EP3346314B1 - Dispositif et procédé de génération d'un faisceau laser à l'aide d'un dispositif générateur de faisceau programmable - Google Patents

Dispositif et procédé de génération d'un faisceau laser à l'aide d'un dispositif générateur de faisceau programmable Download PDF

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Publication number
EP3346314B1
EP3346314B1 EP18150017.4A EP18150017A EP3346314B1 EP 3346314 B1 EP3346314 B1 EP 3346314B1 EP 18150017 A EP18150017 A EP 18150017A EP 3346314 B1 EP3346314 B1 EP 3346314B1
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EP
European Patent Office
Prior art keywords
shaping
laser
beam shaper
shaper
laser beam
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EP18150017.4A
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German (de)
English (en)
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EP3346314A1 (fr
Inventor
Dmitriy Mikhaylov
Damir Shakirov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
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Robert Bosch GmbH
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Definitions

  • the invention relates to a device for shaping a laser beam by means of a programmable beam shaper.
  • the invention also relates to a method for shaping a laser beam using a programmable beam shaper.
  • Programmable beam shapers for influencing the local and temporal intensity distribution of a laser beam are known as "spatial light modulators (SLM)" based on liquid crystals or as “digital micromirror devices” in the form of one- or two-dimensional arrangements of movable mirrors. If the properties of the input beam are known, they can be used to set a desired shape of a wave front of an output beam. A limiting factor is the image repetition rate that can be achieved, with which different beam shapes can be set one after the other in order to adapt the beam shape to the respective machining process.
  • unintended transition states unintended transition states (unknown state of the refractive index matrix) can occur for a period noticeable in the process, which can impair a laser machining process.
  • Machining surfaces are thus generated on the workpiece in the grid of the microlens arrangement, each machining surface being individually controllable. There is no sequential control and no merging of the light path on a single processing surface.
  • the system is designed to process a workpiece with a large number of laser beams simultaneously. It is not intended to use the laser beams on the Merge the workpiece and thus improve the working frequency of the array of beam shapers.
  • a known device from the laid-open specification WO2010 / 092189 A1 has a multiple excess number of light-shaping segment elements than would actually be required to form a shaping pattern for an output beam. This is done solely for reasons of redundancy. This means that the redundantly provided segment elements are not used at all in the event of error-free operation.
  • US6208369 B1 describes a laser process, for example for drilling the smallest holes, using a beam shaper.
  • a corresponding shaping pattern is provided by the beam shaper, which effects the drilling process.
  • the shaping pattern a whole row of lines of a two-dimensional beam shaper is always uniformly irradiated to depict a point line.
  • N-1, n, n + 1, n + 2 within a two-dimensional beam shaper the next row row is always irradiated continuously until a cycle is repeated. It is explicitly pointed out that, in the case of beamformers with shorter switching times, an increasing number of pixels per row and an increase in the rows as a whole are required in order to maintain the imaging speed of the shaping pattern
  • the patent specification KR101310452 B1 discloses an arrangement of several laser systems, in each of whose light paths a beam shaper is arranged. All beam formers have the same shaping pattern, which is then brought into overlap on a processing object and via a merged laser beam. All beam shapers are therefore permanently irradiated, the radiation intensity being limited to the maximum bearable radiation intensity of a respective radiation former.
  • the disclosure document DE102012207220 A1 describes a laser processing system in which a beam shaper is generally used to form a beam shaping pattern.
  • the device object of the invention is achieved by the device according to claim 1, i. i.a. in that there is a deflection unit for alternately directing the laser beam along a first light path and at least one second light path onto a first beam shaper and at least one second beam shaper, that an optical unit is available for merging the first and at least second light paths after beam shaping, that a Control unit for controlling the deflection unit and the first and at least second beam shaper is present and that in the control unit there is a sequence control for alternately directing the laser beam onto the first light path and the at least second light path and for controlling a shaping pattern on the first beam shaper and the at least second Beam shaper is present.
  • the device is not limited to two beam formers and two light paths; a variety of beam shapers and light paths can be provided.
  • the beam shapers can have different shaping patterns, between which the deflection unit can be used to switch over very quickly.
  • the alternating frequency is therefore no longer dependent on the switching speed of the beam formers (refresh rate). Due to the increased alternating frequency, highly dynamic laser machining processes such as wobbling or temperature field tayloring can be used in an improved manner. Since the individual beam shaper is not continuously exposed to laser light, its thermal load is also reduced. The process time can be shortened with the same thermal load. It is not necessary that the light paths and beam shapers are always addressed in the same order. It can also be provided that the sequence depends on the type of shaping pattern or the thermal stress on the beam shapers.
  • control unit also controls the optical unit in order to merge the light paths after the beam shapers.
  • control unit can control the deflection unit and the beam shaper in a suitable manner.
  • the sequence control is designed so that a change in a shaping pattern on the first beam shaper only occurs when the laser beam is not directed along the first light path and that a change in a shaping pattern on the second beam shaper is only present when the laser beam is not along of the second light path is directed.
  • further beam shapers can be integrated in such a way that a change in the shaping pattern is only carried out when the beam former is not exposed to laser light.
  • the method object of the invention is achieved by the method according to claim 2, i. i.a. in that the laser beam is deflected by a deflection unit alternately along a first light path and at least one second light path onto a first beam shaper and at least one second beam shaper and, after the programmable beam shaper or the first beam shaper and the second beam shaper, is brought together in an optical unit to form a combined laser beam becomes.
  • the deflection unit can be used to switch between different beam formers with different shaping patterns, so that the alternating frequency between shaping patterns can be greatly improved.
  • the partial beams from the different light paths are brought together on a common optical axis so that they can be guided, deflected and focused together.
  • a change in a shaping pattern on one of the beam shapers is carried out during a beam pause in which the latter is not subjected to laser radiation.
  • the merged laser beam can be kept free of transition effects (e.g. "tearing") when changing shaping patterns on the beam shapers and the quality of the machining process can be improved.
  • the device or the method for material processing with laser light in the form of welding, gas alloying, soldering, Labeling, marking, drilling, cleaning, polishing or laser ablation can be used. Furthermore, the device and the method can be used in laser projection technology, where they offer the same advantages.
  • the device or the method can be used for laser projection.
  • Figure 1 a schematic representation of a laser processing system in which the method can be used.
  • FIG. 1 shows schematically a laser processing system 10 with a laser source 11 which emits a laser beam 12.
  • the laser beam 12 is fed by a deflection unit 13 alternately along a first light path 17 to a first beam shaper 14, along a second light path 18 to a second beam shaper 15 and along a third light path 19 to a third beam shaper 16.
  • light from the laser beam 12 can also be applied to a larger number of beam formers via further light paths.
  • the beam shapers 14, 15, 16, the light paths 17, 18, 19 are deflected in an optical unit 21 in such a way that they are brought together along a common optical axis to form a combined laser beam 22.
  • the merged laser beam 22 is directed onto a workpiece 23, where it can be used, for example, for welding, soldering, labeling, marking, gas alloying, drilling, cleaning, polishing or for material removal.
  • a laser projection can be generated according to the same principle. 23 is then a projection surface.
  • a control unit 20 controls the deflection unit 13 and the beam formers 14, 15, 16 in such a way that a change in a shaping pattern on one beam former 14, 15, 16 is only made while the laser beam 12 is acting on one of the other beam formers 14, 15, 16. In this way it can be achieved that changes to the shaping pattern are only made on beam formers that are not exposed to laser light and that transition shapes between two successive shaping patterns have no effect on the have combined laser beam 22. This improves the quality of the combined laser beam 22.
  • the use of a plurality of beam formers 14, 15, 16 has the advantage that an image change rate with which changes in the shaping pattern can be carried out for the combined laser beam 22 can be increased considerably. Furthermore, the heat load on the individual beam shaper is reduced, since it is not continuously exposed to laser radiation.
  • the arrangement according to the invention can reduce the effect of objective speckles on the result of laser processing and thus improve the processing result.
  • the laser beam 12 being deflected by the deflection unit 13 onto different areas of an individual beam shaper instead of being directed onto different beam shapers.
  • the shaping pattern is left unchanged in the area just exposed to laser light and, if necessary, changed in one of the areas not exposed to laser light.
  • the deflection unit 13 can be designed as a polygon scanner, as an acousto-optical or electro-optical modulator, as an arrangement of mirrors driven by galvanomotors, as an actuator based on a different technology for deflecting a laser beam or as a combination of the aforementioned units.
  • the optical unit 21 can be designed as a system of optical components such as mirrors, lenses or prisms. It can be controlled by the control unit in such a way that movable or controllable optical components combine the laser light coming from the beam shapers into the combined laser beam 22 with a common optical axis.

Claims (3)

  1. Dispositif de mise en forme d'un faisceau laser (12) par un dispositif de mise en forme de faisceau programmable en réalisant un motif de mise en forme,
    dans lequel, afin de réduire une charge thermique du dispositif de mise en forme de faisceau tout en augmentant une fréquence de changement entre des motifs de mise en forme réalisés, il existe une unité de déviation (13) pour guider le faisceau laser en alternance le long d'un premier chemin optique (17) vers un premier dispositif de mise en forme de faisceau (14) et le long d'au moins un deuxième chemin optique (18) vers au moins un deuxième dispositif de mise en forme de faisceau (15), il existe une unité optique (21) pour fusionner le premier et ledit au moins un deuxième chemin optique (17, 18) le long d'un axe optique commun en un faisceau laser fusionné après la mise en forme de faisceau, il existe une unité de commande (20) pour piloter l'unité de déviation (13) et le premier et ledit au moins un deuxième dispositif de mise en forme de faisceau (14, 15), et dans l'unité de commande (20), il existe un dispositif de commande de flux pour guider le faisceau laser (12) en alternance sur le premier chemin optique (17) et ledit au moins un deuxième chemin optique (18) ainsi que pour piloter un motif de mise en forme sur le premier dispositif de mise en forme de faisceau (14) et ledit au moins un deuxième dispositif de mise en forme de faisceau (15), dans lequel, pour exclure des formes intermédiaires entre deux motifs de mise en forme consécutifs dans le faisceau laser fusionné, le dispositif de commande de flux est conçu de telle sorte qu'un changement d'un motif de mise en forme sur le premier dispositif de mise en forme de faisceau (14) n'est effectué que si le faisceau laser (12) n'est pas guidé le long du premier chemin optique (17), et un changement d'un motif de mise en forme sur le deuxième dispositif de mise en forme de faisceau (15) n'est effectué que si le faisceau laser (12) n'est pas guidé le long du deuxième chemin optique (18).
  2. Procédé de mise en forme d'un faisceau laser (12) par un dispositif de mise en forme de faisceau programmable en réalisant un motif de mise en forme,
    dans lequel, pour réduire une charge thermique du dispositif de mise en forme de faisceau tout en augmentant une fréquence de changement entre des motifs de mise en forme réalisés, le faisceau laser (12) est guidé par une unité de déviation (13) en alternance le long d'un premier chemin optique (17) vers un premier dispositif de mise en forme de faisceau (14) et le long d'au moins un deuxième chemin optique (18) vers au moins un deuxième dispositif de mise en forme de faisceau (15), et après le premier dispositif de mise en forme de faisceau (14) et ledit au moins un deuxième dispositif de mise en forme de faisceau (15), est fusionné dans une unité optique (21) en un faisceau laser (22) fusionné le long d'un axe optique commun,
    dans lequel, pour exclure des formes intermédiaires entre deux motifs de mise en forme consécutifs dans le faisceau laser fusionné, un changement d'un motif de mise en forme sur un premier dispositif de mise en forme de faisceau (14, 15) n'est effectué que dans une interruption de faisceau dans laquelle celui-ci ne reçoit pas de rayonnement laser.
  3. Utilisation d'un dispositif ou d'un procédé selon l'une quelconque des revendications précédentes pour un usinage de matériaux avec de la lumière laser par soudage, alliage au gaz, brasage, inscription, marquage, perçage, nettoyage, polissage ou pour une ablation au laser.
EP18150017.4A 2017-01-09 2018-01-02 Dispositif et procédé de génération d'un faisceau laser à l'aide d'un dispositif générateur de faisceau programmable Active EP3346314B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102017200170.4A DE102017200170A1 (de) 2017-01-09 2017-01-09 Vorrichtung und Verfahren zur Formung eines Laserstrahls durch einen programmierbaren Strahlformer

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EP3346314A1 EP3346314A1 (fr) 2018-07-11
EP3346314B1 true EP3346314B1 (fr) 2020-12-02

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EP18150017.4A Active EP3346314B1 (fr) 2017-01-09 2018-01-02 Dispositif et procédé de génération d'un faisceau laser à l'aide d'un dispositif générateur de faisceau programmable

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019179604A1 (fr) * 2018-03-20 2019-09-26 Robert Bosch Gmbh Dispositif et procédé servant à former un faisceau laser par un système de formation de faisceaux programmable
WO2020178813A1 (fr) * 2019-03-06 2020-09-10 Orbotech Ltd. Mise en forme de faisceau dynamique à grande vitesse
DE102020204437A1 (de) 2020-04-06 2021-10-07 Volkswagen Aktiengesellschaft Verfahren und Vorrichtung zur Versorgung eines Objekts mit einem Versorgungsgut
DE102021129223B3 (de) 2021-11-10 2023-05-11 Nanoscribe Holding Gmbh Lithographievorrichtung mit Strahlformungseinrichtung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1068923A2 (fr) * 1999-07-12 2001-01-17 MDC Max Dätwyler Bleienbach AG Procédé pour obtenir une répartition d'intensité sur un faisceau laser de travail ainsi qu'un appareil pour celà

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL119099A (en) * 1996-08-20 1999-05-09 Scitex Corp Ltd Apparatus and method for recording an image
US6625181B1 (en) 2000-10-23 2003-09-23 U.C. Laser Ltd. Method and apparatus for multi-beam laser machining
WO2010092189A1 (fr) * 2009-02-16 2010-08-19 Micronic Laser Systems Ab Modulateur de lumière micro-mécanique re-configurable et procédé
GB2488780A (en) 2011-03-07 2012-09-12 Isis Innovation Laser Fabrication System and Method
KR101310452B1 (ko) * 2011-08-25 2013-09-24 삼성전기주식회사 어레이 타입 공간변조기를 이용한 레이저가공방법
DE102012207220A1 (de) * 2012-04-30 2013-10-31 Robert Bosch Gmbh Verfahren zur Bearbeitung eines Werkstücks mit Laserstrahlung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1068923A2 (fr) * 1999-07-12 2001-01-17 MDC Max Dätwyler Bleienbach AG Procédé pour obtenir une répartition d'intensité sur un faisceau laser de travail ainsi qu'un appareil pour celà

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EP3346314A1 (fr) 2018-07-11

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