EP3537120A1 - Spectrophotomètre d'interférence et interféromètre à deux faisceaux - Google Patents

Spectrophotomètre d'interférence et interféromètre à deux faisceaux Download PDF

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Publication number
EP3537120A1
EP3537120A1 EP19160895.9A EP19160895A EP3537120A1 EP 3537120 A1 EP3537120 A1 EP 3537120A1 EP 19160895 A EP19160895 A EP 19160895A EP 3537120 A1 EP3537120 A1 EP 3537120A1
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EP
European Patent Office
Prior art keywords
movable mirror
speed
interferogram
interference light
intensity signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19160895.9A
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German (de)
English (en)
Inventor
Kazumi Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Publication date
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Publication of EP3537120A1 publication Critical patent/EP3537120A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity

Definitions

  • the present invention relates to an interference spectrophotometer, such as a Fourier transform infrared spectrophotometer (FTIR), and more specifically, to a two-beam interferometer for generating interference light in an interference spectrophotometer.
  • an interference spectrophotometer such as a Fourier transform infrared spectrophotometer (FTIR)
  • FTIR Fourier transform infrared spectrophotometer
  • a Fourier transform infrared spectrophotometer has a two-beam interferometer, a representative of which is a Michelson interferometer including a beam splitter, fixed mirror and movable mirror.
  • the movable mirror is made to move so as to change the optical path length difference (or phase difference) between two light beams and thereby generate infrared interference light whose amplitude (intensity) changes (i.e. the so-called "interferogram").
  • This infrared interference light is cast into or onto a sample, and the intensity of the light transmitted through or reflected by the sample is detected with a photodetector to obtain an interferogram of the transmitted or reflected light.
  • a spectrum (spectral characteristics) of the transmitted or reflected light can be obtained.
  • This spectrum can be represented on a coordinate system which, for example, has a horizontal axis indicating the wavelength (or wavenumber) and a vertical axis indicating the intensity (e.g. absorbance or transmittance).
  • a spectrum which covers a predetermined range of wavelengths can be obtained from an interferogram generated by one scan of a predetermined distance with the movable mirror (see Patent Literature 1).
  • Patent Literature 1 JP 2012-7943 A
  • the noise In the measurement of the infrared interference light, external noise may be mixed into the measurement signal. If the noise is random noise, it can be easily removed, for example, by repeating the measurement. By comparison, if the noise is periodic noise, it cannot be distinguished from a signal having a specific frequency in the interferogram (i.e. a frequency which is specific to a component contained in the sample). Consequently, a false peak having a wavelength (or wavenumber) corresponding to the frequency of the periodic noise appears in the spectrum along with a peak having a wavelength (or wavenumber) corresponding to a specific frequency.
  • a Fourier transform spectrophotometer according to the present invention developed for solving the previously described problem includes:
  • the moving speed of the movable mirror is changed by a predetermined amount at every completion of an operation cycle in which the reciprocal motion or one-way motion of the movable mirror is performed one or more times (the entire motion of the movable mirror during this cycle is hereinafter called the "unit distance motion"), and the intensity signals of the interference light generated during the unit distance motion are detected with the detector.
  • the detector is operated so as to detect the intensity signals of the interference light for each specific amount of change in the optical path length difference between the two light beams (i.e. at regular intervals of the optical path length difference) regardless of the moving speed of the movable mirror.
  • the interval of time for the detector to detect the intensity signal of the interference light becomes longer as the moving speed decreases, or shorter as the moving speed increases. Therefore, if there is periodic noise being generated at a fixed frequency, the timing at which the periodic noise is superposed on the intensity signal in a series of detecting operations (one detection operation) performed in the detector during the unit distance motion of the movable mirror changes with the moving speed of the movable mirror. In other words, if a piece of information which changes depending on the moving speed of the movable mirror is present in a plurality of sets of intensity signals of the interference light respectively obtained by a plurality of detection operations, it is possible to consider that the piece of information has been altered by the superposition of periodic noise.
  • the Fourier transform spectrophotometer having the previous configuration may further include an interferogram creator for creating one interferogram from the intensity signals of the interference light obtained by the one detection operation, and the information extractor may be configured to extract the speed-dependent information based on a plurality of interferograms obtained by the plurality of detection operations.
  • the Fourier transform spectrophotometer having the previous configuration may further include a spectrum creator for obtaining one interferogram from the intensity signals of the interference light obtained by the one detection operation, and for creating one spectrum by Fourier-transforming the one interferogram, and the information extractor may be configured to compare a plurality of spectra obtained by a plurality of detection operations, to locate a peak which changes depending on the moving speed of the movable mirror, and to extract position information of the located peak as the speed-dependent information.
  • a Fourier transform spectrophotometer having the previously described configuration can remove such periodic noise from the intensity signals of the interference light and thereby eliminate a false peak which would otherwise appear on a spectrum due to the periodic noise.
  • Fig. 1 shows an optical-path configuration of a two-beam interferometer according to the present embodiment and a Fourier transform infrared spectrophotometer (FTIR) using the interferometer.
  • the FTIR according to the present embodiment includes a main interferometer for obtaining an interferogram as well as a control interferometer for controlling the moving speed of a movable mirror and generating a timing signal for the sampling of the signals obtained with a photodetector in the main interferometer.
  • the main interferometer includes an infrared light source 2, condensing mirror 3, collimator mirror 4, beam splitter 5, fixed mirror 6 and movable mirror 7, which are all placed within an interferometer chamber 1.
  • the control interferometer includes a laser light source 8 and a laser mirror 9 as well as the beam splitter 5, fixed mirror 6 and movable mirror 7.
  • the movable mirror 7 is driven by a driving device 10 including a linear motor 10a and a linear guide (not shown).
  • the linear motor includes a voice coil and a magnet. Applying a voltage to the voice coil in the linear motor 10a produces electromagnetic force, which makes the movable mirror 7 reciprocally move along the linear guide in the direction indicated by arrow M.
  • the main interferometer generates infrared interference light to be used for a spectrum measurement of a sample 14 in a sample chamber 13 located outside the interferometer chamber 1.
  • the infrared light emitted from the infrared light source 2 is cast onto the beam splitter 5 via the condensing mirror 3 and the collimator mirror 4.
  • the beam splitter 5 splits the infrared light into two beams directed to the fixed mirror 6 and the movable mirror 7, respectively. After being reflected by the fixed mirror 6 and the movable mirror 7, the two light beams return to the beam splitter 5.
  • the two light beams are merged back into one beam and sent into an optical path which leads to a parabolic mirror 12.
  • the movable mirror 7 is made to continuously move back and forth in the direction indicated by arrow M. Therefore, the two merged beams form interference light whose amplitude varies with time.
  • the light After being condensed by the parabolic mirror 12, the light enters the sample chamber 13 and is cast onto the sample 14 placed within the sample chamber 13. The light which has passed through the sample 14 is focused onto an infrared detector 16 by an ellipsoidal mirror 15.
  • the control interferometer generates laser interference light to be used for obtaining an interference fringe signal.
  • the laser light emitted from the laser light source 8 is cast onto the beam splitter 5 via the laser mirror 9 and forms interference light directed toward the parabolic mirror 12, as with the infrared light.
  • the laser interference light forms a beam of light with an extremely small diameter and travels forward, to be eventually reflected by a laser mirror 17 in the optical path and introduced into a laser detector 18.
  • the controlling-processing unit 30 may be a dedicated controlling-processing device. However, it is more common to use a personal computer on which dedicated controlling-processing software is installed.
  • An input unit 40 for allowing users to perform various input operations using a keyboard or pointing device (e.g. mouse), as well as a monitor 41 for displaying measurement results and other related information, are connected to the computer.
  • Fig. 2 is a schematic diagram showing the configuration of the controlling-processing unit 30.
  • the controlling-processing unit 30 includes: a data storage section 301 for storing digital data received from the A/D converter 23; an interferogram creator 302 for extracting, from the data stored in the data storage section 301, a series of data corresponding to one reciprocal motion of the movable mirror 7, as a set of data for one detection operation, and for creating one interferogram from the extracted data; a spectrum creator 303 for creating one spectrum by performing a Fourier-transform operation on one interferogram; a noise remover 304 for extracting a noise component from a plurality of spectra corresponding to a plurality of detection operations by comparing those spectra, and for removing the noise from each of the spectra; and a spectrum accumulator 305 for creating an accumulated spectrum by accumulating a plurality of spectra from which the noise has been removed.
  • the controlling-processing unit 30 also includes a drive controller 306 for changing the moving speed of the movable mirror 7 by regulating the voltage applied to the voice coil in the linear motor 10a, as well as a data processor 307 and other related components.
  • a spectrum of the infrared interference light transmitted through the sample 14 is obtained from light-receiving signals produced by the infrared detector 16 while the movable mirror 7 is made to continuously move back and forth multiple times.
  • the drive controller 306 regulates the voltage applied to the voice coil in the linear motor 10a so as to constantly maintain the moving speed of the movable mirror 7 during each reciprocal motion of the movable mirror 7 while changing (increasing or decreasing) the moving speed of the movable mirror 7 by a predetermined amount every time the movable mirror 7 proceeds from one reciprocal motion to the next.
  • the light-receiving signal produced by the infrared detector 16 during one reciprocal motion of the movable mirror 7 is sampled by the sample-and-hold circuit 22 every time the optical path length difference between the two light beams of the control interferometer is increased or decreased by 632.8 nm.
  • the sampled signal is subsequently converted into digital data by the A/D converter 23 and sent to the controlling-processing unit 30.
  • the controlling-processing unit 30 For each series of digital data received within one reciprocal motion of the movable mirror 7, the controlling-processing unit 30 relates each of the digital data to the corresponding optical path length difference and stores those digital data in the data storage section 301 as a set of data corresponding to one detection operation (this set of data is hereinafter called the "one set of detection data").
  • the moving speed of the movable mirror 7 is changed every time the movable mirror 7 proceeds from one reciprocal motion to the next. Therefore, although the interval of the optical path length difference for the sampling by the sample-and-hold circuit 22 is constant, the interval of time at which the sampling is performed becomes longer as the moving speed decreases, or shorter as the moving speed increases. Consequently, the (apparent) frequency of the periodic noise superposed on one set of detection data to be stored in the data storage section 301 changes depending on the interval of time of the sampling by the sample-and-hold circuit 22.
  • the interferogram creator 302 creates one interferogram from one set of detection data stored in the data storage section 301.
  • the spectrum creator 303 creates one spectrum by Fourier-transforming one interferogram.
  • a spectrum created by Fourier-transforming an interferogram created from detection data on which periodic noise has been superposed has a peak originating from the periodic noise.
  • the wavelength (wavenumber) of this peak is determined by the original frequency of the periodic noise and the moving speed of the movable mirror 7. Therefore, the original frequency of the periodic noise can be calculated from the moving speed of the movable mirror 7 and the wavelength at which the peak is located.
  • Table 1 shows the relationship between the frequency of the periodic noise and the wavenumber of the peak observed on the spectrum due to the periodic noise for a movable mirror driven at a normal speed of 2.8 mm/sec as well as modified speeds of 2.8 ⁇ 0.1 mm/sec in the case where a detector employing a DLATGS (deuterated L-alanine-doped triglycine sulphate crystal) element (DLATGS detector) is used as the infrared detector 16.
  • DLATGS detector deuterated L-alanine-doped triglycine sulphate crystal
  • the superposition of the periodic noise of 1.088 kHz on the interferogram will result in the noise being observed as a peak with a wavenumber of 2015 cm -1 on the spectrum, while the superposition of the periodic noise of 1.089 kHz on the interferogram will result in the noise being observed as a peak with a wavenumber of 2016 cm -1 on the spectrum.
  • the wavenumber of the peak of the periodic noise of 1.128 kHz observed on the spectrum will shift from 2015 cm -1 by 47 cm -1 when the moving speed is changed (increased or decreased) from 2.8 mm/sec by 0.1 mm/sec.
  • the peaks which appear on a spectrum are normally determined by the properties (molecular structure) of a substance contained in the sample 14 and do not depend on the moving speed of the movable mirror 7. Accordingly, a peak which shows a significant change depending on the moving speed of the movable mirror 7 can be identified as a false (or altered) peak, and the frequency of the periodic noise can be determined from the peak position (wavenumber) and the moving speed of the movable mirror 7.
  • the peak position (wavenumber or wavelength) in the present embodiment corresponds to the speed-dependent information in the present invention.
  • the noise remover 304 reads the plurality of spectra from the data storage section 301 and extracts, from those spectra, a peak which shows a significant change depending on the moving speed of the movable mirror 7.
  • the noise remover 304 removes that peak from each of those spectra and send the spectra to the spectrum accumulator 305.
  • the speed-dependent information is extracted from the spectra created by the spectrum creator 303.
  • the speed-dependent information may be extracted from the interferograms created by the interferogram creator 302.
  • the speed-dependent information can also be extracted from the digital data sent from the A/D converter 23 to the controlling-processing unit 30.
  • the amount by which the moving speed of the movable mirror is changed for each reciprocal motion of the movable mirror does not need to be 0.1 mm/sec as in the previous embodiment but may be larger or smaller than this value. What is essential is to allow for the extraction of a peak which changes with the change in the moving speed of the movable mirror.
  • the amount of change in the moving speed of the movable mirror may be smaller if the spectra are obtained with a higher level of resolving power.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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EP19160895.9A 2018-03-07 2019-03-05 Spectrophotomètre d'interférence et interféromètre à deux faisceaux Withdrawn EP3537120A1 (fr)

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JP2018040426A JP2019158348A (ja) 2018-03-07 2018-03-07 干渉分光光度計及び二光束干渉計

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EP (1) EP3537120A1 (fr)
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CN (1) CN110243474A (fr)

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WO2020049941A1 (fr) * 2018-09-05 2020-03-12 パナソニックＩｐマネジメント株式会社 Dispositif de mesure et procédé de mesure
JP6782470B2 (ja) * 2018-09-05 2020-11-11 パナソニックＩｐマネジメント株式会社 計測装置及び計測方法
WO2022196015A1 (fr) * 2021-03-18 2022-09-22 株式会社島津製作所 Dispositif d'analyse

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012007943A (ja) 2010-06-23 2012-01-12 Shimadzu Corp フーリエ変換赤外分光光度計
WO2016124970A1 (fr) * 2015-02-02 2016-08-11 Foss Analytical A/S Système de spectromètre et procédé permettant de compenser des perturbations périodiques temporelles d'un interférogramme généré par le système de spectromètre

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03202729A (ja) * 1989-12-29 1991-09-04 Shimadzu Corp 干渉分光光度計の移動鏡駆動制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012007943A (ja) 2010-06-23 2012-01-12 Shimadzu Corp フーリエ変換赤外分光光度計
WO2016124970A1 (fr) * 2015-02-02 2016-08-11 Foss Analytical A/S Système de spectromètre et procédé permettant de compenser des perturbations périodiques temporelles d'un interférogramme généré par le système de spectromètre

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JP2019158348A (ja) 2019-09-19
CN110243474A (zh) 2019-09-17
US20190277699A1 (en) 2019-09-12

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