EP3259555A1 - Procédé de détermination de profondeur - Google Patents

Procédé de détermination de profondeur

Info

Publication number
EP3259555A1
EP3259555A1 EP16700550.3A EP16700550A EP3259555A1 EP 3259555 A1 EP3259555 A1 EP 3259555A1 EP 16700550 A EP16700550 A EP 16700550A EP 3259555 A1 EP3259555 A1 EP 3259555A1
Authority
EP
European Patent Office
Prior art keywords
light source
image
coherent light
measuring beam
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16700550.3A
Other languages
German (de)
English (en)
Inventor
Anton Schick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP3259555A1 publication Critical patent/EP3259555A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront

Definitions

  • the invention relates to a method for the optical depth determination of an object.
  • an optical pattern can be projected onto a surface of the OBJEK ⁇ tes.
  • a triangulation that is to say a depth determination of the object, can take place.
  • the ambient light is at least partially suppressed by means of narrow-band optical filters. This results in each ⁇ but the drawback is that approximately the entire power of the provided for the projection light is concentrated in a narrow frequency interval.
  • a further disadvantage results from a depth determination of partially transparent objects, for example when determining the depth of organic tissue.
  • Organic tissue typically has a volume of distribution that forms an un ⁇ desired surface.
  • a lubrication of the optical pattern can take place, so that characteristic features of the projected optical pattern are such that their original positions with respect to the projected pattern are difficult to detect.
  • the problem of volume spread is important and should not be neglected.
  • the prior art proposes to tune the wavelength of the light intended for depth determination to the object such that the wavelength-dependent volume scattering becomes as small as possible.
  • ⁇ play is blue light of a depth determining the liver of particular advantage.
  • ⁇ light source must be adapted to the object and thus the wavelength is no longer freely selectable.
  • the problem of volume scattering remains with color-coded depth determinations, due to the majority of the wavelengths used.
  • the present invention is based on the object, the
  • the object is 10 ge ⁇ solve by a method with the features of independent claim 1 and by an apparatus with the features of the independent claim.
  • advantageous refinements and developments of the invention are given.
  • the method according to the invention for depth determination of an object comprises the steps:
  • phase difference between the measuring beam and the reference beam of the first coherent light source is changed by means of a phase shifter.
  • light beams in particular the measuring beam and the reference beam
  • a coherent light source is a light source at ⁇ is seen here that generates a coherent light having such Konos ⁇ rence length that this is capable of interference.
  • ⁇ sondere the first and second coherent light source generating a coherent light having a coherence length such that a superposition, that is, interference is possible between the measuring beam reflected by the object and the reference beam.
  • a superposition of the measurement beam reflected by the surface of the object with the reference beam takes place before the first and second images are recorded.
  • an interference pattern is advantageously generated for each recording, which pattern is selected from the lenoptischen superimposition of the reflected measuring beam and the reference beam is formed.
  • made ⁇ light the coherent light of said first and second coherent light source, the superimposition, that is, the interference be- seen the from the surface of the object reflected measurement ⁇ beam and the reference beam.
  • the second image is recorded by means of the second coherent light source or by means of the first coherent light source, wherein the phase difference between the measuring beam generated by the first coherent light source and the reference beam is then changed by means of the phase ⁇ slider.
  • a change in the superimposition always takes place before the recording of the first image for recording the second image, whereby the changes take place by means of the phase shifter or by using a coherent light source (second coherent light source) different from the first coherent light source.
  • the reflected measuring beam Due to the reflection of the measuring beam on the surface of the object, the reflected measuring beam has coherent and incoherent components. Only the coherent portion of the re fl ected measuring beam contributes significantly to the interference.
  • the inko ⁇ ent proportions for example the incoherent which is formed also on the images by recording ambient ⁇ , light, and / or the overall scattered within a volume of the object light of the measurement beam (bulk scattering), by contrast change from the first to the second image not on average.
  • the volume-scattered light of the measurement beam is incoherent because it has no fixed reference to its original phase due to the multiple scattering within the volume of the object.
  • the coherent components of the incoherent components for example the ambient light and / or the proportion of the light scattered within the volume of the object (volume scattering) to be separated by the evaluation of the first and second image, which takes place by means of the computing device.
  • the coherent components are mainly determined by the projected optical pattern, so that overall better recognition of the optical pattern and consequently improved depth determination of the object can take place.
  • the ambient light and the vo ⁇ lumen scattered light of the measurement beam not interfere with the reference beam ⁇ .
  • the incoherent portion of light when recording the image in the first and second means remains Annae ⁇ hernd constant.
  • the coherent component changes due to the superimposition between the first and the second image, so that it can be recognized by this change in the evaluation. Consequently, the depth determination in ambient light and / or in semitransparent objects, in particular organic tissue, is improved. Especially in minimally invasive surgery, example ⁇ as in laparoscopy, this is of particular advantage.
  • the device according to the invention for carrying out the method comprises:
  • a detection device a computing device and a projection device comprising at least a first coherent light source
  • the projection device comprises a first beam splitter, which is formed by means of the first coherent light source for generating a measuring beam and a reference beam ⁇ ;
  • the projection device is further configured to project an optical pattern generated by means of the measuring beam onto a surface of an object
  • the detection device is adapted to receive a generated by the overlay first image and a second image
  • the computing device for evaluating the first and second image for depth determination of the object is ⁇ out forms
  • the device comprises a second coherent light source incoherent to the first coherent light source or a phase shifter ,
  • the second coherent light source is provided for the recording of the second image
  • phase shifter is designed to change the phase difference between the measuring beam and the reference beam of the first coherent light source.
  • a sub ⁇ traction of the first and second image takes place in the evaluation of the first and second image.
  • the examples themselves example by formation of the amount of the difference of the results in the images at ⁇ .
  • the images are example ⁇ , as intensity images in the computing device before.
  • the first and second images may be present as a matrix of intensity values.
  • the said intensity values are then subtracted from each other by means of the computing device. Since those intensity values which correspond to the incoherent portion of the light remain approximately average on average, they fall out at the formation of the subtraction or are at least significantly reduced.
  • the intensity values corresponding to the coherent portion of the light and thus substantially the optical pattern remain in the difference image and may even be amplified due to the interference.
  • the difference image formed by the subtraction forms an image of the projected optical pattern, which is cleaned by the ambient light and by the volume-scattered proportion of the projected light (incoherent portion), which enables an improved depth determination of the object.
  • a change in the coherent component can also result from a movement and / or vibration of the object.
  • a movement and / or a vibration of the object in the region of the wavelength of the light generated by the first or second light source are / is particularly advantageous.
  • the movement and / or vibration of the Whether ⁇ jektes in the range of micrometers are given, for example, in organic tissue, in particular in minimally invasive surgery.
  • a phase shift ⁇ environment and consequently a change of the superposition of the measuring beam and the reference beam are provided, for example, in organic tissue, in particular in minimally invasive surgery.
  • the change of the overlay ⁇ tion accordingly takes place a change from the first to the second image, which in turn is taken into account in the evaluation of the images, for example by forming the difference image.
  • the object itself forms the phase shifter or another phase shifter.
  • the areas of the image which are relevant for the evaluation and the depth determination of the object, in particular the difference image, can be intensified or reduced in their intensity by the constructive or destructive interference. It is therefore expedient to adapt the superimposition between the measuring beam and the reference beam in such a way that there is a maximum constructive or destructive interference of the two named beams for the mentioned relevant areas of the differential image. This improves the recognizability of the change between the first and second images and consequently the recognizability of the optical pattern. sert.
  • the recording of a plurality of first and / or second images and their evaluation can also be provided.
  • a random or coded optical dot pattern is used as the optical pattern.
  • an optical dot pattern allows a preferred superposition of the measuring beam with the reference ⁇ beam. This is because the position of a dot of the dot pattern within the optical dot pattern changes only slightly as it reflects on the object. This results in only small optical path length, so-that an approximately constructive superposition of points in ⁇ nerrenz the first and second image is carried out. As a result, the depth determination of the object is advantageously further improved. Moreover, the randomness or coding of the optical dot pattern makes it possible to determine the position of the individual dots within the reflected dot pattern relative to the projected dot pattern, and thus to solve or at least improve the allocation problem in the depth determination of the object. According to an advantageous embodiment of the invention, a color-coded optical pattern is an optical pattern ver ⁇ turns.
  • a color-coded triangulation of the object takes place. It is particularly preferred in this case to use a laser projector having at least the colors red, green and blue (RGB Laserproj ector).
  • a three-chip camera can be provided in this case.
  • the detection device comprises a three-chip camera.
  • the first and second images are recorded at a time interval from one another.
  • the time interval can be adapted to the movement and / or vibration of the object.
  • the first and the second Ab ⁇ image are recorded in such a large distance in time to each other that the change of the position of the object in
  • Range is half or integer multiples of the wavelength of the projected light.
  • the recording of the first or second image is synchronized with the use of the first or second coherent light source by means of a control device.
  • an on or off ⁇ will switch the first and / or second coherent light source synchronized with the recording of the first or second image.
  • the first coherent light source is turned on and the first image is taken.
  • the first coherent light source ⁇ is then turned off and the second coherent light source and the second image recorded by the detecting ⁇ device by means of the control device.
  • the control device enables advantageous control of the first and / or second coherent light source and the detection device.
  • the recording of the first or second image may preferably be synchronized with the change of the phase difference by means of a control device.
  • the recording of the first or second image is advantageously adapted to the changes in the phase difference.
  • the control device allows control of the phase shifter, so that a desired and advantageous change in the phase difference between the measuring beam and the reference beam takes place.
  • the change of the phase difference as well as a recording of a plurality of corresponding images can take place substantially continuously (image sequence). This makes it possible to detect the change ⁇ tion of interference from destructive to constructive interference approximately continuously.
  • the phase difference can be periodically modulated with a reference frequency, so that by means of the evaluation of a plurality of first and / or second images, in particular a sequence of first and / or second images (image sequence), and by means of a lock-in process particularly weak signals within the images can be ⁇ he recognized.
  • a reference frequency for example, a plurality of first and / or second images, in particular a sequence of first and / or second images (image sequence), and by means of a lock-in process particularly weak signals within the images can be ⁇ he recognized.
  • the light of a laser in particular of the first and second laser, has a temporally great coherence.
  • the coherence length of the light of a laser is in the range of several meters.
  • the light of a laser has a very high spatial coherence. Due to the high temporal and spatial coherence of the light of a laser, lasers are particularly preferred as the first and / or second coherent light source.
  • a piezotranslator or a Pockels cell is used as a phase shifter.
  • a piezotranslator or a Pockels cell allows adaptation and modification of the phase difference between the measuring beam and the reference beam.
  • the reference beam preferably passes through the piezotranslator or the Pockels cell.
  • An advantage of the Pockels cell is that the light of the first coherent light source can be continuously adjusted or modulated in its phase. In particular, an adaptation or modulation of the polarization and / or intensity is also possible.
  • the first and / or second beam splitter forms as a splitter mirror ⁇ out.
  • the splitter mirror enables a simple and cost-effective splitting of the light emanating from the first or second coherent light source into the measuring beam and the reference beam.
  • a portion of the light emanating from the first or second coherent light source is reflected by the splitter mirror.
  • Another share will be transmitted.
  • the reflected portion forms the measuring beam and the transmitted portion forms the reference beam.
  • Further optical beam splitters for dividing the light emanating from the first or second coherent light source into the measuring beam and the reference beam can be provided.
  • FIG. 1 shows an apparatus for carrying out the method according to the invention, which comprises a phase shifter
  • Figure 2 shows another device for carrying out the method according to the invention, comprising a first and second coherent light source
  • FIG. 3 an exemplary clarification of the evaluation of a first and second image.
  • the ray trajectories of light rays shown in the figures are exemplary and accordingly not necessarily the physically real conditions.
  • Figure 1 shows the device 1, which is suitable for carrying out the method according to the invention.
  • the device 1 comprises a projection device 4, a detection device 2 and a computing device 3. Furthermore, the device 1 comprises a control device 12.
  • the projection device 4 comprises a first coherent light source 41, a first beam splitter 44, a
  • DOE diffractive optical ⁇ table element
  • the device 1 comprises an optical fiber 6, and in particular a single mode fiber (engl. Single-Mode Optical Fi ⁇ BER), and a phase shifter 8.
  • a coherent light of the first coherent light source 41 is split by means of the first beam splitter 44 into a measuring beam 101 and a reference beam 102.
  • the first coherent light source 41 is formed as a first laser from ⁇ .
  • the measuring beam 101 is generated by means of the wide ⁇ ren lenses 48 and by means of the diffractive optical elementary 49 is formed into an optical dot pattern 104.
  • the formation or formation of the optical dot pattern 104 is diffractive, that is, by diffraction of the measuring beam 101 at the diffractive optical element 49. The.
  • the detection device 2 For receiving the reflectors ⁇ oriented from the surface of the object 10 the measurement beam 105 (reflected dot pattern), the detection device 2 comprises at least a lens 26 and a second beam splitter 24 and a camera 22nd By means of the first beam splitter 44, the reference beam
  • the reference beam 102 is formed from the light of the first coherent light source 41.
  • the reference beam 102 is focused after the first beam splitter 44 by means of the focusing lens 46 to the input of the optical fiber 6 ⁇ .
  • the reference beam 102 is guided to the phase shifter 8.
  • the phase shifter 8 is arranged at the output of the optical fiber 6.
  • the reference beam 102 passes through the phase shifter 8.
  • the phase shifter 8 the phase of the reference ⁇ beam 102 is changed or shifted so that the phase difference between the measuring beam 101 and the reference beam 102 and / or between the reflected measuring beam 105 and the reference beam 102nd changes.
  • the superimposition 111 of the reflected measurement beam 105 and the reference beam 102 takes place before the first and second images are recorded.
  • the reference beam 102 is reflected at the second beam splitter 24 of the detection device 2.
  • the reflected from the object 10 measuring beam 105 is at second beam splitter 24 of the detection device 2, however, mainly transmitted.
  • phase difference Zvi ⁇ rule For receiving the first image is a phase by means of the phase shifter 8, that is, a phase difference Zvi ⁇ rule the measuring beam 101, 105 and the reference beam 102 fixed.
  • the phase of the reference beam 102 is changed relative to the phase of the measurement beam 101, 105 by means of the phase shifter 8.
  • the phase difference between the measuring beam 101, 105 and the reference beam 102 is changed. Since said ⁇ n ⁇ alteration of the phase difference between the first and second image for the incoherent portion is not relevant, it is equal to an average of the first and second image.
  • the coherent component in the first and second images is sensitive to the change in the phase difference between the measurement beam 101, 105 and the reference beam 102, so that a noticeable change takes place between the first and second images.
  • the change in the phase difference changes almost exclusively the coherent component within the first and second images appreciably.
  • the coherent component which essentially corresponds to the projected optical dot pattern 104, can advantageously be recognized by its change from the first to the second image, as a result of which the depth determination of the object 10 is improved.
  • the control device 12 For a synchronization of the recordings of the first and / or second image and the change in the phase difference between the measuring beam 101, 105 and the reference beam 102 by means of the phase shifter 8, the control device 12 is seen ⁇ before.
  • the control device 12 may be electronically connected to the phase shifter 8, the camera 22 and the computing device 3.
  • the camera 22 can be electronically connected to the computing device 3, which enables an evaluation of the first and second images, in particular a subtraction of the first and second images.
  • FIG. 2 shows by way of example the further device 1 which is suitable for carrying out the method according to the invention.
  • the further apparatus 1 includes a projection device 4, a detection device 2, a computing device 3 and a control device 12.
  • the projection device 4 comprises, in contrast to Figure 1, a first and second co ⁇ INHERENT light source 41, 42. Basically, the procedure relating to the first or second light source 41, 42 comparable to the method already described in Figure 1.
  • a phase difference comparable thereto is made possible by the use of the second coherent light source 42.
  • the light generated by the first coherent light source 41 is incoherent with the light of the second coherent light source 42. This is because there is no fixed phase relationship between the first and second coherent light sources 41, 42. In other words, two coherent light sources 41, 42 independent of each other in phase are used. In particular, the coherent ones
  • Light source 41, 42 formed as a laser.
  • Each of the coherent light sources 41, 42 generates a measuring beam 101 and a reference beam 102 for taking an image by means of a first beam splitter 44.
  • a coherent light generated by the coherent light sources 41, 42 becomes a measuring beam 101 and a reference beam 102, respectively divided up .
  • the measuring beam 101 of the first or second coherent light source 41, 42 is respectively converted into an optical dot pattern 104 by means of lenses 48 and by means of a diffractive optical element 49 (DOE).
  • the optical dot pattern 104 is applied to the surface by means of the projection device 4 of the object 10 is projected. From the surface of the OBJEK ⁇ tes 10 reflected dot pattern or the light reflected from the surface of the object 10 the measurement beam 105 is detected by a camera 22 via a lens 26 and a second beam splitter 24 of the detecting device. 2
  • the first coherent light source 41 is provided, so that for the recording of the first image of the measuring beam 101, 105 and the reference beam 102 are generated by means of the first coherent light source 41.
  • the second coherent light source 42 is provided so that for receiving the second image of the measuring beam 101, 105 and the Refe rence ⁇ beam 102 are now generated by means of the second coherent light source 42nd.
  • the first coherent light source 41 is turned on and the second coherent light source 42 is turned off.
  • the first coherent light source is switched from ⁇ 41 and the second coherent light source switched on 42nd
  • the reference beam 102 is focused by means of a focusing lens 46 on an input of an optical fiber 6, in particular a single-mode optical fiber.
  • the optical fiber 6 guides the reference beam 102 into a region 110, which is arranged in front of the camera 22 and provided for an overlay 111 of the reflected measuring beam 105 with the reference beam 102.
  • an overlay 111 that is an inter ⁇ reference between the reflected measuring beam 105 and the reference beam 102.
  • the coherent light sources 41, 42 to one another exhibit no fixed Phasenbe- relationship, arises between the receiving of the first image and the recording of the second Abbil ⁇ of a phase difference. Due to the said phase difference change between the first image and the second image the portions of the images, which were formed by means of a coherent An ⁇ part of the reflected measuring beam 105. But the coherent part substantially corresponds to the proji ⁇ ed dot pattern 104, so that it can be preferentially recognized by the change between the first and second image. An incoherent portion of the reflected measurement beam ⁇ 105 which is formed for example by ambient light or of a volume scattering within the object 10 remains the same in the middle between the first and second image.
  • the incoherent component for example by forming a differential image (subtraction of the first and second image), can fall out or be significantly reduced in an evaluation by the computing device 12.
  • the relevant for the evaluation of te coherent part of a base is filtered out.
  • the control device 12 For a synchronization, in particular for the switching on and / or off of the first and second coherent light source 41, 42, the control device 12 is provided.
  • the control device 12 may be electronically connected to the computing device 3 and the camera 22. Furthermore, the camera 22 is electronically connected to the computing device 3 for evaluating the first and second images.
  • the control device 12 makes it possible, for example in conjunction with the Rechenvor ⁇ direction 3, a switching between the first coherent light source 41 and the second coherent light source 42nd
  • FIG. 3 shows an example of an evaluation by means of a subtraction 642.
  • the subtraction 642 is formed by means of a first image 610 and a second image 620, whereby a difference image 630 is formed.
  • the first image 610 and the second image 620 may be present as matrices of intensity values in a memory of the computing device 3.
  • the first and second images 610, 620 are characterized by a plurality of pixels. formed, wherein each pixel is associated with at least one intensity value.
  • the intensity value corresponds to the intensity of the Inten ⁇ picked up by the camera 22 light.
  • the reflection of the measurement beam 101 takes place on an organic tissue, so that a volume dispersion of the measurement beam 101 occurs.
  • the reflected measuring beam 105 has, in particular, an incoherent component 612.
  • a coherent portion 611 of the reflected measurement beam 105 which here essentially corresponds to a portion of a dot pattern is formed by two adjacent ellipsenförmi ⁇ ge areas.
  • the respective coherent components 611, 621 Due to the change in the phase difference between the recording of the first image 610 and the recording of the second image 620, the respective coherent components 611, 621 have different values with regard to their intensities. In contrast, the respective incoherent portions 612, 622 are approximately equal in the images 610, 620.
  • the approximately constant incoherent component 612, 622 drops out of the difference image 630.
  • an incoherent portion 632 of the difference image 630 is approximately equal to zero.
  • Coherent portions 631 of the difference image 630 which are formed from the coherent portions 611, 621, on the other hand, can be significantly amplified.
  • the coherent portions 631 of the difference image 630 which substantially correspond to the projected dot pattern 104, grow out of the incoherent portion 632, that is, out of the ground. This advantageously improves the depths ⁇ determination of the object 10 and increases the signal-to-noise ratio.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un procédé interférométrique destiné à la détermination de profondeur d'un objet (10), comprenant les étapes consistant à prendre un dispositif de détection (2), un dispositif informatique (3) et un dispositif de projection (4) qui comporte au moins une première source lumineuse cohérente (41) et une deuxième source lumineuse (42) incohérente par rapport à cette dernière. L'invention concerne également un dispositif de mise en oeuvre du procédé.
EP16700550.3A 2015-04-22 2016-01-11 Procédé de détermination de profondeur Withdrawn EP3259555A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015207328.9A DE102015207328A1 (de) 2015-04-22 2015-04-22 Verfahren zur Tiefenbestimmung
PCT/EP2016/050372 WO2016169664A1 (fr) 2015-04-22 2016-01-11 Procédé de détermination de profondeur

Publications (1)

Publication Number Publication Date
EP3259555A1 true EP3259555A1 (fr) 2017-12-27

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EP16700550.3A Withdrawn EP3259555A1 (fr) 2015-04-22 2016-01-11 Procédé de détermination de profondeur

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Country Link
US (1) US20180120097A1 (fr)
EP (1) EP3259555A1 (fr)
JP (1) JP2018513387A (fr)
KR (1) KR20170139632A (fr)
CN (1) CN107690566A (fr)
DE (1) DE102015207328A1 (fr)
WO (1) WO2016169664A1 (fr)

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US10241131B2 (en) * 2016-08-28 2019-03-26 Bruker Nano, Inc. Method and apparatus for chemical and optical imaging with a broadband source
CN115200510B (zh) * 2021-04-09 2024-08-30 圣邦微电子（北京）股份有限公司 一种获取物体表面深度信息的装置和方法

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KR20170139632A (ko) 2017-12-19
US20180120097A1 (en) 2018-05-03
WO2016169664A1 (fr) 2016-10-27
CN107690566A (zh) 2018-02-13
JP2018513387A (ja) 2018-05-24

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