EP3253183B1 - Atmospheric-pressure plasma generation device - Google Patents
Atmospheric-pressure plasma generation device Download PDFInfo
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- EP3253183B1 EP3253183B1 EP15879895.9A EP15879895A EP3253183B1 EP 3253183 B1 EP3253183 B1 EP 3253183B1 EP 15879895 A EP15879895 A EP 15879895A EP 3253183 B1 EP3253183 B1 EP 3253183B1
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- Prior art keywords
- electrode
- processing gas
- tube
- housing
- inner tube
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- 239000000463 material Substances 0.000 claims description 18
- 230000005611 electricity Effects 0.000 claims description 2
- 230000003068 static effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 60
- 239000004809 Teflon Substances 0.000 description 51
- 229920006362 Teflon® Polymers 0.000 description 51
- 239000011521 glass Substances 0.000 description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229920002313 fluoropolymer Polymers 0.000 description 3
- 239000004811 fluoropolymer Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
Definitions
- the present invention relates to an atmospheric pressure plasma generator that plasmarizes processing gas supplied inside a tubular member and emits plasma from an end section of the tubular member.
- Patent literature 2 falling within the terms of Art. 54(3) EPC, discloses a further example of an atmospheric plasma generator.
- the atmospheric pressure plasma generator disclosed in the above patent literature 1 it is possible to suitably emit plasma.
- an electrode is arranged inside the tubular member, there is a problem in that, due to deterioration of the electrode, foreign matter may contaminate a target object of the plasma.
- an electrode is not arranged inside the tubular member, in order to prevent foreign matter contaminating a target object of the plasma, there is a problem in that processing gas cannot be suitably plasmarized inside the tubular member.
- the present invention takes account of such circumstances, and an object thereof is suitably plasmarize processing gas while preventing foreign matter from contaminating a target object of the plasma.
- the present invention provides an atmospheric pressure plasma generator according to independent claim 1. Preferred embodiments are laid down in the dependent claims.
- an inner tube is inserted inside an outer tube and the inner tube is formed of a material with either positive or negative electrical polarity.
- an electrode with electrical polarity opposite to that of the material of the inner tube is provided on an outer circumferential surface of the outer tube. Therefore, by flowing processing gas such that processing gas contacts the inner tube, with the inner tube electrified, by applying an electric current to the electrode provided on the outer circumferential surface of the outer tube, current flows between the electrode and the inner tube.
- processing gas inside the outer tube is plasmarized.
- processing gas is plasmarized inside the outer tube without providing an electrode on the inside of the outer tube.
- Fig. 1 shows an embodiment of the present invention, atmospheric pressure plasma generator 10.
- Atmospheric pressure plasma generator 10 is for generating plasma at atmospheric pressure.
- Atmospheric pressure plasma generator 10 is provided with resin housing 20, Teflon (registered trademark of DuPont, USA) tube 22, glass pipe 24, and electrode 26.
- Housing 20 is approximately cylindrical, and an inner circumferential surface of housing 20 is configured from small diameter section 30, and large diameter section 32 that has a larger diameter than small diameter section 30.
- Through-hole 34 that pierces large diameter section 32 in the diameter direction is formed at the small diameter section 30 end section of large diameter section 32, and gas introduction pipe 36 is connected to through-hole 34.
- Teflon tube 22 is approximately cylindrical and its outer diameter is slightly smaller than the inner diameter of small diameter section 30 of housing 20. Further, Teflon tube 22 is inserted into small diameter section 30 of housing 20, and an end of Teflon tube 22 protrudes slightly from the end section of housing 20 on the large diameter section 32 side.
- Glass pipe 24 is approximately cylindrical and its outer diameter is slightly smaller than the inner diameter of large diameter section 32 of housing 20. Further, glass pipe 24 is engaged with large diameter section 32 of housing 20, and an end of glass pipe 24 protrudes from the end section of housing 20 on the large diameter section 32 side. Note that, the amount that glass pipe 24 protrudes from the end section of housing 20 is greater than the protruding amount of Teflon tube 22 from housing 20. That is, the end section of Teflon tube 22 protruding from the end of housing 20 is positioned inside glass pipe 24 protruding from housing 20.
- Electrode 26 is approximately annular and is provided on an outer circumferential surface of glass pipe 24.
- the arrangement location of electrode 26 is roughly at a central portion of glass pipe 24 in the axial direction, and electrode 26 faces the end section of Teflon tube 22 sandwiching glass pipe 24.
- atmospheric pressure plasma generator 10 With atmospheric pressure plasma generator 10, thanks to the above configuration, processing gas is supplied to both Teflon tube 22 and gas introduction pipe 36, and plasma is emitted from the end section of glass pipe 24 by applying current to electrode 26. Plasma generation by atmospheric pressure plasma generator 10 is described below in detail.
- processing gas is supplied inside Teflon tube 22 from a gas supply device (not shown), and flows inside Teflon tube 22 in the direction of arrow 50. Further, processing gas is supplied in gas introduction pipe 36 from the gas supply device, and flows between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20 in the direction of arrow 52. Note that, the processing gas flowing inside Teflon tube 22 and the processing gas flowing inside gas introduction pipe 36 are the same, and that processing gas is a mixture at any given ratio of an inert gas such as nitrogen and a reactive gas such as oxygen from air.
- Teflon tube 22 is formed from a fluoropolymer, and the fluoropolymer is a material with negative electrical polarity.
- a material with negative electrical polarity is a material which is easily charged as a cathode and, for example, in a case of static electricity caused by friction, material for which the electrical polarity is negative is charged as a cathode. Therefore, when processing gas flows inside Teflon tube 22, or between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, Teflon tube 22 is charged as a cathode.
- the electric potential on the outer circumferential surface of glass pipe 24 when measuring the electric potential on the outer circumferential surface of glass pipe 24 with processing gas flowing inside Teflon tube 22, the electric potential on the outer circumferential surface of glass pipe 24 was -11 volts. Also, when measuring the electric potential on the outer circumferential surface of glass pipe 24 with processing gas flowing between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, the electric potential on the outer circumferential surface of glass pipe 24 was -77 volts.
- a conventional atmospheric pressure plasma generator generally, one of a pair of electrodes is arranged on the outer circumferential surface of glass pipe 24 and the other electrode of the pair is arranged on the inner circumferential surface of glass pipe 24, and processing gas inside glass pipe 24 is plasmarized by positive electric voltage being applied to the electrode and negative electric voltage being applied to the other electrode. Therefore, with a conventional atmospheric pressure plasma generator, the electrode arranged on the outer circumferential surface of glass pipe 24 deteriorates, and due to deterioration of the electrode, foreign matter may contaminate a target object of the plasma.
- atmospheric pressure plasma generator 10 because electrical discharge occurs between Teflon tube 22 and electrode 26, it is not necessary to arrange an electrode on the inside of glass pipe 24. Therefore, by performing plasma processing with atmospheric pressure plasma generator 10, it is possible to prevent foreign matter from contaminating a target object of the plasma.
- processing gas flows not only inside Teflon tube 22, but also between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, and that processing gas is plasmarized. This enables a large amount of processing gas to be plasmarized, meaning that plasma is emitted efficiently.
- Fig. 2 shows a second embodiment, atmospheric pressure plasma generator 70, which is useful to understand the invention, but does not fall under the claimed subject matter.
- Atmospheric pressure plasma generator 70 of the second embodiment is provided with the same configuration elements as atmospheric pressure plasma generator 10 of the first embodiment, except for the electrode. Therefore, the same reference numbers are given to configuration elements that are the same as configuration elements of atmospheric pressure plasma generator 10 and descriptions of those items are omitted.
- Atmospheric plasma generator 70 is provided with pair of electrodes 72 and 74.
- Each of the pair of electrodes 72 and 74 is approximately annular and electrodes 72 and 74 are provided on an outer circumferential surface of glass pipe 24 slightly separated from each other.
- Electrode 72 is provided roughly at a central portion of glass pipe 24 in the axial direction and electrode 74 is provided between electrode 72 and the end of glass pipe 24 at the side protruding from housing 20. Note that, electrode 72 faces the end section of Teflon tube 22 sandwiching glass pipe 24.
- atmospheric pressure plasma generator 70 With atmospheric pressure plasma generator 70 with such a configuration, negative electric voltage is applied to electrode 72 and positive electric voltage is applied to electrode 74 with processing gas being supplied to Teflon tube 22 and glass introduction pipe 36. By this, electric current flows between electrode 72 and electrode 74, and between electrode 74 and Teflon tube 22. In this case, electrical discharge occurs between electrode 72 and electrode 74, and between electrode 74 and Teflon tube 22, and processing gas flowing from inside Teflon tube 22 to inside glass pipe 24, and processing gas flowing from between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20 to inside glass pipe 24 is plasmarized. By this, similarly to atmospheric pressure plasma generator 10, atmospheric pressure plasma generator 70 emits plasma from the leading end of glass pipe 24.
- atmospheric pressure plasma generator 10 is an example of an atmospheric pressure plasma generator.
- the item configured from housing 20 and glass pipe 24 is an example of an outer tube.
- Teflon tube 22 is an example of an inner tube.
- Electrode 26 is an example of an electrode.
- Atmospheric pressure plasma generator 70 is an example not being part of the invention of an atmospheric pressure plasma generator.
- Electrode 72 is an example of a second electrode. Electrode 74 is an example of an electrode.
- a fluoropolymer is used as a material with negative electrical polarity, and possible materials include silicon, vinyl chloride, acrylic, polyurethane; polypropylene, polyester, rubber, and so on. That is, instead of Teflon tube 22, a tubular member formed from a material such as silicon, vinyl chloride, or the like may be used.
- Teflon tube 22 formed from a material with negative electrical polarity is provided on the inside of housing 20, but a tubular member formed from a material with positive electrical polarity may be provided instead of Teflon tube 22.
- a tubular member formed from a material with positive electrical polarity is provided instead of Teflon tube 22
- negative electric voltage must be applied to electrode 26.
- electrical discharge occurs between the tubular member formed from a material with positive electrical polarity and electrode 26, and the same effects as the above atmospheric pressure plasma generator 10 are achieved.
- a material with positive electrical polarity for example, glass, nylon, or the like may be used.
- processing gas supplied to Teflon tube 22 and the processing gas supplied to gas introduction pipe 36 are the same, but different processing gases may be supplied to Teflon tube 22 and gas introduction pipe 36.
- processing gas supplied to Teflon tube 22 and gas introduction pipe 36 is gas in which an inert gas such as nitrogen is mixed with an active gas in the air such as oxygen at a given ratio, but the processing gas may be only an inert gas, or only a reactive gas.
- processing gas is supplied to both Teflon tube 22 and to gas introduction pipe 36, but processing gas may be supplied to one of Teflon tube 22 and gas introduction pipe 36. That is, processing gas may be only supplied to Teflon tube 22 and that processing gas plasmarized, or processing gas may only be supplied between the outer circumferential surface of Teflon tube 22 and the inner circumferential surface of housing 20, and that processing gas plasmarized.
- 10 atmospheric pressure plasma generator
- 20 housing (outer tube); 22: Teflon tube (inner tube); 24: glass pipe (outer tube); 26: electrode; 70: atmospheric pressure plasma generator; 72: electrode (second electrode); 74: electrode
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Fluid Mechanics (AREA)
- Plasma Technology (AREA)
Description
- The present invention relates to an atmospheric pressure plasma generator that plasmarizes processing gas supplied inside a tubular member and emits plasma from an end section of the tubular member.
- There is a known atmospheric plasma generator that plasmarizes processing gas inside a tubular member and emits plasma from an end section of the tubular member. In detail, one of a pair of electrodes is arranged on an outer circumferential surface of the tubular member, and the other of the pair of electrodes is arranged on an inner circumferential surface of the tubular member. And, with processing gas being supplied inside the tubular member, by applying current to the pair of electrodes, processing gas is plasmarized inside the tubular member and emitted from an end section of the tubular member. An example of an atmospheric pressure plasma generator configured as such is disclosed in the Patent literature 1 below.
- Patent literature 2, falling within the terms of Art. 54(3) EPC, discloses a further example of an atmospheric plasma generator.
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- Patent literature 1:
WO 2007/105428 A1 - Patent literature 2:
WO 2015/071746 A1 - According to the atmospheric pressure plasma generator disclosed in the above patent literature 1, it is possible to suitably emit plasma. However, with the atmospheric pressure plasma generator disclosed in the above patent literature, because an electrode is arranged inside the tubular member, there is a problem in that, due to deterioration of the electrode, foreign matter may contaminate a target object of the plasma. Also, if an electrode is not arranged inside the tubular member, in order to prevent foreign matter contaminating a target object of the plasma, there is a problem in that processing gas cannot be suitably plasmarized inside the tubular member. The present invention takes account of such circumstances, and an object thereof is suitably plasmarize processing gas while preventing foreign matter from contaminating a target object of the plasma.
- To solve the above problems, the present invention provides an atmospheric pressure plasma generator according to independent claim 1. Preferred embodiments are laid down in the dependent claims.
- With the disclosed atmospheric pressure plasma generator, an inner tube is inserted inside an outer tube and the inner tube is formed of a material with either positive or negative electrical polarity. Also, an electrode with electrical polarity opposite to that of the material of the inner tube is provided on an outer circumferential surface of the outer tube. Therefore, by flowing processing gas such that processing gas contacts the inner tube, with the inner tube electrified, by applying an electric current to the electrode provided on the outer circumferential surface of the outer tube, current flows between the electrode and the inner tube. Thus, electrical discharge occurs between the electrode and the inner tube, and processing gas inside the outer tube is plasmarized. In such a manner, with the disclosed atmospheric pressure plasma generator, processing gas is plasmarized inside the outer tube without providing an electrode on the inside of the outer tube. Therefore, even in a case in which the electrode deteriorates, it is possible to prevent foreign matter from contaminating a target object of the the plasma during exposure to plasma. Further, because electrical discharge occurs between the electrode and the inner tube, it is possible to suitably plasmarize processing gas.
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- [
Fig. 1 ]
Fig. 1 shows a cross section of an atmospheric pressure plasma generator of a first embodiment. - [
Fig. 2 ]
Fig. 2 shows a cross section of an atmospheric pressure plasma generator of a second embodiment, which is useful to understand the invention, but does not fall under the claimed subject matter. - The following describes in detail referring to the figures an example embodiment of the present invention.
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Fig. 1 shows an embodiment of the present invention, atmosphericpressure plasma generator 10. Atmosphericpressure plasma generator 10 is for generating plasma at atmospheric pressure. Atmosphericpressure plasma generator 10 is provided withresin housing 20, Teflon (registered trademark of DuPont, USA)tube 22,glass pipe 24, andelectrode 26. -
Housing 20 is approximately cylindrical, and an inner circumferential surface ofhousing 20 is configured fromsmall diameter section 30, andlarge diameter section 32 that has a larger diameter thansmall diameter section 30. Through-hole 34 that pierceslarge diameter section 32 in the diameter direction is formed at thesmall diameter section 30 end section oflarge diameter section 32, andgas introduction pipe 36 is connected to through-hole 34. -
Teflon tube 22 is approximately cylindrical and its outer diameter is slightly smaller than the inner diameter ofsmall diameter section 30 ofhousing 20. Further,Teflon tube 22 is inserted intosmall diameter section 30 ofhousing 20, and an end ofTeflon tube 22 protrudes slightly from the end section ofhousing 20 on thelarge diameter section 32 side. -
Glass pipe 24 is approximately cylindrical and its outer diameter is slightly smaller than the inner diameter oflarge diameter section 32 ofhousing 20. Further,glass pipe 24 is engaged withlarge diameter section 32 ofhousing 20, and an end ofglass pipe 24 protrudes from the end section ofhousing 20 on thelarge diameter section 32 side. Note that, the amount thatglass pipe 24 protrudes from the end section ofhousing 20 is greater than the protruding amount ofTeflon tube 22 fromhousing 20. That is, the end section ofTeflon tube 22 protruding from the end ofhousing 20 is positioned insideglass pipe 24 protruding fromhousing 20. -
Electrode 26 is approximately annular and is provided on an outer circumferential surface ofglass pipe 24. The arrangement location ofelectrode 26 is roughly at a central portion ofglass pipe 24 in the axial direction, andelectrode 26 faces the end section ofTeflon tube 22 sandwichingglass pipe 24. - Generation of plasma by atmospheric pressure plasma generator With atmospheric
pressure plasma generator 10, thanks to the above configuration, processing gas is supplied to bothTeflon tube 22 andgas introduction pipe 36, and plasma is emitted from the end section ofglass pipe 24 by applying current toelectrode 26. Plasma generation by atmosphericpressure plasma generator 10 is described below in detail. With atmosphericpressure plasma generator 10, processing gas is supplied insideTeflon tube 22 from a gas supply device (not shown), and flows insideTeflon tube 22 in the direction ofarrow 50. Further, processing gas is supplied ingas introduction pipe 36 from the gas supply device, and flows between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20 in the direction ofarrow 52. Note that, the processing gas flowing insideTeflon tube 22 and the processing gas flowing insidegas introduction pipe 36 are the same, and that processing gas is a mixture at any given ratio of an inert gas such as nitrogen and a reactive gas such as oxygen from air. - Further,
Teflon tube 22 is formed from a fluoropolymer, and the fluoropolymer is a material with negative electrical polarity. A material with negative electrical polarity is a material which is easily charged as a cathode and, for example, in a case of static electricity caused by friction, material for which the electrical polarity is negative is charged as a cathode. Therefore, when processing gas flows insideTeflon tube 22, or between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20,Teflon tube 22 is charged as a cathode. Specifically, for example, when measuring the electric potential on the outer circumferential surface ofglass pipe 24 with processing gas flowing insideTeflon tube 22, the electric potential on the outer circumferential surface ofglass pipe 24 was -11 volts. Also, when measuring the electric potential on the outer circumferential surface ofglass pipe 24 with processing gas flowing between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20, the electric potential on the outer circumferential surface ofglass pipe 24 was -77 volts. Further, when measuring the electric potential on the outer circumferential surface ofglass pipe 24 with processing gas flowing between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20 and flowing insideTeflon tube 22, the electric potential on the outer circumferential surface ofglass pipe 24 was -50 volts. Note that, the electric potential ofTeflon tube 22 while processing gas was flowing was too low to be measured. - In this manner, when processing gas flows so as to contact
Teflon tube 22,Teflon tube 22 is charged as a cathode. Therefore, when processing gas is supplied toTeflon tube 22 andgas introduction pipe 36 and positive electric voltage is applied toelectrode 26, electric current flows betweenTeflon tube 22 andelectrode 26. In this case, electrical discharge occurs betweenTeflon tube 22 andelectrode 26, and processing gas flowing from insideTeflon tube 22 toinside glass pipe 24, and processing gas flowing from between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20 toinside glass pipe 24 is plasmarized. By this, atmosphericpressure plasma generator 10 emits plasma from the leading end ofglass pipe 24. - With a conventional atmospheric pressure plasma generator, generally, one of a pair of electrodes is arranged on the outer circumferential surface of
glass pipe 24 and the other electrode of the pair is arranged on the inner circumferential surface ofglass pipe 24, and processing gas insideglass pipe 24 is plasmarized by positive electric voltage being applied to the electrode and negative electric voltage being applied to the other electrode. Therefore, with a conventional atmospheric pressure plasma generator, the electrode arranged on the outer circumferential surface ofglass pipe 24 deteriorates, and due to deterioration of the electrode, foreign matter may contaminate a target object of the plasma. However, with atmosphericpressure plasma generator 10, because electrical discharge occurs betweenTeflon tube 22 andelectrode 26, it is not necessary to arrange an electrode on the inside ofglass pipe 24. Therefore, by performing plasma processing with atmosphericpressure plasma generator 10, it is possible to prevent foreign matter from contaminating a target object of the plasma. - Also, with atmospheric
pressure plasma generator 10, processing gas flows not only insideTeflon tube 22, but also between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20, and that processing gas is plasmarized. This enables a large amount of processing gas to be plasmarized, meaning that plasma is emitted efficiently. -
Fig. 2 shows a second embodiment, atmosphericpressure plasma generator 70, which is useful to understand the invention, but does not fall under the claimed subject matter. Atmosphericpressure plasma generator 70 of the second embodiment is provided with the same configuration elements as atmosphericpressure plasma generator 10 of the first embodiment, except for the electrode. Therefore, the same reference numbers are given to configuration elements that are the same as configuration elements of atmosphericpressure plasma generator 10 and descriptions of those items are omitted. -
Atmospheric plasma generator 70 is provided with pair ofelectrodes electrodes electrodes glass pipe 24 slightly separated from each other.Electrode 72 is provided roughly at a central portion ofglass pipe 24 in the axial direction andelectrode 74 is provided betweenelectrode 72 and the end ofglass pipe 24 at the side protruding fromhousing 20. Note that,electrode 72 faces the end section ofTeflon tube 22 sandwichingglass pipe 24. - With atmospheric
pressure plasma generator 70 with such a configuration, negative electric voltage is applied toelectrode 72 and positive electric voltage is applied toelectrode 74 with processing gas being supplied toTeflon tube 22 andglass introduction pipe 36. By this, electric current flows betweenelectrode 72 andelectrode 74, and betweenelectrode 74 andTeflon tube 22. In this case, electrical discharge occurs betweenelectrode 72 andelectrode 74, and betweenelectrode 74 andTeflon tube 22, and processing gas flowing from insideTeflon tube 22 toinside glass pipe 24, and processing gas flowing from between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20 toinside glass pipe 24 is plasmarized. By this, similarly to atmosphericpressure plasma generator 10, atmosphericpressure plasma generator 70 emits plasma from the leading end ofglass pipe 24. - In this manner, with atmospheric
pressure plasma generator 70, a pair ofelectrodes electrodes glass pipe 24, and electrical discharge occurs betweenelectrode 74 andTeflon tube 22 insideglass pipe 24. Therefore, similarly to atmosphericpressure plasma generator 10, with atmosphericpressure plasma generator 70, because no electrode is provided inside on the inside ofglass pipe 24, it is possible to prevent foreign matter from contaminating a target object of the plasma. - Note that, atmospheric
pressure plasma generator 10 is an example of an atmospheric pressure plasma generator. The item configured fromhousing 20 andglass pipe 24 is an example of an outer tube.Teflon tube 22 is an example of an inner tube.Electrode 26 is an example of an electrode. Atmosphericpressure plasma generator 70 is an example not being part of the invention of an atmospheric pressure plasma generator. -
Electrode 72 is an example of a second electrode.Electrode 74 is an example of an electrode. - Further, the present invention is not limited to the above example embodiments, and various changed or improved embodiments are possible within the scope of the claims, based on the knowledge of someone skilled in the art. Specifically, for example, in an above embodiment, a fluoropolymer is used as a material with negative electrical polarity, and possible materials include silicon, vinyl chloride, acrylic, polyurethane; polypropylene, polyester, rubber, and so on. That is, instead of
Teflon tube 22, a tubular member formed from a material such as silicon, vinyl chloride, or the like may be used. - Also, in an embodiment above,
Teflon tube 22 formed from a material with negative electrical polarity is provided on the inside ofhousing 20, but a tubular member formed from a material with positive electrical polarity may be provided instead ofTeflon tube 22. However, in a case in which a tubular member formed from a material with positive electrical polarity is provided instead ofTeflon tube 22, negative electric voltage must be applied toelectrode 26. By this, electrical discharge occurs between the tubular member formed from a material with positive electrical polarity andelectrode 26, and the same effects as the above atmosphericpressure plasma generator 10 are achieved. Note that, as a material with positive electrical polarity, for example, glass, nylon, or the like may be used. - Also, in an embodiment above, the processing gas supplied to
Teflon tube 22 and the processing gas supplied togas introduction pipe 36 are the same, but different processing gases may be supplied toTeflon tube 22 andgas introduction pipe 36. Further, in an embodiment above, processing gas supplied toTeflon tube 22 andgas introduction pipe 36 is gas in which an inert gas such as nitrogen is mixed with an active gas in the air such as oxygen at a given ratio, but the processing gas may be only an inert gas, or only a reactive gas. - Also, in an embodiment above, processing gas is supplied to both
Teflon tube 22 and togas introduction pipe 36, but processing gas may be supplied to one ofTeflon tube 22 andgas introduction pipe 36. That is, processing gas may be only supplied toTeflon tube 22 and that processing gas plasmarized, or processing gas may only be supplied between the outer circumferential surface ofTeflon tube 22 and the inner circumferential surface ofhousing 20, and that processing gas plasmarized. - 10: atmospheric pressure plasma generator; 20: housing (outer tube); 22: Teflon tube (inner tube); 24: glass pipe (outer tube); 26: electrode; 70: atmospheric pressure plasma generator; 72: electrode (second electrode); 74: electrode
Claims (3)
- An atmospheric pressure plasma generator (10) comprising:an approximately cylindrical housing (20) having an inner circumferential surface with a small diameter section (30) and a large diameter section (32), a diameter of the large diameter section (32) being larger than a diameter of the small diameter section (30);a tubular outer tube (24), its outer diameter being slightly smaller than an inner diameter of the large diameter section (32) such that the outer tube (24) is engaged into the large diameter section (32) of the housing (20) and an end of the tubular outer tube (24) protrudes from an end section of the housing (20) on the large diameter section (32) side;an inner tube (22), with an outer diameter smaller than an inner diameter of the outer tube (24), the inner tube (22) is inserted into the small diameter section (30) of the housing (20), so that the end of the inner tube (22) protrudes slightly from the end section of the housing (20) on the large diameter section (32) side, wherein the protruding amount of the tubular outer tube (24) from the end section of the housing (20) on the large diameter section (32) side is larger than the protruding amount of the inner tube (22) from the end section of the housing (20) on the large diameter section (32) side, the inner tube (22) being formed from a material with either positive or negative electrical charging polarity, being a material, which is, in a case of static electricity caused by friction, charged as either an anode or a cathode;only one electrode (26), the electrode (26) being capable to assume the electrical polarity opposite to that of the material of the inner tube (22), the electrode (26) being provided on an outer circumferential surface of the outer tube (24),a first flow path inside the inner tube (22), anda second flow path between an outer circumferential surface of the inner tube (22) and an inner circumferential surface of the outer tube (24),wherein in operation, a processing gas is arranged to flow in at least one of the first flow path and the second flow path, and the processing gas by contact is arranged to electrically charge the inner tube (22), such that by applying an electric current to the electrode (26), an electrical discharge is arranged to occur between the electrode (26) and the inner tube (22) capable to plasmarize the processing gas.
- The atmospheric pressure plasma generator (10) according to claim 1, wherein
the inner tube (22) is formed from a material with negative electrical charging polarity and the electrode (26) is a positive electrode. - The atmospheric pressure plasma generator (10) according to claim 1 or 2, wherein,
in a state with processing gas flowing in both the first flow path and the second flow path, processing gas flowing through the first flow path and the second flow path is plasmarized by applying an electric current to the electrode (26).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2015/052191 WO2016120998A1 (en) | 2015-01-27 | 2015-01-27 | Atmospheric-pressure plasma generation device |
Publications (3)
Publication Number | Publication Date |
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EP3253183A1 EP3253183A1 (en) | 2017-12-06 |
EP3253183A4 EP3253183A4 (en) | 2018-09-26 |
EP3253183B1 true EP3253183B1 (en) | 2023-11-08 |
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EP15879895.9A Active EP3253183B1 (en) | 2015-01-27 | 2015-01-27 | Atmospheric-pressure plasma generation device |
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EP (1) | EP3253183B1 (en) |
JP (1) | JP6425742B2 (en) |
WO (1) | WO2016120998A1 (en) |
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JP3267810B2 (en) * | 1993-07-20 | 2002-03-25 | 株式会社半導体エネルギー研究所 | Coating method |
JP4953255B2 (en) * | 2006-02-13 | 2012-06-13 | 国立大学法人群馬大学 | Nozzle for plasma generator, plasma generator, plasma surface treatment apparatus, plasma generation method and plasma surface treatment method |
JP2010218997A (en) * | 2009-03-19 | 2010-09-30 | Shibaura Mechatronics Corp | Plasma generator, and plasma processing device |
ITPD20130310A1 (en) * | 2013-11-14 | 2015-05-15 | Nadir S R L | METHOD FOR THE GENERATION OF AN ATMOSPHERIC PLASMA JET OR JET AND ATMOSPHERIC PLASMA MINITORCIA DEVICE |
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2015
- 2015-01-27 WO PCT/JP2015/052191 patent/WO2016120998A1/en active Application Filing
- 2015-01-27 EP EP15879895.9A patent/EP3253183B1/en active Active
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JP6425742B2 (en) | 2018-11-21 |
WO2016120998A1 (en) | 2016-08-04 |
EP3253183A4 (en) | 2018-09-26 |
EP3253183A1 (en) | 2017-12-06 |
JPWO2016120998A1 (en) | 2017-11-02 |
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