EP3535094A1 - Grinding apparatus - Google Patents
Grinding apparatusInfo
- Publication number
- EP3535094A1 EP3535094A1 EP17818418.0A EP17818418A EP3535094A1 EP 3535094 A1 EP3535094 A1 EP 3535094A1 EP 17818418 A EP17818418 A EP 17818418A EP 3535094 A1 EP3535094 A1 EP 3535094A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- grinding
- cleaning
- belt
- grinding belt
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/10—Devices or means for dressing or conditioning abrasive surfaces of travelling flexible backings coated with abrasives; Cleaning of abrasive belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/18—Accessories
Definitions
- This invention relates to a display manufacturing technology, and particularly, to a grinding apparatus.
- a conventional grinding and cleaning apparatus for a glass substrate in display manufacturing industry mainly includes a grinding belt in a circular shape, a driving mechanism for moving the grinding belt, and a grinding and cleaning head.
- the driving mechanism drives the grinding belt to rotate so as to grind the glass substrate.
- the grinding and cleaning head is provided above a working area of the grinding belt.
- the grinding and cleaning head sprays high-pressure water-vapor mixed fluid to provide a grinding pressure to the grinding belt. As such, the grinding belt and the glass substrate are subjected to high-speed rubbing with each other, thereby achieving cleaning effect.
- the grinding apparatus may comprise a grinding belt cleaning structure.
- the grinding belt cleaning structure may further comprise a cleaning section at a side of a grinding surface of a grinding belt and a support section at a side of a non-grinding surface of the grinding belt and at a position corresponding to the cleaning section.
- the grinding belt cleaning structure may be located in a non-grinding area of the grinding apparatus.
- the cleaning section may be configured to clean the grinding surface of the grinding belt and the support section may be configured to provide a contact pressure between the cleaning section and the grinding belt.
- the cleaning section may comprise a cleaning roller and a roller moving device.
- the cleaning roller may be configured to roll and rub the grinding surface of the grinding belt, thereby cleaning the grinding surface of the grinding belt.
- a rolling direction of the cleaning roller may coincide with a moving direction of the grinding belt.
- the roller moving device may be configured to control the cleaning roller to switch between a first state and a second state. In the first state, the cleaning roller is in contact with the grinding surface of the grinding belt to clean the grinding surface of the grinding belt. In the second state, the cleaning roller is not in contact with the grinding surface of the grinding belt.
- the cleaning roller may be made of an ethylene propylene diene monomer (EPDM) rubber.
- EPDM ethylene propylene diene monomer
- the cleaning section may further comprise a first control circuit configured to control an operating state of the roller moving device so that the roller moving device controls the cleaning roller to switch between the first state and the second state.
- the cleaning section may further comprise a cleaning brush and a cleaning brush moving device.
- the cleaning brush moving device may be configured to control the cleaning brush to switch between a third state and a fourth state. In the third state, the cleaning brush is in contact with the grinding surface of the grinding belt to clean the grinding surface of the grinding belt. In the fourth state, the cleaning brush is not in contact with the grinding surface of the grinding belt.
- the cleaning brush may comprise bristles. The bristles may be configured to reach and clean gaps between a plurality of grinding particles on the grinding surface of the grinding belt.
- the bristles may be made of nylon polymer.
- the cleaning section may further comprise a second control circuit configured to control an operating state of the cleaning brush movement device so that the cleaning brush movement device controls the cleaning brush to switch between the third state and the fourth state.
- the cleaning section may further comprise a shower device configured to spray a cleaning solution onto the grinding surface of the grinding belt, thereby rinsing the grinding surface of the grinding belt.
- the shower device may comprise a plurality of shower holes provided on the cleaning brush.
- the cleaning solution may comprise alcohol and a detergent.
- the grinding apparatus may further comprise a support section.
- the support section may comprise a support roller and a support roller control device.
- the support roller may be configured to roll on a non-grinding surface of the grinding belt.
- the support roller control device may be configured to control the support roller to switch between a fifth state and a sixth state. In the fifth state, the support roller is in contact with the grinding surface of the grinding belt to provide a support force to the grinding belt. In the sixth state, the support roller is not in contact with the non-grinding surface of the grinding belt.
- the support section may comprise at least two support rollers. One of the support rollers may be in a position corresponding to a position of the cleaning roller and another one of the support rollers may be in a position corresponding to a position of the cleaning brush.
- the grinding apparatus may further comprise a grinding head section on one side of the grinding belt to provide a contact pressure between the grinding belt and a member to be grinded.
- the method may comprise driving the grinding belt with the driving device and cleaning the grinding belt with the grinding belt cleaning structure.
- the grinding belt cleaning structure may clean the grinding belt in the non-grinding area while the grinding belt grinds a member in a grinding area.
- the cleaning roller and the cleaning brush of the cleaning section of the grinding belt cleaning structure may clean the grinding belt at the same time.
- the shower device may spray the cleaning solution onto the grinding surface of the grinding belt while the cleaning roller and the cleaning brush of the cleaning section of the grinding belt cleaning structure clean the grinding belt.
- Fig. 1 is a schematic view of an overall structure of a grinding apparatus according to an embodiment.
- Fig. 2 is a schematic view of a partial structure of a grinding apparatus according to an embodiment.
- Fig. 3 is a schematic view of another partial structure of a grinding apparatus according to an embodiment.
- One example of the present disclosure provides a grinding apparatus, which avoids secondary contamination of a substrate caused by dirt and residual adhesive on a surface of a grinding belt and secondary damage of the substrate such as scratches caused by hard foreign matter and glass debris embedded in particles of the grinding belt.
- Fig. 1 shows a schematic view of an overall structure of a grinding apparatus according to an embodiment.
- the grinding apparatus comprises a grinding belt 100, a driving device 200 for rotating the grinding belt 100, a grinding head portion 500 at one side of the grinding belt 100 for providing a contact pressure between the grinding belt 100 and a member to be grinded, and a grinding belt cleaning structure for cleaning the grinding belt 100.
- the grinding belt cleaning structure is configured to clean a grinding surface of a grinding belt 100 during movement of the grinding belt 100, that is, to remove residual dirt and foreign matter on the grinding surface of the grinding belt 100, thereby improving cleanliness of the grinding belt 100. As such, secondary contamination and secondary scratches of the grinded member can be avoided. Furthermore, the grinding belt 100 can be better utilized to improve grinding and cleaning effect, thereby improving product yield.
- the grinding belt 100 may be rotated in a circular path driven by the driving device 200. When any portion of the grinding belt 100 is moved to a region corresponding to the grinding head portion 500, which is a grinding area of the grinding belt, the portion of the grinding belt is in contact with the member to be grinded and grind the member.
- the grinding belt 100 has a grinding surface and a non-grinding surface opposite the grinding surface.
- the grinding belt cleaning structure comprises a cleaning section 300 and a support section 400.
- the cleaning section 300 is configured to be in contact with and clean the grinding surface of the grinding belt 100.
- the cleaning section is located on the grinding surface side of the grinding belt 100.
- the support section 400 is configured to be in contact with the non-grinding surface of the grinding belt 100 to support the grinding belt 100 and provide a contact pressure between the cleaning section and the grinding belt 100.
- the support section 400 is located on the non-grinding surface side of the grinding belt 100 and at a position corresponding to the cleaning section.
- the support section 400 can be in contact with the non-grinding surface of the grinding belt 100 to support the grinding belt 100.
- a contact pressure i.e., a back pressure
- a back pressure is provided between the grinding belt 100 and the cleaning section, thereby facilitating cleaning of the grinding surface of the grinding belt 100.
- Fig. 2 shows a schematic view of a partial structure of a grinding apparatus according to an embodiment.
- the cleaning section comprises a cleaning roller 301, a roller driving device for driving the cleaning roller 301, and a roller moving device 302.
- the cleaning roller 301 is configured to roll and rub the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100.
- a rolling direction of the cleaning roller 301 coincides with the moving direction of the grinding belt 100.
- the roller moving device 302 is configured to control the cleaning roller 301 to switch between a first state and a second state.
- the cleaning roller 301 In the first state, the cleaning roller 301 is in contact with the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100.
- the cleaning roller 301 In the second state, the cleaning roller 301 is not in contact with the grinding surface of the grinding belt 100.
- the cleaning section uses a cleaning roller 301 whose rolling direction coincides with the moving direction of the grinding belt 100. That is, a tangential moving direction of the cleaning roller 301 at the contacting area with the grinding surface of the grinding belt 100 coincides with the moving direction of the grinding belt 100. Dirt and residual adhesive on the grinding surface of the grinding belt 100 can be cleaned due to high-speed rubbing by the cleaning roller 301.
- the roller moving device 302 controls movement of the cleaning roller 301 to move the cleaning roller 301 to the first state when the grinding belt 100 is being cleaned and to the second state when the grinding belt 100 is not being cleaned.
- the clean roller may be made of rubber such as an ethylene propylene diene monomer (EPDM) rubber or a material which can clean away organic matter and residual adhesive.
- EPDM ethylene propylene diene monomer
- the cleaning section uses a cleaning roller 301, which has advantageous such as simple structure, good cleaning effect, convenient handling , and being capable of cleaning the dirt and residual adhesive on the surface of the grinding surface of the grinding belt 100.
- the cleaning section is not limited thereto.
- the roller moving device 302 may include a cylinder connected to the cleaning roller 301. Since there is liquid such as cleaning liquid in working environment of the grinding belt 100, the cylinder is advantageous and can has a long service life.
- the cleaning roller 301 may be driven by a driving motor or the like.
- the cleaning section further comprises a first control circuit.
- the first control circuit is used for controlling operating states of the roller moving device 302. As such, the roller moving device 302 controls the cleaning roller 301 to switch between the first state and the second state in accordance with a preset first period.
- a working period of the cleaning roller 301 can be set in advance.
- the cleaning roller 301 is driven by the cylinder to advance to the grinding belt 100.
- the cleaning cycle is 500 pcs. The cleaning cycle can be adjusted depending on specific production situation.
- the cleaning roller 301 is retracted by the cylinder and in a standby state.
- Fig. 3 shows a schematic view of another partial structure of a grinding apparatus according to an embodiment.
- the cleaning section further comprises a cleaning brush 303 and a cleaning brush moving device 304.
- the cleaning brush 303 is configured to be capable of being in contact with and cleaning the grinding surface of the grinding belt 100.
- the grinding surface of the grinding belt 100 has a plurality of grinding particles.
- the cleaning brush 303 has bristles 3031, which can reach and clean gaps formed by the plurality of grinding particles.
- the bristles may be made of a polymer such as nylon.
- the cleaning brush moving device 304 is configured to control the cleaning brush 303 to switch between a third state and a fourth state.
- the cleaning brush 303 is in the third state, the cleaning brush 303 is in contact with the grinding surface of the grinding belt 100 and cleans the grinding surface of the grinding belt 100.
- the cleaning brush 303 is in the fourth state, the cleaning brush 303 is not in contact with the grinding surface of the grinding belt 100.
- the cleaning section uses a cleaning brush 303.
- the cleaning brush movement device 304 controls the movement of the cleaning brush 303.
- the cleaning brush 303 is moved to the third state.
- the cleaning brush 303 is moved to the fourth state.
- the cleaning section uses the cleaning roller 301, which has advantageous such as simple structure, good cleaning effect, convenient handling and being capable of cleaning the dirt and residual adhesive on the surface of the grinding surface of the grinding belt 100.
- the cleaning section is not limited thereto.
- the cleaning brush moving device 304 may comprise a cylinder connected to the cleaning brush 303.
- the cleaning brush 303 is driven by the cylinder, since there is liquid such as cleaning liquid in the working environment of the grinding belt 100, the cylinder is advantageous and can has a long service life.
- the cleaning roller 301 may be driven by a driving motor or the like.
- the cleaning section further comprises a second control circuit.
- the second control circuit is used to control operating states of the cleaning brush movement device 304.
- the cleaning brush movement device 304 controls the cleaning brush 303 to switch between the third state and the fourth state in accordance with a preset second period.
- the working period of the cleaning brush 303 can be set in advance. When a cleaning cycle of the working period is reached, the cleaning brush 303 is driven by the cylinder to advance to the grinding belt 100. In one embodiment, the cleaning cycle is 500 pcs. The cleaning cycle can be adjusted depending on specific production situation. After the cleaning of the grinding belt 100 is complete, the cleaning brush 303 is retracted by the cylinder and is in a standby state.
- the cleaning section further comprises a shower device 305.
- the shower device 305 is used for spraying cleaning solution onto the grinding surface of the grinding belt 100 and rinsing the grinding surface of the grinding belt 100.
- the shower device 305 is provided to spray the cleaning solution on the grinding surface of the grinding belt 100 to flush the grinding surface of the grinding belt 100, thereby improving cleaning effect.
- the cleaning solution may be an organic cleaning solution comprising alcohol and a detergent.
- the shower device 305 is provided to work after the cleaning steps by the cleaning roller 301 and the cleaning brush 303. In another embodiment, the shower structure 305 is provided to work at the same time as the cleaning roller 301 and the cleaning brush 303.
- the shower device 305 is combined with the cleaning brush 303 as a unitary structure.
- the cleaning brush 303 is provided with a plurality of shower holes 3051.
- the plurality of shower holes 3051 are arranged in a row.
- the grinding belt cleaning structure is located at a position outside the region corresponding to the grinding head portion 500.
- the grinding belt cleaning structure is located in a non-grinding area other than the grinding area of the grinding belt 100.
- the grinding belt can be cleaned in the non- grinding area by the grinding belt cleaning structure while the grinding belt 100 grinds the member in the grinding area.
- the support section comprises a support roller 401 and a support roller control device 402.
- the support roller 401 is capable of rolling on the non-grinding surface of the grinding belt 100.
- the support roller control device 402 is used for controlling the support roller 401 to switch between a fifth state and a sixth state in accordance with a preset third period. As such, a supporting force may be provided to the grinding belt 100.
- a supporting force may be provided to the grinding belt 100.
- the support roller 401 is in the fifth state, the support roller 401 is in contact with the non-grinding surface of the grinding belt 100 to provide a supporting force to the grinding belt 100.
- the support roller 401 is in the sixth state, the support roller 401 is not in contact with the non-grinding surface of the grinding belt 100.
- the working period of the support roller 401 can be set in advance.
- the support roller 401 is driven by a cylinder to advance to the grinding belt 100.
- the grinding belt 100 is supported.
- the support roller 401 is retracted by the cylinder and in a standby state.
- At least two support rollers 401 may be provided in the support section. At least one of the support rollers 401 is in a position which corresponds to the position of the cleaning roller 301. At least another one of the support rollers 401 is in another position which corresponds to the position of the cleaning brush.
- a working cycle of the cleaning roller 301 is controlled by the first control circuit.
- a working cycle of the cleaning roller 303 and a working cycle of the shower device 305 are controlled by the second control circuit.
- a working cycle of the support roller 401 is controlled by the support roller control device 402.
- the support roller 401 is advanced by the cylinder. As such, the support roller 401 is in contact with the non-grinding surface of the grinding belt 100 to provide a back pressure.
- the cleaning roller 301 is advanced and brought into contact with the grinding surface of the grinding belt 100 by the cylinder.
- the cleaning brush 303 is also advanced and brought in contact with the grinding surface of the grinding belt 100 by the cylinder.
- the shower device 305 sprays cleaning liquid simultaneously.
- the grinding belt 100 is rotated at a high speed and accordingly rubbed at a high speed by the cleaning roller 301 and the cleaning brush 303, thereby achieving excellent cleaning effect of the grinding belt 100.
- the cleaning effect is further improved by the cleaning liquid.
- the cleaning roller 301 and the cleaning brush 303 of the cleaning section may be used at the same time. It is also possible to selectively use one of them to clean the grinding belt 100.
- the grinding apparatus according to one embodiment of the present disclosure may be used in the TFT-LCD industry for cleaning the substrate. It may be applied to other fields.
- Another example of the present disclosure is a grinding method using the grinding apparatus according to one embodiment of the present disclosure.
- the method comprises driving a grinding belt 100 by a driving device 200 and cleaning the grinding belt 100 by the grinding belt cleaning structure.
- an operating state of the roller moving device 302 is controlled so that the roller moving device 302 controls the cleaning roller 301 to switch between the first state and the second state in accordance with the preset first period.
- the cleaning roller 301 In the first state, the cleaning roller 301 is in contact with the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100. In the second state, the cleaning roller 301 is not in contact with the grinding surface of the grinding belt 100.
- an operating state of the cleaning brush moving device 304 is controlled so that the cleaning brush moving device 304 controls the cleaning brush 303 to switch between the third state and the fourth state in accordance with the preset second period.
- the cleaning brush 303 is in contact with the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100.
- the cleaning brush 303 is not in contact with the grinding surface of the grinding belt 100.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Electrostatic Charge, Transfer And Separation In Electrography (AREA)
Abstract
Description
- CROSS-REFERENCE TO RELATED APPLICATIONS
- This application claims the benefit of the filing date of Chinese Patent Application No. 201610962505.5 filed on November 4, 2016, the disclosure of which is hereby incorporated by reference.
- This invention relates to a display manufacturing technology, and particularly, to a grinding apparatus.
- In a display manufacturing process, a surface of a glass substrate needs to be cleaned before a polarizer is attached onto it. In a conventional method, the surface of the glass substrate is mainly cleaned by a grinding belt. A conventional grinding and cleaning apparatus for a glass substrate in display manufacturing industry mainly includes a grinding belt in a circular shape, a driving mechanism for moving the grinding belt, and a grinding and cleaning head. The driving mechanism drives the grinding belt to rotate so as to grind the glass substrate. The grinding and cleaning head is provided above a working area of the grinding belt. The grinding and cleaning head sprays high-pressure water-vapor mixed fluid to provide a grinding pressure to the grinding belt. As such, the grinding belt and the glass substrate are subjected to high-speed rubbing with each other, thereby achieving cleaning effect.
- BRIEF SUMMARY
- Accordingly one example of the present disclosure is a grinding apparatus. The grinding apparatus may comprise a grinding belt cleaning structure. The grinding belt cleaning structure may further comprise a cleaning section at a side of a grinding surface of a grinding belt and a support section at a side of a non-grinding surface of the grinding belt and at a position corresponding to the cleaning section. The grinding belt cleaning structure may be located in a non-grinding area of the grinding apparatus. The cleaning section may be configured to clean the grinding surface of the grinding belt and the support section may be configured to provide a contact pressure between the cleaning section and the grinding belt.
- The cleaning section may comprise a cleaning roller and a roller moving device. The cleaning roller may be configured to roll and rub the grinding surface of the grinding belt, thereby cleaning the grinding surface of the grinding belt. A rolling direction of the cleaning roller may coincide with a moving direction of the grinding belt. The roller moving device may be configured to control the cleaning roller to switch between a first state and a second state. In the first state, the cleaning roller is in contact with the grinding surface of the grinding belt to clean the grinding surface of the grinding belt. In the second state, the cleaning roller is not in contact with the grinding surface of the grinding belt. The cleaning roller may be made of an ethylene propylene diene monomer (EPDM) rubber.
- The cleaning section may further comprise a first control circuit configured to control an operating state of the roller moving device so that the roller moving device controls the cleaning roller to switch between the first state and the second state.
- The cleaning section may further comprise a cleaning brush and a cleaning brush moving device. The cleaning brush moving device may be configured to control the cleaning brush to switch between a third state and a fourth state. In the third state, the cleaning brush is in contact with the grinding surface of the grinding belt to clean the grinding surface of the grinding belt. In the fourth state, the cleaning brush is not in contact with the grinding surface of the grinding belt. The cleaning brush may comprise bristles. The bristles may be configured to reach and clean gaps between a plurality of grinding particles on the grinding surface of the grinding belt. The bristles may be made of nylon polymer.
- The cleaning section may further comprise a second control circuit configured to control an operating state of the cleaning brush movement device so that the cleaning brush movement device controls the cleaning brush to switch between the third state and the fourth state.
- The cleaning section may further comprise a shower device configured to spray a cleaning solution onto the grinding surface of the grinding belt, thereby rinsing the grinding surface of the grinding belt. The shower device may comprise a plurality of shower holes provided on the cleaning brush. The cleaning solution may comprise alcohol and a detergent.
- The grinding apparatus may further comprise a support section. The support section may comprise a support roller and a support roller control device. The support roller may be configured to roll on a non-grinding surface of the grinding belt. The support roller control device may be configured to control the support roller to switch between a fifth state and a sixth state. In the fifth state, the support roller is in contact with the grinding surface of the grinding belt to provide a support force to the grinding belt. In the sixth state, the support roller is not in contact with the non-grinding surface of the grinding belt. The support section may comprise at least two support rollers. One of the support rollers may be in a position corresponding to a position of the cleaning roller and another one of the support rollers may be in a position corresponding to a position of the cleaning brush.
- The grinding apparatus may further comprise a grinding head section on one side of the grinding belt to provide a contact pressure between the grinding belt and a member to be grinded.
- Another example of the present disclosure is a method of grinding using the grinding apparatus according to one embodiment of the present disclosure. The method may comprise driving the grinding belt with the driving device and cleaning the grinding belt with the grinding belt cleaning structure. The grinding belt cleaning structure may clean the grinding belt in the non-grinding area while the grinding belt grinds a member in a grinding area. The cleaning roller and the cleaning brush of the cleaning section of the grinding belt cleaning structure may clean the grinding belt at the same time. Furthermore, the shower device may spray the cleaning solution onto the grinding surface of the grinding belt while the cleaning roller and the cleaning brush of the cleaning section of the grinding belt cleaning structure clean the grinding belt.
- The subject matter which is regarded as the invention is particularly pointed out and distinctly claimed in the claims at the conclusion of the specification. The foregoing and other objects, features, and advantages of the invention are apparent from the following detailed description taken in conjunction with the accompanying drawings in which:
- Fig. 1 is a schematic view of an overall structure of a grinding apparatus according to an embodiment.
- Fig. 2 is a schematic view of a partial structure of a grinding apparatus according to an embodiment.
- Fig. 3 is a schematic view of another partial structure of a grinding apparatus according to an embodiment.
- The present invention is described with reference to embodiments of the invention. Throughout the description of the invention reference is made to Figs. 1-3. When referring to the figures, like structures and elements shown throughout are indicated with like reference numerals. The described embodiments are merely part of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art without departing from the inventive work are within the scope of the present invention.
- One example of the present disclosure provides a grinding apparatus, which avoids secondary contamination of a substrate caused by dirt and residual adhesive on a surface of a grinding belt and secondary damage of the substrate such as scratches caused by hard foreign matter and glass debris embedded in particles of the grinding belt.
- Fig. 1 shows a schematic view of an overall structure of a grinding apparatus according to an embodiment. The grinding apparatus comprises a grinding belt 100, a driving device 200 for rotating the grinding belt 100, a grinding head portion 500 at one side of the grinding belt 100 for providing a contact pressure between the grinding belt 100 and a member to be grinded, and a grinding belt cleaning structure for cleaning the grinding belt 100.
- In one embodiment, the grinding belt cleaning structure is configured to clean a grinding surface of a grinding belt 100 during movement of the grinding belt 100, that is, to remove residual dirt and foreign matter on the grinding surface of the grinding belt 100, thereby improving cleanliness of the grinding belt 100. As such, secondary contamination and secondary scratches of the grinded member can be avoided. Furthermore, the grinding belt 100 can be better utilized to improve grinding and cleaning effect, thereby improving product yield.
- The grinding belt 100 may be rotated in a circular path driven by the driving device 200. When any portion of the grinding belt 100 is moved to a region corresponding to the grinding head portion 500, which is a grinding area of the grinding belt, the portion of the grinding belt is in contact with the member to be grinded and grind the member. The grinding belt 100 has a grinding surface and a non-grinding surface opposite the grinding surface.
- In one embodiment, the grinding belt cleaning structure comprises a cleaning section 300 and a support section 400. The cleaning section 300 is configured to be in contact with and clean the grinding surface of the grinding belt 100. The cleaning section is located on the grinding surface side of the grinding belt 100. The support section 400 is configured to be in contact with the non-grinding surface of the grinding belt 100 to support the grinding belt 100 and provide a contact pressure between the cleaning section and the grinding belt 100. The support section 400 is located on the non-grinding surface side of the grinding belt 100 and at a position corresponding to the cleaning section.
- According to the above embodiment, the support section 400 can be in contact with the non-grinding surface of the grinding belt 100 to support the grinding belt 100. As such, when the cleaning section 300 is in contact with the grinding surface of the grinding belt 100 to perform cleaning, a contact pressure (i.e., a back pressure) is provided between the grinding belt 100 and the cleaning section, thereby facilitating cleaning of the grinding surface of the grinding belt 100.
- Fig. 2 shows a schematic view of a partial structure of a grinding apparatus according to an embodiment. As shown in Fig. 2, the cleaning section comprises a cleaning roller 301, a roller driving device for driving the cleaning roller 301, and a roller moving device 302.
- The cleaning roller 301 is configured to roll and rub the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100. A rolling direction of the cleaning roller 301 coincides with the moving direction of the grinding belt 100.
- The roller moving device 302 is configured to control the cleaning roller 301 to switch between a first state and a second state. In the first state, the cleaning roller 301 is in contact with the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100. In the second state, the cleaning roller 301 is not in contact with the grinding surface of the grinding belt 100.
- In the above-described embodiment, the cleaning section uses a cleaning roller 301 whose rolling direction coincides with the moving direction of the grinding belt 100. That is, a tangential moving direction of the cleaning roller 301 at the contacting area with the grinding surface of the grinding belt 100 coincides with the moving direction of the grinding belt 100. Dirt and residual adhesive on the grinding surface of the grinding belt 100 can be cleaned due to high-speed rubbing by the cleaning roller 301. In addition, the roller moving device 302 controls movement of the cleaning roller 301 to move the cleaning roller 301 to the first state when the grinding belt 100 is being cleaned and to the second state when the grinding belt 100 is not being cleaned. The clean roller may be made of rubber such as an ethylene propylene diene monomer (EPDM) rubber or a material which can clean away organic matter and residual adhesive.
- In the above-described embodiment, the cleaning section uses a cleaning roller 301, which has advantageous such as simple structure, good cleaning effect, convenient handling , and being capable of cleaning the dirt and residual adhesive on the surface of the grinding surface of the grinding belt 100. The cleaning section is not limited thereto.
- In one embodiment, the roller moving device 302 may include a cylinder connected to the cleaning roller 301. Since there is liquid such as cleaning liquid in working environment of the grinding belt 100, the cylinder is advantageous and can has a long service life. In another embodiment, the cleaning roller 301 may be driven by a driving motor or the like.
- In one embodiment, the cleaning section further comprises a first control circuit. The first control circuit is used for controlling operating states of the roller moving device 302. As such, the roller moving device 302 controls the cleaning roller 301 to switch between the first state and the second state in accordance with a preset first period.
- In one embodiment, a working period of the cleaning roller 301 can be set in advance. When a cleaning cycle of the working period is reached, the cleaning roller 301 is driven by the cylinder to advance to the grinding belt 100. In one embodiment, the cleaning cycle is 500 pcs. The cleaning cycle can be adjusted depending on specific production situation. After the cleaning of the grinding belt 100 is completed, the cleaning roller 301 is retracted by the cylinder and in a standby state.
- Fig. 3 shows a schematic view of another partial structure of a grinding apparatus according to an embodiment. In one embodiment, as shown in Figs. 1 to 3, the cleaning section further comprises a cleaning brush 303 and a cleaning brush moving device 304.
- The cleaning brush 303 is configured to be capable of being in contact with and cleaning the grinding surface of the grinding belt 100. The grinding surface of the grinding belt 100 has a plurality of grinding particles. The cleaning brush 303 has bristles 3031, which can reach and clean gaps formed by the plurality of grinding particles. The bristles may be made of a polymer such as nylon.
- The cleaning brush moving device 304 is configured to control the cleaning brush 303 to switch between a third state and a fourth state. When the cleaning brush 303 is in the third state, the cleaning brush 303 is in contact with the grinding surface of the grinding belt 100 and cleans the grinding surface of the grinding belt 100. When the cleaning brush 303 is in the fourth state, the cleaning brush 303 is not in contact with the grinding surface of the grinding belt 100.
- In the above embodiment, the cleaning section uses a cleaning brush 303. When the grinding belt 100 is in motion, the grinding surface of the grinding belt 100 is subjected to high-speed rubbing by the cleaning brush 303 to clean away hard tiny foreign matters or glass debris embedded on the grinding surface of the grinding belt 100. In addition, the cleaning brush movement device 304 controls the movement of the cleaning brush 303. When the grinding belt 100 needs to be cleaned, the cleaning brush 303 is moved to the third state. When the grinding belt 100 does not need to be cleaned, the cleaning brush 303 is moved to the fourth state.
- In the above embodiment, the cleaning section uses the cleaning roller 301, which has advantageous such as simple structure, good cleaning effect, convenient handling and being capable of cleaning the dirt and residual adhesive on the surface of the grinding surface of the grinding belt 100. In other embodiments of the present disclosure, the cleaning section is not limited thereto.
- In one embodiment, the cleaning brush moving device 304 may comprise a cylinder connected to the cleaning brush 303. When the cleaning brush 303 is driven by the cylinder, since there is liquid such as cleaning liquid in the working environment of the grinding belt 100, the cylinder is advantageous and can has a long service life. In another embodiment, the cleaning roller 301 may be driven by a driving motor or the like.
- In one embodiment, the cleaning section further comprises a second control circuit. The second control circuit is used to control operating states of the cleaning brush movement device 304. As such, the cleaning brush movement device 304 controls the cleaning brush 303 to switch between the third state and the fourth state in accordance with a preset second period.
- In one embodiment, the working period of the cleaning brush 303 can be set in advance. When a cleaning cycle of the working period is reached, the cleaning brush 303 is driven by the cylinder to advance to the grinding belt 100. In one embodiment, the cleaning cycle is 500 pcs. The cleaning cycle can be adjusted depending on specific production situation. After the cleaning of the grinding belt 100 is complete, the cleaning brush 303 is retracted by the cylinder and is in a standby state.
- In one embodiment, as shown in Fig. 1, the cleaning section further comprises a shower device 305. The shower device 305 is used for spraying cleaning solution onto the grinding surface of the grinding belt 100 and rinsing the grinding surface of the grinding belt 100.
- In the above-described embodiment, the shower device 305 is provided to spray the cleaning solution on the grinding surface of the grinding belt 100 to flush the grinding surface of the grinding belt 100, thereby improving cleaning effect. The cleaning solution may be an organic cleaning solution comprising alcohol and a detergent.
- In one embodiment, the shower device 305 is provided to work after the cleaning steps by the cleaning roller 301 and the cleaning brush 303. In another embodiment, the shower structure 305 is provided to work at the same time as the cleaning roller 301 and the cleaning brush 303.
- In another embodiment, as shown in Fig. 3, the shower device 305 is combined with the cleaning brush 303 as a unitary structure. The cleaning brush 303 is provided with a plurality of shower holes 3051. The plurality of shower holes 3051 are arranged in a row.
- In one embodiment, as shown in Fig. 1, the grinding belt cleaning structure is located at a position outside the region corresponding to the grinding head portion 500. In other words, the grinding belt cleaning structure is located in a non-grinding area other than the grinding area of the grinding belt 100. As such, the grinding belt can be cleaned in the non- grinding area by the grinding belt cleaning structure while the grinding belt 100 grinds the member in the grinding area.
- In one embodiment, as shown in Figs. 1 to 3, the support section comprises a support roller 401 and a support roller control device 402. The support roller 401 is capable of rolling on the non-grinding surface of the grinding belt 100.
- The support roller control device 402 is used for controlling the support roller 401 to switch between a fifth state and a sixth state in accordance with a preset third period. As such, a supporting force may be provided to the grinding belt 100. When the support roller 401 is in the fifth state, the support roller 401 is in contact with the non-grinding surface of the grinding belt 100 to provide a supporting force to the grinding belt 100. When the support roller 401 is in the sixth state, the support roller 401 is not in contact with the non-grinding surface of the grinding belt 100.
- In the above-described embodiment, the working period of the support roller 401 can be set in advance. When a cleaning cycle of the working period is reached, the support roller 401 is driven by a cylinder to advance to the grinding belt 100. As such, the grinding belt 100 is supported. After the grinding belt 100 is cleaned, the support roller 401 is retracted by the cylinder and in a standby state.
- In one embodiment, at least two support rollers 401 may be provided in the support section. At least one of the support rollers 401 is in a position which corresponds to the position of the cleaning roller 301. At least another one of the support rollers 401 is in another position which corresponds to the position of the cleaning brush.
- Operation of the grinding apparatus according to one embodiment of the present disclosure is described below. A working cycle of the cleaning roller 301 is controlled by the first control circuit. A working cycle of the cleaning roller 303 and a working cycle of the shower device 305 are controlled by the second control circuit. A working cycle of the support roller 401 is controlled by the support roller control device 402. When the preset working cycle is reached, the support roller 401 is advanced by the cylinder. As such, the support roller 401 is in contact with the non-grinding surface of the grinding belt 100 to provide a back pressure. The cleaning roller 301 is advanced and brought into contact with the grinding surface of the grinding belt 100 by the cylinder. The cleaning brush 303 is also advanced and brought in contact with the grinding surface of the grinding belt 100 by the cylinder. The shower device 305 sprays cleaning liquid simultaneously. At this time, the grinding belt 100 is rotated at a high speed and accordingly rubbed at a high speed by the cleaning roller 301 and the cleaning brush 303, thereby achieving excellent cleaning effect of the grinding belt 100. The cleaning effect is further improved by the cleaning liquid.
- In the above-described embodiments, the cleaning roller 301 and the cleaning brush 303 of the cleaning section may be used at the same time. It is also possible to selectively use one of them to clean the grinding belt 100.
- In addition, the grinding apparatus according to one embodiment of the present disclosure may be used in the TFT-LCD industry for cleaning the substrate. It may be applied to other fields.
- Another example of the present disclosure is a grinding method using the grinding apparatus according to one embodiment of the present disclosure. The method comprises driving a grinding belt 100 by a driving device 200 and cleaning the grinding belt 100 by the grinding belt cleaning structure.
- In the step of cleaning the grinding belt 100, an operating state of the roller moving device 302 is controlled so that the roller moving device 302 controls the cleaning roller 301 to switch between the first state and the second state in accordance with the preset first period.
- In the first state, the cleaning roller 301 is in contact with the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100. In the second state, the cleaning roller 301 is not in contact with the grinding surface of the grinding belt 100.
- Furthermore, in the method, an operating state of the cleaning brush moving device 304 is controlled so that the cleaning brush moving device 304 controls the cleaning brush 303 to switch between the third state and the fourth state in accordance with the preset second period. In the third state, the cleaning brush 303 is in contact with the grinding surface of the grinding belt 100 to clean the grinding surface of the grinding belt 100. In the fourth state, the cleaning brush 303 is not in contact with the grinding surface of the grinding belt 100.
- The descriptions of the various embodiments of the present invention have been presented for purposes of illustration, but are not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein was chosen to best explain the principles of the embodiments, the practical application or technical improvement over technologies found in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (19)
- A grinding apparatus, comprising a grinding belt cleaning structure,the grinding belt cleaning structure further comprising a cleaning section at a side of a grinding surface of a grinding belt and a support section at a side of a non-grinding surface of the grinding belt and at a position corresponding to the cleaning section,wherein the grinding belt cleaning structure is located in a non-grinding area of the grinding apparatus.
- The grinding apparatus according to claim 1, wherein the cleaning section is configured to clean the grinding surface of the grinding belt and the support section is configured to provide a contact pressure between the cleaning section and the grinding belt.
- The grinding apparatus according to claim 1 or claim 2, wherein the cleaning section comprises a cleaning roller and a roller moving device,the cleaning roller is configured to roll and rub the grinding surface of the grinding belt, thereby cleaning the grinding surface of the grinding belt, a rolling direction of the cleaning roller coinciding with a moving direction of the grinding belt, andthe roller moving device is configured to control the cleaning roller to switch between a first state and a second state, wherein in the first state, the cleaning roller is in contact with the grinding surface of the grinding belt to clean the grinding surface of the grinding belt, and in the second state, the cleaning roller is not in contact with the grinding surface of the grinding belt.
- The grinding apparatus according to claim 3, wherein the cleaning section further comprises a first control circuit configured to control an operating state of the roller moving device so that the roller moving device controls the cleaning roller to switch between the first state and the second state.
- The grinding apparatus according to claim 3, wherein the cleaning roller is made of an ethylene propylene diene monomer (EPDM) rubber.
- The grinding apparatus according to any one of claims 1 to 5, wherein the cleaning section further comprises a cleaning brush and a cleaning brush moving device,the cleaning brush moving device is configured to control the cleaning brush to switch between a third state and a fourth state, wherein in the third state, the cleaning brush is in contact with the grinding surface of the grinding belt to clean the grinding surface of the grinding belt; and in the fourth state, the cleaning brush is not in contact with the grinding surface of the grinding belt.
- The grinding apparatus according to claim 6, wherein the cleaning brush comprises bristles, the bristles configured to reach and clean gaps between a plurality of grinding particles on the grinding surface of the grinding belt.
- The grinding apparatus according to claim 7, wherein the bristles are made of nylon polymer.
- The grinding apparatus according to any of claims 6-8, wherein the cleaning section further comprises a second control circuit configured to control an operating state of the cleaning brush movement device so that the cleaning brush movement device controls the cleaning brush to switch between the third state and the fourth state.
- The grinding apparatus according to any one of claims 1 to 9, wherein the cleaning section further comprises a shower device configured to spray a cleaning solution onto the grinding surface of the grinding belt, thereby rinsing the grinding surface of the grinding belt.
- The grinding apparatus according to claim 10, wherein the shower device comprises a plurality of shower holes provided on the cleaning brush.
- The grinding apparatus according to claim 10, wherein the cleaning solution comprises alcohol and a detergent.
- The grinding apparatus according to any of claims 1 to 12, further comprising a support section, the support section comprising a support roller and a support roller control device,wherein the support roller is configured to roll on a non-grinding surface of the grinding belt, andthe support roller control device is configured to control the support roller to switch between a fifth state and a sixth state, wherein in the fifth state, the support roller is in contact with the grinding surface of the grinding belt to provide a support force to the grinding belt; and in the sixth state, the support roller is not in contact with the non-grinding surface of the grinding belt.
- The grinding apparatus according to claim 13, wherein the support section comprises at least two support rollers, wherein one of the support rollers is in a position corresponding to a position of the cleaning roller and another one of the support rollers is in a position corresponding to a position of the cleaning brush.
- The grinding apparatus according to any of claims 1 to 14, further comprising a grinding head section on one side of the grinding belt to provide a contact pressure between the grinding belt and a member to be grinded.
- Amethod of grinding using the grinding apparatus according to any one of claims 1 to 14, the method comprising:driving a grinding belt with a driving device, andcleaning the grinding belt with the grinding belt cleaning structure.
- The method of grinding according to claim 16, wherein the grinding belt cleaning structure cleans the grinding belt in the non-grinding area while the grinding belt grinds a member in a grinding area.
- The method of grinding according to claim 16 or claim 17, wherein the cleaning roller and the cleaning brush of the cleaning section of the grinding belt cleaning structure clean the grinding belt at the same time.
- The method of grinding according to any of claims 16-18, wherein the shower device sprays the cleaning solution onto the grinding surface of the grinding belt while the cleaning roller and the cleaning brush of the cleaning section of the grinding belt cleaning structure clean the grinding belt.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610962505.5A CN108015674B (en) | 2016-11-04 | 2016-11-04 | Grinding device |
PCT/CN2017/084041 WO2018082279A1 (en) | 2016-11-04 | 2017-05-12 | Grinding apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3535094A1 true EP3535094A1 (en) | 2019-09-11 |
EP3535094A4 EP3535094A4 (en) | 2020-07-08 |
Family
ID=62075653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17818418.0A Withdrawn EP3535094A4 (en) | 2016-11-04 | 2017-05-12 | Grinding apparatus |
Country Status (4)
Country | Link |
---|---|
US (1) | US20180297171A1 (en) |
EP (1) | EP3535094A4 (en) |
CN (1) | CN108015674B (en) |
WO (1) | WO2018082279A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113579943B (en) * | 2021-08-06 | 2023-07-18 | 江苏库纳实业有限公司 | Aluminum profile surface treatment equipment and surface treatment method thereof |
CN114800137B (en) * | 2022-04-18 | 2023-11-17 | 安徽省方舟九社包装有限公司 | Plastic packaging product burr treatment device with good use effect |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3085268A (en) * | 1961-05-26 | 1963-04-16 | Romeo T Proulx | Sanding belt cleaner |
US3753269A (en) * | 1971-05-21 | 1973-08-21 | R Budman | Abrasive cloth cleaner |
US3872627A (en) * | 1974-02-07 | 1975-03-25 | Timesavers Inc | Wide belt sanding machine with improved dust collector |
US4109422A (en) * | 1976-04-05 | 1978-08-29 | Parsons Enterprises, Inc. | Sander cleaning process |
US4205490A (en) * | 1978-06-15 | 1980-06-03 | Kimwood Corporation | Vertically shiftable belt cleaner |
US4293970A (en) * | 1979-06-28 | 1981-10-13 | Bencene Robert C | Belt cleaning apparatus |
US4525955A (en) * | 1981-10-20 | 1985-07-02 | Timesavers, Inc. | Abrasive belt cleaning system |
US4720939A (en) * | 1986-05-23 | 1988-01-26 | Simpson Products, Inc. | Wide belt sander cleaning device |
US4815238A (en) * | 1987-04-13 | 1989-03-28 | Pro-Kleen Systems International, Ltd. | Debris collector for a wide belt sander and the like |
WO1993001896A1 (en) * | 1991-07-22 | 1993-02-04 | Robert Keith Smith | Belt cleaner |
DE19500611C1 (en) * | 1995-01-11 | 1996-06-05 | Heesemann Juergen | Blasting device for a rotating sanding belt of a belt sanding machine |
DE19502290C2 (en) * | 1995-01-26 | 1997-01-23 | Heesemann Karl Masch | Process for setting a grinding belt of a belt grinder and belt grinder for carrying out the method |
JP2647050B2 (en) * | 1995-03-31 | 1997-08-27 | 日本電気株式会社 | Wafer polishing equipment |
US5620361A (en) * | 1996-02-28 | 1997-04-15 | Aylesworth; Perry J. | Sanding accessory and method |
WO1998045090A1 (en) * | 1997-04-04 | 1998-10-15 | Obsidian, Inc. | Polishing media magazine for improved polishing |
PL183946B1 (en) * | 1997-06-17 | 2002-08-30 | Bielas Slawomir | Apparatus for cleaning abrasive bands |
US6162113A (en) * | 1997-08-25 | 2000-12-19 | Armstrong; Jay T. | Process using in-situ abrasive belt/planer cleaning system |
TW396084B (en) * | 1998-08-12 | 2000-07-01 | Worldwild Semiconductor Mfg Co | Chemical mechanic polishing machine |
US6352595B1 (en) * | 1999-05-28 | 2002-03-05 | Lam Research Corporation | Method and system for cleaning a chemical mechanical polishing pad |
US6244944B1 (en) * | 1999-08-31 | 2001-06-12 | Micron Technology, Inc. | Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates |
US6645046B1 (en) * | 2000-06-30 | 2003-11-11 | Lam Research Corporation | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers |
US6875091B2 (en) * | 2001-01-04 | 2005-04-05 | Lam Research Corporation | Method and apparatus for conditioning a polishing pad with sonic energy |
CN101648364B (en) * | 2009-09-01 | 2011-11-16 | 王超 | Washed-out sand machine |
CN103286688A (en) * | 2011-11-12 | 2013-09-11 | 孙长顺 | Polishing and sand surface self-cleaning mechanism |
CN102601711B (en) * | 2012-03-20 | 2014-10-08 | 友达光电(苏州)有限公司 | Board grinding device |
CN203155648U (en) * | 2013-01-18 | 2013-08-28 | 深圳市易天自动化设备有限公司 | Glass cleaning system |
CN203495721U (en) * | 2013-08-30 | 2014-03-26 | 陕西德赛新材料科技有限公司 | Coated abrasive tool finishing device |
CN204546294U (en) * | 2015-01-08 | 2015-08-12 | 天津鼎天斯凯特机械有限公司 | A kind of work-piece polishing device |
-
2016
- 2016-11-04 CN CN201610962505.5A patent/CN108015674B/en active Active
-
2017
- 2017-05-12 WO PCT/CN2017/084041 patent/WO2018082279A1/en active Application Filing
- 2017-05-12 US US15/578,422 patent/US20180297171A1/en not_active Abandoned
- 2017-05-12 EP EP17818418.0A patent/EP3535094A4/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP3535094A4 (en) | 2020-07-08 |
US20180297171A1 (en) | 2018-10-18 |
WO2018082279A1 (en) | 2018-05-11 |
CN108015674A (en) | 2018-05-11 |
CN108015674B (en) | 2020-03-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102810459B (en) | Method for cleaning wafer after chemical mechanical planarization | |
US8808061B2 (en) | Method and apparatus for dressing polishing pad | |
KR20190052138A (en) | Edge polishing apparatus and method of wafer | |
TWI443732B (en) | Post-cmp wafer cleaning apparatus | |
US20100248597A1 (en) | Equipment and method for cleaning polishing cloth | |
JP6054805B2 (en) | Substrate cleaning device | |
US9011605B2 (en) | Substrate cleaning method and roll cleaning member | |
CN112735940B (en) | Dynamically adjustable wafer cleaning method | |
US10256120B2 (en) | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | |
CN102485358A (en) | Wafer cleaning device and method | |
CN113941536A (en) | Wafer cleaning device for controlling posture of cleaning brush | |
WO2018082279A1 (en) | Grinding apparatus | |
KR101058188B1 (en) | Substrate Cleaning Equipment | |
TW201922413A (en) | Substrate processing apparatus and substrate processing method capable of removing impurities by bringing a scrubbing tool into sliding contact with the back surface of the substrate | |
CN105364699A (en) | A chemical mechanical polishing method and a chemical mechanical polishing apparatus | |
KR20080109181A (en) | Device for cleaning wafer face of semiconductor production equipment | |
KR101619044B1 (en) | Non-contact type wafer cleaning system | |
JP4283068B2 (en) | Method for initializing cleaning member of substrate cleaning apparatus, substrate cleaning apparatus, substrate polishing and cleaning system | |
JP2007157936A (en) | Substrate processing device, and substrate processing method | |
KR20170087766A (en) | Polisher for notch of wafer | |
CN112974324B (en) | Wafer cleaning brush and wafer cleaning device | |
US9636714B2 (en) | Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes | |
CN117340777A (en) | Chemical mechanical polishing equipment | |
KR20200051400A (en) | Substrate polishing system | |
KR20130080183A (en) | A dresser of wafer polishing apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20180105 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20200609 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: B24B 53/10 20060101AFI20200604BHEP Ipc: B24B 7/24 20060101ALI20200604BHEP Ipc: B24B 21/14 20060101ALI20200604BHEP Ipc: B24B 13/015 20060101ALI20200604BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20200812 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: BOE TECHNOLOGY GROUP CO., LTD. Owner name: HEFEI BOE DISPLAY TECHNOLOGY CO., LTD. |