JPH0720930Y2 - Electrostrictive effect element - Google Patents
Electrostrictive effect elementInfo
- Publication number
- JPH0720930Y2 JPH0720930Y2 JP15023088U JP15023088U JPH0720930Y2 JP H0720930 Y2 JPH0720930 Y2 JP H0720930Y2 JP 15023088 U JP15023088 U JP 15023088U JP 15023088 U JP15023088 U JP 15023088U JP H0720930 Y2 JPH0720930 Y2 JP H0720930Y2
- Authority
- JP
- Japan
- Prior art keywords
- effect element
- metal member
- electrostrictive effect
- metal
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、圧電セラミックス部材と内部電極導体とが交
互に積層された積層体を含み、圧電アクチュエータに用
いられる電歪効果素子に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an electrostrictive effect element used for a piezoelectric actuator, which includes a laminated body in which piezoelectric ceramic members and internal electrode conductors are alternately laminated.
最近、光または磁気ディスクヘッド、各種光学装置、精
密工作機械等の精密位置決め装置、その他機械的駆動素
子として圧電アクチュエータが極めて有望視されてきて
いる。Recently, piezoelectric actuators have been regarded as extremely promising as optical or magnetic disk heads, various optical devices, precision positioning devices for precision machine tools, and other mechanical drive elements.
これらの機器に積層型の電歪効果素子を使用する場合、
一般的には側面が樹脂で被覆された柱状の電歪効果素子
や、第2図に示すように、両端に金属キャップ3,11が冠
着された電歪効果素子1を使用し、電歪効果素子1をア
クチュエータの取付部材12a,12bで挟持するように組み
付けている。When using a laminated electrostrictive effect element for these devices,
Generally, a columnar electrostrictive effect element whose side surface is covered with resin or an electrostrictive effect element 1 having metal caps 3 and 11 on both ends is used as shown in FIG. The effect element 1 is assembled so as to be sandwiched by the actuator mounting members 12a and 12b.
上述した従来の電歪効果素子は、電歪効果素子の全長に
対して千分の1(全長10mmに対して10μm)という微小
変位を効率良く得るためと、素子の割れ防止として、変
位させた時の荷重が素子の両端面全体に均一に加わるよ
うにするために、電歪効果素子の両端面の平行度、上下
の金属キャップの平行度、さらには上下の取付部材の平
行度を高精度に仕上げる必要があり、電歪効果素子のコ
ストアップになるばかりでなく、アクチュエータとして
使用する場合も大幅なコストアップになる欠点がある。The above-mentioned conventional electrostrictive effect element was displaced in order to efficiently obtain a minute displacement of 1/1000 (10 μm for a total length of 10 mm) with respect to the total length of the electrostrictive effect element and to prevent cracking of the element. In order to evenly apply the load to both end faces of the element, the parallelism of both end faces of the electrostrictive effect element, the parallelism of the upper and lower metal caps, and the parallelism of the upper and lower mounting members are highly accurate. Therefore, there is a drawback that not only the cost of the electrostrictive effect element increases but also the cost increases significantly when it is used as an actuator.
本考案の電歪効果素子は、圧電セラミックス部材と内部
電極導体とが交互に積層された積層体を含む電歪効果素
子において、前記電歪効果素子の一端に接続された第1
の金属部材と、前記第1の金属部材に接続された第1の
取り付け部材と、前記電歪効果素子の他端に接続された
第2の金属部材と、前記第2の金属部材に対向して設け
られた第3の金属部材と、前記第3の金属部材の前記第
2の金属部材と対向しない面に接続された第2の取り付
け部材と、前記第2の金属部材と前記第3の金属部材と
の間に設けられ前記電歪効果素子の変位を前記第1の取
り付け部材および前記第2の取り付け部材に偏ることな
く伝達する伝達手段とを設けたことを特徴とする。The electrostrictive effect element of the present invention is an electrostrictive effect element including a laminated body in which piezoelectric ceramic members and internal electrode conductors are alternately laminated.
Of the metal member, the first attachment member connected to the first metal member, the second metal member connected to the other end of the electrostrictive effect element, and the second metal member facing each other. And a second mounting member connected to a surface of the third metal member that does not face the second metal member, the second metal member, and the third metal member. It is characterized in that a transmission means is provided which is provided between the electrostrictive effect element and the metal member and transmits the displacement of the electrostrictive effect element to the first attachment member and the second attachment member without being biased.
電歪効果素子の一方の端部が鋼球を介して金属部材に回
動可能に支持されているので、素子を取付ける取付部材
がいかなる状態であっても、最適な状態で素子を取付け
ることができる。Since one end of the electrostrictive effect element is rotatably supported by the metal member via the steel ball, it is possible to mount the element in an optimal state regardless of the mounting member for mounting the element. it can.
次に、本考案の実施例について図面を参照して説明す
る。Next, an embodiment of the present invention will be described with reference to the drawings.
第1図は本考案の電歪効果素子の一実施例の縦断面図で
ある。FIG. 1 is a longitudinal sectional view of an embodiment of the electrostrictive effect element of the present invention.
電歪効果素子1は、圧電セラミック部材と内部電極導体
層とが交互に積層され、一対のリード線2a,2bを有して
いる。電歪効果素子1の一端に電歪効果素子1の外部電
極導体とリード線2a,2bにより接続されたガラス端子か
らなる一対のリード端子4a,4bが半田付けで側面に取り
付けられた金属キャップ3が内側底面において固着され
ている。さらに、金属キャップ3の開口部には、金属キ
ャップ3の外径と同一の内径を有し、電歪効果素子1の
他端を越えて延びるステンレス製のベローズ5が全周に
渡り溶接されている。電歪効果素子1の他端には、一方
の面の中央部に円錐形の凹部8aを、他方の面の中央部に
電歪効果素子1の外径とほぼ同一の内径の凹部7を有す
る金属部材6が凹部7において被せられている。さら
に、金属キャップ3の外径寸法とほぼ同じ大きさで、一
方の面に円錐形の凹部8bを有する金属部材9が、凹部8
a,8bで挟持された鋼球10を介して金属部材6と対向し、
かつベローズ5の開口側でベローズ5と全周に渡り溶接
されている。The electrostrictive effect element 1 has a pair of lead wires 2a and 2b in which piezoelectric ceramic members and internal electrode conductor layers are alternately laminated. A metal cap 3 having a pair of lead terminals 4a and 4b made of glass terminals connected to the external electrode conductor of the electrostrictive effect element 1 and the lead wires 2a and 2b at one end of the electrostrictive effect element 1 and attached to the side surface by soldering. Are fixed on the inner bottom surface. Further, in the opening of the metal cap 3, a stainless bellows 5 having the same inner diameter as the outer diameter of the metal cap 3 and extending beyond the other end of the electrostrictive effect element 1 is welded over the entire circumference. There is. At the other end of the electrostrictive effect element 1, there is provided a conical recess 8a at the center of one surface and a recess 7 having an inner diameter substantially the same as the outer diameter of the electrostrictive effect element 1 at the center of the other surface. The metal member 6 is covered in the recess 7. Further, the metal member 9 having a conical concave portion 8b on one surface and having substantially the same size as the outer diameter of the metallic cap 3 is
facing the metal member 6 via the steel ball 10 sandwiched by a and 8b,
Moreover, it is welded to the bellows 5 over the entire circumference on the opening side of the bellows 5.
次に、本実施例の電歪効果素子の組立て方法を説明す
る。Next, a method for assembling the electrostrictive effect element according to the present embodiment will be described.
まず、電歪効果素子1のリード線2a,2bを金属キャップ
3のリード端子4a,4bにそれぞれ半田付けで接続する。
そして金属キャップ3に溶接されているベローズ5の中
に電歪効果素子1を入れ、金属キャップ3の内側底面に
直立するように接着剤で固定する。次に、電歪効果素子
1の上端部に金属部材6の凹部7をはめ込み、金属部材
6の円錐形の凹部8aと金属部材9の円錐形の凹部8bとで
鋼球10を挟持するように金属板9をベローズ5の開口部
にはめ込む。最後に、金属部材9とベローズ5を全周に
渡り溶接して組立てを完了させる。このようにして完成
した電歪効果素子をアクチュエータの取付部材12a,12b
間に取付けて、リード端子4a,4bに電圧を印加すると、
取付部12a,12bを押し広げる方向に所望の変位を発生す
る。First, the lead wires 2a and 2b of the electrostrictive effect element 1 are connected to the lead terminals 4a and 4b of the metal cap 3 by soldering.
Then, the electrostrictive effect element 1 is put in the bellows 5 welded to the metal cap 3 and fixed with an adhesive so as to stand upright on the inner bottom surface of the metal cap 3. Next, the recess 7 of the metal member 6 is fitted into the upper end of the electrostrictive effect element 1 so that the steel ball 10 is sandwiched between the conical recess 8a of the metal member 6 and the conical recess 8b of the metal member 9. The metal plate 9 is fitted into the opening of the bellows 5. Finally, the metal member 9 and the bellows 5 are welded over the entire circumference to complete the assembly. The electrostrictive effect element completed in this way is attached to the actuator mounting members 12a, 12b.
Installed between them and applying voltage to the lead terminals 4a and 4b,
A desired displacement is generated in the direction in which the mounting portions 12a and 12b are expanded.
以上説明したように本考案は、電歪効果素子の両端面間
に鋼球を挟持した2枚の金属部材からなる回転自在な構
造を有することにより、電歪効果素子の両端面、上下の
金属部材の端面および取付部材の両端面と取付部材の両
端面間の平行度を特に高精度に仕上げることなく、電歪
効果素子の両端面と取付部材の取付面とを密着させるこ
とができ、所望の変位を得ることができ、したがって製
造コストを大幅に低減できる効果がある。INDUSTRIAL APPLICABILITY As described above, the present invention has a rotatable structure composed of two metal members having steel balls sandwiched between both end faces of the electrostrictive effect element, so that both end faces of the electrostrictive effect element and the upper and lower metal members are formed. The end faces of the electrostrictive effect element and the mounting face of the mounting member can be brought into close contact with each other without finishing the parallelism between the end face of the member and both end faces of the mounting member and both end faces of the mounting member with particularly high precision. Therefore, there is an effect that the displacement can be obtained, and thus the manufacturing cost can be significantly reduced.
第1図は本考案の電歪効果素子の一実施例の縦断面図、
第2図は従来例の電歪効果素子の縦断面図である。 1……電歪効果素子、2a,2b……リード線、3……金属
キャップ、4a,4b……リード端子、5……ベローズ、6
……金属部材、7……金属部材6の凹部、8a……金属部
材6の円錐形の凹部、8b……金属部材9の円錐形の凹
部、9……金属部材、10……鋼球、12a,12b……アクチ
ュエータの取付部材。FIG. 1 is a longitudinal sectional view of one embodiment of the electrostrictive effect element of the present invention,
FIG. 2 is a vertical sectional view of a conventional electrostrictive effect element. 1 ... Electrostrictive effect element, 2a, 2b ... Lead wire, 3 ... Metal cap, 4a, 4b ... Lead terminal, 5 ... Bellows, 6
... metal member, 7 ... recess of metal member 6, 8a ... conical recess of metal member 6, 8b ... conical recess of metal member 9 ... metal member, 10 ... steel ball, 12a, 12b ... Actuator mounting members.
Claims (3)
交互に積層された積層体を含む電歪効果素子において、 前記電歪効果素子の一端に接続された第1の金属部材
と、前記第1の金属部材に接続された第1の取り付け部
材と、前記電歪効果素子の他端に接続された第2の金属
部材と、前記第2の金属部材に対向して設けられた第3
の金属部材と、前記第3の金属部材の前記第2の金属部
材と対向しない面に接続された第2の取り付け部材と、
前記第2の金属部材と前記第3の金属部材との間に設け
られ前記電歪効果素子の変位を前記第1の取り付け部材
および前記第2の取り付け部材に偏ることなく伝達する
伝達手段とを設けたことを特徴とする電歪効果素子。1. An electrostrictive effect element including a laminate in which piezoelectric ceramic members and internal electrode conductors are alternately laminated, wherein a first metal member connected to one end of the electrostrictive effect element and the first A first mounting member connected to the metal member, a second metal member connected to the other end of the electrostrictive effect element, and a third metal member provided to face the second metal member.
And a second mounting member connected to a surface of the third metal member that does not face the second metal member,
A transmission means that is provided between the second metal member and the third metal member and that transmits the displacement of the electrostrictive effect element to the first mounting member and the second mounting member without being biased. An electrostrictive effect element characterized by being provided.
に対向する面に第1の凹部を有し、前記第3の金属部材
は前記第1の凹部に対向する部分に第2の凹部を有し、
前記伝達手段は前記第1の凹部と第2の凹部との間に設
けられた球体であることを特徴とする実用新案登録請求
の範囲(1)に記載の電歪効果素子。2. The second metal member has a first recess on a surface facing the third metal member, and the third metal member has a second recess on a portion facing the first recess. Has a recess of
The electrostrictive effect element according to claim (1), wherein the transmission means is a sphere provided between the first concave portion and the second concave portion.
用新案登録請求の範囲(2)に記載の電歪効果素子。3. The electrostrictive effect element according to claim (2), wherein the sphere is a steel ball.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15023088U JPH0720930Y2 (en) | 1988-11-17 | 1988-11-17 | Electrostrictive effect element |
US07/432,809 US5113108A (en) | 1988-11-04 | 1989-11-06 | Hermetically sealed electrostrictive actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15023088U JPH0720930Y2 (en) | 1988-11-17 | 1988-11-17 | Electrostrictive effect element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0270465U JPH0270465U (en) | 1990-05-29 |
JPH0720930Y2 true JPH0720930Y2 (en) | 1995-05-15 |
Family
ID=31423185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15023088U Expired - Lifetime JPH0720930Y2 (en) | 1988-11-04 | 1988-11-17 | Electrostrictive effect element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720930Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2658812B2 (en) * | 1993-08-12 | 1997-09-30 | 日本電気株式会社 | Piezo actuator |
-
1988
- 1988-11-17 JP JP15023088U patent/JPH0720930Y2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0270465U (en) | 1990-05-29 |
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