EP3347696A1 - Lichtleitvorrichtung, messsystem und verfahren zum herstellen einer lichtleitvorrichtung - Google Patents

Lichtleitvorrichtung, messsystem und verfahren zum herstellen einer lichtleitvorrichtung

Info

Publication number
EP3347696A1
EP3347696A1 EP16751617.8A EP16751617A EP3347696A1 EP 3347696 A1 EP3347696 A1 EP 3347696A1 EP 16751617 A EP16751617 A EP 16751617A EP 3347696 A1 EP3347696 A1 EP 3347696A1
Authority
EP
European Patent Office
Prior art keywords
light
optical fiber
light guide
coupling
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16751617.8A
Other languages
German (de)
English (en)
French (fr)
Inventor
Daniel AQUINO MAIER
Martin Schreivogel
Philipp ELMLINGER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3347696A1 publication Critical patent/EP3347696A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206Optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4266Thermal aspects, temperature control or temperature monitoring
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/08Optical fibres; light guides
    • G01N2201/0806Light rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/08Optical fibres; light guides
    • G01N2201/0873Using optically integrated constructions

Definitions

  • the invention is based on a device or a method according to the preamble of the independent claims.
  • the subject of the present invention is also a computer program.
  • Optical fibers such as glass fibers or waveguides are usually made of a core, English core, and a cladding, English cladding, wherein the light-reflecting effect based on total reflections arises because the core has a higher refractive index compared to the cladding.
  • the differences between the refractive indices can be very small, for example less than 0.05.
  • Optical fibers for sensor applications such as in the area of
  • Absorption spectroscopy for example, can be designed to divide a light train emanating from a light source for reference measurements and in this case to conduct as much light as possible to a sensitive unit.
  • the light beam can be split using planar light guide structures such as Y couplers.
  • Light guide device for guiding a light beam between a light source and a measuring unit for measuring a gas concentration, a measuring system, a method for manufacturing a light guiding device, a device which uses this method, and finally a corresponding one
  • a light-guiding device for guiding a light beam between a light source and a measuring unit for measuring a substance concentration wherein the light-guiding device has the following features: a light guide with at least one coupling section facing the light source for coupling in the light beam and an outcoupling section facing or facing the measuring unit to the
  • the light guide is designed to guide the light beam between the coupling-in section and the coupling-out section by total reflection at an interface with a fluid or material surrounding the light guide and having a refractive index smaller than the light guide; and a holding device configured to hold the light guide in the fluid such that at least a major portion of a surface of the light guide is in contact with the fluid.
  • An optical waveguide can be understood to mean a transparent component, for example in the form of a straight, curved or branched rod or beam.
  • the light guide may be suitable for use in miniaturized systems. The light pipe is thereby reflected by a
  • the light source may be one or more light-emitting diodes or one or more laser diodes.
  • the light source may also include one or more reflective elements such as mirrors to one of a Light emission unit of the light source emitted light to guide in a desired light output direction of the light source. Under a single or
  • Auskoppelabites can be understood a portion of a surface of the light guide, in particular, for example, a cross-sectional area.
  • the cross-sectional area may be approximately rectangular, round or hexagonal.
  • a measuring unit for example, a measuring cell, a measuring detector or a reference detector can be understood.
  • the fluid may be a gas or gas mixture such as air or even a liquid such as oil.
  • the material may be a transparent material such as a silicone material.
  • the light guide can be arranged or arranged, for example, in a filled or filled with the fluid or material and fluid-tight sealable housing.
  • a holding device may be understood to mean a holder for fastening or placing the optical waveguide.
  • the holding device can be positively, positively or materially connected to the light guide. It is also conceivable, however, a one-piece design of the light guide and the holding device, wherein the light guide and the holding device can be made of the same material.
  • the approach described here is based on the finding that using a sheathless light guide and a corresponding holder for
  • Curves, mode mixers, splitters and Y-couplers allows.
  • a correspondingly thick core layer of the light guide can be particularly in connection with the so-called butt coupling, but also at
  • such a light guide device can have a high
  • the light guide is well suited for use in absorption spectroscopy, especially in the UV absorption spectroscopy for the optical detection of (off) gases such as
  • Nitrogen oxides NO, NO 2 and sulfur oxides (SO 2) as well as ammonia (NH 3) or ozone (03).
  • the light-guiding device can be realized, for example, in the form of a free-standing glass core light guide with an air-vacuum jacket.
  • the advantage of such a light-conducting system is that as much light as possible can be coupled in and guided, at the same time enabling elements such as couplers.
  • the light guide device requires no lenses and can be miniaturized.
  • the production costs can be reduced;
  • this can simplify the production and increase the robustness.
  • external optical elements such as mirrors or lenses can be omitted, whereby the adjustment effort and thus the production costs can be significantly reduced.
  • Some of the elements mentioned here can also be dispensed with, where optical elements which may also be integrated in a light source may be required for coupling in / out of light into the measuring cell.
  • the light-guiding device may have a base element for receiving the holding device.
  • a base element for receiving the holding device.
  • the floor element be made of silicon or a silicon-containing material.
  • the bottom element can be formed, for example, with a corresponding recess or recess in order to allow the largest possible contact of the light guide with the fluid. By the bottom element, the holding device can be stably supported.
  • the light guide and the holding device are made in one piece.
  • the light guide and the holding device are made in one piece.
  • Decoupling portion is formed by a cross-sectional area of a second end of the light guide.
  • the light guide as a bar with rectangular or hexagonal cross section and corresponding
  • Cross-sectional surfaces are manufactured as input or decoupling section. Also by this embodiment, the light guide can be produced very easily.
  • the light guide and, additionally or alternatively, the holding device may be made of glass or a polymer or of both.
  • Such materials offer the advantage of low manufacturing costs and good transmission properties, especially in the wavelength range of UV light.
  • Temperature control unit for active and / or passive cooling and / or heating of the light source and / or the light guide and / or the measuring unit to provide. That is, in other words, that the light source and / or the light guide and / or measuring units connected to the light guide, e.g. Photodetectors or an absorption measuring cell to be coupled to active and / or passive temperature controller or cooling elements.
  • a temperature controller may e.g. be realized by a Peltier element.
  • Such an apparatus may be particularly advantageous in the absorption spectroscopy of exhaust gases to enhance the function of temperature-sensitive elements, such as e.g. LEDs or photodetectors, in environments with high heat or strong
  • Temperature variations e.g. in the exhaust system of internal combustion engines. Furthermore, by regulating the temperature of
  • the holding device may comprise at least a first holding element and a second holding element.
  • the light guide can be clamped or clamped between the first holding element and the second holding element.
  • the first holding element or, additionally or alternatively, the second holding element can be configured U- or L-shaped.
  • the two holding elements can be connected to a frame with each other.
  • the first holding element at at least one point of contact, at which the first holding element contacts the optical waveguide have a tapering in the direction of the light guide cross section. Accordingly, alternatively or additionally, the second holding element on at least one
  • Touch point at which the second holding element contacts the optical waveguide have a tapering in the direction of the light guide cross section.
  • the cross section may be tapered.
  • the optical waveguide can at least one branch point at least one optical fiber branch for deflecting and / or dividing one over the
  • the optical fiber branch can be, for example, one with the input and output coupling section
  • the acting main branch connected auxiliary branch of the light guide act, in this case, the light guide branch, depending on the embodiment, for example, be arranged at right angles or at an acute angle to the main branch.
  • the optical fiber branch can also have a corresponding coupling-out section for decoupling one of the two partial beams.
  • the light beam can be directed simultaneously in different directions.
  • the light guide can be realized for example as a Y-shaped coupler.
  • the optical fiber also act as a holding element for holding the light guide at the same time.
  • the optical waveguide can at least one first optical fiber branch and at at least one first branch point at least one second branch point at least one second
  • the first branching point can be designed to divide a light beam coupled in via the coupling-in section into a first partial beam and a second partial beam such that the first partial beam is directed to the coupling-out section and the second partial beam is directed into the first optical fiber branch.
  • the second branching point may be configured to direct a light beam coupled in via the coupling-out section into the second optical waveguide and / or to divide it into a third sub-beam and a fourth sub-beam such that the third sub-beam adjoins the coupling-in section and the fourth sub-beam into the second sub-beam second optical fiber is directed.
  • the second branch point can be designed to direct the light beam or the fourth partial beam coupled in via the coupling-out section into a direction deviating from a direction of the light beam coupled in via the coupling-in section or of the first partial beam or the second partial beam.
  • the two light guide branches can be arranged on mutually adjacent or opposite sides of the light guide. Also by this embodiment, the light guide can be realized in a particularly space-saving with relatively few parts.
  • optical waveguide is shaped in accordance with a further embodiment in order to homogenize the light beam.
  • the optical waveguide can have at least sections thereof a spiral or wave-shaped structure.
  • additional optical elements for homogenizing the light beam can be omitted.
  • the approach described here also provides a measuring system having the following features: a light-guiding device according to one of the preceding embodiments; a light source which is arranged facing the coupling-in section of the light guide; and a measuring unit for measuring a gas or substance concentration, wherein the measuring unit is arranged opposite the coupling-out section of the light guide.
  • the light source or a light-emitting element does not necessarily have to be arranged opposite the coupling-in section (in the form of parallel planes). It can also z.
  • B. deflecting mirror can be used so that the emitting surface and the light guide can be installed horizontally.
  • the approach proposed here provides a method for producing a light guide device according to one of the preceding embodiments, wherein the method comprises the following steps:
  • Forming the light guide by processing a provided substrate of a light-conducting material
  • both the light guide and the fixture are formed by machining the substrate, such as in a suitable cutting or etching process.
  • the optical waveguide is formed on the holding device or the holding device on the optical waveguide. In this case, the step of arranging can be omitted.
  • This method can be implemented, for example, in software or hardware or in a mixed form of software and hardware, for example in a control unit.
  • the approach presented here also provides a device which is designed to implement the steps of a variant of a method presented here
  • a device in the form of a device, the object underlying the invention can be solved quickly and efficiently.
  • a device in the form of a device, the object underlying the invention can be solved quickly and efficiently.
  • a device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon.
  • the device may have an interface, which may be formed in hardware and / or software.
  • the interfaces can be part of a so-called system ASIC, for example, which contains a wide variety of functions of the device.
  • the interfaces are their own integrated circuits or at least partially consist of discrete components.
  • the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.
  • a computer program product or computer program with program code which can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and for carrying out, implementing and / or controlling the steps of the method according to one of the above
  • FIG. 1 shows a schematic representation of a measuring system according to an embodiment
  • FIG. 2 shows a schematic representation of a measuring system according to an exemplary embodiment
  • FIG. 3 shows a schematic illustration of a light-conducting device according to an exemplary embodiment
  • Fig. 4 is a schematic representation of a light guide according to
  • Embodiment 5 shows a schematic illustration of a section of a light guide according to an exemplary embodiment
  • 6 shows a schematic representation of a section of a light guide according to an exemplary embodiment
  • Light-conducting device according to one embodiment.
  • the measuring system 100 includes a
  • Light-guiding device 102 from a light guide 104 with a coupling-in section 106 for coupling in a light beam 108 emitted from a light source 107 facing the coupling cutout 106 and a light beam 108
  • Decoupling section 110 for decoupling the light beam 108.
  • the optical fiber 104 is realized with a beam-like main branch 112, wherein the coupling-in section 106 by a rectangular cross-sectional area of a first end of the main branch 112 and
  • Decoupling portion 110 is formed by a likewise rectangular cross-sectional area of a second end of the main branch 112 opposite the first end. It is also conceivable that the cross-sectional area of the first and / or second end is formed by a shape other than a rectangle, for example a hexagonal shape or any polygonal shape. Also, such a cross-sectional area does not need to be flat.
  • a measuring cell is arranged as a measuring unit 114, so that the emerging from the coupling-out portion 110 light beam 108 strikes the measuring unit 114.
  • the light guide 102 has according to the one shown in Fig. 1
  • the two light guide branches 116, 118 serve as holding means 120 for holding the light guide 104 in a fluid which has a lower refractive index than a material of the light guide 104.
  • the first optical fiber 116 serves to divide the light beam 108 coupled in via the coupling-in section 106 into a first partial beam 122 and a second partial beam 124, the first partial beam 122 passing through the main branch 112 to the coupling-out section 110 and the second partial beam 124 through the first Optical fiber 116 is passed to a arranged at one end of the first optical fiber 116 reference detector 126.
  • the two light guide branches 116, 118 are realized as straight beams and are each arranged at an acute or obtuse angle on the main branch 112, such that one end of the first optical fiber branch 116 faces in a direction facing the coupling-out section 110 and one end of the second Lichtleiterastes 118 in a the coupling section 106 facing direction has.
  • the first branch point 115 is adjacent to
  • the second optical fiber 118 serves according to the one shown in Fig. 1
  • Auskoppelabites 110 reflected light beam 127 on a relative to one end of the second Lichtleiterastes 118 placed measuring detector 128 to direct.
  • the two light guide branches 116, 118 and the main branch 112 are, for example, produced in one piece from the same material, for example in a suitable cut or etching method. Depending on the embodiment, the three branches may have an identical cross-sectional area or different cross-sectional areas.
  • the light guide device 102 also has an optional bottom element 130, which is realized in two parts from a first plate 132 and a second plate 134 according to the embodiment shown in Fig. 1, wherein the first optical fiber 116 via the 116 at the end of the first Lichtleiterastes
  • the mounted measuring detector 128 is fixed on the second plate 134.
  • the light guide 104 is in this case free standing between the two plates 132, 134 arranged and thus up to the connection surfaces of the two light guide branches 116, 118 at the two branching points 115, 117 surrounded by the fluid.
  • the reference detector 126 and the measurement detector 128 both project beyond a respective cross-sectional area of the ends of the two light guide branches 116, 118.
  • FIG. 2 shows a schematic illustration of a measuring system 100 according to an exemplary embodiment in plan view.
  • the main load 112 of the light-guiding device 102 according to FIG. 2 is optically with the second via the measuring unit 114
  • Fiber optic branch 118 coupled. Further, the optical fiber 104 has between the
  • Light beam 108 which is realized in an exemplary spiral in Fig. 2.
  • the first branching point 115 is designed as a splitter in order to split the light beam 108 into the two partial beams 122, 124.
  • the measuring unit 114 has, for example, a reflecting element 202, which is aligned in such a way that the first partial beam 122 directed into the measuring unit 114 is reflected by the measuring unit 114 further in the direction of the second optical fiber branch 118.
  • the reflecting element 202 is in this case in a region of the measuring unit 114 facing away from the light guide 104, so that a path length traveled by the first partial beam 122 in the measuring unit 114 is increased proportionally to a measuring signal.
  • the measuring unit 114 may be a simple transmission measuring cell or a multi-reflection cell be realized. For measuring substance concentrations by means of
  • the measuring cell can be traversed by the medium to be measured.
  • FIG. 3 shows a schematic representation of a light-conducting device 102 according to an exemplary embodiment.
  • the light-guiding device 102 is, for example, a light-guiding device that can be used in a measuring system described above with reference to FIGS. 1 and 2.
  • the light-guiding device 102 is, for example, a light-guiding device that can be used in a measuring system described above with reference to FIGS. 1 and 2.
  • Optical fiber device 102 is realized according to FIG. 3 with a light guide 104 in the form of a straight beam with a rectangular cross section, which is clamped between two U-shaped holding elements 300, 302 of the holding device 120.
  • the two holding elements 300, 302 and the optical waveguide 104 for example, in one piece by appropriate processing of a glass plate, such as a quartz plate realized.
  • the two holding elements 300, 302 are in turn on the one-piece here, for example made of silicon, bottom element 130.
  • the bottom element 130 has a recess 304, wherein the optical fiber 104 of the two
  • Holding elements 300, 302 is held centrally above the recess 304, so that it has as large as possible contact with the fluid on all four sides.
  • the ends of the two holding elements 300, 302 that touch the optical waveguide 104 are each realized with a cross-section that tapers in the direction of the optical waveguide 104 in order to minimize a contact area between the holding elements 300, 302 and the optical waveguide 104.
  • the straight light guide 104 is cut from a quartz plate and two carriers in the form of the holding elements 300, 302 on a
  • Silicon wafer fixed as a bottom element 130.
  • the free-standing optical fiber 104 consists only of core material and is
  • the holding elements 300, 302 are fixed by wafer bonding on a silicon substrate as a bottom element 130, wherein a the region of the bottom element 130 opposite to the light guide 104 is released, for example by etching the recess 304.
  • the free-standing, light-conducting system in the form of the light guide 104 is surrounded by air or some other suitable gas or even by a liquid medium.
  • optical components such as splitters, couplers or mode mixers can be integrated directly into the light-conducting system.
  • Thin-film deposition (English: plasma-enhanced chemical vapor deposition, PECVD for short), here the complete substrate thickness, for example a glass wafer, is used for light conduction.
  • PECVD plasma-enhanced chemical vapor deposition
  • air having a refractive index of nearly 1 is used as the surrounding medium.
  • a high refractive index difference of about 0.5 can be achieved when the optical fiber 104 is made of glass.
  • a high acceptance angle and a high Lichteinkopplungseffizienz be achieved.
  • Bending radius which typically corresponds to a 300- to 600-fold mantle radius, ie a bending radius of for example at least 3 cm at a cladding radius of more than 100 ⁇ , a significant reduction of the minimum radius of curvature can be achieved.
  • the optical fiber 104 can be realized with a thickness of more than 100 ⁇ .
  • optical elements such as laser diodes, LEDs, photodiodes or glass fibers can be attached to the interfaces of the measuring system.
  • optical fiber 104 should be kept in the air with minimal contact.
  • Optical fiber 104 placed bumps, d. H. Metal balls, in particular of reflective material used.
  • Holding elements 300, 302 scales with the light loss induced by the holding elements 300, 302 and should therefore be minimized.
  • the optical waveguide 104 may be mounted to minimize a contact surface between two substrates, which are coated for example with pyramid-like structures and thus have contact with the optical fiber 104 only at the tips.
  • the optical fiber 104 is clamped directly and without further carrier elements between the light source 107 and the target, such as a detector or a measuring cell. It is also conceivable that light guide branches in branched
  • optical fiber branches Simultaneously serve as light-guiding and mechanical support structures by the optical fiber branches are fixed at their ends to sources, detectors and similar elements, such as in Fig. 1 to see.
  • the structure of the light guide 104 and other elements such as
  • the holding elements 300, 302 can be structured in the same production step as the light guide 104.
  • the number and shape of the holding elements 300, 302 depends according to the size or weight of the optical fiber 104 and the respective
  • the holding elements 300, 302 are attached by way of example at right angles to the light guide 104.
  • By choosing a suitable angle between holding elements 300, 302 and optical fiber 104 can be chosen.
  • high-purity quartz glass (fused silica) is suitable as a light-conducting material for conducting UV light.
  • This can be structured, for example, by dry etching processes or laser ablation. Compared to dry etch processes, wet etch with hydrofluoric acid (HF) is a fast and cost effective alternative.
  • HF hydrofluoric acid
  • Another structuring option consists of the combination of laser irradiation for material modification in desired regions and a subsequent etching step in which the regions modified by the laser irradiation have a higher etching rate and can therefore be etched selectively with respect to the non-irradiated regions (Example: Selective Laser Etching ).
  • Selective Laser Etching Through this technology, round and any other light guide cross sections can be produced.
  • transparent polymers in the deep UV region about special silicones, can be structured with the methods mentioned.
  • Such materials are for example processed in typical processes of plastics processing such as injection molding or extrusion.
  • the optical fiber 104 may also be patterned by machining such as (micro) milling or turning from a stock material.
  • corrugated or other three-dimensionally shaped substrates for cutting can also be used to provide not only planar, but also three-dimensional optical fibers realize. It is also conceivable to produce an arbitrarily shaped 3-D light guide by casting the starting material into a corresponding shape.
  • Layers can be eliminated by the use of a fluid around the light guide.
  • the optical fiber 104 and the surrounding medium may be arranged in a corresponding fluid-tight housing.
  • the measuring system As shown in FIG. 2, the measuring system according to an exemplary embodiment is realized with a mode mixer for homogenizing the spatial beam distribution and different chips. As a result, the measuring system is particularly suitable for use as a light-conducting system for the
  • Led measuring cell in which the gas concentration-dependent absorption takes place.
  • the light emanating from the measuring cell is now in turn directed to a measuring detector.
  • the light-conducting system is connected to the measuring cell via interconnections made of glass fibers.
  • heat-sensitive components such as light sources and detectors of high-temperature areas such as the exhaust line can be decoupled.
  • the light source 107 emits UV light having a wavelength of 227 nm, wherein one part is coupled to the reference detector and the other part is coupled to a glass fiber and guided to the measuring cell in the exhaust gas line.
  • Light emitting diodes are particularly suitable as light sources for use in compact and cost-critical products.
  • the light component coupled into the light guide 104 may be limited due to the broad spatial radiation characteristic.
  • Einkoppelvon is about the so-called butt coupling.
  • an end facet of the light guide 104 is placed directly on a flat side of the LED chip, the less light is lost, the larger the
  • Conductor cross-sectional area compared to the LED surface is.
  • Lens systems or development and cost intensive coupling techniques such as coupling via diffraction gratings are dispensed with.
  • the optical fiber 104 is much more handy with a larger acceptance angle.
  • the optical fiber 104 can be produced with less effort.
  • FIG. 4 shows a schematic illustration of a light-conducting device 102 according to an exemplary embodiment.
  • the holding device 120 according to FIG. 4 is realized with two L-shaped holding elements 300, 302, wherein in each case a first end of the two holding elements with the base element 130 realized here as a simple plate and in each case a second end of the two holding elements with the light guide 104 has contact.
  • the optical fiber branch 104 is also held freestanding above the base element 130 in FIG. 4 by the two retaining elements 300, 302.
  • Branching point 115 Y-shaped in the two light guide branches 116, 118, wherein the free ends of the two light guide branches 116, 118 each in one of the
  • the light beam 108 is divided into the first sub-beam 122 and the second sub-beam 124 such that the first sub-beam 122 is passed through the second optical fiber 118 and the second sub-beam 124 through the first optical fiber 116.
  • the light guide 104 on the main branch 112 is held by the two holding elements 300, 302 above the bottom element 130.
  • Fig. 5 shows a portion of a light guide 104 according to a
  • Embodiment such as a light guide, as described above with reference to Figures 1 to 4.
  • Light source 104 is significantly smaller than the coupling-106 is executed.
  • the light source 107 has, for example, a radiating surface of 200 * 200 ⁇ m 2 and the light guide 104 has a thickness of 350 ⁇ m, for example.
  • Fig. 6 shows a portion of a light guide 104 according to a
  • the optical waveguide 104 according to FIG. 6 is realized with an approximately hexagonal cross-section.
  • FIG. 6 shows, by way of example, an isotropic etching profile of an H F-etched quartz light guide 104, wherein the light guide 104 is etched on both sides from above and below and thus has a hexagonal-like cross section.
  • FIG. 7 shows a flowchart of a method 700 for producing a light-conducting device according to one exemplary embodiment.
  • the method 700 can be used, for example, to produce a device described with reference to FIGS. 1 to 6
  • the optical fiber is formed by processing a substrate provided in a preceding step in step 710, from a photoconductive, especially transparent material, such as a glass or polymer plate. This is done for example in a corresponding section or
  • both the light guide and the fixture are formed in step 710 by machining the substrate.
  • the optical fiber and the holding device are formed in the same manufacturing step as a single part of the substrate.
  • the optical fiber is formed on the holding device or the holding device on the optical fiber, wherein the optical fiber and the holder device can be formed either simultaneously or in succession. Accordingly, step 720 can be omitted here. If an exemplary embodiment comprises an "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

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EP16751617.8A 2015-09-11 2016-08-17 Lichtleitvorrichtung, messsystem und verfahren zum herstellen einer lichtleitvorrichtung Withdrawn EP3347696A1 (de)

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DE102015217425.5A DE102015217425A1 (de) 2015-09-11 2015-09-11 Lichtleitvorrichtung, Messsystem und Verfahren zum Herstellen einer Lichtleitvorrichtung
PCT/EP2016/069511 WO2017042008A1 (de) 2015-09-11 2016-08-17 Lichtleitvorrichtung, messsystem und verfahren zum herstellen einer lichtleitvorrichtung

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US20180252635A1 (en) 2018-09-06
DE102015217425A1 (de) 2017-03-16
CN107923843A (zh) 2018-04-17
WO2017042008A1 (de) 2017-03-16

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