EP3555475B1 - Système de pompe à vide et son procédé de fonctionnement - Google Patents

Système de pompe à vide et son procédé de fonctionnement Download PDF

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Publication number
EP3555475B1
EP3555475B1 EP17803941.8A EP17803941A EP3555475B1 EP 3555475 B1 EP3555475 B1 EP 3555475B1 EP 17803941 A EP17803941 A EP 17803941A EP 3555475 B1 EP3555475 B1 EP 3555475B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pump system
auxiliary
sealing gas
control variable
Prior art date
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Application number
EP17803941.8A
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German (de)
English (en)
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EP3555475A1 (fr
Inventor
Max PELIKAN
Daniel Reinhard
Raffaello GHISLOTTI
Dirk Schiller
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Leybold GmbH
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Leybold GmbH
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Publication of EP3555475A1 publication Critical patent/EP3555475A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F04C23/006—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps

Definitions

  • the invention relates to a vacuum pump system and a method for operating a vacuum pump system.
  • a vacuum pump system has, for example, at least one main vacuum pump and at least one auxiliary pump.
  • the main vacuum pump is, for example, a dry-compressing vacuum pump such as a screw vacuum pump.
  • An auxiliary pump is connected to an outlet of the main vacuum pump for assistance.
  • Diaphragm pumps or ejector pumps are often used as auxiliary pumps.
  • the delivery volume of the auxiliary pump is significantly less than the delivery volume of the main vacuum pump.
  • the delivery volume of the auxiliary vacuum pump is less than 1/50 of the main vacuum pump.
  • US 2012/0219443 there is known a vacuum pumping system having a main pump and an ejector connected to the outlet of the main pump.
  • the ejector pump is only switched on if the pressure at the outlet of the main vacuum pump is in a predefined pressure range. In this way, the energy consumption of the ejector pump and also the consumption of propellant gas can be reduced.
  • the ejector pump is switched on and off with the in US 2012/0219443 described vacuum pump system with the help of an electronic control device. This switches the ejector pump depending on the pressure measured at the outlet of the main vacuum pump and depending on the power consumption of the main vacuum pump.
  • This in US 2012/0219443 The vacuum pump system described therefore has the disadvantage that a complex electronic control and sensors must be provided. In particular, these are cost-intensive sensors for measuring absolute pressure. This reduces the operational safety, but increases the manufacturing costs.
  • sealing gas is often fed to the pump in vacuum pump systems. Sealing gas is used in particular to protect shaft seals and oil chambers from dust and other particles.
  • the use of sealing gas has the disadvantage that an amount of gas penetrating into the vacuum pump must also be conveyed by the vacuum pump system (ejector). This causes an additional energy requirement.
  • a vacuum pump with the features defined in the preamble of claim 1 is from EP 0 974 756 known.
  • the object of the invention is to create a vacuum pump system and a method for operating a vacuum pump system in which the energy requirement can be reduced even when using sealing gas.
  • the vacuum pump system has a main vacuum pump which can be connected to a chamber to be evacuated.
  • the main vacuum pump is in particular a dry-compressing vacuum pump such as a screw pump.
  • An auxiliary pump which in a preferred embodiment is an ejector pump, is connected to an outlet of the main vacuum pump.
  • the vacuum pump system has a sealing gas supply device and a control device connected to the sealing gas supply device.
  • the control device With the control device, it is possible to switch the sealing gas supply device on and off. This switching off and on of the sealing gas supply device takes place as a function of a predetermined control variable.
  • the amount of sealing gas may exceed the amount of gas that the ejector can deliver, so it is imperative that the sealing gas be switched off in order to evacuate the outlet.
  • control device can be connected to the auxiliary vacuum pump so that the auxiliary vacuum pump can be switched on and off. This also takes place as a function of a control variable.
  • control variables used when switching the sealing gas supply device or the auxiliary vacuum pump on and off can be different or the same control variable.
  • the preferred control variables described below are used in a preferred embodiment both to control the auxiliary vacuum pump and to control the sealing gas supply device, Any combinations of the individual control variables are also possible, so that, for example, the sealing gas supply device is controlled with the help of a different control variable than the control of the auxiliary vacuum pump.
  • the auxiliary vacuum pump such as the ejector pump, is preferably switched on only when the main pump mode has been completed and the vacuum pump system goes into standby mode (ultimate pressure mode).
  • the sealing gas supply is switched off in standby mode.
  • the auxiliary vacuum pump and / or the sealing gas supply device are therefore preferably switched on as a function of a control variable which defines that the system now goes into standby mode or is shortly before or shortly after standby mode.
  • a pressure value in the chamber to be evacuated and / or at the inlet of the main vacuum pump and / or at the outlet of the main vacuum pump can be determined as a control variable.
  • the auxiliary vacuum pump is switched on.
  • the limit values can differ depending on the arrangement of the pressure sensor in relation to the chamber, the pump inlet or the pump outlet. These values can also be combined with one another so that the auxiliary vacuum pump is only switched on, for example, when the values fall below two limit values at the same time.
  • a check valve is provided at the outlet of the main vacuum pump.
  • This check valve is preferably connected to the control device.
  • the position of the check valve can be used as a control variable.
  • the position of the check valve can be determined by a sensor and transmitted to the control device. It is preferred that when the check valve is closed, the barrier gas supply is also closed.
  • the auxiliary vacuum pump is switched on at the same time. In a preferred embodiment, when the check valve is open, the sealing gas is switched on and the auxiliary vacuum pump is preferably switched off at the same time.
  • a predetermined control variable is a parameter of an electric motor driving the main vacuum pump.
  • the power consumption of the electric motor or a signal from a frequency converter is particularly suitable for this. As soon as the power consumption falls below a predetermined limit value, the auxiliary vacuum pump is switched on and / or the sealing gas supply is switched off.
  • the predetermined control variable is preferably the fact that the pressure at the main vacuum pump falls below a value.
  • This pressure value can be determined, for example, with a pressure sensor.
  • the corresponding pressure limit is preferably 1 mbar.
  • a pressure value at the outlet of the main vacuum pump can be used as an additional or alternative control variable.
  • This pressure value can also be determined by a pressure sensor, the pressure limit preferably being 1020 mbar.
  • Another possibly additional control variable can be a parameter of an electric motor that drives the main vacuum pump.
  • it can be the current consumption.
  • An increase in the power consumption at the final pressure by preferably 10% can preferably serve as the predetermined control variable.
  • the control device preferably has an electrically switchable valve or is connected to it. This is arranged in the direction of flow, preferably upstream of the auxiliary vacuum pump. A corresponding switching of the valve thus takes place when the auxiliary vacuum pump is switched on or off.
  • this electrical valve can be integrated into the vacuum pump.
  • An electrically switchable valve can also be provided at a sealing gas inlet.
  • This electrically switchable valve can in turn be part of the control device or connected to it, so that it is possible in a simple manner to switch the sealing gas supply off and on.
  • two correspondingly switchable valves can be provided for switching the auxiliary pump on and off and for switching the sealing gas supply off and on.
  • a rocker switch can be provided.
  • the pressure rocker is connected to corresponding pressure lines so that the pressure rocker is switched as soon as one or more of the pressures defined above fall below or exceed a predetermined limit value.
  • Appropriate switching of the additional pressure rocker results in a release and thus a supply of propellant gas to the ejector pump.
  • the propellant gas supply to the ejector pump can also be switched off accordingly. It is also possible to switch the barrier gas supply on and off with a mechanical pressure rocker.
  • the limit values are selected such that the auxiliary vacuum pump, which is in particular an ejector pump, is not operated during the main pumping mode.
  • the energy requirement of the auxiliary vacuum pump is in poor proportion to the amount of gas conveyed, so that it is advantageous to reduce the energy requirement of the overall system if the auxiliary vacuum pump remains switched off during the main pumping mode.
  • the limit values are preferably selected such that no sealing gas is supplied in an auxiliary pump mode. This can also result in energy savings.
  • the combination of switching off the sealing gas supply during the auxiliary pumping mode and switching off the auxiliary pump during the main pumping mode results in considerable energy savings.
  • the invention also relates to a method for operating a vacuum pump system.
  • This is in particular a vacuum pump system as described above, the method preferably being developed as described above with reference to the vacuum pump system.
  • the method according to the invention for operating a vacuum pump system has a control device which is connected to the sealing gas supply device and is used to switch the sealing gas supply device on and off as a function of a predetermined control variable. It is also preferred that not only the sealing gas supply device is switched off and on, but that the auxiliary pump is also switched off and on as a function of a control variable. This can be the same or a different control variable, it being preferred that the same control variable is involved when the sealing gas supply device is switched on and off and the auxiliary vacuum pump is switched on and off.
  • the sealing gas supply is preferably switched off in standby mode.
  • the method according to the invention is preferably developed as described above with reference to the vacuum pump system according to the invention, in particular in a preferred development.
  • the vacuum pump system has a main vacuum pump 10.
  • the outlet of the main vacuum pump 10 is connected to an auxiliary vacuum pump 12, which is in particular an ejector pump.
  • the inlet of the main vacuum pump 10 is connected to a chamber 14 to be evacuated.
  • a pump 16 is connected to the main vacuum pump 10. This is connected via a controllable valve 18 to a container 24 in which sealing gas is provided. With the aid of the pump 16, sealing gas is thus supplied to the main vacuum pump 10. If the sealing gas is under pressure, the pump 16 can also be omitted.
  • a control device 20 is connected to a pressure sensor 22 which is arranged between the chamber 14 to be evacuated and the main vacuum pump 10.
  • the pressure measured by the pressure sensor 22 serves as a control variable for the regulating device 20.
  • the electrical valve 18 is controlled as a function of the pressure via which the main vacuum pump 10 is supplied with sealing gas.
  • the ejector pump 12 is regulated accordingly.
  • an electric valve can also be regulated that regulates the propellant gas supply to the ejector pump 12.

Claims (16)

  1. Système de pompe à vide avec
    une pompe à vide principale (10) adaptée pour être reliée à une chambre à évacuer (14),
    une pompe auxiliaire (12) reliée à une sortie de la pompe à vide principale (10),
    un dispositif d'admission de gaz d'étanchéité (24) et
    un dispositif de régulation (20) relié au dispositif d'admission de gaz d'étanchéité (24) et destiné à activer et désactiver le dispositif d'admission de gaz d'étanchéité (24) en fonction d'une valeur de commande prédéterminée,
    caractérisé en ce que
    c'est une donnée caractéristique d'un moteur électrique entraînant la pompe à vide principale (10), notamment la consommation électrique, qui est la valeur de commande pour le dispositif d'admission de gaz d'étanchéité (24) et/ou la pompe à vide auxiliaire (12).
  2. Système de pompe à vide selon la revendication 1, caractérisé en ce que le dispositif de régulation (20) est relié à la pompe à vide auxiliaire (12) et destiné à activer et désactiver la pompe à vide auxiliaire (12) en fonction d'une autre ou de la même valeur de commande.
  3. Système de pompe à vide selon la revendication 1 ou 2, caractérisé en ce que la valeur de commande prédéterminée pour le dispositif d'admission de gaz d'étanchéité (24) et/ou la pompe à vide auxiliaire (12) est le fait d'atteindre ou d'arrêter un mode veille.
  4. Système de pompe à vide selon l'une des revendications 1 à 3, caractérisé en ce que la valeur de commande prédéterminée pour le dispositif d'admission de gaz d'étanchéité (24) et/ou la pompe à vide auxiliaire (12) est le fait de passer en-dessous d'une valeur de pression à l'entrée de la pompe à vide principale (10), qui est déterminée en particulier à l'aide d'un capteur de pression, la limite de pression étant de préférence 1 mbar.
  5. Système de pompe à vide selon l'une des revendications 1 à 4, caractérisé en ce que la valeur de commande prédéterminée pour le dispositif d'admission de gaz d'étanchéité (24) et/ou la pompe à vide auxiliaire (12) est le fait de passer en-dessous d'une valeur de pression à la sortie de la pompe à vide principale (10), qui est déterminée en particulier à l'aide d'un capteur de pression, la limite de pression étant de préférence 1020 mbar.
  6. Système de pompe à vide selon l'une des revendications 1 à 5, caractérisé en ce que le dispositif de régulation (20) comprend une valve commutable électriquement ou est relié à celle-ci, valve qui est montée de préférence en amont, dans le sens du flux, de la pompe auxiliaire (24).
  7. Système de pompe à vide selon l'une des revendications 1 à 6, caractérisé en ce que le dispositif de régulation (20) comprend une valve (18) commutable électriquement ou est relié à celle-ci, valve qui est disposée dans un conduit d'arrivée pour le gaz d'étanchéité.
  8. Système de pompe à vide selon l'une des revendication 1 à 7, caractérisé en ce que la position d'une valve anti-retour prévue à une sortie de la pompe à vide principale (10), est utilisée comme valeur de commande.
  9. Procédé de fonctionnement d'un système de pompe à vide, notamment selon l'une des revendications 1 à 8, selon lequel le dispositif d'admission de gaz d'étanchéité (24) est désactivé et activé en fonction d'une valeur de commande et selon lequel une donnée caractéristique d'un moteur électrique entraînant la pompe à vide principale, notamment la consommation électrique, est utilisée comme valeur de commande.
  10. Procédé de fonctionnement d'un système de pompe à vide selon la revendication 9, selon lequel, en plus ou à la place du dispositif d'admission de gaz d'étanchéité (24), la pompe à vide auxiliaire (12) est désactivée ou activée, la désactivation et l'activation se produisant de préférence en fonction d'une autre ou de la même valeur de commande.
  11. Procédé de fonctionnement d'un système de pompe à vide selon la revendication 9 ou 10, selon lequel le fait d'atteindre ou d'arrêter un mode veille est utilisé comme valeur de commande.
  12. Procédé de fonctionnement d'un système de pompe à vide selon l'une des revendications 9 à 11, selon lequel le fait de passer en-dessous d'une valeur de pression à l'admission de la pompe à vide principale est utilisé comme valeur de commande, la limite de pression étant de préférence d'1 mbar.
  13. Procédé de fonctionnement d'un système de pompe à vide selon l'une des revendications 9 à 12, selon lequel le fait de passer en-dessous d'une valeur de pression à la sortie de la pompe à vide principale est utilisé comme valeur de commande, la limite de pression étant de préférence de 1020 mbar.
  14. Procédé de fonctionnement d'un système de pompe à vide selon l'une des revendications 9 à 13, selon lequel c'est une valve montée en amont, dans le sens du flux, de la pompe auxiliaire, qui est réglée à l'aide du dispositif de régulation.
  15. Procédé de fonctionnement d'un système de pompe à vide selon l'une des revendications 9 à 14, selon lequel c'est une valve disposée dans le conduit d'arrivée pour le gaz d'étanchéité, qui est réglée à l'aide du dispositif de régulation.
  16. Procédé de fonctionnement d'un système de pompe à vide selon l'une des revendications 9 à 15, selon lequel c'est la position d'une valve anti-retour prévue à la sortie de la pompe à vide principale, qui est utilisée comme valeur de commande.
EP17803941.8A 2016-12-15 2017-11-23 Système de pompe à vide et son procédé de fonctionnement Active EP3555475B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202016007609.5U DE202016007609U1 (de) 2016-12-15 2016-12-15 Vakuumpumpsystem
PCT/EP2017/080191 WO2018108479A1 (fr) 2016-12-15 2017-11-23 Système de pompe à vide et son procédé de fonctionnement

Publications (2)

Publication Number Publication Date
EP3555475A1 EP3555475A1 (fr) 2019-10-23
EP3555475B1 true EP3555475B1 (fr) 2020-09-23

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Country Status (7)

Country Link
US (2) US11286934B2 (fr)
EP (1) EP3555475B1 (fr)
JP (1) JP2020502410A (fr)
KR (1) KR20190097019A (fr)
CN (1) CN110036204A (fr)
DE (1) DE202016007609U1 (fr)
WO (1) WO2018108479A1 (fr)

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Publication number Priority date Publication date Assignee Title
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem

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CN110036204A (zh) 2019-07-19
US20190345938A1 (en) 2019-11-14
KR20190097019A (ko) 2019-08-20
US20230033429A1 (en) 2023-02-02
JP2020502410A (ja) 2020-01-23
DE202016007609U1 (de) 2018-03-26
US11286934B2 (en) 2022-03-29
WO2018108479A1 (fr) 2018-06-21
EP3555475A1 (fr) 2019-10-23

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