EP3253183B1 - Atmosphährendruck-plasmaerzeugungsvorrichtung - Google Patents

Atmosphährendruck-plasmaerzeugungsvorrichtung Download PDF

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Publication number
EP3253183B1
EP3253183B1 EP15879895.9A EP15879895A EP3253183B1 EP 3253183 B1 EP3253183 B1 EP 3253183B1 EP 15879895 A EP15879895 A EP 15879895A EP 3253183 B1 EP3253183 B1 EP 3253183B1
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EP
European Patent Office
Prior art keywords
electrode
processing gas
tube
housing
inner tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP15879895.9A
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English (en)
French (fr)
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EP3253183A4 (de
EP3253183A1 (de
Inventor
Akihiro NIWA
Takahiro Jindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
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Fuji Corp
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Publication of EP3253183A4 publication Critical patent/EP3253183A4/de
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes

Definitions

  • the present invention relates to an atmospheric pressure plasma generator that plasmarizes processing gas supplied inside a tubular member and emits plasma from an end section of the tubular member.
  • Patent literature 2 falling within the terms of Art. 54(3) EPC, discloses a further example of an atmospheric plasma generator.
  • the atmospheric pressure plasma generator disclosed in the above patent literature 1 it is possible to suitably emit plasma.
  • an electrode is arranged inside the tubular member, there is a problem in that, due to deterioration of the electrode, foreign matter may contaminate a target object of the plasma.
  • an electrode is not arranged inside the tubular member, in order to prevent foreign matter contaminating a target object of the plasma, there is a problem in that processing gas cannot be suitably plasmarized inside the tubular member.
  • the present invention takes account of such circumstances, and an object thereof is suitably plasmarize processing gas while preventing foreign matter from contaminating a target object of the plasma.
  • the present invention provides an atmospheric pressure plasma generator according to independent claim 1. Preferred embodiments are laid down in the dependent claims.
  • an inner tube is inserted inside an outer tube and the inner tube is formed of a material with either positive or negative electrical polarity.
  • an electrode with electrical polarity opposite to that of the material of the inner tube is provided on an outer circumferential surface of the outer tube. Therefore, by flowing processing gas such that processing gas contacts the inner tube, with the inner tube electrified, by applying an electric current to the electrode provided on the outer circumferential surface of the outer tube, current flows between the electrode and the inner tube.
  • processing gas inside the outer tube is plasmarized.
  • processing gas is plasmarized inside the outer tube without providing an electrode on the inside of the outer tube.
  • Fig. 1 shows an embodiment of the present invention, atmospheric pressure plasma generator 10.
  • Atmospheric pressure plasma generator 10 is for generating plasma at atmospheric pressure.
  • Atmospheric pressure plasma generator 10 is provided with resin housing 20, Teflon (registered trademark of DuPont, USA) tube 22, glass pipe 24, and electrode 26.
  • Housing 20 is approximately cylindrical, and an inner circumferential surface of housing 20 is configured from small diameter section 30, and large diameter section 32 that has a larger diameter than small diameter section 30.
  • Through-hole 34 that pierces large diameter section 32 in the diameter direction is formed at the small diameter section 30 end section of large diameter section 32, and gas introduction pipe 36 is connected to through-hole 34.
  • Teflon tube 22 is approximately cylindrical and its outer diameter is slightly smaller than the inner diameter of small diameter section 30 of housing 20. Further, Teflon tube 22 is inserted into small diameter section 30 of housing 20, and an end of Teflon tube 22 protrudes slightly from the end section of housing 20 on the large diameter section 32 side.
  • Glass pipe 24 is approximately cylindrical and its outer diameter is slightly smaller than the inner diameter of large diameter section 32 of housing 20. Further, glass pipe 24 is engaged with large diameter section 32 of housing 20, and an end of glass pipe 24 protrudes from the end section of housing 20 on the large diameter section 32 side. Note that, the amount that glass pipe 24 protrudes from the end section of housing 20 is greater than the protruding amount of Teflon tube 22 from housing 20. That is, the end section of Teflon tube 22 protruding from the end of housing 20 is positioned inside glass pipe 24 protruding from housing 20.
  • Electrode 26 is approximately annular and is provided on an outer circumferential surface of glass pipe 24.
  • the arrangement location of electrode 26 is roughly at a central portion of glass pipe 24 in the axial direction, and electrode 26 faces the end section of Teflon tube 22 sandwiching glass pipe 24.
  • atmospheric pressure plasma generator 10 With atmospheric pressure plasma generator 10, thanks to the above configuration, processing gas is supplied to both Teflon tube 22 and gas introduction pipe 36, and plasma is emitted from the end section of glass pipe 24 by applying current to electrode 26. Plasma generation by atmospheric pressure plasma generator 10 is described below in detail.
  • processing gas is supplied inside Teflon tube 22 from a gas supply device (not shown), and flows inside Teflon tube 22 in the direction of arrow 50. Further, processing gas is supplied in gas introduction pipe 36 from the gas supply device, and flows between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20 in the direction of arrow 52. Note that, the processing gas flowing inside Teflon tube 22 and the processing gas flowing inside gas introduction pipe 36 are the same, and that processing gas is a mixture at any given ratio of an inert gas such as nitrogen and a reactive gas such as oxygen from air.
  • Teflon tube 22 is formed from a fluoropolymer, and the fluoropolymer is a material with negative electrical polarity.
  • a material with negative electrical polarity is a material which is easily charged as a cathode and, for example, in a case of static electricity caused by friction, material for which the electrical polarity is negative is charged as a cathode. Therefore, when processing gas flows inside Teflon tube 22, or between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, Teflon tube 22 is charged as a cathode.
  • the electric potential on the outer circumferential surface of glass pipe 24 when measuring the electric potential on the outer circumferential surface of glass pipe 24 with processing gas flowing inside Teflon tube 22, the electric potential on the outer circumferential surface of glass pipe 24 was -11 volts. Also, when measuring the electric potential on the outer circumferential surface of glass pipe 24 with processing gas flowing between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, the electric potential on the outer circumferential surface of glass pipe 24 was -77 volts.
  • a conventional atmospheric pressure plasma generator generally, one of a pair of electrodes is arranged on the outer circumferential surface of glass pipe 24 and the other electrode of the pair is arranged on the inner circumferential surface of glass pipe 24, and processing gas inside glass pipe 24 is plasmarized by positive electric voltage being applied to the electrode and negative electric voltage being applied to the other electrode. Therefore, with a conventional atmospheric pressure plasma generator, the electrode arranged on the outer circumferential surface of glass pipe 24 deteriorates, and due to deterioration of the electrode, foreign matter may contaminate a target object of the plasma.
  • atmospheric pressure plasma generator 10 because electrical discharge occurs between Teflon tube 22 and electrode 26, it is not necessary to arrange an electrode on the inside of glass pipe 24. Therefore, by performing plasma processing with atmospheric pressure plasma generator 10, it is possible to prevent foreign matter from contaminating a target object of the plasma.
  • processing gas flows not only inside Teflon tube 22, but also between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, and that processing gas is plasmarized. This enables a large amount of processing gas to be plasmarized, meaning that plasma is emitted efficiently.
  • Fig. 2 shows a second embodiment, atmospheric pressure plasma generator 70, which is useful to understand the invention, but does not fall under the claimed subject matter.
  • Atmospheric pressure plasma generator 70 of the second embodiment is provided with the same configuration elements as atmospheric pressure plasma generator 10 of the first embodiment, except for the electrode. Therefore, the same reference numbers are given to configuration elements that are the same as configuration elements of atmospheric pressure plasma generator 10 and descriptions of those items are omitted.
  • Atmospheric plasma generator 70 is provided with pair of electrodes 72 and 74.
  • Each of the pair of electrodes 72 and 74 is approximately annular and electrodes 72 and 74 are provided on an outer circumferential surface of glass pipe 24 slightly separated from each other.
  • Electrode 72 is provided roughly at a central portion of glass pipe 24 in the axial direction and electrode 74 is provided between electrode 72 and the end of glass pipe 24 at the side protruding from housing 20. Note that, electrode 72 faces the end section of Teflon tube 22 sandwiching glass pipe 24.
  • atmospheric pressure plasma generator 70 With atmospheric pressure plasma generator 70 with such a configuration, negative electric voltage is applied to electrode 72 and positive electric voltage is applied to electrode 74 with processing gas being supplied to Teflon tube 22 and glass introduction pipe 36. By this, electric current flows between electrode 72 and electrode 74, and between electrode 74 and Teflon tube 22. In this case, electrical discharge occurs between electrode 72 and electrode 74, and between electrode 74 and Teflon tube 22, and processing gas flowing from inside Teflon tube 22 to inside glass pipe 24, and processing gas flowing from between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20 to inside glass pipe 24 is plasmarized. By this, similarly to atmospheric pressure plasma generator 10, atmospheric pressure plasma generator 70 emits plasma from the leading end of glass pipe 24.
  • atmospheric pressure plasma generator 10 is an example of an atmospheric pressure plasma generator.
  • the item configured from housing 20 and glass pipe 24 is an example of an outer tube.
  • Teflon tube 22 is an example of an inner tube.
  • Electrode 26 is an example of an electrode.
  • Atmospheric pressure plasma generator 70 is an example not being part of the invention of an atmospheric pressure plasma generator.
  • Electrode 72 is an example of a second electrode. Electrode 74 is an example of an electrode.
  • a fluoropolymer is used as a material with negative electrical polarity, and possible materials include silicon, vinyl chloride, acrylic, polyurethane; polypropylene, polyester, rubber, and so on. That is, instead of Teflon tube 22, a tubular member formed from a material such as silicon, vinyl chloride, or the like may be used.
  • Teflon tube 22 formed from a material with negative electrical polarity is provided on the inside of housing 20, but a tubular member formed from a material with positive electrical polarity may be provided instead of Teflon tube 22.
  • a tubular member formed from a material with positive electrical polarity is provided instead of Teflon tube 22
  • negative electric voltage must be applied to electrode 26.
  • electrical discharge occurs between the tubular member formed from a material with positive electrical polarity and electrode 26, and the same effects as the above atmospheric pressure plasma generator 10 are achieved.
  • a material with positive electrical polarity for example, glass, nylon, or the like may be used.
  • processing gas supplied to Teflon tube 22 and the processing gas supplied to gas introduction pipe 36 are the same, but different processing gases may be supplied to Teflon tube 22 and gas introduction pipe 36.
  • processing gas supplied to Teflon tube 22 and gas introduction pipe 36 is gas in which an inert gas such as nitrogen is mixed with an active gas in the air such as oxygen at a given ratio, but the processing gas may be only an inert gas, or only a reactive gas.
  • processing gas is supplied to both Teflon tube 22 and to gas introduction pipe 36, but processing gas may be supplied to one of Teflon tube 22 and gas introduction pipe 36. That is, processing gas may be only supplied to Teflon tube 22 and that processing gas plasmarized, or processing gas may only be supplied between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, and that processing gas plasmarized.
  • 10 atmospheric pressure plasma generator
  • 20 housing (outer tube); 22: Teflon tube (inner tube); 24: glass pipe (outer tube); 26: electrode; 70: atmospheric pressure plasma generator; 72: electrode (second electrode); 74: electrode

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)

Claims (3)

  1. Atmosphärendruck-Plasmaerzeugungsvorrichtung (10), umfassend:
    ein näherungsweise zylindrisches Gehäuse (20), das eine Innenumfangsfläche mit einem Abschnitt (30) mit kleinem Durchmesser und einem Abschnitt (32) mit großem Durchmesser aufweist, wobei ein Durchmesser des Abschnitts (32) mit großem Durchmesser größer ist als ein Durchmesser des Abschnitts (30) mit kleinem Durchmesser;
    ein rohrförmiges äußeres Rohr (24), dessen Außendurchmesser geringfügig kleiner ist als ein Innendurchmesser des Abschnitts (32) mit großem Durchmesser, so dass sich das äußere Rohr (24) im Eingriff mit dem Abschnitt (32) mit großem Durchmesser des Gehäuses (20) befindet und ein Ende des rohrförmigen äußeren Rohrs (24) von einem Endabschnitt des Gehäuses (20) an der Seite des Abschnitts (32) mit großem Durchmesser vorsteht;
    ein inneres Rohr (22) mit einem Außendurchmesser, der kleiner ist als ein Innendurchmesser des äußeren Rohrs (24), wobei das innere Rohr (22) in den Abschnitt (30) mit kleinem Durchmesser des Gehäuses (20) eingesetzt ist, so dass das Ende des inneren Rohrs (42) geringfügig von dem Endabschnitt des Gehäuses (20) an der Seite des Abschnitts (32) mit großem Durchmesser vorsteht, wobei das vorstehende Ausmaß des rohrförmigen äußeren Rohrs (24) von dem Endabschnitt des Gehäuses (20) auf der Seite des Abschnitts (32) mit großem Durchmesser größer ist als das vorstehende Ausmaß des inneren Rohrs (22) von dem Endabschnitt des Gehäuses (20) auf der Seite des Abschnitts (32) mit großem Durchmesser, wobei das innere Rohr (22) aus einem Material mit entweder positiver oder negativer elektrischer Ladepolarität gebildet ist, welches ein Material ist, welches im Falle statischer Elektrizität, die durch Reibung verursacht wird, entweder als Anode oder Kathode geladen wird;
    nur eine Elektrode (26), wobei die Elektrode (26) die elektrische Polarität entgegengesetzt zu der des Materials des inneren Rohrs (22) annehmen kann, wobei die Elektrode (26) an einer Außenumfangsfläche des äußeren Rohrs (24) bereitgestellt ist,
    einen ersten Strömungsweg innerhalb des inneren Rohrs (22), und
    einen zweiten Strömungsweg zwischen einer Außenumfangsfläche des inneren Rohrs (22) und einer Innenumfangsfläche des äußeren Rohrs (24),
    wobei im Betrieb eingerichtet ist, dass ein Prozessgas in mindestens einem von dem ersten Strömungsweg und dem zweiten Strömungsweg strömt und eingerichtet ist, dass das Prozessgas mittels Kontakt das innere Rohr (22) elektrisch lädt, so dass durch Anlegen eines elektrischen Stroms an der Elektrode (26) eingerichtet ist, dass eine elektrische Entladung zwischen der Elektrode (26) und dem inneren Rohr (22) auftritt, die das Prozessgas in Plasma umwandeln kann.
  2. Die Atmosphärendruck-Plasmaerzeugungsvorrichtung (10) nach Anspruch 1, wobei
    das innere Rohr (22) aus einem Material mit negativer elektrischer Ladepolarität gebildet ist und die Elektrode (26) eine positive Elektrode ist.
  3. Die Atmosphärendruck-Plasmaerzeugungsvorrichtung (10) nach Anspruch 1 oder 2, wobei
    in einem Zustand, in welchem Prozessgas sowohl in dem ersten Strömungsweg als auch dem zweiten Strömungsweg strömt, Prozessgas, das durch den ersten Strömungsweg und den zweiten Strömungsweg strömt, durch Anlegen eines elektrischen Stroms an der Elektrode (26) in Plasma umgewandelt wird.
EP15879895.9A 2015-01-27 2015-01-27 Atmosphährendruck-plasmaerzeugungsvorrichtung Active EP3253183B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2015/052191 WO2016120998A1 (ja) 2015-01-27 2015-01-27 大気圧プラズマ発生装置

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EP3253183A1 EP3253183A1 (de) 2017-12-06
EP3253183A4 EP3253183A4 (de) 2018-09-26
EP3253183B1 true EP3253183B1 (de) 2023-11-08

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JP (1) JP6425742B2 (de)
WO (1) WO2016120998A1 (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3267810B2 (ja) * 1993-07-20 2002-03-25 株式会社半導体エネルギー研究所 被膜形成方法
JP4953255B2 (ja) * 2006-02-13 2012-06-13 国立大学法人群馬大学 プラズマ発生装置用ノズル、プラズマ発生装置、プラズマ表面処理装置、プラズマ発生方法およびプラズマ表面処理方法
JP2010218997A (ja) * 2009-03-19 2010-09-30 Shibaura Mechatronics Corp プラズマ発生装置およびプラズマ処理装置
ITPD20130310A1 (it) * 2013-11-14 2015-05-15 Nadir S R L Metodo per la generazione di un getto o jet di plasma atmosferico e dispositivo minitorcia al plasma atmosferico

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JP6425742B2 (ja) 2018-11-21
WO2016120998A1 (ja) 2016-08-04
EP3253183A4 (de) 2018-09-26
EP3253183A1 (de) 2017-12-06
JPWO2016120998A1 (ja) 2017-11-02

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