JPH05130786A - Strain actuator - Google Patents
Strain actuatorInfo
- Publication number
- JPH05130786A JPH05130786A JP3139634A JP13963491A JPH05130786A JP H05130786 A JPH05130786 A JP H05130786A JP 3139634 A JP3139634 A JP 3139634A JP 13963491 A JP13963491 A JP 13963491A JP H05130786 A JPH05130786 A JP H05130786A
- Authority
- JP
- Japan
- Prior art keywords
- knob
- spherical
- contact
- strain
- spherical concave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000003754 machining Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 11
- 230000002040 relaxant effect Effects 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁歪材、電歪材、圧電
材、光歪材等の歪素子の伸縮によって各種の被作動体を
動かす歪アクチュエータに係り、特にその歪素子の伸縮
力を基準台あるいはノブに伝達する接触子の接触構造に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a strain actuator that moves various actuated bodies by expanding and contracting a strain element such as a magnetostrictive material, an electrostrictive material, a piezoelectric material, and a photostrictive material. The present invention relates to a contact structure of a contactor that transmits a reference to a reference stand or a knob.
【0002】[0002]
【従来の技術と発明が解決しようとする課題】図3
(A)、(B)はそれぞれ従来の歪アクチュエータを示
す平面図および縦断面図であり、磁歪素子1を収容する
ホルダ30は、ケース4の図面上の下端と上端にそれぞ
れ基準台6とノブ保持板5とを当て、結合ボルト7をノ
ブ保持板5から挿通し、基準台6のねじ穴にねじ込んで
締め付けることにより構成される。なおケース4の代わ
りに複数本の結合ロッドを基準台6とノブ保持板5との
間に介在させてねじ付けすることもある。磁歪素子1は
棒状をなし、巻線2を施したボビン3の筒部内に該磁歪
素子1を入れる。磁歪素子1の下端は、ボビン3に下端
筒部に嵌合した接触子12を介して基準台6に支持させ
る。ノブ8はノブ保持板5の中心に上下動自在に貫挿
し、該ノブ8の下部に設けたフランジ8aと前記磁歪素
子1の上端との間にはボビン3の筒部に嵌合しかつ上面
(ノブ8の下面との接触面)を平面に形成した接触子1
0を介在させる。また、ノブ8のフランジ8aとノブ保
持板5との間には、圧縮スプリング9を介在させ、ノブ
保持板5とボビン3との間にはボビン押さえとなる圧縮
スプリング11を介在させている。前記接触子10、1
2、ノブ8、ノブ保持板5、ケース4、基準台6は磁性
材でなり、これらの部品と磁歪素子1により閉磁路を構
成している。Prior Art and Problems to be Solved by the Invention FIG.
(A) and (B) are respectively a plan view and a longitudinal sectional view showing a conventional strain actuator, and a holder 30 for accommodating the magnetostrictive element 1 has a reference table 6 and a knob at the lower end and the upper end of the case 4 in the drawing. The holding plate 5 is applied, the connecting bolt 7 is inserted from the knob holding plate 5, screwed into the screw hole of the reference base 6, and tightened. Note that instead of the case 4, a plurality of connecting rods may be interposed between the reference base 6 and the knob holding plate 5 and screwed. The magnetostrictive element 1 has a rod shape, and the magnetostrictive element 1 is put in the tubular portion of the bobbin 3 having the winding 2. The lower end of the magnetostrictive element 1 is supported on the reference table 6 via a contactor 12 fitted to the bobbin 3 at the lower end tube portion. The knob 8 is vertically movably inserted through the center of the knob holding plate 5, and is fitted between the flange 8a provided at the lower portion of the knob 8 and the upper end of the magnetostrictive element 1 in the tubular portion of the bobbin 3 and the upper surface thereof. Contact 1 having a flat surface (contact surface with the lower surface of the knob 8)
0 is inserted. Further, a compression spring 9 is interposed between the flange 8a of the knob 8 and the knob holding plate 5, and a compression spring 11 serving as a bobbin pressing member is interposed between the knob holding plate 5 and the bobbin 3. The contacts 10, 1
2, the knob 8, the knob holding plate 5, the case 4, and the reference table 6 are made of a magnetic material, and these components and the magnetostrictive element 1 form a closed magnetic circuit.
【0003】このような従来の歪アクチュエータにおい
ては、巻線2に通電すると、発生磁界により磁歪素子1
が伸長してノブ8を押し出すが、ノブ8が傾斜して取付
けられていたり、ボビン3が基準台6に対して傾斜して
いると、接触子12と基準台6との接触あるいは接触子
10とノブ8のフランジ8aとの接触が点接触あるいは
線接触となり、応力集中によってこれらの部品の破損を
招来するおそれがあるため、これらの接触部分の面の平
行度および磁歪素子1の基準台6やノブ8の接触面に対
する垂直度を正確に出す必要があり、加工精度を要し、
製作手間がかかり、製作費が高価になるという問題点が
あった。In such a conventional strain actuator, when the winding 2 is energized, the magnetostrictive element 1 is generated by the generated magnetic field.
Extends and pushes out the knob 8, but if the knob 8 is attached so as to be inclined or the bobbin 3 is inclined with respect to the reference table 6, the contact between the contact 12 and the reference table 6 or the contact 10 The contact between the knob and the flange 8a of the knob 8 becomes a point contact or a line contact, which may lead to damage of these parts due to stress concentration. Therefore, the parallelism of the surfaces of these contact portions and the reference base 6 of the magnetostrictive element 1 may occur. It is necessary to accurately measure the verticality of the knob 8 and the contact surface, which requires processing accuracy,
There is a problem in that it takes a lot of time and effort to manufacture and the manufacturing cost becomes high.
【0004】本発明は、この問題点に鑑み、加工精度を
それほど要することなく、接触子やノブ等に発生する応
力が緩和される構造の歪アクチュエータを提供すること
を目的とする。In view of this problem, it is an object of the present invention to provide a strain actuator having a structure in which the stress generated in the contactor, the knob, etc. is relieved without requiring much processing accuracy.
【0005】[0005]
【課題を解決するための手段】本発明の歪アクチュエー
タは、基準台またはおよびノブと接触する接触子の接触
面を球状凸面に形成するか、あるいは基準台またはおよ
びノブにこの球状凸面(または球状凹面に)嵌まる球状
凹面(または球状凸面)に形成するか、または接触子と
基準台またはおよびノブとの対向面にそれぞれ球状凹面
を形成してその中に球体を嵌合したものである。また本
発明は、前記ノブを摺動自在に貫挿した球体を設け、該
球体を前記ノブ保持板に設けた球面凹面に回動自在に嵌
合させたものである。In the strain actuator of the present invention, the contact surface of the contactor which comes into contact with the reference table or the knob is formed into a spherical convex surface, or the spherical surface (or spherical surface) is formed on the reference table or the knob. It is formed into a spherical concave surface (or spherical convex surface) that fits into the concave surface, or a spherical concave surface is formed on each of the facing surfaces of the contactor and the reference base or the knob, and the spherical body is fitted therein. Further, according to the present invention, a spherical body in which the knob is slidably inserted is provided, and the spherical body is rotatably fitted to a spherical concave surface provided on the knob holding plate.
【0006】[0006]
【作用】本発明の歪アクチュエータは、上記構造を有
し、接触子が球面で基準台またはノブに接触するため、
応力集中が緩和される。また、ノブを貫挿した球体を、
ノブ保持板に設けた球面凹面に嵌合することにより、ノ
ブの傾斜が許容され、応力集中が緩和される。The strain actuator of the present invention has the above structure, and since the contactor is a spherical surface and contacts the reference stand or the knob,
Stress concentration is relieved. Also, the sphere that penetrates the knob,
By fitting the spherical concave surface provided on the knob holding plate, the inclination of the knob is allowed and stress concentration is alleviated.
【0007】[0007]
【実施例】図1(A)は本発明による歪アクチュエータ
の一実施例を示す縦断面図であって、平面図は従来例を
示した図3(A)と同様にあらわれるものであり、図3
と同じ符号は同じ機能を発揮するために設けられるもの
である。本実施例のものは、磁歪素子1の上下の接触子
10、12のノブ8あるいは基準台6に対する接触面を
球状凸面10a、12aに形成したものである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1A is a longitudinal sectional view showing an embodiment of a strain actuator according to the present invention, a plan view of which is similar to FIG. 3A showing a conventional example. Three
The same symbols as are provided to perform the same function. In the present embodiment, the contact surfaces of the upper and lower contacts 10 and 12 of the magnetostrictive element 1 with respect to the knob 8 or the reference table 6 are formed into spherical convex surfaces 10a and 12a.
【0008】このような構造とすれば、磁歪素子1に対
して基準台6やノブ8が多少傾斜していても、接触面は
球面と平面であるため、面接触でかつ磁歪素子1や接触
子10、12が傾斜が許容され、応力集中が起こらず、
応力集中による損傷をまぬがれる。With such a structure, even if the reference base 6 and the knob 8 are slightly inclined with respect to the magnetostrictive element 1, the contact surface is a spherical surface and a flat surface. Inclination of the children 10 and 12 is allowed, stress concentration does not occur,
Prevents damage due to stress concentration.
【0009】図1(B)は本発明の他の実施例であり、
前記ノブ8の下面すなわち接触子10に接触する面に前
記球状凸面10aに嵌まる球状凹面8bを形成し、基準
台6の接触子12との接触面にも、接触子12の球状凸
面12aに嵌まる球状凹面6aを形成したものである。FIG. 1B shows another embodiment of the present invention.
A spherical concave surface 8b that fits into the spherical convex surface 10a is formed on the lower surface of the knob 8, that is, the surface that contacts the contact 10, and the contact surface of the reference table 6 with the contact 12 as well as the spherical convex surface 12a of the contact 12 is formed. The spherical concave surface 6a to be fitted is formed.
【0010】このような構造とすれば、図1(A)の場
合に比較し、接触子10、12のノブ8あるいは基準台
6との接触面における接触面積が広くなり、さらに応力
集中緩和効果が高められると共に、ボビン3や磁歪素子
1が安定して支持される。With such a structure, as compared with the case of FIG. 1A, the contact area of the contact surfaces of the contacts 10 and 12 with the knob 8 or the reference table 6 becomes wider, and the stress concentration relaxing effect is further increased. And the bobbin 3 and the magnetostrictive element 1 are stably supported.
【0011】図1(C)は本発明の他の実施例であり、
接触子10とノブ8の対向面および接触子12と基準台
6の対向面の双方にそれぞれ球状凹面10b、8cおよ
び12b、6bを設け、これらの球状凹面にそれぞれ球
体20、21を設けたものである。本実施例によれば、
接触子10、12やノブ8あるいは基準台6に対する加
工はすべて等しい内径の球状凹面ですむため、加工が容
易である。FIG. 1C shows another embodiment of the present invention.
Spherical concave surfaces 10b, 8c and 12b, 6b are provided on both the facing surfaces of the contact 10 and the knob 8 and the facing surface of the contact 12 and the reference base 6, respectively, and spherical bodies 20, 21 are provided on these spherical concave surfaces, respectively. Is. According to this embodiment,
Since the contacts 10, 12 and the knob 8 or the reference table 6 can be machined by spherical concave surfaces having the same inner diameter, the machining is easy.
【0012】図1(D)は図1(B)における凹凸関係
を逆にしたもので、接触子10に球状凹面10cを、ノ
ブ8にこれに嵌まる球状凸面8dを形成したものであっ
て、この構造は接触子12にも採用でき、図1(B)と
同様の効果を発揮できる。FIG. 1 (D) is obtained by reversing the concavo-convex relationship in FIG. 1 (B), in which the contact 10 has a spherical concave surface 10c and the knob 8 has a spherical convex surface 8d fitted therein. This structure can also be adopted in the contactor 12, and the same effect as in FIG. 1 (B) can be exhibited.
【0013】以上の実施例は、双方の接触子10、12
について、同様の接触部構造を採用する例について示し
たが、一方の接触子のみについて、前記接触部構造を採
用した場合にも、従来より優れた応力緩和効果が得られ
る。また、各例で示した接触部構造を組合わせても良
い。In the above embodiment, both contacts 10, 12 are
Regarding the above, an example in which the same contact portion structure is adopted is shown, but even when the contact portion structure is adopted for only one of the contacts, a stress relaxation effect superior to the conventional one can be obtained. Moreover, you may combine the contact part structure shown in each example.
【0014】図2(A)は本発明の他の実施例であり、
前記ノブ8を摺動自在に貫挿した球体13を設け、該球
体13を前記ノブ保持板5に設けた球状凹面22に回動
自在に嵌合すると共に、ノブ保持板5の下面にねじ付け
したリング状の押さえ板14により球体13を保持した
ものである。FIG. 2A shows another embodiment of the present invention,
A knob 13 is slidably inserted into the spherical body 13, and the spherical body 13 is rotatably fitted into the spherical concave surface 22 provided on the knob holding plate 5, and is screwed to the lower surface of the knob holding plate 5. The spherical body 13 is held by the ring-shaped pressing plate 14.
【0015】本実施例によれば、ノブ8が多少傾斜でき
ることから、接触子10とノブ8あるいは接触子12の
基準台6との接触面が精度良く形成されていない場合で
あっても、ノブ8が多少傾斜することにより、これらの
接触面が全面で接触した状態で組合わせることができ、
接触面の加工に高精度が要求されず、応力集中が緩和さ
れる。According to this embodiment, since the knob 8 can be tilted to some extent, even if the contact surface between the contact 10 and the knob 8 or the reference base 6 of the contact 12 is not accurately formed, the knob 8 By slightly inclining 8, it is possible to combine them with their contact surfaces in full contact,
High precision is not required for processing the contact surface, and stress concentration is relieved.
【0016】図2(B)は、図2(A)の構造におい
て、接触子12と基準台6との接触部に図1(B)の構
造を採用し、また、上部の接触子10の上端部10dを
ノブ8に設けた穴8eに嵌合して結合したものである。
本実施例によれば、図2(A)の場合に比較してノブ8
と磁歪素子1の垂直設定が容易であり、応力集中緩和効
果も得られる。FIG. 2B shows the structure of FIG. 2A, which employs the structure of FIG. 1B for the contact portion between the contact 12 and the reference base 6, and the upper contact 10. The upper end portion 10d is fitted into and combined with a hole 8e provided in the knob 8.
According to this embodiment, the knob 8 is different from the case of FIG.
The vertical setting of the magnetostrictive element 1 is easy, and the stress concentration relaxing effect can be obtained.
【0017】本発明は、磁歪材の代わりに、電歪材、圧
電材、光歪材を歪材として用いることができるが、電気
機械結合係数の大きな希土類金属−鉄系の例えばTb
0.3Dy0.7Fe1.95等の組成を有する超磁歪材が用れ
ば、小さなサイズで大きな動作量が得られる。この場
合、材料の脆いという欠点を補う上で非常に有効とな
る。In the present invention, an electrostrictive material, a piezoelectric material, or a photostrictive material can be used as the strain material instead of the magnetostrictive material, but a rare earth metal-iron system such as Tb having a large electromechanical coupling coefficient is used.
If a giant magnetostrictive material having a composition such as 0.3 Dy 0.7 Fe 1.95 is used, a large operation amount can be obtained with a small size. In this case, it is very effective in compensating for the fragility of the material.
【0018】[0018]
【発明の効果】請求項1によれば、接触子と基準台ある
いはノブとの接触面における応力集中が緩和され、接触
子やノブさらには歪素子に対する応力集中が緩和され
る。また前記接触面における加工に高精度を要しないた
め、加工が容易となる。According to the first aspect of the present invention, the stress concentration on the contact surface between the contact and the reference base or the knob is reduced, and the stress concentration on the contact, the knob and the strain element is reduced. Further, since the processing on the contact surface does not require high precision, the processing becomes easy.
【0019】請求項2によれば、応力集中緩和効果がさ
らに高められる。According to the second aspect, the stress concentration relaxing effect is further enhanced.
【0020】請求項3によれば、接触子、ノブ、基準台
に設ける球状凹面を共通に形成しても良く、加工が容易
である。According to the third aspect, the contact, the knob, and the spherical concave surface provided on the reference base may be commonly formed, which facilitates the processing.
【0021】請求項4によれば、接触子とノブあるいは
基準台との全面で接触した状態で組合わせが可能であ
り、応力集中緩和効果が得られることは勿論、従来と同
様の接触構造を採用しても良く、加工精度を要すること
なく製作できる。According to the fourth aspect, the contactor and the knob or the reference table can be combined in a state of being in contact with each other over the entire surface, and the stress concentration relaxing effect can be obtained, as well as the contact structure similar to the conventional one. It can be adopted and can be manufactured without requiring machining accuracy.
【0022】請求項5によれば、歪素子とノブとの垂直
設定が容易となる。According to the fifth aspect, vertical setting of the strain element and the knob becomes easy.
【図1】(A)〜(C)は本発明による歪アクチュエー
タの各実施例を示す縦断面図である。1A to 1C are vertical cross-sectional views showing respective embodiments of a strain actuator according to the present invention.
【図2】(A)、(B)は本発明による歪アクチュエー
タの他の各実施例を示す縦断面図である。2A and 2B are vertical cross-sectional views showing other embodiments of the strain actuator according to the present invention.
【図3】(A)、(B)はそれぞれ従来の歪アクチュエ
ータの平面図および縦断面図である。3A and 3B are a plan view and a vertical sectional view of a conventional strain actuator, respectively.
1 磁歪素子 2 巻線 3 ボビン 4 ケース 5 ノブ保持板 6 基準台 7 結合ねじ 8 ノブ 8b、8c 球状凹面 9、11 圧縮スプリング 10、12 接触子 10a 球状凸面 10b 球状凹面 13 球体 20、21 球体 22 球状凹面 30 ホルダ DESCRIPTION OF SYMBOLS 1 Magnetostrictive element 2 Winding 3 Bobbin 4 Case 5 Knob holding plate 6 Reference stand 7 Coupling screw 8 Knobs 8b, 8c Spherical concave surface 9, 11 Compression spring 10, 12 Contactor 10a Spherical convex surface 10b Spherical concave surface 13 Sphere 20, 21 Sphere 22 Spherical concave surface 30 Holder
Claims (5)
有し、他端にノブを摺動自在に貫挿したノブ保持板を有
し、歪素子の両端をそれぞれ接触子を介して前記基準台
およびノブに接触させた歪アクチュエータにおいて、前
記基準台またはおよびノブに接触する接触子の接触面を
球状凸面に形成したことを特徴とする歪アクチュエー
タ。1. A holder for accommodating a strain element has a reference stand at one end, and a knob holding plate at the other end of which a knob is slidably inserted, and both ends of the strain element are respectively provided with contacts. In the strain actuator in contact with the reference table and the knob, the contact surface of the contactor contacting the reference table and / or the knob is formed into a spherical convex surface.
なくとも一方に球状凸面(または球状凹面)を形成し、
前記ノブまたはおよび基準台に、前記球状凸面(または
球状凹面)に嵌まる球状凹面(または球状凸面)を形成
したことを特徴とする歪アクチュエータ。2. A spherical convex surface (or a spherical concave surface) is formed on at least one of the both contact elements according to claim 1,
A strain actuator, wherein a spherical concave surface (or spherical convex surface) that fits into the spherical convex surface (or spherical concave surface) is formed on the knob or the reference base.
する少なくとも一方の前記球状凸面もしくは球状凹凸面
の代わりに、接触子と基準台またはノブとの対向面の双
方に設けた球状凹面と、これらの球状凹面に嵌まる球体
とを設けたことを特徴とする歪アクチュエータ。3. The spherical concave surface provided on both of the facing surface of the contactor and the reference base or the knob, instead of at least one of the spherical convex surface or the spherical uneven surface constituting the contact portion. And a spherical body fitted to these spherical concave surfaces.
有し、他端にノブを取付けた端板を有し、歪素子の両端
をそれぞれ接触子を介して前記基準台およびノブに接触
または結合させた歪アクチュエータにおいて、前記ノブ
を摺動自在に貫挿した球体を設け、該球体を前記端板に
設けた球状凹面に回動自在に嵌合させたことを特徴とす
る歪アクチュエータ。4. A holder for accommodating a strain element has a reference stand at one end and an end plate having a knob attached at the other end, and both ends of the strain element are connected to the reference stand and the knob via contacts, respectively. In the strain actuator which is in contact with or joined to the strain actuator, a spherical body in which the knob is slidably inserted is provided, and the spherical body is rotatably fitted into a spherical concave surface provided in the end plate. ..
の間に、請求項1ないし3のいずれかの接触構造を設け
たことを特徴とする歪アクチュエータ。5. A strain actuator according to claim 4, wherein the contact structure according to any one of claims 1 to 3 is provided between the reference base and the contact.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3139634A JPH05130786A (en) | 1991-05-15 | 1991-05-15 | Strain actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3139634A JPH05130786A (en) | 1991-05-15 | 1991-05-15 | Strain actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05130786A true JPH05130786A (en) | 1993-05-25 |
Family
ID=15249853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3139634A Withdrawn JPH05130786A (en) | 1991-05-15 | 1991-05-15 | Strain actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05130786A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013219567A (en) * | 2012-04-10 | 2013-10-24 | Yamaha Corp | Giant magnetostriction exciter |
JP2016533644A (en) * | 2013-09-17 | 2016-10-27 | エト・マグネティック・ゲー・エム・ベー・ハーEto Magnetic Gmbh | Actuator device with magnetic shape memory element |
JP2017135977A (en) * | 2013-02-06 | 2017-08-03 | グレート プレインズ ディーゼル テクノロジーズ,エル.シー. | Magnetostriction actuator |
WO2018167242A3 (en) * | 2017-03-15 | 2018-12-27 | Eto Magnetic Gmbh | Actuator device and method for operating an actuator device |
-
1991
- 1991-05-15 JP JP3139634A patent/JPH05130786A/en not_active Withdrawn
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013219567A (en) * | 2012-04-10 | 2013-10-24 | Yamaha Corp | Giant magnetostriction exciter |
JP2017135977A (en) * | 2013-02-06 | 2017-08-03 | グレート プレインズ ディーゼル テクノロジーズ,エル.シー. | Magnetostriction actuator |
JP2016533644A (en) * | 2013-09-17 | 2016-10-27 | エト・マグネティック・ゲー・エム・ベー・ハーEto Magnetic Gmbh | Actuator device with magnetic shape memory element |
US10424717B2 (en) | 2013-09-17 | 2019-09-24 | Eto Magnetic Gmbh | Actuator device having a magnetic shape-memory element |
WO2018167242A3 (en) * | 2017-03-15 | 2018-12-27 | Eto Magnetic Gmbh | Actuator device and method for operating an actuator device |
US11569436B2 (en) | 2017-03-15 | 2023-01-31 | Eto Magnetic Gmbh | Actuator device and method for operating an actuator device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980806 |