 6b). The magnetic element 26c is thereby formed as an elastic element and has resilient and / or restoring

Properties on. Alternatively, however, a magnetic element in this case could also have any other number of clamping disks, such as at least five and / or at least eight clamping disks. , -

Moreover, in this case, the contraction unit 18c is at least partially formed integrally with an expansion unit 32c. In the present case, the magnetic element 26c is identical to an expansion element 34c of the expansion unit 32c.

FIG. 7 shows a further embodiment of the invention. The embodiment of Figure 7 is followed by the letter d. The further embodiment of Figure 7 differs from the previous embodiments, at least substantially by a configuration of a stretching unit 32d.

The expansion unit 32d is designed in the present case as a mechanical expansion unit and comprises two expansion elements 34d, 35d. The expansion elements 34d, 35d are formed separately from each other. The expansion elements 34d, 35d are arranged in a direction perpendicular to a longitudinal extension direction of an actuator element 10d on different sides of the actuator element 10d. The expansion elements 34d, 35d are formed identical to each other. The expansion elements 34d, 35d are formed as elastic elements. The expansion elements 34d, 35d are as

Spring elements, in the present case in particular as a leaf spring and / or spring plate, formed.

The expansion elements 34d, 35d also have an operative connection with the

Actuator 10d on. In the present case, the expansion elements 34d, 35d contact the actuator element 10d, in particular opposite longitudinal sides of the actuator element 10d.

The expansion elements 34d, 35d are intended to exert a force on the actuator element 10d and thereby transmit a compressive force to an actuating element (not shown). In the present case, the expansion elements 34d, 35d are provided to transmit a force to the actuator element 10d such that the actuating element moves in a further movement direction 16d, in particular after a contraction of the actuator element 10d by a contraction unit (not shown). The expansion elements 34d, 35d are thus provided to effect, in at least one application state, an, in particular mechanical, expansion of the actuator element 10d, in particular connected to the actuating element in a manner fixed against movement, and thereby to generate a movement of the actuating element in the further movement direction 16d. , -

FIG. 8 shows a further embodiment of the invention. The embodiment of Figure 8 is followed by the letter e. The further exemplary embodiment of FIG. 8 differs from the previous exemplary embodiments at least essentially by a design of an expansion unit 32e. The stretching unit 32e is formed in this case as a magnetic stretching unit. The stretching unit 32e is passively formed and in particular free of an active driving possibility. The stretching unit 32e is provided to stretch an actuator element 10e.

The stretching unit 32e is provided to engage the actuator 10e

to provide an additional magnetic field. The expansion unit 32e is provided to influence a deformation of the actuator element 10e, in particular by means of the further magnetic field. In the present case, the expansion unit 32e is provided to cause an expansion and / or return of the actuator element 10e by means of the further magnetic field and thereby to generate a movement of an actuating element 12e in a further movement direction 16e. In this case, the stretching unit 32e is provided to provide a magnetic field, wherein field lines 60e of the

Magnetic field in the region of the actuator element 10e at least substantially perpendicular to the further direction of movement 16e and / or to the longitudinal direction of the extension

Actuator element 10e are aligned. For this purpose, the stretching unit 32e comprises a permanent magnet

Expansion element 36e. The expansion element 36e has an operative connection with the actuator element 10e. The expansion element 36e consists of a

Permanent magnetic material, preferably a hard magnetic material, which in particular has a coercive force of at least 1 kA / m and advantageously at least 50 kA / m. The expansion element 36e is in the present case as

Rare earth magnet formed and consists in particular of samarium cobalt. Alternatively, however, an expansion element in this case could also be at least partially

preferably consist at least to a large part and particularly preferably completely of neodymium-iron-boron, a neodymium-iron-boron alloy and / or a samarium-cobalt alloy. - -

The expansion element 36e is provided to exert a force on the actuator element 10e and thereby transmit a compressive force to the actuator 12e. In the present case, the expansion element 36e is provided to transmit a magnetic force to the actuator element 10e in such a way that the actuating element 12e moves in the further movement direction 16e, in particular in time after one

Contraction of the actuator element 10e by a contraction unit (not shown). The expansion element 36e is thus provided in at least one

Application state one, in particular magnetic, elongation of, in particular with the actuating element 12e immovably connected actuator element 10e to effect and thereby produce a movement of the actuating element 12e in the further direction of movement 16e.

FIG. 9 shows a further exemplary embodiment of the invention. the

Embodiment of Figure 9 is the letter f readjusted. The further

Embodiment of Figure 9 shows an example of an actuator according to the previous embodiments.

FIG. 9 shows a valve 42f designed by way of example as an inline valve. The valve 42f is designed as a fluid valve, in the present case in particular as a pneumatic valve. The valve 42f is controllable. The valve 42f is designed as a quick-acting valve. The valve 42f comprises an actuator 40f with an actuator device according to the invention. Actuator 40f essentially corresponds to an actuator of the preceding one

Embodiments.

In this case, however, an actuator housing 48 f is designed as a fluid housing and has an inlet opening 62 f for an introduction of a, in the present case in particular gaseous, fluid flow and an outlet opening 64 f for a discharge of the

Fluid flow on.

In addition, an actuating element 12f, which is in particular fixedly connected to an actuator element 10f, is designed as a valve needle.

FIG. 10 shows a further exemplary embodiment of the invention. the

Embodiment of Figure 10 is the letter g readjusted. The further - -

Embodiment of Figure 10 shows another example of an actuator according to the previous embodiments.

FIG. 10 shows a further embodiment of a valve 42g, which comprises an actuator 40g with an actuator device according to the invention, in a frontal view. In this case, a magnetic member 22g of a contraction unit 18g is disposed inside an actuator housing 48g such that the magnetic member 22g contacts an inside of the actuator housing 48g. In this case, a power supply of the magnetic element 22g by means of a supply electronics (not shown) of the actuator device takes place directly over the actuator housing 48g, so that an additional

Dispensed supply contact and a Kontaktierungsaufwand can be advantageously reduced.

In Figure 1 1, a further embodiment of the invention is shown. the

Embodiment of Figure 1 1, the letter h is readjusted. The further

Embodiment of Figure 1 1 shows another example of an application of several actuators according to the previous embodiments.

Figure 1 1 shows an embodiment of a valve system 44h in a schematic frontal view. The valve system 44h may be used, for example, for use in

Sorting, in particular rice sorting, be provided.

The valve system 44h has a valve block 46h. The valve block 46h has a plurality of identically formed and evenly distributed over the valve block 46h recesses 66h.

In addition, the valve system 44h includes a plurality of valves 42h. The valves 42h substantially correspond to the valves 42f, 42g shown in FIGS. 9 and 10. Each of the valves 42h thus comprises an actuator with an actuator device according to the invention. The valves 42h are designed as pneumatic valves. The valves 42h are designed as inline valves. The valves 42h are arranged in the valve block 46h, in particular in the recesses 66h of the valve block 46h. In the present case, one of the valves 42h is arranged in each of the recesses 66h. - -

The valves 42h are arranged in the valve block 46h such that immediately adjacent valves 42h have a minimum distance of at most 10 mm and advantageously of at most 7 mm. In this way, a valve system 44h can be provided with an advantageously small grid dimension of at most 10 mm, whereby in particular an improved sorting function can be achieved.

In addition, by the design of the valve block 46h a merging of

Inlet openings and / or supply contacts possible. Thus, for example, a central inlet can be created and / or by merging an electrical pole, for example by an embodiment according to FIG. 10, a number of electrical contact points and thus a contacting effort can be significantly reduced.

Claims

claims

1 . Actuator device having at least one actuator element (10a; 10b; 10d; 10e; 10f) which is at least partially made of a magnetically deformable material and which is at least provided by means of a contraction movement of at least one actuating element (12a; 12e; 12f) in at least a movement direction (14a) and with a magnetic contraction unit (18a; 18b; 18c; 18g) provided for causing the actuator element (10a; 10b; 10d; 10e; 10f) to contract onto the actuator element (10a 10b; 10d; 10e; 10f), characterized in that field lines (20a) of the magnetic field in the region of the actuator element (10a; 10b; 10d; 10e; 10f) are aligned at least substantially parallel to the direction of movement (14a).

2. Actuator device according to claim 1, characterized in that the

Actuator element (10a; 10b; 10d; 10e; 10f) is at least provided to transmit a tensile force to the actuating element (12a; 12e; 12f).

3. Actuator device according to claim 1 or 2, characterized in that the magnetically deformable material is a magnetic

Shape memory alloy is, in particular, a magnetic

Shape memory alloy containing nickel, manganese and gallium.

4. Actuator device according to one of the preceding claims, characterized

characterized in that the magnetically deformable material is monocrystalline.

5. Actuator device according to claim 4, characterized in that the magnetically deformable material has a tetragonal crystal structure with the lattice constants a, b = a and c, where c / a <1, and the magnetically deformable material has a magnetic anisotropy, wherein the magnetic permeability is higher in the direction of the c-axis than along the a-axis and the b-axis.

6. Actuator device according to one of the preceding claims, characterized

characterized in that the magnetic field causes a change in length of the actuator element (10a; 10b; 10d; 10e; 10f) in the direction of movement (14a) of at least 2%.

7. Actuator device according to one of the preceding claims, characterized by the actuating element (12a, 12e, 12f), with which the actuator element (10a; 10b; 10d; 10e; 10f) is rigidly connected.

8. actuator device according to one of the preceding claims, characterized

in that the contraction unit (18a; 18b; 18c; 18g) for

Providing the magnetic field comprises at least one magnetic element (22a; 24b; 26c; 22g) designed as an air-core coil.

9. actuator device according to one of the preceding claims, characterized

characterized in that the contraction unit (18a; 18g) for providing the magnetic field comprises at least one magnetic element (22a; 22g) designed as a reel spool.

10. Actuator device according to one of the preceding claims, characterized

in that the contraction unit (18c) for providing the magnetic field comprises at least one magnetic element (24c) consisting of stacked tension discs (58c). Actuator device according to one of the preceding claims, characterized in that the contraction unit (18b) at least one

Flux concentrator (28b, 30b), which is intended to increase the force acting on the actuator element (10b) magnetic field. 12 actuator device according to claim 1 1, characterized in that the

Flux concentrator (28b, 30b) in an axial end portion of the actuator element (10b) is arranged. 13. Actuator device according to one of the preceding claims, characterized by an expansion unit (32a; 32c; 32d; 32e) which is provided for an expansion of the actuator element (10a; 10b; 10d; 10e; 10f).

14 actuator device according to claim 13, characterized in that the

Elongation unit (32a; 32c; 32d) at least one expansion element (34a; 34c; 34d, 35d) designed as an elastic element, in particular a

Spring element comprises. 15 actuator device according to claim 13 or 14, characterized in that the expansion unit (32e) comprises at least one designed as a permanent magnet expansion element (36e). 16. Actuator device according to one of the preceding claims, characterized by a detection unit (38a) which is provided to detect at least one actuation parameter correlated with the movement of the actuation element (12a; 12e; 12f), wherein the actuation parameter is one due to a deformation of the actuator element (38). 10a, 10b, 10d, 10e, 10f) and / or an induction current caused by a deformation of the actuator element (10a; 10b; 10d; 10e; 10f). 17 actuator (40a; 40f; 40g) with at least one actuator device according to one of

previous claims.

18. Valve (42f; 42g; 42h), in particular pneumatic valve, with at least one actuator (40f; 40g) according to claim 17.

A valve system (44h) comprising a valve block (46h) and a plurality of valves (42h) disposed in the valve block (46h) according to claim 18, wherein the valves (42h) have a minimum clearance, in particular a pitch, of at most 10 mm, preferably 7 mm at the most.

20. A method for operating an actuator device, in particular according to one of claims 1 to 16, which comprises at least one actuator element (10a; 10b; 10d; 10e; 10f) which at least partially consists of a magnetically

wherein the actuator element (10a; 10b; 10d; 10e; 10f) is contracted by means of a magnetic field acting on the actuator element (10a; 10b; 10d; 10e; 10f) and by means of the contraction of the actuator element (10a; 10b; 10d 10e, 10f) a movement of at least one actuating element (12a, 12e, 12f) in at least one direction of movement (14a) is effected, characterized in that field lines (20a) of the magnetic field in the region of the actuator element (10a; 10b; 10d; 10e; 10f) at least substantially parallel to the direction of movement (14a) are aligned.