CN110168227A - Multi-stage roots pump - Google Patents

Multi-stage roots pump Download PDF

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Publication number
CN110168227A
CN110168227A CN201880006099.2A CN201880006099A CN110168227A CN 110168227 A CN110168227 A CN 110168227A CN 201880006099 A CN201880006099 A CN 201880006099A CN 110168227 A CN110168227 A CN 110168227A
Authority
CN
China
Prior art keywords
pump
stage roots
stage
connecting pipe
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201880006099.2A
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Chinese (zh)
Inventor
迪特尔·科文巴赫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of CN110168227A publication Critical patent/CN110168227A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/084Toothed wheels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/30Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A kind of multi-stage roots pump, includes multiple pump chambers (14) in pump case (16,18).Pump chamber constitutes corresponding pump stage (26,28,30,32,34), wherein each pump stage includes two bidentate rotary-pistons (10).Pump stage (26,28,30,32,34) is separated from each other by partition wall (44).The connecting pipe (48) substantially radially extended is arranged in partition wall (44).Connecting pipe (48) is connect with room (40) are flowed into, and the inlet opening (42) for flowing into room (40) has the cross section bigger than connecting pipe (48).

Description

Multi-stage roots pump
[technical field]
The present invention relates to a kind of multi-stage roots pumps.
[background technique]
Lobe pump includes the bidentate rotary-piston being for example arranged in pump chamber.Two rotary-piston edges that each pump chamber provides Opposite direction driving, so that gas is entered by individual room via main-inlet and is discharged via primary outlet.Here, main-inlet And primary outlet is extended in a radial direction and is positioned relative to each other.Furthermore it is known that multiple tooth rotary-piston, especially includes three A or four teeth rotary-piston.Here, same, gas is substantially radially pumped into radial arrangement from the main-inlet radially arranged Primary outlet.
Furthermore it is known that multi-stage roots pump is for obtaining low-pressure.Such every level-one of lobe pump includes a pair of of rotary-piston.? This, gas to be pumped is transported to the entrance of adjacent pump stage from the outlet of pump stage.This is realized by connecting pipe.Connecting pipe can To be arranged in the shell of lobe pump, as described in US 2010/0158728, wherein connecting pipe is around pump chamber, rotation Piston is arranged in pump chamber or is arranged radially at outside pump chamber.This be by gas from the lower area for being arranged in lobe pump The outlet of pump stage be transported to needed for the entrance of the adjacent pump stage in opposite (such as top) region for being arranged in lobe pump.This The shortcomings that class lobe pump, is that the construction of pipeline in the housing is technically complicated.In addition, shell must have big volume To accommodate connecting pipe.This does not only result in the big external dimensions of lobe pump, and relates particularly to high cost.High cost is not only It is attributed to complex fabrication process, and is also due to required a large amount of metals.
In addition, being pumped according to multi-stage roots known to WO 2013/023954, wherein rotary-piston includes three or more teeth. Here, the connecting pipe between adjacent pump chamber, which is arranged in, to be made in adjacent pump chamber partition wall separated from each other.Due to providing each rotation It turns a work and fills in three or more teeth, therefore connecting pipe can be only disposed axially in partition wall.Due to this of connecting pipe Axial arrangement is only possible in the case where three teeth or multiple tooth rotary piston pump, therefore the shortcomings that such pump is, suction Ability is less than the suction capactity of the lobe pump with bidentate rotary-piston.
According to another lobe pump known to US 2005/0089424 with three tooth rotary-pistons.This is multi-stage roots pump, In individually pump stage be separated from each other by partition wall.Connecting pipe between pump stage is arranged in partition wall.Here, connecting pipe With Z-shaped construction.Therefore, connecting pipe includes entrance area, the join domain radially extended and axially extending outlet area Domain.This causes high flow capacity to lose.
[summary of the invention]
The object of the present invention is to provide a kind of multi-stage roots pumps that high suction capactity can be obtained by means of it.According to this hair Bright, this purpose is realized by being pumped according to the multi-stage roots of technical solution 1.
Multi-stage roots pump according to the present invention includes the multiple pump chambers being limited in pump case.For limiting two of pump stage Bidentate rotary-piston is arranged in each of pump chamber.Adjacent pump stage is separated from each other by partition wall.For making adjacent pump stage The connecting pipe being connected to each other is arranged in partition wall.According to the present invention, connecting pipe is constructed such that at least one connection Pipeline, preferably all connecting pipes are connect with the axial room that flows into, by the connecting pipe, the pump of the medium that is conveyed from pump stage Room is flowed into via inlet opening and flows into room.According to the present invention, inlet opening is constructed such that the cross section of inlet opening Greater than the cross section of connecting pipe.In the help of the construction of the multi-stage roots pump according to the present invention with bidentate rotary-piston Under, high suction capactity can be obtained.By providing the inflow room including big inlet opening, even if being arranged in separation in connecting pipe In wall and therefore in the case where shorter, it also can reduce flow resistance.This reduces the power consumption of pump, and increases suction energy The efficiency of power and therefore increasing pump.
Since according to the present invention, this is the lobe pump for including bidentate rotary-piston, it is therefore preferred to, between two pump stages Connecting pipe be substantially particularly only arranged radially in partition wall and completely in partition wall and extend.Therefore, connecting tube Road particularly includes the pipe section only radially extended.It is arranged it is particularly preferred that whole connection pipeline is radial, wherein connecting tube Road is particularly preferably directly connected to the axially upstream inflow room seen in the flowing direction.It is particularly preferred that additionally providing Axial delivery chamber is preferably also directly connected to the connecting pipe radially extended.Delivery chamber is then via outflow opening under One pump stage connection, wherein the outflow opening of connecting pipe constitutes the entrance of next pump stage.
Preferably, the inlet opening for flowing into room has the section bigger than the radial passage section of connecting pipe, and especially It is the cross section bigger than the connecting pipe substantially only radially extended.It is particularly preferred that the cross section of inlet opening is than connection The cross section of pipeline greatly at least 10%, particularly at least 20% and more preferably at least 30%.
For the flow resistance for further decreasing appearance, it is further preferred that, it is preferable that all sides at entrance opening Edge preferably also all falls by flow enhuancement mode according to radius at all edges of the transition position flowed between room and connecting pipe Circle.Preferably, the radius of the part through rounding is greater than 2 millimeters.
It according to another preferred embodiment, sees in the flowing direction, cup is provided in the upstream for flowing into room.Therefore, to be tested The medium conveyed at least partly initially travel in cup, then its be passed to flow into room in.However, if necessary Words, cup and the arrangement for flowing into room can make the medium that can also directly advance in inflow room from pump chamber.This construct into One step reduces flow resistance.The independent invention that cup is independently of the cross section of inlet opening is provided.
According to particularly preferred aspect, the mutually the pair of rotary-piston of cup is radially arranged.This provides an advantage in that be conveyed Medium when being flowed into cup without being redirected.It is therefore particularly preferred that cup is configured to one of pump chamber Point, rotary-piston does not protrude into the part simultaneously.It is highly preferred that cup extends across the entire width of pump chamber, so that before medium arrives In room is possible without flow resistance inflow.
Particularly preferred aspect according to the present invention, the connecting pipe being arranged in partition wall are additionally connect with delivery chamber. Here, it is preferable that the connection is realized in direct mode, wherein preferably, connecting pipe is only arranged radially in partition wall. Preferably, delivery chamber includes outflow opening.Here, the cross section of outflow opening is preferably configured such that it is greater than connecting tube The cross section in road.The cross section of outflow opening preferably bigger than the cross section of connecting pipe 10%, particularly 20% and more excellent Selection of land 30%.In addition, in the region, equally, edge is preferably rounded as in the region for flowing into room.
Particularly preferred aspect according to the present invention, it is preferable to provide rear chamber.It sees in the flowing direction, is arranged in delivery chamber Downstream.Here, rear chamber can be arranged and constructed into so that medium is fully or only partially by outflow opening from delivery chamber It is flowed into rear chamber.Therefore, medium may partly can be directly flowed into next pump chamber from outflow opening, or can be with Completely or partially first flow into rear chamber so as to then therefrom flow into next pump chamber.Preferably, rear chamber is by structure It causes so that it corresponds to cup.Particularly, rear chamber is radially arranged preferably relative to the pair of rotary-piston.Here, same Sample, it is preferred that rotary-piston does not protrude into cup simultaneously, and particularly the entire width across pump stage extends cup.
Particularly preferred aspect according to the present invention, shell include at least one inlet cover.At least one described inlet cover is special Do not constitute the side wall for flowing into room almost.By opening or remove at least one described inlet cover, can for example be easy for Cleaning purpose and enter flow into room.In addition, geometry is simplified, this is convenient for system by providing at least one described inlet cover It makes.
According to preferred aspect, additional inlets lid is provided, for example, its side wall for constituting cup.This side cover Preferably also by It is configured so that it fully constructs the wall, so that for example cup can be readily entered for cleaning purpose.To, equally, geometry Shape is simplified, and therefore cheaper manufacture is possible.In addition, pump chamber can be readily entered via the inlet cover of cup.
It is particularly preferred that side cover constitutes the side wall for flowing into room and cup.According to particularly preferred aspect, inlet cover is across at least Two adjacent pump stages extend, and all pump stages more preferably across multi-stage roots pump extend.
According to preferred aspect, shell includes at least one outlet cap, and outlet cap constitutes the side wall of delivery chamber.Here, outlet Lid is preferably configured such that it corresponds to inlet cover, wherein particularly, providing the outlet cap for rear chamber, and according to spy Other preferred embodiment, outlet cap extend across one or more pump stages, especially extend across all pump stages.
[Detailed description of the invention]
Hereinafter, with reference to attached drawing, the present invention is explained in detail based on preferred embodiment, in the accompanying drawings:
Fig. 1 shows signal of the two-stage lobe pump according to the present invention in the different rotary position of the pair of rotary-piston The cross section of figure,
Fig. 2 shows the schematic perspective longitudinal cross-section of multi-stage roots pump according to the present invention, and
Fig. 3 shows top view, schematically shows the entrance area for flowing into room.
[specific embodiment]
Each pump stage of multi-stage roots pump according to the present invention includes a pair of of rolling piston.The pair of rolling piston includes Two bidentate rotary-pistons 10.It is respectively arranged on axis 12 and rotates in mutually opposite directions with pumped (conveying) medium.Continuously arrange The individual rolling piston of pump stage is respectively placed on common axis, so that lobe pump includes two axis 12.Corresponding a pair of of rolling Rolling piston 10 in piston is arranged in the pump chamber 14 for constituting pump stage.Pump chamber is formed by two housing parts 16,18.Here, shell Partition 20 provide in the center of two axis 12 so that simple assembling is possible.In addition, shell is provided with 22 He of inlet cover Outlet cap 24.
It can be seen that shown according to fig. 2 along the schematic longitudinal section of the line II-II of Fig. 1 according to the present invention Lobe pump is configured to multi-stage roots pump, wherein in the axial direction, provides multiple pump stages 26,28,30,32,34.Individually The room volume of pump stage reduces from pump stage 26 initially towards pump stage 34.First pump stage 26 is connect with main-inlet 36.Main-inlet 36 with to Room of evacuation or the like connection.Therefore, the pump chamber that medium to be conveyed passes through 36 radial inflow of main-inlet to the first pump stage 26 In 14.
In radial directions, opposite with main-inlet 36, form cup 38.Cup 38 prolongs across the entire axial width of pump stage 26 It stretches, and therefore there is the width substantially the same with the rolling piston 10 of the first pump stage 26.
Additionally, it is provided flowing into room 40.In shown exemplary embodiment, 40 one side of room is flowed into adjacent to cup 38 Arrangement, and further comprise the inlet opening 42 being directly connected to pump chamber 14.
The connecting pipe 48 inside partition wall 44 is arranged in dispose adjacent to room 40 is flowed into.In Fig. 2, medium to be conveyed Bottom is flowed to from top in connecting pipe 48.
It is constructed such that it corresponds to the delivery chamber 50 of inflow room 40 and is adjacent in shown exemplary embodiment The connecting pipe 48 that only radially extends and arrange, and be constructed such that it corresponds to the rear chamber 52 of cup 38 and is adjacent to Flow into room 40 and arrange.Delivery chamber 50 includes outflow opening 54, in shown exemplary embodiment, the wheel of outflow opening 54 Wide and construction matching inlet opening 42 profile and construction.
In shown exemplary embodiment, all pump stages are structured to so that it corresponds to each other, wherein each pump stage It is separated from each other respectively by partition wall 44, and in shown exemplary embodiment, 48 cloth of connecting pipe radially extended It sets in each partition wall 44.Each connecting pipe 48 connects with inflow room 40 and delivery chamber 50 and cup 38 and rear chamber 52 respectively It connects.
Especially for flow resistance is reduced, flows into the entrance opening 42 of room 40 and preferably there are also the streams of delivery chamber 50 Opening 54 is constructed such that it has the cross section bigger than connecting pipe 48 out.
In addition, inflow room 40 and cup 38 are all connect with shared inlet cover 24.Correspondingly, delivery chamber 50 and rear chamber 52 with Outlet cap 22 is shared to connect.
Last pump stage 34 is further connect with unshowned primary outlet, and medium to be conveyed is discharged by primary outlet.
In figure 3 it is shown that the schematic top view of inlet chamber 40,40 one side of inlet chamber is connect with cup 38, and another On the one hand it is connect with connecting pipe 48.In shown exemplary embodiment, entrance opening 42 is formed by curved edge 54.Cause This, entrance opening has the cross section as shown in dotted line 56.
Can with it is further seen that, flow into 40 one side of room and be directly connected to corresponding pump chamber 14, and another aspect and cup 38 are directly connected to.This is equally applicable to outflow opening 54.

Claims (19)

1. a kind of multi-stage roots pump comprising:
The multiple pump chambers (14) limited by pump case (16,18), two bidentate rotary-pistons (10) are arranged in the pump chamber and use In construction pump stage (26,28,30,32,34);
Make the adjacent pump stage (26,28,30,32,34) partition wall (44) separated from each other;And
The connecting tube for being arranged in the partition wall (44) and the adjacent pump stage (26,28,30,32,34) being made to be connected to each other Road (48),
Wherein the connecting pipe (48) connect with axial flow into room (40), and the medium conveyed passes through inlet opening (42) from pump The pump chamber (14) of grade (26,28,30,32,34) is flowed into axial inflow room (40), and
Wherein the inlet opening (42) has the cross section bigger than the connecting pipe (48).
2. multi-stage roots according to claim 1 pump, it is characterised in that the connecting pipe (48) is substantially particularly only Radial arrangement.
3. multi-stage roots pump according to claim 2, it is characterised in that the connecting pipe (48) and the inflow room (40) it is directly connected to.
4. multi-stage roots pump according to any one of claims 1 to 3, it is characterised in that the inlet opening (42) Cross section greatly at least 10%, particularly at least 20% and more preferably at least of the cross section than the connecting pipe (48) 30%.
5. multi-stage roots pump according to any one of claims 1 to 4, it is characterised in that preferably, the inflow is opened It is rounded that flow enhuancement mode is all pressed at all edges of mouth (42).
6. multi-stage roots pump according to any one of claims 1 to 5, it is characterised in that see arrangement in the flowing direction Cup (38) in the upstream for flowing into room (40).
7. multi-stage roots pump according to claim 6, it is characterised in that the cup (38) is relative to the pair of rotation Piston (10) is radially arranged.
8. multi-stage roots pump according to claim 6 or 7, it is characterised in that the cup (38) is the pump chamber (14) A part, the rotary-piston (10) do not protrude into the part simultaneously.
9. being pumped according to claim 1 to multi-stage roots described in any one of 8, it is characterised in that the connecting pipe (48) is special It is not to be directly connected to delivery chamber (50).
10. multi-stage roots pump according to claim 9, it is characterised in that the outflow opening (54) of the delivery chamber (50) has There is the cross section bigger than the connecting pipe (48), the medium conveyed flows out to the pump chamber by the outflow opening (54) (14) in.
11. multi-stage roots according to claim 9 or 10 pump, it is characterised in that the outflow opening (54) it is described transversal Cross section greatly at least 10%, particularly at least 20% and more preferably at least 30% of the face than the connecting pipe (48).
12. multi-stage roots pump according to claim 11, it is characterised in that preferably, the outflow opening (54) is owned It is rounded that flow enhuancement mode is all pressed at edge.
13. the multi-stage roots according to any one of claim 9 to 12 pump, it is characterised in that see cloth in the flowing direction Set the rear chamber (52) in the downstream of the delivery chamber (50).
14. multi-stage roots pump according to claim 13, it is characterised in that the rear chamber (54) is lived relative to the rotation (10) are filled in radially to arrange.
15. multi-stage roots described in 3 or 14 pump according to claim 1, it is characterised in that the rear chamber (54) is the pump chamber (14) a part, the rotary-piston (10) do not protrude into the part simultaneously.
16. being pumped according to claim 1 to multi-stage roots described in any one of 15, it is characterised in that the pump case (16, It 18) include at least one inlet cover (24), the inlet cover (24) constitutes the side wall for flowing into room (40).
17. multi-stage roots pump according to claim 16, it is characterised in that the inlet cover (24) constitutes the cup (38) side wall.
18. being pumped according to claim 1 to multi-stage roots described in any one of 17, it is characterised in that the pump case (16, It 18) include at least one outlet cap (22), the outlet cap (22) constitutes the side wall of the downstream chamber (50).
19. multi-stage roots pump according to claim 18, it is characterised in that the outlet cap (22) constitutes the rear chamber (52) side wall.
CN201880006099.2A 2017-02-17 2018-01-24 Multi-stage roots pump Pending CN110168227A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202017001029.1 2017-02-17
DE202017001029.1U DE202017001029U1 (en) 2017-02-17 2017-02-17 Multi-stage Roots pump
PCT/EP2018/051641 WO2018149598A1 (en) 2017-02-17 2018-01-24 Multi-stage rotary lobe pump

Publications (1)

Publication Number Publication Date
CN110168227A true CN110168227A (en) 2019-08-23

Family

ID=61054390

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880006099.2A Pending CN110168227A (en) 2017-02-17 2018-01-24 Multi-stage roots pump

Country Status (8)

Country Link
US (1) US11255328B2 (en)
EP (1) EP3583319B1 (en)
JP (1) JP2020507704A (en)
KR (1) KR102490780B1 (en)
CN (1) CN110168227A (en)
CA (1) CA3053679A1 (en)
DE (1) DE202017001029U1 (en)
WO (1) WO2018149598A1 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2088957A (en) * 1980-12-05 1982-06-16 Boc Ltd Rotary positive-displacement Fluid-machines
GB2137696A (en) * 1983-04-02 1984-10-10 Leybold Heraeus Gmbh & Co Kg Rotary vacuum pump
JPS6319090U (en) * 1986-07-23 1988-02-08
EP1006281A1 (en) * 1998-12-04 2000-06-07 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Multi-stage roots pump
EP1479913A2 (en) * 2003-05-19 2004-11-24 Kabushiki Kaisha Toyota Jidoshokki Roots pump
CN101382137A (en) * 2007-09-07 2009-03-11 中国科学院沈阳科学仪器研制中心有限公司 Multi-stage roots dry vacuum pump discharging directly into atmosphere
CN101545487A (en) * 2008-03-24 2009-09-30 阿耐思特岩田株式会社 Multi-stage rotor pump and manufacturing process thereof
CN201396281Y (en) * 2009-03-19 2010-02-03 孙成忠 Multistage three-blade Roots vacuum pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3198120A (en) * 1962-10-29 1965-08-03 Waukesha Foundry Co Multiple positive displacement pump
JPS6188764A (en) 1984-10-08 1986-05-07 Hitachi Ltd Thyristor type ac power controller
EP0738833B1 (en) 1995-04-19 2000-09-20 Ebara Corporation Multistage positive-displacement vacuum pump
JP2000205148A (en) * 1999-01-11 2000-07-25 Toyota Autom Loom Works Ltd Multistage route pump and manufacture of rotor housing of multistage route pump
TWI237093B (en) 2003-10-23 2005-08-01 Ind Tech Res Inst Multi-staged vacuum pump
JP2005155540A (en) * 2003-11-27 2005-06-16 Aisin Seiki Co Ltd Multistage dry-sealed vacuum pump
GB0515905D0 (en) 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
JP5370298B2 (en) * 2010-07-14 2013-12-18 株式会社豊田自動織機 Roots fluid machinery
DE202011104491U1 (en) 2011-08-17 2012-11-20 Oerlikon Leybold Vacuum Gmbh Roots
FR3001263B1 (en) * 2013-01-18 2015-02-20 Adixen Vacuum Products DRY TYPE MULTI-STAGE VACUUM PUMP
DE112015004060T5 (en) * 2014-09-04 2017-07-06 Scoprega S.P.A. Volumetric compressor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2088957A (en) * 1980-12-05 1982-06-16 Boc Ltd Rotary positive-displacement Fluid-machines
GB2137696A (en) * 1983-04-02 1984-10-10 Leybold Heraeus Gmbh & Co Kg Rotary vacuum pump
JPS6319090U (en) * 1986-07-23 1988-02-08
EP1006281A1 (en) * 1998-12-04 2000-06-07 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Multi-stage roots pump
EP1479913A2 (en) * 2003-05-19 2004-11-24 Kabushiki Kaisha Toyota Jidoshokki Roots pump
CN101382137A (en) * 2007-09-07 2009-03-11 中国科学院沈阳科学仪器研制中心有限公司 Multi-stage roots dry vacuum pump discharging directly into atmosphere
CN101545487A (en) * 2008-03-24 2009-09-30 阿耐思特岩田株式会社 Multi-stage rotor pump and manufacturing process thereof
CN201396281Y (en) * 2009-03-19 2010-02-03 孙成忠 Multistage three-blade Roots vacuum pump

Also Published As

Publication number Publication date
EP3583319B1 (en) 2024-05-15
KR102490780B1 (en) 2023-01-19
EP3583319A1 (en) 2019-12-25
KR20190112002A (en) 2019-10-02
CA3053679A1 (en) 2018-08-23
JP2020507704A (en) 2020-03-12
US20190376515A1 (en) 2019-12-12
WO2018149598A1 (en) 2018-08-23
US11255328B2 (en) 2022-02-22
DE202017001029U1 (en) 2018-05-18

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Application publication date: 20190823