EP3492698A1 - Mit einer schallschutzanordnung ausgestattetes vakuumpumpsystem - Google Patents

Mit einer schallschutzanordnung ausgestattetes vakuumpumpsystem Download PDF

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Publication number
EP3492698A1
EP3492698A1 EP17204792.0A EP17204792A EP3492698A1 EP 3492698 A1 EP3492698 A1 EP 3492698A1 EP 17204792 A EP17204792 A EP 17204792A EP 3492698 A1 EP3492698 A1 EP 3492698A1
Authority
EP
European Patent Office
Prior art keywords
hood
casing
soundproofing
pumping system
air inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17204792.0A
Other languages
English (en)
French (fr)
Inventor
Roberto Carboneri
Jonatan Perrotta
Gianfranco Cappuzzo
Giuseppe Epifani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Priority to EP17204792.0A priority Critical patent/EP3492698A1/de
Priority to CN201811324739.2A priority patent/CN109944802A/zh
Priority to JP2018217361A priority patent/JP2019100335A/ja
Priority to US16/201,506 priority patent/US20190162187A1/en
Publication of EP3492698A1 publication Critical patent/EP3492698A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/065—Noise dampening volumes, e.g. muffler chambers
    • F04C29/066—Noise dampening volumes, e.g. muffler chambers with means to enclose the source of noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/32—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having both the movement defined in group F04C18/02 and relative reciprocation between the co-operating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/063—Sound absorbing materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member

Definitions

  • the present invention relates to a vacuum pumping system comprising a vacuum pump and provided with a soundproofing arrangement.
  • the present invention relates to a vacuum pumping system comprising a rotary vane vacuum pump and provided with a soundproofing arrangement.
  • Vacuum pumps are employed in a wide range of applications for obtaining subatmospheric pressure conditions, going from rough vacuum conditions (i.e. about 10 -1 Pa) to very high vacuum conditions (i.e. about 10 -8 Pa).
  • rotary vane vacuum pumps are mechanical pumps, namely positive displacement pumps, that are generally used to obtain low vacuum conditions, in a pressure range from atmospheric pressure to about 10 -1 Pa.
  • rotary vane vacuum pumps generally include a pump housing having a gas suction port and a gas exhaust port and receiving a stator defining a cylindrical chamber; a cylindrical rotor is eccentrically arranged inside the stator chamber, which rotor is equipped with spring-loaded radial vanes cooperating with the wall of the stator chamber for pumping a gas from the gas suction port to the gas exhaust port.
  • the pump housing is filled with oil so that the stator is immersed in an oil bath, which has the function of cooling down and lubricating the pump and isolating it from the outside environment.
  • a drive motor namely an electric motor
  • the drive motor is typically arranged outside the pump housing and it is connected to the pump housing through an interface flange.
  • blowers or fans are provided for cooling down the rotary vane vacuum pump and, in particular, for keeping the temperature of the oil of the vacuum pump oil bath in the pump housing below a predetermined temperature threshold.
  • Vacuum pumping systems comprising other kinds of vacuum pumps including moving parts (such, as for instance, turbomolecular pumps, which are commonly used for obtaining high vacuum conditions) and/or comprising pump accessories including moving parts also generate noise, which could represent a remarkable drawbacks in some applications.
  • moving parts such, as for instance, turbomolecular pumps, which are commonly used for obtaining high vacuum conditions
  • pump accessories including moving parts also generate noise, which could represent a remarkable drawbacks in some applications.
  • the noise generated by a vacuum pumping system increases upon increase of the pumping speed of the vacuum pump.
  • a possible solution for reducing the noise generated by the vacuum pumping system is to run the vacuum pump at low speed.
  • US 5,145,335 discloses a vacuum pumping system comprising a rotary vane vacuum pump comprising a first housing, receiving the pump stator and the pump rotor and filled with oil, a drive motor associated to the vacuum pump, and a second housing surrounding the first housing and the drive motor.
  • US 2010/0116583 suggests to provide a soundproofing hood that radially encloses the vacuum pumping system and is open at both axial ends, so that the cooling of the vacuum pumping system is not hindered.
  • the soundproofing arrangement should be provided with its own blowers or fans in order to guarantee that the temperature of the vacuum pump is kept below a desired threshold.
  • the vacuum pumping system of the invention comprises a vacuum pump, accommodated in a pump housing, and a soundproofing hood which surrounds the pump housing and is provided with a hood air inlet, which is in communication with the pump housing air inlet, for allowing fresh air to flow into the inside of the hood and then through the vacuum pump for cooling it down, and with a hood air outlet, which is in communication with the pump housing air outlet, for allowing heated air coming from the vacuum pump to flow out from the hood.
  • the vacuum pumping system comprises one or more additional soundproofing shielding element(s) arranged between the hood air inlet and/or outlet and the pump housing air inlet and/or outlet, respectively.
  • a straight air flow from the surrounding environment to the vacuum pump through the hood air inlet and the pump housing inlet and/or a straight air flow from the vacuum pump to the surrounding environment through the pump housing outlet and the hood air outlet can be prevented, which allows to strongly reduce the noise generated by the vacuum pumping system and transmitted to the surrounding environment, down to below a threshold of 50 - 55 dB.
  • said additional soundproofing shielding element(s) is/are designed as a casing surrounding the pump housing, said casing being provided with an air inlet and an air outlet for allowing fresh air to flow into the casing and then through the vacuum pump for cooling it down and for allowing heated air coming from the vacuum pump to be discharged from the casing, respectively.
  • the hood air inlet is preferably provided on the peripheral wall of the soundproofing hood at a location which is as far as possible from the casing air inlet of the underlying casing, so that the noise dampening effect is optimized, the path of the fresh air inside the hood and around the casing surrounding the vacuum pump is maximized and the cooling efficiency is also maximized.
  • the hood air outlet is preferably provided in the peripheral wall of the soundproofing hood at a location which is as far as possible from the location of the hood air inlet on said peripheral wall of the soundproofing hood, so that heat exchange between the fresh air entering through said hood air inlet and the heated air exiting through said hood air outlet can be prevented.
  • said additional soundproofing shielding element(s) is/are designed as a casing surrounding the pump housing and raised above the floor and the casing air outlet is provided at the bottom wall of the casing.
  • the vacuum pumping system of the invention further comprises a soundproofing tray provided at the bottom wall of the casing, between the casing air outlet and the floor.
  • the soundproofing hood is provided with a partition extending from the inner wall of the soundproofing hood to the outer wall of the underlying casing and separating a space in which the hood air inlet and the casing air inlet are arranged from a space in which the hood air outlet and the casing air outlet are arranged.
  • such partition completely separates the space in which the hood air inlet and the casing air inlet are arranged from the space in which the hood air outlet and the casing air outlet are arranged.
  • the heated air coming out of the vacuum pump through the casing air outlet is prevented from coming into contact with the fresh air entering the vacuum pump through the casing air inlet.
  • the temperature of the fresh air entering the vacuum pump is not raised by possible mixing with the heated air coming out of the vacuum pump itself.
  • the provision of the soundproofing arrangement of the invention does not involve any relevant increase in manufacturing costs and power consumption, and the overall design of the vacuum pumping system according to the invention is simple and reliable.
  • the soundproofing hood and/or the additional soundproofing shielding element(s) and/or the soundproofing tray has/have a multi-layered structure comprising several layers of soundproofing material, including at least a first, inner layer made of sound-absorbing material and a second, outer layer made of sound-insulating material.
  • Such an exemplary embodiment has not to be considered as limiting the scope of the present invention, which could be applied to vacuum pumping systems comprising any kind of vacuum pump that generates noise.
  • a vacuum pumping system 100 according to the invention is shown.
  • the vacuum pumping system 100 comprises a rotary vane vacuum pump 10 and a drive motor 20.
  • the rotary vane vacuum pump 10 comprises a pump housing 12 in which a gas suction port and a gas exhaust port are defined.
  • a stator 14 defining a cylindrical stator chamber is received inside the pump housing 12.
  • a rotor 16 is also received in the pump housing 12, said rotor having an axis parallel to the axis of the stator chamber, but being eccentrically arranged relative to the stator chamber axis.
  • the rotor 16 can be a single-stage rotor or a dual-stage rotor. Each stage of the rotor 16 is equipped with one or more radially movable radial vanes that are mounted on the rotor 16 and kept against the wall of the stator chamber.
  • the pump housing 12 is filled with such an amount of oil that the stator 14 is immersed in an oil bath acting as cooling and lubricating fluid.
  • the drive motor 20 typically is an electric motor.
  • the drive motor 20 is arranged externally to the pump housing 12 and cantilevered thereon, said drive motor 20 driving in rotation the pump rotor 16. More in detail, the shaft of the rotor of the drive motor 20 is connected to shaft of the pump rotor 16 for driving the latter in rotation about its axis.
  • a cooling fan 30 for cooling the vacuum pump 10, and more particularly the oil of the oil bath of the vacuum pump, is also mounted on the shaft of the drive motor 20.
  • a soundproofing hood 50 is provided, which soundproofing hood surrounds the pump housing 12 as well as the drive motor 20.
  • the soundproofing hood 50 comprises a roof 50a and a peripheral wall 50b completely surrounding the pump housing 12.
  • the roof 50a has a rectangular shape and the peripheral wall 50b comprises four side walls, equal and parallel two by two, which downwardly extend from respective sides of the roof 50a.
  • the roof 50a and the side walls forming the peripheral wall 50b are preferably made as separate parts, which can be assembled together, for instance by screws or rivets.
  • the soundproofing hood does not comprises any bottom wall. This allows the soundproofing hood 50 to be easily lowered onto the pump housing 12 after the latter has been moved to the desired location and this also allows said soundproofing hood 50 to be easily lifted from the pump housing 12 when necessary, for instance for inspection or maintenance of the vacuum pumping system.
  • the soundproofing hood 50 could be provided with a bottom wall, if desired.
  • the soundproofing hood could be provided with a peripheral frame extending from the lower edge of the peripheral wall 50b and having a suitable width so as not to interfere with the casing when the soundproofing hood is lowered or lifted.
  • the soundproofing hood 50 preferably has a multi-layered structure comprising two or more layers made of soundproofing material.
  • the soundproofing hood 50 comprises a first, inner layer 50' made of a sound-absorbing material and a second, outer layer 50" made of a sound-insulating material.
  • the first, inner layer can be made, for instance, of an open-cell foam such as polyurethane foam and it can be provided with pyramid or wedge shapes on its inner side.
  • the second, outer layer can be made, for instance, of a heavy plastic material having long molecules.
  • the number, thickness and materials of the soundproofing hood 50 can be chosen in each case according to the need of the specific application, taking into account the vacuum pump size and speed, the spectrum of the generated noise and the required threshold for the noise in the environment surrounding the vacuum pumping system.
  • the soundproofing hood 50 is provided with a hood air inlet 52, which is in communication with the pump housing air inlet, for allowing a stream of fresh air to enter the hood for cooling down the vacuum pump 10, and it is also provided with a hood air outlet 54, which is in communication with the pump housing air outlet, for discharging the heated air, which has passed through the vacuum pump and has cooled it down, from the hood.
  • the hood 50 dampens the noise generated by the vacuum pumping system 100, it has proven to be unable to reduce the noise in the environment surrounding the vacuum pumping system below the threshold required in certain demanding applications such as the so-called "quiet laboratories", i.e. to below the threshold of 50 - 55 dB.
  • one or more additional soundproofing shielding element(s) is/are arranged between the hood air inlet and/or outlet and the pump housing air inlet and/or outlet, respectively.
  • the vacuum pumping system may comprise a suitably shaped wall arranged between the hood air inlet 52 and the pump housing air inlet and/or a suitably shaped wall arranged between the pump housing air outlet and the hood air outlet 54.
  • such additional soundproofing shielding element(s) is/are designed as a casing 40 which can be contained under the soundproofing hood 50 and surrounds the pump housing 12, so as to form an effective shield between the hood air inlet and the pump housing air inlet and between the hood air outlet and the pump housing air outlet, respectively.
  • the casing 40 has a top wall 40a, a peripheral wall 40b completely surrounding the pump housing 12 and the drive motor 20 and a bottom wall 40c.
  • the top wall 40a and the bottom wall 40c of the casing have a substantially rectangular outline, and the peripheral wall 40b of the casing correspondingly comprises four side walls, substantially equal and parallel two by two.
  • the casing 40 is preferably mounted on wheels 42, allowing to move the vacuum pumping system 100 in the surrounding environment for carrying it to the desired location. Thanks to the presence of the wheels 42, the bottom wall 40c of the casing 40 is raised above the floor.
  • the casing 40 is provided with a soundproofing lining 44, at least partially covering the inner surface of the casing.
  • a soundproofing lining 44 comprises at least one layer made of a soundproofing material, namely a sound-absorbing material such as polyurethane foam.
  • the casing 40 is provided with a casing air inlet 46 for allowing a stream of fresh air to enter the casing for cooling down the vacuum pump 10.
  • the casing air inlet 46 is preferably provided in the peripheral wall 40b of the casing 40, at a location which is as far as possible from the cooling air inlet of the pump housing 12 (i.e. in the side wall 40b' of the peripheral wall 40b opposite to the pump housing inlet), so that the path of the fresh air around the pump housing 12 is maximized and the cooling of the vacuum pump is accordingly optimized.
  • the casing 40 is also provided with a casing air outlet 48 for discharging the heated air, which has passed through the vacuum pump and has cooled it down, from the casing.
  • the casing air outlet 48 is preferably provided in the bottom wall 40c of the casing.
  • the noise generated by the vacuum pumping system in the surrounding environment can be further dampened, below the threshold required in certain demanding applications such as the so-called "quiet laboratories.
  • the soundproofing hood 50 is provided with a partition 56 extending from the inner wall of the soundproofing hood 50 to the outer wall of the underlying casing 40 and separating a space in which the hood air inlet 52 and the casing air inlet 46 are arranged from a space in which the hood air outlet 54 and the casing air outlet 48 are arranged.
  • said partition 56 is suitably shaped so as to completely separate the space in which the hood air inlet 52 and the casing air inlet 46 are arranged from the space in which the hood air outlet 54 and the casing air outlet 48 are arranged.
  • the temperature of the fresh air entering the vacuum pump is not raised before entering the casing 40, the cooling of the vacuum pump is effective and there is no need to provide the soundproofing hood 50 with additional cooling means.
  • the hood air inlet 52 is provided in a first side wall 50b' of the hood peripheral wall 50b, at a certain height above the lower edge of said peripheral wall, and the hood air outlet 54 is provided in a second, opposite side wall 50b" of the hood peripheral wall 50b, close to the lower edge of said peripheral wall (see for instance Figures 1a and 1b ). Due to the fact that the hood air inlet 52 and the hood air outlet 54 are arranged on opposite side walls of the hood peripheral wall 50b, they are as far as possible from each other, so that any heat exchange between the fresh air entering the hood air inlet and the heated air coming out of the hood air outlet is effectively prevented.
  • the partition 56 is formed as a peripheral frame extending all along the inner side of the peripheral wall 50b of the soundproofing hood 50, at a height below the hood air inlet 52 and above the hood air outlet 54, and extending to the outer wall of the casing 40, so as to completely and effectively separate a space in which the hood air inlet 52 and the casing air inlet 46 are located from a space in which the hood air outlet 54 and the casing air outlet 48 are located.
  • Such partition 56 can be made of any suitable material, e.g. paperboard.
  • the soundproofing hood 50 is preferably arranged with respect to the underlying casing 40 in such a way that the hood air inlet 52 is as far as possible from the casing air inlet 46.
  • the side wall 50b' of the hood peripheral wall 50b in which the hood air inlet is provided is on the opposite side with respect to the side wall 40b' of the casing peripheral wall 40b in which the casing air inlet is provided.
  • the hood air inlet is far from the casing air inlet so that the noise transmission through the casing air inlet and the hood air inlet is strongly reduced; on the other hand, the path of the fresh air inside the soundproofing hood and around the casing enclosing the vacuum pump is maximized, so that the cooling effect on the vacuum pump is correspondingly maximized.
  • the peripheral wall 50b of the soundproofing hood 50 is further provided with an additional opening 58 for the passage of electrical cables and connections (not shown) of the vacuum pumping system 100.
  • Such opening 58 is preferably arranged near the hood air inlet 52, i.e. as far as possible from the casing air inlet 46, in order to minimize noise transmission therethrough.
  • the casing air outlet 48 is provided in the bottom wall 40c of the casing, so that the flow of heated air coming out of the casing is directed toward the underlying floor.
  • the vacuum pumping system 100 may further comprise a soundproofing tray 60 to be arranged at the casing air outlet 48, between such casing air outlet and the floor.
  • the soundproofing tray 60 preferably has a multi-layered structure comprising two or more layers made of soundproofing material, most preferably including a first, upper layer made of sound-absorbing material, and a second, lower layer made of sound insulating material.
  • the soundproofing tray 60 preferably has an "L" shape, with a first arm 60a substantially parallel to the bottom wall 40c of the casing 40 and a second arm 60b substantially perpendicular to said casing bottom wall 40c and interposed between the casing air outlet 48 and the hood air outlet 54.
  • the soundproofing tray 60 allows to obtain a further advantage: the heated air discharged from the casing air outlet 46 cannot directly flow to the hood air outlet 54, but it is forced to further flow around the casing 40 before leaving the soundproofing hood, thus further increasing the length of the flow path inside said soundproofing hood and further increasing the cooling of the vacuum pump.
  • the overall path of the cooling air inside the vacuum pumping system 100 of the invention is indicated by thick arrows in the attached Figures.
  • the fresh air sucked by the fan 30 enters the soundproofing hood 50 through the hood air inlet 54 (A) and it is forced to flow along the facing side wall 40b" of the peripheral wall 40b of the casing 40 and along the whole area of the top wall 40a of said casing before reaching the casing air inlet 46 (B). After passing through said casing air inlet 46, the air is forced to flow around the pump housing 12 before reaching the opposite side of said pump housing (C) and penetrating into it. Then the air passes through the vacuum pump 10 and is discharged through the casing air outlet 48.
  • the air is further forced to flow along the bottom wall 40c of the casing 40 (D) before leaving the soundproofing hood through the hood air outlet 54 (E). All along such path the heat exchange between the vacuum pump and the cooling air takes place, so that by maximizing the length of the air flow path, the cooling efficiency is also maximized.
  • the heated air coming out of the casing air outlet 48 is warmer than the fresh air entering through the hood air inlet 52, so that it would have the tendency to move upwards and mix with the colder fresh air.
  • this is effectively avoided by the provision of the partition 56.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP17204792.0A 2017-11-30 2017-11-30 Mit einer schallschutzanordnung ausgestattetes vakuumpumpsystem Withdrawn EP3492698A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP17204792.0A EP3492698A1 (de) 2017-11-30 2017-11-30 Mit einer schallschutzanordnung ausgestattetes vakuumpumpsystem
CN201811324739.2A CN109944802A (zh) 2017-11-30 2018-11-08 设置有隔音装置的真空泵系统
JP2018217361A JP2019100335A (ja) 2017-11-30 2018-11-20 防音装置を備える真空ポンピングシステム
US16/201,506 US20190162187A1 (en) 2017-11-30 2018-11-27 Vacuum pumping system provided with a soundproofing arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17204792.0A EP3492698A1 (de) 2017-11-30 2017-11-30 Mit einer schallschutzanordnung ausgestattetes vakuumpumpsystem

Publications (1)

Publication Number Publication Date
EP3492698A1 true EP3492698A1 (de) 2019-06-05

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EP17204792.0A Withdrawn EP3492698A1 (de) 2017-11-30 2017-11-30 Mit einer schallschutzanordnung ausgestattetes vakuumpumpsystem

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US (1) US20190162187A1 (de)
EP (1) EP3492698A1 (de)
JP (1) JP2019100335A (de)
CN (1) CN109944802A (de)

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US11607477B2 (en) * 2020-02-10 2023-03-21 Zimmer Gmbh Apparatus and system for reducing vaccum pump noise
EP3933207A1 (de) * 2020-06-29 2022-01-05 Dürr Dental SE Medizinisches, insbesondere dentalmedizinisches, gebläse mit schallisolierendem dämmsystem
CN112483342A (zh) * 2020-12-10 2021-03-12 山东泰丰智能控制股份有限公司 一种带吸音栅的紧凑高效型泵
CN114001030B (zh) * 2021-11-03 2023-04-25 信尔胜机械（江苏）有限公司 一种喷油螺杆真空泵
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