EP3555475B1 - Vacuum pump system and method for operating a vacuum pump system - Google Patents

Vacuum pump system and method for operating a vacuum pump system Download PDF

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Publication number
EP3555475B1
EP3555475B1 EP17803941.8A EP17803941A EP3555475B1 EP 3555475 B1 EP3555475 B1 EP 3555475B1 EP 17803941 A EP17803941 A EP 17803941A EP 3555475 B1 EP3555475 B1 EP 3555475B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pump system
auxiliary
sealing gas
control variable
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EP17803941.8A
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German (de)
French (fr)
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EP3555475A1 (en
Inventor
Max PELIKAN
Daniel Reinhard
Raffaello GHISLOTTI
Dirk Schiller
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Leybold GmbH
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Leybold GmbH
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Publication of EP3555475A1 publication Critical patent/EP3555475A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F04C23/006—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps

Definitions

  • the invention relates to a vacuum pump system and a method for operating a vacuum pump system.
  • a vacuum pump system has, for example, at least one main vacuum pump and at least one auxiliary pump.
  • the main vacuum pump is, for example, a dry-compressing vacuum pump such as a screw vacuum pump.
  • An auxiliary pump is connected to an outlet of the main vacuum pump for assistance.
  • Diaphragm pumps or ejector pumps are often used as auxiliary pumps.
  • the delivery volume of the auxiliary pump is significantly less than the delivery volume of the main vacuum pump.
  • the delivery volume of the auxiliary vacuum pump is less than 1/50 of the main vacuum pump.
  • US 2012/0219443 there is known a vacuum pumping system having a main pump and an ejector connected to the outlet of the main pump.
  • the ejector pump is only switched on if the pressure at the outlet of the main vacuum pump is in a predefined pressure range. In this way, the energy consumption of the ejector pump and also the consumption of propellant gas can be reduced.
  • the ejector pump is switched on and off with the in US 2012/0219443 described vacuum pump system with the help of an electronic control device. This switches the ejector pump depending on the pressure measured at the outlet of the main vacuum pump and depending on the power consumption of the main vacuum pump.
  • This in US 2012/0219443 The vacuum pump system described therefore has the disadvantage that a complex electronic control and sensors must be provided. In particular, these are cost-intensive sensors for measuring absolute pressure. This reduces the operational safety, but increases the manufacturing costs.
  • sealing gas is often fed to the pump in vacuum pump systems. Sealing gas is used in particular to protect shaft seals and oil chambers from dust and other particles.
  • the use of sealing gas has the disadvantage that an amount of gas penetrating into the vacuum pump must also be conveyed by the vacuum pump system (ejector). This causes an additional energy requirement.
  • a vacuum pump with the features defined in the preamble of claim 1 is from EP 0 974 756 known.
  • the object of the invention is to create a vacuum pump system and a method for operating a vacuum pump system in which the energy requirement can be reduced even when using sealing gas.
  • the vacuum pump system has a main vacuum pump which can be connected to a chamber to be evacuated.
  • the main vacuum pump is in particular a dry-compressing vacuum pump such as a screw pump.
  • An auxiliary pump which in a preferred embodiment is an ejector pump, is connected to an outlet of the main vacuum pump.
  • the vacuum pump system has a sealing gas supply device and a control device connected to the sealing gas supply device.
  • the control device With the control device, it is possible to switch the sealing gas supply device on and off. This switching off and on of the sealing gas supply device takes place as a function of a predetermined control variable.
  • the amount of sealing gas may exceed the amount of gas that the ejector can deliver, so it is imperative that the sealing gas be switched off in order to evacuate the outlet.
  • control device can be connected to the auxiliary vacuum pump so that the auxiliary vacuum pump can be switched on and off. This also takes place as a function of a control variable.
  • control variables used when switching the sealing gas supply device or the auxiliary vacuum pump on and off can be different or the same control variable.
  • the preferred control variables described below are used in a preferred embodiment both to control the auxiliary vacuum pump and to control the sealing gas supply device, Any combinations of the individual control variables are also possible, so that, for example, the sealing gas supply device is controlled with the help of a different control variable than the control of the auxiliary vacuum pump.
  • the auxiliary vacuum pump such as the ejector pump, is preferably switched on only when the main pump mode has been completed and the vacuum pump system goes into standby mode (ultimate pressure mode).
  • the sealing gas supply is switched off in standby mode.
  • the auxiliary vacuum pump and / or the sealing gas supply device are therefore preferably switched on as a function of a control variable which defines that the system now goes into standby mode or is shortly before or shortly after standby mode.
  • a pressure value in the chamber to be evacuated and / or at the inlet of the main vacuum pump and / or at the outlet of the main vacuum pump can be determined as a control variable.
  • the auxiliary vacuum pump is switched on.
  • the limit values can differ depending on the arrangement of the pressure sensor in relation to the chamber, the pump inlet or the pump outlet. These values can also be combined with one another so that the auxiliary vacuum pump is only switched on, for example, when the values fall below two limit values at the same time.
  • a check valve is provided at the outlet of the main vacuum pump.
  • This check valve is preferably connected to the control device.
  • the position of the check valve can be used as a control variable.
  • the position of the check valve can be determined by a sensor and transmitted to the control device. It is preferred that when the check valve is closed, the barrier gas supply is also closed.
  • the auxiliary vacuum pump is switched on at the same time. In a preferred embodiment, when the check valve is open, the sealing gas is switched on and the auxiliary vacuum pump is preferably switched off at the same time.
  • a predetermined control variable is a parameter of an electric motor driving the main vacuum pump.
  • the power consumption of the electric motor or a signal from a frequency converter is particularly suitable for this. As soon as the power consumption falls below a predetermined limit value, the auxiliary vacuum pump is switched on and / or the sealing gas supply is switched off.
  • the predetermined control variable is preferably the fact that the pressure at the main vacuum pump falls below a value.
  • This pressure value can be determined, for example, with a pressure sensor.
  • the corresponding pressure limit is preferably 1 mbar.
  • a pressure value at the outlet of the main vacuum pump can be used as an additional or alternative control variable.
  • This pressure value can also be determined by a pressure sensor, the pressure limit preferably being 1020 mbar.
  • Another possibly additional control variable can be a parameter of an electric motor that drives the main vacuum pump.
  • it can be the current consumption.
  • An increase in the power consumption at the final pressure by preferably 10% can preferably serve as the predetermined control variable.
  • the control device preferably has an electrically switchable valve or is connected to it. This is arranged in the direction of flow, preferably upstream of the auxiliary vacuum pump. A corresponding switching of the valve thus takes place when the auxiliary vacuum pump is switched on or off.
  • this electrical valve can be integrated into the vacuum pump.
  • An electrically switchable valve can also be provided at a sealing gas inlet.
  • This electrically switchable valve can in turn be part of the control device or connected to it, so that it is possible in a simple manner to switch the sealing gas supply off and on.
  • two correspondingly switchable valves can be provided for switching the auxiliary pump on and off and for switching the sealing gas supply off and on.
  • a rocker switch can be provided.
  • the pressure rocker is connected to corresponding pressure lines so that the pressure rocker is switched as soon as one or more of the pressures defined above fall below or exceed a predetermined limit value.
  • Appropriate switching of the additional pressure rocker results in a release and thus a supply of propellant gas to the ejector pump.
  • the propellant gas supply to the ejector pump can also be switched off accordingly. It is also possible to switch the barrier gas supply on and off with a mechanical pressure rocker.
  • the limit values are selected such that the auxiliary vacuum pump, which is in particular an ejector pump, is not operated during the main pumping mode.
  • the energy requirement of the auxiliary vacuum pump is in poor proportion to the amount of gas conveyed, so that it is advantageous to reduce the energy requirement of the overall system if the auxiliary vacuum pump remains switched off during the main pumping mode.
  • the limit values are preferably selected such that no sealing gas is supplied in an auxiliary pump mode. This can also result in energy savings.
  • the combination of switching off the sealing gas supply during the auxiliary pumping mode and switching off the auxiliary pump during the main pumping mode results in considerable energy savings.
  • the invention also relates to a method for operating a vacuum pump system.
  • This is in particular a vacuum pump system as described above, the method preferably being developed as described above with reference to the vacuum pump system.
  • the method according to the invention for operating a vacuum pump system has a control device which is connected to the sealing gas supply device and is used to switch the sealing gas supply device on and off as a function of a predetermined control variable. It is also preferred that not only the sealing gas supply device is switched off and on, but that the auxiliary pump is also switched off and on as a function of a control variable. This can be the same or a different control variable, it being preferred that the same control variable is involved when the sealing gas supply device is switched on and off and the auxiliary vacuum pump is switched on and off.
  • the sealing gas supply is preferably switched off in standby mode.
  • the method according to the invention is preferably developed as described above with reference to the vacuum pump system according to the invention, in particular in a preferred development.
  • the vacuum pump system has a main vacuum pump 10.
  • the outlet of the main vacuum pump 10 is connected to an auxiliary vacuum pump 12, which is in particular an ejector pump.
  • the inlet of the main vacuum pump 10 is connected to a chamber 14 to be evacuated.
  • a pump 16 is connected to the main vacuum pump 10. This is connected via a controllable valve 18 to a container 24 in which sealing gas is provided. With the aid of the pump 16, sealing gas is thus supplied to the main vacuum pump 10. If the sealing gas is under pressure, the pump 16 can also be omitted.
  • a control device 20 is connected to a pressure sensor 22 which is arranged between the chamber 14 to be evacuated and the main vacuum pump 10.
  • the pressure measured by the pressure sensor 22 serves as a control variable for the regulating device 20.
  • the electrical valve 18 is controlled as a function of the pressure via which the main vacuum pump 10 is supplied with sealing gas.
  • the ejector pump 12 is regulated accordingly.
  • an electric valve can also be regulated that regulates the propellant gas supply to the ejector pump 12.

Description

Die Erfindung betrifft ein Vakuumpumpsystem sowie ein Verfahren zum Betreiben eines Vakuumpumpsystems.The invention relates to a vacuum pump system and a method for operating a vacuum pump system.

Ein Vakuumpumpsystem weist beispielsweise mindestens eine Hauptvakuumpumpe sowie mindestens eine Hilfspumpe auf. Bei der Hauptvakuumpumpe handelt es sich beispielsweise um eine trockenverdichtende Vakuumpumpe wie eine Schraubenvakuumpumpe. Mit einem Auslass der Hauptvakuumpumpe ist eine Hilfspumpe zur Unterstützung verbunden. Als Hilfspumpen werden häufig Membranpumpen oder Ejektorpumpen eingesetzt. Bei derartigen Vakuumpumpensystemen ist das Fördervolumen der Hilfspumpe deutlich geringer als das Fördervolumen der Hauptvakuumpumpe. Insbesondere ist das Fördervolumen der Hilfsvakuumpumpe kleiner 1/50 der Hauptvakuumpumpe. Durch das Verwenden derartiger Hilfspumpen können niedrigere Enddrücke erzielt werden. Durch das Verwenden derartiger Hilfspumpen kann der Energieverbrauch des gesamten Systems reduziert werden, wobei die Hilfspumpe selbst den Nachteil aufweist, dass hierdurch ein zusätzlicher Energiebedarf erforderlich ist. Dies ist insbesondere dann der Fall, wenn die Hilfspumpe wie die Ejektorpumpe ununterbrochen betrieben wird. Dies hat ferner einen hohen Verbrauch an Treibgas für die Ejektorpumpe, bei dem es sich beispielsweise um Druckluft handelt zur Folge.A vacuum pump system has, for example, at least one main vacuum pump and at least one auxiliary pump. The main vacuum pump is, for example, a dry-compressing vacuum pump such as a screw vacuum pump. An auxiliary pump is connected to an outlet of the main vacuum pump for assistance. Diaphragm pumps or ejector pumps are often used as auxiliary pumps. In such vacuum pump systems, the delivery volume of the auxiliary pump is significantly less than the delivery volume of the main vacuum pump. In particular, the delivery volume of the auxiliary vacuum pump is less than 1/50 of the main vacuum pump. By using such auxiliary pumps, lower ultimate pressures can be achieved. By using such auxiliary pumps, the energy consumption of the entire system can be reduced, the auxiliary pump itself having the disadvantage that this requires an additional energy requirement. This is particularly the case when the auxiliary pump, like the ejector pump, is operated continuously. This also results in a high consumption of propellant gas for the ejector pump, which is, for example, compressed air.

Aus US 2012/0219443 ist ein Vakuumpumpsystem mit einer Hauptpumpe und einer mit dem Auslass der Hauptpumpe verbundenen Ejektorpumpe bekannt. Die Ejektorpumpe wird bei diesem System nur zugeschaltet, wenn am Auslass der Hauptvakuumpumpe Druck in einem vordefinierten Druckbereich herrscht. Hierdurch kann die Energieaufnahme der Ejektorpumpe sowie auch der Verbrauch an Treibgas verringert werden. Das Ein- und Ausschalten der Ejektorpumpe erfolgt bei dem in US 2012/0219443 beschriebenen Vakuumpumpsystem mit Hilfe einer elektronischen Regeleinrichtung. Diese schaltet die Ejektorpumpe in Abhängigkeit des am Auslass der Hauptvakuumpumpe gemessenen Drucks sowie in Abhängigkeit der Leistungsaufnahme der Hauptvakuumpumpe. Das in US 2012/0219443 beschriebene Vakuumpumpsystem weist daher den Nachteil auf, dass eine aufwendige elektronische Steuerung sowie Sensoren vorgesehen sein müssen. Insbesondere handelt es sich hierbei um kostenintensive Sensoren zur Absolutdruckmessung. Dies verringert die Betriebssicherheit, erhöht aber die Herstellungskosten.Out US 2012/0219443 there is known a vacuum pumping system having a main pump and an ejector connected to the outlet of the main pump. In this system, the ejector pump is only switched on if the pressure at the outlet of the main vacuum pump is in a predefined pressure range. In this way, the energy consumption of the ejector pump and also the consumption of propellant gas can be reduced. The ejector pump is switched on and off with the in US 2012/0219443 described vacuum pump system with the help of an electronic control device. This switches the ejector pump depending on the pressure measured at the outlet of the main vacuum pump and depending on the power consumption of the main vacuum pump. This in US 2012/0219443 The vacuum pump system described therefore has the disadvantage that a complex electronic control and sensors must be provided. In particular, these are cost-intensive sensors for measuring absolute pressure. This reduces the operational safety, but increases the manufacturing costs.

Ferner ist aus DE 20 2014 007 963 ein Vakuumpumpsystem bekannt, bei dem ebenfalls eine Regeleinrichtung zum Zuschalten der Hilfspumpe insbesondere eine Ejektorpumpe vorgesehen ist, wobei diese Regeleinrichtung ausschließlich mechanische Bauteile aufweist. Hierdurch kann bei hoher Betriebssicherheit auch unter Verwendung ausschließlich mechanischer Bauteile der Einsatz kostenintensiver Sensoren vermieden werden, so dass die Herstellungskosten reduziert sind.It is also off DE 20 2014 007 963 a vacuum pump system is known in which a control device is also provided for switching on the auxiliary pump, in particular an ejector pump, this control device having exclusively mechanical components. As a result, the use of cost-intensive sensors can be avoided with a high level of operational reliability even using exclusively mechanical components, so that the production costs are reduced.

Ferner wird bei Vakuumpumpsystemen häufig Sperrgas der Pumpe zugeführt. Sperrgas wird insbesondere verwendet, um Wellendichtungen und Ölräume vor Staub und anderen Partikeln zu schützen. Das Verwenden von Sperrgas weist jedoch den Nachteil auf, dass eine in die Vakuumpumpe eindringende Gasmenge zusätzlich von dem Vakuumpumpensystem (Ejektor) gefördert werden muss. Dies bewirkt einen zusätzlichen Energiebedarf.Furthermore, sealing gas is often fed to the pump in vacuum pump systems. Sealing gas is used in particular to protect shaft seals and oil chambers from dust and other particles. However, the use of sealing gas has the disadvantage that an amount of gas penetrating into the vacuum pump must also be conveyed by the vacuum pump system (ejector). This causes an additional energy requirement.

Eine Vakuumpumpe mit den im Oberbegriff des Anspruchs 1 definierten Merkmalen ist aus EP 0 974 756 bekannt.A vacuum pump with the features defined in the preamble of claim 1 is from EP 0 974 756 known.

Aufgabe der Erfindung ist es, ein Vakuumpumpsystem sowie ein Verfahren zum Betreiben eines Vakuumpumpsystems zu schaffen, bei dem auch bei Verwendung von Sperrgas der Energiebedarf gesenkt werden kann.The object of the invention is to create a vacuum pump system and a method for operating a vacuum pump system in which the energy requirement can be reduced even when using sealing gas.

Die Lösung der Aufgabe erfolgt durch die Merkmale des Anspruchs 1 bzw. 9.The object is achieved by the features of claims 1 and 9, respectively.

Das erfindungsgemäße Vakuumpumpsystem weist eine Hauptvakuumpumpe auf, die mit einer zu evakuierenden Kammer verbindbar ist. Bei der Hauptvakuumpumpe handelt es sich insbesondere um eine trockenverdichtende Vakuumpumpe wie eine Schraubenpumpe. Mit einem Auslass der Hauptvakuumpumpe ist eine Hilfspumpe verbunden, bei der es sich in bevorzugter Ausführungsform um eine Ejektorpumpe handelt.The vacuum pump system according to the invention has a main vacuum pump which can be connected to a chamber to be evacuated. The main vacuum pump is in particular a dry-compressing vacuum pump such as a screw pump. An auxiliary pump, which in a preferred embodiment is an ejector pump, is connected to an outlet of the main vacuum pump.

Des Weiteren weist das Vakuumpumpensystem eine Sperrgaszuführeinrichtung sowie eine mit der Sperrgaszuführeinrichtung verbundene Regeleinrichtung auf. Mit der Regeleinrichtung ist es möglich, die Sperrgaszuführeinrichtung ab- und zuzuschalten. Dieses Ab- und Zuschalten der Sperrgaszufuhreinrichtung erfolgt in Abhängigkeit einer vorgegebenen Steuergröße.Furthermore, the vacuum pump system has a sealing gas supply device and a control device connected to the sealing gas supply device. With the control device, it is possible to switch the sealing gas supply device on and off. This switching off and on of the sealing gas supply device takes place as a function of a predetermined control variable.

Die Sperrgasmenge übersteigt ggf. die Gasmenge, welche der Ejektor fördern kann, daher muss zwingend Sperrgas abgeschaltet werden, um den Auslass zu evakuieren.The amount of sealing gas may exceed the amount of gas that the ejector can deliver, so it is imperative that the sealing gas be switched off in order to evacuate the outlet.

Zusätzlich kann die Regeleinrichtung mit der Hilfsvakuumpumpe verbunden sein, so dass die Hilfsvakuumpumpe ab- und zugeschaltet werden kann. Dies erfolgt ebenfalls in Abhängigkeit einer Steuergröße.In addition, the control device can be connected to the auxiliary vacuum pump so that the auxiliary vacuum pump can be switched on and off. This also takes place as a function of a control variable.

Bei den beim Ab- und Zuschalten der Sperrgaszuführeinrichtung bzw. der Hilfsvakuumpumpe genutzten Steuergrößen kann es sich um unterschiedliche oder auch um dieselbe Steuergröße handeln. Die nachfolgend beschriebenen bevorzugten Steuergrößen werden in bevorzugter Ausführungsform sowohl zum Steuern der Hilfsvakuumpumpe als auch zum Steuern der Sperrgaszuführeinrichtung genutzt, wobei auch beliebige Kombinationen der einzelnen Steuergrößen möglich sind, so dass beispielsweise die Steuerung der Sperrgaszuführeinrichtung mit Hilfe einer anderen Steuergröße erfolgt als die Steuerung der Hilfsvakuumpumpe.The control variables used when switching the sealing gas supply device or the auxiliary vacuum pump on and off can be different or the same control variable. The preferred control variables described below are used in a preferred embodiment both to control the auxiliary vacuum pump and to control the sealing gas supply device, Any combinations of the individual control variables are also possible, so that, for example, the sealing gas supply device is controlled with the help of a different control variable than the control of the auxiliary vacuum pump.

Vorzugsweise erfolgt das Zuschalten der Hilfsvakuumpumpe, wie der Ejektorpumpe, vorzugsweise erst dann, wenn der Hauptpumpmodus abgeschlossen ist und das Vakuumpumpsystem in den Standbymodus (Enddruckbetrieb) geht. Zusätzlich oder anstelle dieses Schaltens der Hilfsvakuumpumpe erfolgt in besonders bevorzugter Ausführungsform ein Abschalten der Sperrgaszufuhr im Standbymodus. Das Zuschalten der Hilfsvakuumpumpe und/oder der Sperrgaszuführeinrichtung erfolgt daher vorzugsweise in Abhängigkeit einer Steuergröße, durch die definiert ist, dass das System nunmehr in den Standbymodus geht, oder sich zeitlich kurz vor oder kurz nach dem Standbymodus befindet. Als Steuergröße kann hierbei ein Druckwert in der zu evakuierenden Kammer und/oder am Einlass der Hauptvakuumpumpe und/oder am Auslass der Hauptvakuumpumpe, ermittelt werden. Sobald dieser Druckwert einen vorgegebenen Grenzwert unterschreitet, erfolgt ein Zuschalten der Hilfsvakuumpumpe. Hierbei können sich die Grenzwerte je nach Anordnung des Drucksensors bezogen auf die Kammer, den Pumpeneinlass oder den Pumpenauslass unterscheiden. Auch können diese Werte miteinander kombiniert werden, sodass die Hilfsvakuumpumpe beispielsweise erst bei gleichzeitigem Unterschreiten von zwei Grenzwerten zugeschaltet wird.The auxiliary vacuum pump, such as the ejector pump, is preferably switched on only when the main pump mode has been completed and the vacuum pump system goes into standby mode (ultimate pressure mode). In addition to or instead of this switching of the auxiliary vacuum pump, in a particularly preferred embodiment the sealing gas supply is switched off in standby mode. The auxiliary vacuum pump and / or the sealing gas supply device are therefore preferably switched on as a function of a control variable which defines that the system now goes into standby mode or is shortly before or shortly after standby mode. A pressure value in the chamber to be evacuated and / or at the inlet of the main vacuum pump and / or at the outlet of the main vacuum pump can be determined as a control variable. As soon as this pressure value falls below a predetermined limit value, the auxiliary vacuum pump is switched on. The limit values can differ depending on the arrangement of the pressure sensor in relation to the chamber, the pump inlet or the pump outlet. These values can also be combined with one another so that the auxiliary vacuum pump is only switched on, for example, when the values fall below two limit values at the same time.

Insbesondere ist am Auslass der Hauptvakuumpumpe ein Rückschlagventil vorgesehen. Dieses Rückschlagventil ist vorzugsweise mit der Regeleinrichtung verbunden. Die Stellung des Rückschlagventils kann als Steuergröße genutzt werden. Hierbei kann die Stellung des Rückschlagventils von einem Sensor ermittelt und der Regeleinrichtung übermittelt werden. Bevorzugt ist es, dass wenn das Rückschlagventil geschlossen ist auch die Sperrgaszufuhr geschlossen wird. Gleichzeitig erfolgt in bevorzugter Ausführungsform ein Zuschalten der Hilfsvakuumpumpe. Es erfolgt bei geöffnetem Rückschlagventil in bevorzugter Ausführungsform ein Zuschalten des Sperrgases und vorzugsweise gleichzeitig ein Abschalten der Hilfsvakuumpumpe.In particular, a check valve is provided at the outlet of the main vacuum pump. This check valve is preferably connected to the control device. The position of the check valve can be used as a control variable. Here, the position of the check valve can be determined by a sensor and transmitted to the control device. It is preferred that when the check valve is closed, the barrier gas supply is also closed. In a preferred embodiment, the auxiliary vacuum pump is switched on at the same time. In a preferred embodiment, when the check valve is open, the sealing gas is switched on and the auxiliary vacuum pump is preferably switched off at the same time.

Erfindungsgemäß ist eine vorgegebene Steuergröße eine Kenngröße eines die Hauptvakuumpumpe antreibenden Elektromotors. Hierzu ist besonders die Stromaufnahme des Elektromotors oder ein Signal eines Frequenzumrichters geeignet. Sobald die Stromaufnahme einen vorgegebenen Grenzwert unterschreitet, erfolgt ein Zuschalten der Hilfsvakuumpumpe und/oder ein Abschalten der Sperrgaszufuhr.According to the invention, a predetermined control variable is a parameter of an electric motor driving the main vacuum pump. The power consumption of the electric motor or a signal from a frequency converter is particularly suitable for this. As soon as the power consumption falls below a predetermined limit value, the auxiliary vacuum pump is switched on and / or the sealing gas supply is switched off.

Vorzugsweise handelt es sich bei der vorgegebenen Steuergröße um das Unterschreiten eines Druckwerts an der Hauptvakuumpumpe. Dieser Druckwert kann beispielsweise mit einem Drucksensor ermittelt werden. Die entsprechende Druckgrenze liegt vorzugweise bei 1 mbar.The predetermined control variable is preferably the fact that the pressure at the main vacuum pump falls below a value. This pressure value can be determined, for example, with a pressure sensor. The corresponding pressure limit is preferably 1 mbar.

Als zusätzliche oder alternative Steuergröße kann das Unterschreiten eines Druckwerts am Auslass der Hauptvakuumpumpe genutzt werden. Auch dieser Druckwert kann durch einen Drucksensor ermittelt werden, wobei die Druckgrenze vorzugsweise 1020 mbar beträgt.Falling below a pressure value at the outlet of the main vacuum pump can be used as an additional or alternative control variable. This pressure value can also be determined by a pressure sensor, the pressure limit preferably being 1020 mbar.

Eine weitere gegebenenfalls zusätzliche Steuergröße kann eine Kenngröße eines Elektromotors sein, der die Hauptvakuumpumpe antreibt. Insbesondere kann es sich um die Stromaufnahme handeln. Vorzugsweise kann eine Erhöhung der Stromaufnahme bei Enddruck um vorzugsweise 10 % als vorgegebene Steuergröße dienen.Another possibly additional control variable can be a parameter of an electric motor that drives the main vacuum pump. In particular, it can be the current consumption. An increase in the power consumption at the final pressure by preferably 10% can preferably serve as the predetermined control variable.

Vorzugsweise weist die Regeleinrichtung ein elektrisch schaltbares Ventil auf bzw. ist mit diesem verbunden. Dies ist in Strömungsrichtung, vorzugsweise vor der Hilfsvakuumpumpe, angeordnet. Ein entsprechendes Schalten des Ventils erfolgt somit beim Ein- oder Ausschalten der Hilfsvakuumpumpe. Selbstverständlich kann dieses elektrische Ventil in die Vakuumpumpe integriert sein.The control device preferably has an electrically switchable valve or is connected to it. This is arranged in the direction of flow, preferably upstream of the auxiliary vacuum pump. A corresponding switching of the valve thus takes place when the auxiliary vacuum pump is switched on or off. Of course, this electrical valve can be integrated into the vacuum pump.

Ebenso kann ein elektrisch schaltbares Ventil an einem Sperrgaseinlass vorgesehen sein. Dieses elektrische schaltbare Ventil kann wiederum Teil der Regeleinrichtung oder mit dieser verbunden sein, so dass es auf einfache Weise möglich ist, die Sperrgaszufuhr ab- und zuzuschalten. Selbstverständlich können zwei entsprechend schaltbare Ventile zum Ein- und Ausschalten der Hilfspumpe sowie zum Ab- und Zuschalten der Sperrgaszufuhr vorgesehen sein.An electrically switchable valve can also be provided at a sealing gas inlet. This electrically switchable valve can in turn be part of the control device or connected to it, so that it is possible in a simple manner to switch the sealing gas supply off and on. Of course, two correspondingly switchable valves can be provided for switching the auxiliary pump on and off and for switching the sealing gas supply off and on.

Zusätzlich oder anstelle eines elektrisch schaltbaren Ventils kann eine Druckwippe vorgesehen sein. Die Druckwippe ist mit entsprechenden Druckleitungen verbunden, sodass die Druckwippe geschaltet wird, sobald einer oder mehrere der vorstehend definierten Drücke einen vorgegebenen Grenzwert unterschreiten bzw. überschreiten sollten. Durch ein entsprechendes Schalten der Zusatz-Druckwippe erfolgt eine Freigabe und somit ein Zuführen von Treibgas zu der Ejektorpumpe. Entsprechend kann auch die Treibgaszufuhr zu der Ejektorpumpe abgeschaltet werden. Ebenso ist mit einer mechanischen Druckwippe auch ein Ab- und Zuschalten der Sperrgaszufuhr möglich.In addition to or instead of an electrically switchable valve, a rocker switch can be provided. The pressure rocker is connected to corresponding pressure lines so that the pressure rocker is switched as soon as one or more of the pressures defined above fall below or exceed a predetermined limit value. Appropriate switching of the additional pressure rocker results in a release and thus a supply of propellant gas to the ejector pump. The propellant gas supply to the ejector pump can also be switched off accordingly. It is also possible to switch the barrier gas supply on and off with a mechanical pressure rocker.

Mit Hilfe des vorstehend beschriebenen Vakuumpumpensystems kann der Energieverbrauch verringert werden. Insbesondere sind die Grenzwerte derart gewählt, dass die Hilfsvakuumpumpe, bei der es sich insbesondere um eine Ejektorpumpe handelt, während des Hauptpumpmodus nicht betrieben wird. In dem Hauptpumpmodus, im dem große Gasmengen gefördert werden, steht der Energiebedarf der Hilfsvakuumpumpe in einem schlechten Verhältnis zu der geförderten Gasmenge, sodass es zur Reduzierung des Energiebedarfes des Gesamtsystems vorteilhaft ist, wenn die Hilfsvakuumpumpe während des Hauptpumpmodus ausgeschalten bleibt.With the aid of the vacuum pump system described above, the energy consumption can be reduced. In particular, the limit values are selected such that the auxiliary vacuum pump, which is in particular an ejector pump, is not operated during the main pumping mode. In the main pumping mode, in which large amounts of gas are conveyed, the energy requirement of the auxiliary vacuum pump is in poor proportion to the amount of gas conveyed, so that it is advantageous to reduce the energy requirement of the overall system if the auxiliary vacuum pump remains switched off during the main pumping mode.

Des Weiteren sind hinsichtlich des Sperrgases die Grenzwerte vorzugsweise derart gewählt, dass in einem Hilfspumpenmodus keine Sperrgaszufuhr erfolgt. Hierdurch kann ebenfalls eine Energieeinsparung erfolgen. Insbesondere die Kombination des Abschaltens der Sperrgaszufuhr während des Hilfspumpmodus und das Abschalten der Hilfspumpe während des Hauptpumpmodus bewirkt eine erhebliche Energieeinsparung.Furthermore, with regard to the sealing gas, the limit values are preferably selected such that no sealing gas is supplied in an auxiliary pump mode. This can also result in energy savings. In particular, the combination of switching off the sealing gas supply during the auxiliary pumping mode and switching off the auxiliary pump during the main pumping mode results in considerable energy savings.

Ferner betrifft die Erfindung ein Verfahren zum Betreiben eines Vakuumpumpsystems. Hierbei handelt es sich insbesondere um ein Vakuumpumpsystem wie vorstehend beschreiben, wobei das Verfahren vorzugsweise wie vorstehend anhand des Vakuumpumpsystems beschrieben, weitergebildet ist.The invention also relates to a method for operating a vacuum pump system. This is in particular a vacuum pump system as described above, the method preferably being developed as described above with reference to the vacuum pump system.

Insbesondere weist das erfindungsgemäße Verfahren zum Betreiben eines Vakuumpumpsystems eine Regeleinrichtung auf, die mit der Sperrgaszuführeinrichtung verbunden ist und zum Ab- und Zuschalten der Sperrgaszuführeinrichtung in Abhängigkeit einer vorgegebenen Steuergröße dient. Bevorzugt ist es ferner, dass nicht nur die Sperrgaszuführeinrichtung ab- und zugeschaltet wird, sondern dass zusätzlich auch die Hilfspumpe in Abhängigkeit einer Steuergröße ab- und zugeschaltet wird. Hierbei kann es sich um dieselbe oder eine andere Steuergröße handeln, wobei es bevorzugt ist, dass es sich beim Ab- und Zuschalten der Sperrgaszuführeinrichtung sowie beim Ab- und Zuschalten der Hilfsvakuumpumpe um dieselbe Steuergröße handelt.In particular, the method according to the invention for operating a vacuum pump system has a control device which is connected to the sealing gas supply device and is used to switch the sealing gas supply device on and off as a function of a predetermined control variable. It is also preferred that not only the sealing gas supply device is switched off and on, but that the auxiliary pump is also switched off and on as a function of a control variable. This can be the same or a different control variable, it being preferred that the same control variable is involved when the sealing gas supply device is switched on and off and the auxiliary vacuum pump is switched on and off.

Wie vorstehend insbesondere in bevorzugter Ausführungsform des Vakuumpumpsystems beschrieben, erfolgt ein Abschalten der Sperrgaszufuhr vorzugsweise im Standbymodus.As described above in particular in a preferred embodiment of the vacuum pump system, the sealing gas supply is preferably switched off in standby mode.

Das erfindungsgemäße Verfahren ist vorzugsweise wie vorstehend anhand des erfindungsgemäßen Vakuumpumpsystems insbesondere in bevorzugter Weiterbildung beschrieben, weitgebildet.The method according to the invention is preferably developed as described above with reference to the vacuum pump system according to the invention, in particular in a preferred development.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.

Fig. 1
zeigt eine schematische Prinzipskizze eines Vakuumpumpsystems mit Regeleinrichtung.
The invention is explained in more detail below on the basis of a preferred embodiment with reference to the accompanying drawings.
Fig. 1
shows a schematic diagram of a vacuum pump system with a control device.

Im dargestellten Ausführungsbeispiel weist das Vakuumpumpsystem eine Hauptvakuumpumpe 10 auf. Der Auslass der Hauptvakuumpumpe 10 ist mit einer Hilfsvakuumpumpe 12, bei der es sich insbesondere um eine Ejektorpumpe handelt, verbunden. Der Einlass der Hauptvakuumpumpe 10 ist mit einer zu evakuierenden Kammer 14 verbunden. Ferner ist mit der Hauptvakuumpumpe 10 eine Pumpe 16 verbunden. Diese ist über ein regelbares Ventil 18 mit einem Behälter 24 verbunden, in dem Sperrgas bereitgestellt wird. Mit Hilfe der Pumpe 16 erfolgt somit ein Zuführen von Sperrgas zu der Hauptvakuumpumpe 10. Sofern das Sperrgas unter Druck steht, kann die Pumpe 16 auch entfallen.In the illustrated embodiment, the vacuum pump system has a main vacuum pump 10. The outlet of the main vacuum pump 10 is connected to an auxiliary vacuum pump 12, which is in particular an ejector pump. The inlet of the main vacuum pump 10 is connected to a chamber 14 to be evacuated. Furthermore, a pump 16 is connected to the main vacuum pump 10. This is connected via a controllable valve 18 to a container 24 in which sealing gas is provided. With the aid of the pump 16, sealing gas is thus supplied to the main vacuum pump 10. If the sealing gas is under pressure, the pump 16 can also be omitted.

Eine Regeleinrichtung 20 ist im dargestellten Ausführungsbeispiel mit einem Drucksensor 22 verbunden, der zwischen der zu evakuierenden Kammer 14 und der Hauptvakuumpumpe 10 angeordnet ist.In the exemplary embodiment shown, a control device 20 is connected to a pressure sensor 22 which is arranged between the chamber 14 to be evacuated and the main vacuum pump 10.

Der von dem Drucksensor 22 gemessene Druck dient als Steuergröße für die Regeleinrichtung 20. In Abhängigkeit des Drucks erfolgt ein Steuern des elektrischen Ventils 18 über das der Hauptvakuumpumpe 10 Sperrgas zugeführt wird. Ferner erfolgt ein entsprechendes Regeln der Ejektorpumpe 12. Hierbei kann ebenfalls ein elektrisches Ventil geregelt werden, dass die Treibgaszufuhr zu der Ejektorpumpe 12 regelt.The pressure measured by the pressure sensor 22 serves as a control variable for the regulating device 20. The electrical valve 18 is controlled as a function of the pressure via which the main vacuum pump 10 is supplied with sealing gas. In addition, the ejector pump 12 is regulated accordingly. Here, an electric valve can also be regulated that regulates the propellant gas supply to the ejector pump 12.

Claims (16)

  1. A vacuum pump system comprising
    a main vacuum pump (10) adapted to be connected to a chamber (14) to be evacuated,
    an auxiliary pump (12) connected to an inlet of said main vacuum pump (10),
    a sealing gas supply device (24), and
    a control device (20) connected to said sealing gas supply device (24) for switching said sealing gas supply device (24) off and on as a function of a predetermined control variable,
    characterized in that
    the predetermined control variable for the sealing gas device (24) and/or the auxiliary vacuum pump (12) as a characteristic value of an electric motor driving the main vacuum pump (10) is the power consumption.
  2. The vacuum pump system according to claim 1, characterized in that the control device (20) is connected to the auxiliary vacuum pump (12) for switching said auxiliary vacuum pump (12) off and on as a function of a different or the same control variable.
  3. The vacuum pump system according to claim 1 or 2, characterized in that the predetermined control variable for the sealing gas device (24) and/or the auxiliary vacuum pump (12) is the entering or terminating of a standby mode.
  4. The vacuum pump system according to any one of claims 1 to 3, characterized in that the predetermined control variable for the sealing gas device (24) and/or the auxiliary vacuum pump (12) is the falling below a pressure value at the inlet of the main vacuum pump (10), which pressure value is in particular determined with the aid of a pressure sensor (22), wherein the pressure limit value preferably is 1 mbar.
  5. The vacuum pump system according to any one of claims 1 to 4, characterized in that the predetermined control variable for the sealing gas device (24) and/or the auxiliary vacuum pump (12) is the falling below a pressure value at the outlet of the main vacuum pump (10), which pressure value is in particular determined with the aid of a pressure sensor, wherein the pressure limit value preferably is 1020 mbar.
  6. The vacuum pump system according to any one of claims 1 to 5, characterized in that the control device (20) comprises an electrically switchable valve or is connected to the latter which preferably is arranged upstream of the auxiliary pump (24).
  7. The vacuum pump system according to any one of claims 1 to 6, characterized in that the control device (20) comprises an electrically switchable valve (18) or is connected to the latter which is arranged in a supply line for the sealing gas.
  8. The vacuum pump system according to any one of claims 1 to 7, characterized in that the position of a check valve provided at an outlet of the main vacuum pump (10) is used as a control variable.
  9. A method for operating a vacuum pump system, in particular according to any one of claims 1 to 8, wherein a sealing gas supply device (24) is switched off and on with the aid of a control device (20) as a function of a predetermined control variable, and wherein, as the control variable, a characteristic variable of an electric motor driving the main vacuum pump, in particular the power consumption, is used.
  10. The method for operating a vacuum pump system according to claim 9, wherein in addition to or instead of the sealing gas supply device (24), the auxiliary vacuum pump (12) is switched off and on, wherein switching off and on is preferably performed as a function of a different or the same control variable.
  11. The method for operating a vacuum pump system according to claim 9 or 10, wherein, as the control variable, the entering or terminating of a standby mode is used.
  12. The method for operating a vacuum pump system according to any one of claims 9 to 11, wherein, as the control variable, the falling below a pressure value at the inlet of the main vacuum pump is used, wherein the pressure limit value preferably is 1 mbar.
  13. The method for operating a vacuum pump system according to any one of claims 9 to 12, wherein, as the control variable, the falling below a pressure value at the outlet of the main vacuum pump is used, wherein the pressure limit value preferably is 1020 mbar.
  14. The method for operating a vacuum pump system according to any one of claims 9 to 13, wherein, with the aid of the control device, a valve arranged upstream of the auxiliary pump is controlled.
  15. The method for operating a vacuum pump system according to any one of claims 9 to 14, wherein, with the aid of the control device, a valve arranged in the supply line for the sealing gas is controlled.
  16. The method for operating a vacuum pump system according to any one of claims 9 to 15, wherein, as the control variable, the position of a check valve provided at the outlet of the main vacuum pump is used.
EP17803941.8A 2016-12-15 2017-11-23 Vacuum pump system and method for operating a vacuum pump system Active EP3555475B1 (en)

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PCT/EP2017/080191 WO2018108479A1 (en) 2016-12-15 2017-11-23 Vacuum pump system and method for operating a vacuum pump system

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DE202016007609U1 (en) 2018-03-26
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KR20190097019A (en) 2019-08-20
JP2020502410A (en) 2020-01-23
US11286934B2 (en) 2022-03-29
US20230033429A1 (en) 2023-02-02
US20190345938A1 (en) 2019-11-14

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