EP3583319A1

EP3583319A1 - Multi-stage rotary lobe pump

Info

Publication number: EP3583319A1
Application number: EP18701730.6A
Authority: EP
Inventors: Dieter Kolvenbach
Original assignee: Leybold GmbH
Current assignee: Leybold GmbH
Priority date: 2017-02-17
Filing date: 2018-01-24
Publication date: 2019-12-25
Anticipated expiration: 2038-01-24
Also published as: EP3583319B1; KR102490780B1; KR20190112002A; CA3053679A1; JP2020507704A; US20190376515A1; WO2018149598A1; US11255328B2; CN110168227A; DE202017001029U1

Abstract

The invention relates to a multi-stage rotary lobe pump having a plurality of pump chambers (14) in a pump housing (16, 18). Said pump chambers form respective pump stages (26, 28, 30, 32, 34), each pump stage having two bidentate rotary pistons (10). The pump stages (26, 28, 30, 32, 34) are separated from each other by intermediate walls (44). Substantially radially extending connecting channels (48) are arranged in the intermediate walls (44). The connecting channels (48) are connected to an inflow chamber (40), the inflow opening (42) of which has a larger cross-section than the connecting channels (48).

Description

Multi-stage Roots pump

The invention relates to a multi-stage Roots pump.

Roots pumps have, for example, bidentate, arranged in a pumping chamber rotary piston. The two each pump chamber provided rotary pistons are driven in opposite directions, so that sucked through the individual resulting chambers gas through a main inlet and discharged through a main outlet again. The main inlet and the main outlet in this case run in the radial direction and are arranged opposite one another. Furthermore, multidentate, in particular three or four teeth having rotary pistons are known. Here too, a substantially radial pumping of the gas takes place from a radially arranged main inlet to a radially arranged main outlet.

To achieve low pressures also multi-stage Roots pumps are known. For each level, such Roots have a pair of rotary pistons. In this case, the gas to be pumped is conveyed from an outlet of a pumping stage to the inlet of an adjacent pumping stage. This is done via connection channels. The connection channels can, as described for example in US 2010/0158728, be arranged in the housing of the Roots pump, the connection channels surrounding the pump chambers, in which the rotary pistons are arranged, or arranged radially outside the pump chambers. This is required to gas from a, for example, arranged in the lower part of the Roots pump To promote outlet of a pumping stage to a arranged in the opposite, for example, upper portion of a Roots pump inlet of the adjacent pumping stage. Such Roots pumps have the disadvantage that the design of the channels in the housing is technically complex. Furthermore, the housing must be designed to be bulky for receiving the connecting channels. This not only leads to large external dimensions of the Roots pump but in particular to high costs. The high costs are in addition to the complex manufacturing process caused by the large use of metals.

Furthermore, from WO 2013/023954 multi-stage Roots pumps are known in which the Roots have three or more teeth. The connecting channels between adjacent pumping chambers are in this case arranged in the intermediate walls, which separate adjacent pumping chambers from each other. Due to the provision of three or more teeth per rotary piston, it is possible that the connecting channels are arranged only axially in the intermediate walls. Since such an axial arrangement of connecting channels is only possible with three- or multi-toothed rotary lobe pumps, such a pump has the disadvantage that the pumping speed is lower than in Roots pumps with bidentate rotary pistons.

Another Roots pump with dreizähnigen rotary piston is known from US 2005/0089424. It is a multi-stage Roots pump, the individual pump stages are separated by partitions. The connection channels between the pumping stages are arranged in the intermediate walls. Here, the connecting channels are Z-shaped. The connection channels have an inlet region, a radially extending connection region and an axially extending outlet region. This leads to high flow losses. The object of the invention is to provide a multi-stage Roots pump, with the high pumping speed can be achieved.

The object is achieved according to the invention by a multi-stage Roots pump according to claim 1.

The multi-stage Roots pump according to the invention has a plurality of pump chambers formed in a pump housing. In each of the pumping chambers two bidentate rotary pistons are arranged to form a pumping stage. Adjacent pump stages are separated by partitions. In the intermediate walls connecting channels are arranged to connect the adjacent pumping stages with each other. According to the invention, the connection channels are designed such that at least one, preferably all, connection channels are connected to an axial inflow space, in which the conveyed medium flows from the pump chamber of a pump stage through an inflow opening into the inflow space. According to the invention, the inflow opening is in this case designed such that the cross section of the inflow opening is larger than the cross section of the connection chamber. The inventive design of the multi-stage Roots pump with bidentate rotary pistons, a high pumping speed can be achieved. By providing an inflow space having a large inflow opening, the flow resistances can be reduced even when the connecting channels are arranged within the intermediate walls and thus shortened. This reduces the required power consumption of the pump and increases the pumping speed and thus the efficiency of the pump.

Since it is a Roots pump with bidentate rotary pistons according to the invention, it is preferred that the connecting channel between two pumping stages is arranged substantially in particular exclusively radially and runs completely in the intermediate wall. The connecting channel thus has at least one, in particular exclusively radially extending channel section. It is particularly preferred that the entire connecting channel is arranged radially, wherein the connecting channel is in this case preferably directly connected in particular with an upstream upstream in the flow direction of the axial inflow. It is particularly preferred that in addition an axial outflow space is provided, which is preferably also connected directly to the radially extending connection channel. The outflow space is then connected via an outflow opening to the next pumping stage, wherein the outflow opening of the connection channel forms the inlet of the next pumping stage.

Preferably, the inflow opening of the inflow space has a larger cross section than the radial channel section of the connection channel and in particular as the essentially exclusively radially extending connection channel. It is particularly preferred that the cross section of the inflow opening is at least 10%, in particular at least 20% and particularly preferably at least 30% greater than the cross section of the connecting channel.

To further reduce the flow resistances occurring, it is further preferred that preferably all edges at the inflow opening are preferably rounded off at radii by transitions between the inflow space and the connecting channel. Preferably, the radius of the rounding is greater than two millimeters.

In a further preferred embodiment, the inlet space is preceded by an antechamber in the flow direction. The promotional medium to be tested thus passes at least partially into an antechamber before it is then passed on into the inflow space. Possibly. However, the arrangement of the antechamber and the inflow space can be designed so that the medium can also pass directly from the pumping chamber into the inflow space. By such a configuration, the Flow resistances further reduced. The provision of an antechamber is independent of the cross section of the inlet opening is an independent invention.

In a particularly preferred embodiment, the antechamber is arranged radially to the rotary piston pair. This has the advantage that the medium to be pumped does not have to be deflected when flowing into the vestibule. It is therefore particularly preferred that the antechamber forms a part of the pumping chamber into which, however, the rotary pistons do not protrude. Particularly preferably, the antechamber extends over the entire width of the pumping chamber, so that a flow resistance-free inflow of the medium into the antechamber is possible.

In a particularly preferred development of the invention, the connecting channels arranged in the intermediate walls are additionally connected to an outflow chamber. In this case, it is preferred that the connection takes place in particular directly, wherein preferably the connecting channel is arranged exclusively radially within the intermediate walls. The outflow space preferably has an outflow opening. The cross section of the outflow opening is in this case preferably designed such that it is larger than the cross section of the connecting channel. The cross section of the outflow opening is preferably 10%, in particular 20% and particularly preferably 30% greater than the cross section of the connecting channel. Furthermore, also in this area, the edges are preferably rounded, as in the region of the inflow space.

In a particularly preferred development of the invention, a nightroom is additionally provided. This is downstream of the outflow in the flow direction. Here, the Nachraum can be arranged and designed such that the medium flows from the outflow through the exhaust port completely or only partially in the Nachraum. The medium can thus in the subsequent pumping stage, possibly partially directly from the Flow outflow or completely or partially first flow into the Nachraum, then to flow from this into the next pumping chamber. The Nachraum is preferably formed according to the vestibule. In particular, the Nachraum is preferably arranged radially to the rotary piston pair. In this case, it is again preferred that the rotary pistons do not protrude into the antechamber and that the antechamber extends in particular over the entire width of the pumping stage.

In a particularly preferred embodiment of the invention, the housing has at least one inlet cover. The at least one inlet cover forms a sidewall of the inflow space, in particular completely. By opening or removing the at least one inlet cover, the inflow space is easily accessible, for example, for cleaning. Further, by providing the at least one inlet cap, the geometry is simplified and thus the manufacture is easier.

In a preferred embodiment, for example, an additional inlet cover is provided, which forms a side wall of the vestibule. Also, this side cover is preferably designed such that it forms the wall completely, so that the antechamber example meadow is easily accessible for cleaning. As a result, in turn, the geometry is simplified and thus cheaper production possible. Furthermore, the pump space is easily accessible via the inlet cover of the vestibule.

It is particularly preferred that a side cover forms both a side wall of the inflow space and the antechamber. In a particularly preferred embodiment, the inlet cover extends over at least two adjacent pumping stages and particularly preferably over all pump stages of the multi-stage Roots pump. In a preferred development, the housing has at least one outlet cover, which forms a side wall of the outflow space. The outlet cover is in this case preferably developed according to the inlet cover, wherein in particular an outlet cover is provided for a Nachraum and in a particularly preferred embodiment, the outlet cover via one or more pumping stages, in particular all pumping stages extends.

The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Show it :

Fig. 1 schematic diagrams of a two-stage invention

Roots pump in sectional view in different rotational positions of the Wälzkolbenpaars,

Fig. 2 is a schematic perspective longitudinal section of the multi-stage Roots pump according to the invention, and

3 is a schematic representation of an inlet region of the

Inflow space in plan view.

Each pump stage of the multi-stage Roots pump according to the invention has a pair of Wälzkolbenpaar. The Wälzkolbenpaar each includes two bidentate rotary pistons 10. These are each arranged on a shaft 12 and are rotated in the opposite direction for conveying the medium. The individual Wälzkolben the successively arranged pumping stages are each arranged on a common shaft, so that the Roots pump has two shafts 12. The Wälzkolben 10 each of a Wälzkolbenpaares are arranged in a pumping stage forming a pumping chamber 14. The pumping chamber is by a two-part housing 16, 18th educated. A housing separation 20 is in this case provided in the middle of the two shafts 12, so that a simple assembly is possible. Furthermore, the housing is provided with an inlet cover 22 and an outlet cover 24.

From the schematic longitudinal section shown in FIG. 2 along a line II-II in FIG. 1 it can be seen that the Roots pump according to the invention is designed as a multi-stage Roots pump, wherein in the axial direction a plurality of pump stages 26, 28, 30, 32, 34 are provided. The chamber volumes of the individual pump stages take, starting from the pumping stage 26 in the direction of the pumping stage 34, respectively from. The first pumping stage 26 is connected to a main inlet 36. The main inlet 36 is connected to a chamber or the like to be evacuated. The medium to be delivered thus flows radially through the main inlet 36 into the pumping chamber 14 of the first pumping stage 36.

In the radial direction, the main inlet 36 opposite, an antechamber 38 is formed. The antechamber 38 extends over the entire axial width of the pumping stage 26 and thus has substantially the same width as the Roots 10 of the first pumping stage 36.

Furthermore, an inflow space 40 is provided. The inflow space 40 adjoins, on the one hand, the antechamber 38, and further has an inflow opening 42 having a direct connection to the pumping chamber 14 in the illustrated embodiment.

The inflow space 40 is adjoined by a connecting channel 48 arranged within an intermediate wall 44. The medium to be delivered flows in Fig. 2 in the connecting channel 48 from bottom to top.

At the in the illustrated embodiment, only radially extending connecting channel 48, a the inflow space 40 corresponding Outflow space 50 and to this a corresponding to the vestibule 38 trained Nachraum 52 at. The outflow space 50 has an outflow opening 54, which corresponds to the contour and configuration of the inflow opening 42 in the illustrated embodiment.

In the illustrated embodiment, all pump stages are constructed accordingly, wherein the pumping stages are each separated by intermediate walls 44 and in each intermediate wall 44 a in the illustrated embodiment radially extending connecting channel 48 is arranged. Each connecting channel 48 is in each case connected to an inflow space 40 and an outflow space 50 as well as an antechamber 38 and an after-space 52.

In particular, in order to reduce the flow resistances, the inlet openings 42 of the inflow spaces 40 and preferably also the outlet openings 54 of the outflow spaces 50 are designed such that they have a larger cross section than the connection channels 48.

Furthermore, both the inflow spaces 40 and the antechambers 38 are connected to a common inlet cover 24. Correspondingly, the outflow chambers 50 and the after-cavities 52 are also connected to a common outlet cover 22.

The last pumping stage 34 is further connected to a main outlet, not shown, through which the medium to be conveyed is ejected.

In Fig. 3 is a schematic plan view of an inlet space 40, which is connected on the one hand to an antechamber 38 and on the other hand to a connecting channel 48. The inlet opening 42 is formed by the curved edge 54 formed in the illustrated embodiment. The inlet opening thus has the cross section represented by the dashed line 56. As can also be seen, the inflow space 40 is connected on the one hand directly to the corresponding pumping chamber 14 and on the other hand also to the antechamber 38. The same applies to the outflow opening 54.

Claims

claims

Multi-stage Roots pump, with a plurality of pump chambers (14) formed by a pump housing (16, 18), in each of which two bidentate rotary pistons (10) are arranged to form a pumping stage (26, 28, 30, 32, 34) , 28, 30, 32, 34) separating intermediate walls (44), and adjacent pumping stages (26, 28, 30, 32, 34) arranged in the intermediate walls (44), interconnecting connecting channels (48), wherein the connecting channels (48 ) are connected to an axial inflow space (40), in which the conveyed medium from the pumping chamber (14) of a pumping stage (26, 28, 30, 32, 34) flows through an inflow opening (42) and wherein the inflow opening (42) a having a larger cross-section than the connecting channel (48).

Multi-stage Roots pump according to claim 1, characterized in that the connecting channel (48) is arranged substantially in particular exclusively radially.

Multi-stage Roots pump according to claim 2, characterized in that the connecting channel (48) is directly connected to the inflow space (40).

4. Multi-stage Roots pump according to one of claims 1 - 3, characterized in that the cross section of the inflow opening (42) at least 10%, in particular at least 20% and particularly preferably at least 30% greater than the cross section of the connecting channel (48).

5. Multi-stage Roots pump according to one of claims 1 - 4, characterized in that preferably all edges of the inflow opening (42) are rounded aerodynamically.

6. Multi-stage Roots pump according to one of claims 1 - 5, characterized by a the inflow space (40) in the flow direction upstream vestibule (38).

7. Multi-stage Roots pump according to claim 6, characterized in that the antechamber (38) is arranged radially to the rotary piston pair (10).

8. Multi-stage Roots pump according to claim 6 or 7, characterized in that the antechamber (38) is a part of the pumping chamber (14) into which the rotary pistons (10) do not protrude.

9. Multi-stage Roots pump according to one of claims 1-8, characterized in that the connecting channel (48) is in particular directly connected to an outflow space (50).

10. Multi-stage Roots pump according to claim 9, characterized in that an outflow opening (54) of the outflow space (50) through which the pumped medium flows into the pumping chamber (14) has a larger cross-section than the connecting channel (48).

11. Multi-stage Roots pump according to claim 9 or 10, characterized in that the cross section of the outlet opening (54) at least 10%, in particular at least 20% and particularly preferably at least 30% greater than the cross section of the connecting channel (48).

12. Multi-stage Roots pump according to claim 11, characterized in that preferably all edges of the outlet opening (54) are rounded aerodynamically.

13. Multi-stage Roots pump according to one of claims 9 - 12, characterized by a the outflow space (50) in the flow direction downstream Nachraum (52).

14. Multi-stage Roots pump according to claim 13, characterized in that the Nachraum (54) is arranged radially to the rotary piston (10).

15. Multi-stage Roots pump according to claim 13 or 14, characterized in that the Nachraum (54) is a part of the pumping chamber (14), in which the rotary pistons (10) do not protrude.

16. Multi-stage Roots pump according to one of claims 1-15, characterized in that the pump housing (16, 18) has at least one inlet cover (24) through which a side wall of the inflow space (40) is formed.

17. Multi-stage Roots pump according to claim 16, characterized in that the inlet cover (24) forms a side wall of the antechamber (38).

18. Multi-stage Roots pump according to one of claims 1-17, characterized in that the pump housing (16, 18) at least an outlet cover (22) through which a side wall of the outlet space (50) is formed.

19. Multi-stage Roots pump according to claim 18, characterized in that the outlet cover (22) forms a side wall of the Nachraums (52).