JP2009205815A - Static eliminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress imbalance of ion balance to a range allowing general ion balance control to be executed without impairing an inactive gas atmosphere. <P>SOLUTION: This D.C. power type static eliminator 10 includes positive/negative discharge electrodes 11 and 12 both of which are made of tungsten, a restriction resistor 16 is interposed between the negative discharge electrode 12 and a negative D.C. power source 15. The resistance value of the restriction resistor 16 is set not smaller than 0.1 GΩ (0.1×10<SP>9</SP>Ω) and smaller than 10 GΩ (10×10<SP>9</SP>Ω). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a static eliminator, and more particularly, to a static eliminator that neutralizes a charged body, that is, an object to be neutralized, by generating positive ions and electrons by applying a voltage to a discharge electrode.

  The static eliminator includes a discharge electrode to which a high voltage is applied. By applying a high voltage to the discharge electrode, positive ions and electrons are generated, and the charges are neutralized using the ions.

  In the static eliminator, ion balance control corresponding to the amount of ions consumed by static elimination of the object to be neutralized is executed. In Patent Document 1, an ion current measuring electrode is prepared separately from the discharge electrode, and the ion current measuring electrode is applied to the discharge electrode so that ions having a necessary polarity are relatively increased depending on the current value and direction of the ion current. Controlling high voltage is disclosed. Patent Document 2 discloses a high voltage applied to a discharge electrode as a method of ion balance control by detecting a current flowing in a ground line and relatively increasing the number of ions having a required polarity depending on the current value and direction of the current. Of controlling the voltage value or the pulse width of the.

The discharge electrode (also called “discharge electrode needle”) is generally made of stainless steel or tungsten. However, Patent Document 3 has a specific resistance value of 5 MΩ / cm to 20 MΩ / cm (10 ⁶ Ω / cm). We proposed a discharge electrode made of zirconium oxide, and claimed that zirconium oxide is superior in wear resistance, so that it has little metal particle dusting due to wear, can continue stable discharge characteristics for a long time, and has less electric shock. is doing.

  By the way, there exists a problem that a static elimination function does not fully function regarding the static elimination object in a specific atmosphere. Patent document 4 explains this problem in detail. That is, a manufacturing process for an EL (electroluminescence) element substrate in which a TFT (thin film transistor) is formed on the surface of a glass plate or a transparent resin plate is performed in a nitrogen gas atmosphere or the like. However, this neutralization in an inert gas atmosphere such as nitrogen (the neutralization here refers to a corona discharge type neutralization in which neutralization is performed by ionizing a gas around the electrode by applying a high voltage to the electrode. ) Has a problem that the charge removal function is not sufficient compared with the charge removal in the atmosphere.

  The reason for this is that, as pointed out in Patent Document 5, when a corona-type discharge type static eliminator is operated in a nitrogen gas atmosphere or a rare gas atmosphere, that is, an inert gas atmosphere, high-purity nitrogen and rare gas are electrons. It is known that there is a problem in that negative ions are not generated because they do not bind to. That is, in the nitrogen gas atmosphere, negative ions are not generated, and instead, electrons are emitted from the ground through the discharge electrode. Since the movement speed of electrons is 100 to 1000 times that of plus ions, the ion balance is extremely shifted in the minus direction, and the above-described ion balance control becomes substantially impossible. For this reason, Patent Document 5 proposes that a predetermined small amount of gas that combines with electrons is injected in the vicinity of the discharge electrode to generate negative ions. As the gas that combines with electrons, air, oxygen, Carbon dioxide and the like are illustrated. In fact, the inventor of the present application uses a pulse AC type static eliminator (a static eliminator that alternately applies a pulsed positive voltage and a negative voltage to a common discharge electrode), and a high-concentration nitrogen gas atmosphere. When the absolute value of the plus and minus voltages is the same in an atmosphere where the nitrogen concentration is 99% or more and the duty ratio for applying plus and minus voltages is 50:50, the workpiece is neutralized. First, the amount of positive ions generated at the discharge electrode reaching the workpiece was about 5% of the amount of negative electrons reaching the workpiece.

JP 2005-228655 A JP 2007-149419 A JP-A-11-297455 JP 2004-47179 A JP-T-2002-533887

  However, as in Patent Document 5, injecting a gas such as air in the vicinity of the discharge electrode, although a small amount, is harmful to the inert gas atmosphere due to the injected oxygen or the like, such as high-purity nitrogen or noble gas It cannot be applied to the object to be neutralized that needs to be managed in the atmosphere.

  An object of the present invention is to provide a static eliminator capable of eliminating static electricity without harming an inert gas atmosphere.

  It is a further object of the present invention to provide a static eliminator capable of suppressing ion balance imbalance to the extent that general ion balance control can be performed without harming an inert gas atmosphere.

The above technical problem is, according to the first aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Connected to the first power source and applied with a voltage in a voltage adjustment range in which the first voltage value can be adjusted, thereby discharging a discharge current in the first range in an inert gas atmosphere. A discharge electrode;
A second discharge electrode connected to a second power source for applying a voltage in a voltage adjustment range in which the second voltage value is adjustable;
A first range of discharge current generated by the first discharge electrode in the second discharge electrode provided between the second power source and the second discharge electrode in an inert gas atmosphere. And a limiting resistor having a magnitude capable of generating a discharge current in a second range that is substantially equivalent in absolute value.

The above technical problem is, according to the second aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A discharge electrode;
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Switch means for alternately switching and connecting the first power source and the second power source to the discharge electrode;
By being applied between the switch means and the discharge electrode, and when the discharge electrode is connected to the first power source by the switch means, the voltage in the first adjustable voltage adjustment range is applied. The discharge electrode is connected to the second power source by the switch means, the second range being almost equivalent to the first range of the dischargeable discharge current formed in the inert gas atmosphere. This is achieved by providing a static eliminator having a limiting resistor of a size that can be produced in the meantime.

The above technical problem is, according to the third aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Control means for generating positive and negative voltages alternately in the first power supply and the second power supply and controlling the duty ratio of these positive and negative voltages;
A first discharge electrode connected to the first power source and generating a discharge current having a first discharge current value by the first voltage value supplied from the first power source in an inert gas atmosphere When,
A second discharge electrode connected to the second power source and generating a discharge current having a second discharge current value by the second voltage value supplied from the second power source in an inert gas atmosphere When,
An absolute value of a second discharge current interposed between the second power source and the second discharge electrode and generated by the second discharge electrode in an inert gas atmosphere is calculated as the first value. This is achieved by providing a static eliminator having a limiting resistance for making it approximately equal to the first discharge current value of the discharge electrode.

The above technical problem is, according to the fourth aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A common discharge electrode;
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Switch means for alternately switching and connecting the first power source and the second power source to the common discharge electrode;
The positive and negative voltages are alternately generated in the first power source and the second power source, the duty ratio of these positive and negative voltages is controlled, and the switching means is controlled based on the controlled duty ratio. Control means for
A limiting resistor interposed between the switch means and the common discharge electrode;
The limiting resistor is capable of discharging in an inert gas atmosphere when the common discharge electrode is connected to a first power source by the switch means and the voltage of the first voltage value is applied to the common discharge electrode. The second discharge current value, which is almost the same as the first discharge current value of the negative discharge current, has a resistance value that can be generated when the second power source and the common discharge electrode are connected. This is achieved by providing a static eliminator characterized by comprising.

The above technical problem is, according to the fifth aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A common discharge electrode;
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
A first voltage supply line extending from the first power source toward the common discharge electrode; a second voltage supply line extending from the second power source toward the common discharge electrode; A voltage supply line comprising a third voltage supply line connected to the voltage supply line and supplying a voltage supplied from the first and second power supply lines to the common discharge electrode;
Switch means for alternately switching and connecting the first power source and the second power source to the common discharge electrode;
The positive and negative voltages are alternately generated in the first power source and the second power source, the duty ratio of these positive and negative voltages is controlled, and the switching means is controlled based on the controlled duty ratio. Control means for
A limiting resistor provided in the second voltage supply line,
The limiting resistor is capable of discharging in an inert gas atmosphere when the common discharge electrode is connected to a first power source by the switch means and the voltage of the first voltage value is applied to the common discharge electrode. The second discharge current value, which is almost the same as the first discharge current value of the negative discharge current, has a resistance value that can be generated when the second power source and the common discharge electrode are connected. This is achieved by providing a static eliminator characterized by comprising.

According to the sixth aspect of the present invention, the above technical problem is
In the static eliminator used in an inert gas atmosphere,
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Connected to the first power source and applied with a voltage in a voltage adjustment range in which the first voltage value can be adjusted, thereby discharging a discharge current in the first range in an inert gas atmosphere. A discharge electrode;
A second discharge electrode connected to a second power source for applying a voltage in a voltage adjustment range in which the second voltage value is adjustable;
The second discharge electrode is composed of a semiconductive material, and the magnitude of the limiting resistance value by the semiconductive material is the first discharge in the second discharge electrode in an inert gas atmosphere. This is achieved by providing a static eliminator that is capable of generating a discharge current in a second range that is substantially equivalent in absolute value to the first range of the discharge current generated by the electrode.

The above technical problem is, according to the seventh aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A discharge electrode;
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Switch means for alternately switching and connecting the first power source and the second power source to the discharge electrode;
The discharge electrode is made of a semiconductive material, and the magnitude as the limiting resistance value by the semiconductive material is the first adjustment when the discharge electrode is connected to the first power source by the switch means. By applying a voltage in a possible voltage adjustment range, the discharge electrode has a second range that is almost equivalent to the first range of the dischargeable discharge current formed in the inert gas atmosphere as an absolute value. Is achieved by providing a static eliminator having a size that can be generated when connected to a second power source by the switch means.

The above technical problem is, according to the eighth aspect of the present invention,
In the static eliminator used in an inert gas atmosphere,
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Control means for generating positive and negative voltages alternately in the first power supply and the second power supply and controlling the duty ratio of these positive and negative voltages;
A first discharge electrode connected to the first power source and generating a discharge current having a first discharge current value by the first voltage value supplied from the first power source in an inert gas atmosphere When,
A second discharge electrode connected to the second power source and generating a discharge current having a second discharge current value by the second voltage value supplied from the second power source in an inert gas atmosphere When,
The second discharge electrode is made of a semiconductive material, and a magnitude as a limiting resistance value by the semiconductive material is generated by the second discharge electrode in an inert gas atmosphere. This is achieved by providing a static eliminator characterized in that the absolute value of the discharge current is approximately equal to the first discharge current value of the first discharge electrode.

According to a ninth aspect of the present invention, the above technical problem is
In the static eliminator used in an inert gas atmosphere,
A common discharge electrode;
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Switch means for alternately switching and connecting the first power source and the second power source to the common discharge electrode;
The positive and negative voltages are alternately generated in the first power source and the second power source, the duty ratio of these positive and negative voltages is controlled, and the switching means is controlled based on the controlled duty ratio. Control means for
The common discharge electrode is made of a semiconductive material, and the magnitude as the limiting resistance value by the semiconductive material is such that the common discharge electrode is connected to a first power source by the switch means and the first voltage When the common discharge electrode is applied to the voltage, the second discharge current value, which is almost the same as the first discharge current value of the discharge current that can be discharged in the inert gas atmosphere, is the second value. This is achieved by providing a static eliminator having a size that can be generated when the power source is connected to the common discharge electrode.

  Prior to the description of the preferred embodiment of the present invention, the contents of a comparative experiment between the case where the static eliminator is operated in a conventional air atmosphere and the case where it is operated in a high purity nitrogen gas atmosphere will be described.

  FIG. 1 shows the configuration of a pulse AC type static eliminator 1 used in this experiment. The neutralization device 1 shown in the figure is composed of a high voltage power source 3 (not shown, but a positive high voltage power source for applying a positive voltage and a negative high voltage power source for applying a negative voltage to the discharge electrode 2. A high voltage is applied. Specifically, positive and negative voltages are alternately supplied to the discharge electrode 2 by switch means (not shown) interposed between the positive high voltage power source and the negative high voltage power source. The The material of the discharge electrode 2 is tungsten (W). An aluminum plate was prepared as the counter electrode 4, and the current value and the applied voltage value when a high voltage was applied to the discharge electrode 2 were measured with an ammeter 5 and a voltmeter 6. The result shown in was obtained.

FIG. 2 is a graph when the negative high voltage power source in the high voltage power source 3 is operated to the discharge electrode 2 and a negative high voltage is applied, and the square represents the applied voltage and the discharge current when the experiment is performed in an air atmosphere. The triangle shows the relationship between the applied voltage and the discharge current when the experiment was conducted in a high purity N ₂ gas atmosphere. On the other hand, FIG. 3 is a graph when the positive high voltage power source in the high voltage power source 3 is operated to the discharge electrode 2 and a positive high voltage is applied. The relationship between the discharge current is shown, and the triangle shows the relationship between the applied voltage and the discharge current when an experiment is performed in a high purity N ₂ gas atmosphere.

  2 and 3, the relationship between the applied voltage applied to the discharge electrode 2 in the atmosphere and the discharge current generated thereby is compared between when a positive voltage is applied and when a negative voltage is applied. As a result, when the absolute value of the voltage is increased from 0 volt respectively, the corresponding discharge current gradually increases, and the use range of the applied voltage of the positive and negative absolute values is almost the same. In addition, it can be seen that the value of the discharge current generated in the range is substantially the same current value range.

  In contrast, the relationship between the applied voltage applied to the discharge electrode 2 and the discharge current generated thereby in a high-purity nitrogen atmosphere, when a positive voltage is applied and when a negative voltage is applied In comparison, the discharge current generated for a positive applied voltage is larger than the discharge current generated for a positive applied voltage in the atmosphere, but tends to gradually increase as the applied voltage increases. I can understand that. On the other hand, the discharge current generated for a negative applied voltage in a high purity nitrogen atmosphere is about −2.7 kV after the discharge current is confirmed in the vicinity of the applied voltage of about −2.5 kV. In the vicinity of the voltage, a rapid change is already detected until a discharge current of −25 μA is detected.

  Next, as an example, the above-described experimental results are used to provide the range of the discharge current that is normally required for neutralization in the static eliminator; Table 1 shows the voltage adjustment range.

  As can be seen from Table 1, in the atmosphere in the atmosphere, when the absolute value of the discharge current is adjusted to 1 to 10 μA (the range of the magnitude of the discharge current required for performing the charge removal desired as the charge removal device), the discharge electrode The voltage range for applying a positive voltage to 2 is 4.90 kV to 7.37 kV, and the adjustment range is 2.47 kV. The width of the voltage for applying the negative voltage is −6.61 kV to −3.85 kV, and the adjustment width is 2.76 kV. Therefore, at 1 to 10 μA, which is the absolute value of the discharge current, the static eliminator used in this experiment has a positive voltage and a negative voltage as absolute values with almost the same adjustment width and almost the same voltage resolution (voltage can be adjusted). It is shown that it is controllable in a unit). On the other hand, in the atmosphere of high purity nitrogen gas, when the absolute value of the discharge current is adjusted to 1 to 10 μA, the voltage range in which a positive voltage is applied to the discharge electrode is 3.83 kV to 5.61 kV, and the adjustment range is 1.78. kV. The width of the voltage for applying the negative voltage is −2.65 kV to −2.61 kV, and the adjustment width is 0.04 kV. Therefore, in the case of an atmosphere of high purity nitrogen gas, the negative voltage adjustment width is about 1/45 of the positive voltage adjustment width in the absolute value of 1 to 10 μA of the discharge current. Yes, it is shown that the adjustment range of the positive voltage and the negative voltage is completely different scale, in other words, the resolution of completely different voltage, and the control value for performing positive and negative voltage control is the same resolution This indicates that it is in a very difficult state.

  For this reason, when applying a positive and negative voltage in a discharge type static eliminator in an inert gas atmosphere such as high-concentration nitrogen gas (99% or more of nitrogen), compared to the static eliminator used in the air atmosphere, It can be seen that it is necessary to provide the same function as that of the static eliminator used in the atmosphere by controlling the relationship between the voltage applied to the electrode and the discharge current value generated thereby.

  FIG. 4 shows an outline of the static eliminator 10 of the first embodiment used in a high-concentration nitrogen gas atmosphere. Here, in the case of controlling the magnitudes of positive and negative voltages applied to the discharge electrodes 11 and 12 to bring the workpiece into a neutralized state, the magnitude of the limiting resistance used in the pulse DC type static eliminator 10 is large. The way of thinking will be explained.

  The static eliminator 10 has a pair of discharge electrodes 11 and 12. One discharge electrode 11 is a plus electrode and the other discharge electrode 12 is a minus electrode. A power supply circuit 13 for applying a voltage to the pair of discharge electrodes 11 and 12 includes a positive pole direct current (DC) power supply 14 and a minus pole direct current (DC) power supply 15. The positive pole direct current (DC) power supply 14 can generate a positive voltage in a range from 0 kV to +10 kV, and can adjust the voltage in units of 100 V within a range in which this voltage can be varied. . On the other hand, the negative pole direct current (DC) power supply 15 has a polarity different from that of the positive pole direct current (DC) power supply 14, but has a voltage adjustment range as an absolute value and a value as a basic unit capable of adjusting the voltage. A negative voltage can be generated in the range from 0 kV to -10 kV, which is substantially equivalent to the DC power supply 14 of the positive electrode, and the voltage can be changed in units of 100 V within a range in which this voltage can be varied. It can be adjusted.

  A positive pole direct current (DC) power supply 14 is connected to the positive discharge electrode 11, and by applying a voltage in the above-described range to the positive discharge electrode 11, the atmosphere around the electrode is positive ion in a nitrogen gas atmosphere. And a positive discharge current is generated accordingly.

  Similarly, the negative pole direct current (DC) power source 15 is connected to the negative discharge electrode 12 via the limiting resistor 16, and the negative discharge electrode 12 is applied with a voltage in the above-described range. Electrons from the ground are released into the nitrogen gas atmosphere via 12, and a negative discharge current is generated. Further, in the static eliminator 10, the polarity of the workpiece and the charge amount thereof are detected by a resistor 17 provided between the ground and the power source and a voltmeter 18 connected to both ends of the resistor 17. A signal is sent to the controller 19.

  Based on the detected polarity and the magnitude, the controller 19 determines the voltage value of the power supply 14 or 15 that generates a voltage of the reverse polarity charged with the workpiece within the variable voltage range. The voltage is supplied to each of the power supplies 14 and 15 so as to be relatively higher than the voltage value generated by the other power supply 15 or 14, and the work is neutralized. Needless to say, the difference between the relative voltage values (as absolute values) of the two power supplies 14 and 15 is determined by the charge amount with which the workpiece is charged. In the tenth embodiment, the voltage is alternately applied to the discharge electrode 11 and the discharge electrode 12, but this control is performed by the controller 19 as described above to turn on and off the power supplies 14 and 15. Achieved by doing.

  In the static eliminator 10 of this type, considering that the limiting resistor 16 does not exist, positive ions from the negative discharge electrode 12 to the positive discharge electrode 11 as described in the section “Background Art” above. There is a risk that more extremely more electrons are sent to the workpiece, and the function as a static eliminator cannot be performed in a nitrogen atmosphere.

  This is because the discharge current value range (for example, 0 μA to 10 μA) of the discharge current generated by applying a voltage from the positive power supply 14 to the positive discharge electrode 11 within a variable voltage range is negative within the variable range. This is because the range of the discharge current value of the discharge current generated by applying a voltage from the power supply 15 to the negative discharge electrode 12 is greatly different. For this reason, in the static eliminator of the type that performs static elimination by varying the power supply voltage, the magnitude of the resistance value provided by the limiting resistor 16 between the negative power source 15 and the negative discharge electrode 12 is not sufficient. A discharge current range (for example, 0 μA to −10 μA) whose absolute value is almost the same as the range of the discharge current generated by the plus-side discharge electrode 11 in the atmosphere of the active gas has a size that allows the minus-side discharge electrode 12 to generate. It is necessary to. In addition to this, it is possible to control plus and minus at the same level by making the voltage basic unit for voltage adjustment provided to each power supply substantially equal as an absolute value.

  In addition, although not shown, a voltage is simultaneously generated for a DC type static eliminator, that is, positive and negative power sources 14 and 15 that share the same main components as the tenth embodiment, and the controller 19 generates positive and negative power sources. Needless to say, the same effect can be obtained with respect to the DC static eliminator of the type that simultaneously provides on / off signals to 14 and 15 if the resistance limitation having the same size as in the tenth embodiment is employed. . The material of the pair of discharge electrodes 11 and 12 is tungsten (W).

  Next, with reference to FIG. 5, a description will be given of a case where the static elimination control is performed by controlling the magnitudes of the positive and negative power supply voltages in the pulse AC type static elimination apparatus 20 as the second embodiment.

  The AC static eliminator 20 has a common discharge electrode 21. The discharge electrode 21 can generate a positive voltage in the range from 0 kV to +10 kV, and can adjust the voltage in increments of 100 V within a range in which this voltage can be varied. DC) power supply 14 is provided, and although the polarity is different, the voltage adjustment range as an absolute value and the value as a basic unit capable of adjusting the voltage are substantially the same as those of the positive pole DC power supply 14. A negative voltage direct current (DC) power supply 15 capable of generating a negative voltage in the range from 0 kV to -10 kV and adjusting the voltage in units of 100 V within a range in which this voltage can be varied is connected. Has been.

  The positive pole direct current (DC) power supply 14 applies a voltage in the above-described range to the discharge electrode 21 via the limiting resistor 16 to ionize the atmosphere around the electrode into positive ions in the nitrogen gas atmosphere. , Generating a positive discharge current.

  Similarly, a negative pole direct current (DC) power supply 15 is connected to the discharge electrode 21 via the limiting resistor 16, and applies the voltage in the above-described range to the discharge electrode 21, whereby the ground is connected via the discharge electrode 21. Are discharged into a nitrogen gas atmosphere, and a negative discharge current is generated. Furthermore, in this AC static elimination device 20, the polarity of the workpiece and the amount of charge are detected by a resistor 17 provided between the ground and the power source and a voltmeter 18 connected to both ends of the resistor 17, A detection signal is sent to the controller 19.

  Based on the detected polarity and the magnitude, the controller 19 determines the voltage value of the power supply 14 or 15 that generates a voltage of the reverse polarity charged with the workpiece within the variable voltage range. The voltage is supplied to each of the power supplies 14 and 15 so as to be relatively higher than the voltage value generated by the other power supply 15 or 14, and the work is neutralized. Needless to say, the difference between the relative voltage values (as absolute values) of the two power supplies 14 and 15 is determined by the charge amount with which the workpiece is charged. In the present embodiment, positive and negative voltages are alternately applied to the discharge electrode 21 from the positive power source 14 and the negative power source 15, but this control is performed by the controller 19 described above. This is achieved by performing on / off control of the power supplies 14 and 15.

  In this AC-type static eliminator 20, considering that the limiting resistor 16 does not exist, as described in the above [Background Art] section, the number of electrons exceeding the positive ions from the common discharge electrode 21 is extremely large. There is a risk that the function as a static eliminator will not be performed in a nitrogen atmosphere. This is because the discharge current value range (for example, 0 μA to 10 μA) of the discharge current generated by applying a positive voltage from the positive power supply 14 to the discharge electrode 21 within a variable voltage range is minus within the variable range. This is because the range of the discharge current value of the discharge current generated by applying a voltage from the power source 15 to the discharge electrode 21 is greatly different.

  For this reason, in the static eliminator of the type that performs static elimination by varying the power supply voltage, the magnitude of the resistance value given to the limiting resistor 16 between the power supplies 14 and 15 and the discharge electrode 21 is the atmosphere of the inert gas. When a positive voltage is applied to the discharge electrode 21, a range of discharge current that is almost equivalent to the range of the discharge current generated when the positive voltage is applied to the discharge electrode 21 (for example, 0 μA to −10 μA) is applied. It is necessary to have a size that allows the discharge electrode 21 to be generated. In addition to this, it is possible to control positive and negative control at the same level by making the voltage basic unit for voltage adjustment provided to each power supply 14 and 15 substantially the same as an absolute value. .

  Further, when the DC type static eliminator 10 described with reference to FIG. 4 is compared with the AC type embodiment 20 of FIG. 5, the AC type embodiment 20 includes one common discharge electrode 21. On the other hand, since the positive and negative voltages are alternately applied, the limiting resistor 16 is arranged in a path for applying a voltage from both the power supplies 14 and 15 to the discharge electrode 21. For this reason, the positive voltage supplied from the positive power source 14 to the discharge electrode 21 is also affected by the limiting resistor 16. Therefore, in this case, when the range of the discharge current to be generated is 0 μA to +10 μA, in order to provide the generation range of the discharge current, the positive side voltage that can be generated is increased toward this. Alternatively, it is necessary to select whether the range of the discharge current to be generated is slightly reduced. However, even in this case, since the degree of generation of the negative-side discharge current in the inert gas without the limiting resistor 16 is extremely large compared to the positive, the range of the discharge current to be generated on the positive side is positive. In consideration of the balance between the magnitude of the voltage of the power supply on the side, that is, the adjustment range of the voltage that can be generated and the magnitude of the limiting resistance, the resistance value of the limiting resistance 16 is set to a positive voltage in an inert gas atmosphere. The range of the discharge current generated when applied to the discharge electrode 21 is substantially the same as the range of the discharge current generated when applied to the discharge electrode 21 (for example, 0 μA to −10 μA). What should I do?

  The case where the DC and AC type voltage values are controlled has been described above. Hereinafter, the concept regarding the magnitude of the resistance value of the limiting resistor 16 when the duty ratio is controlled will be described.

  First, the limiting resistor used in the pulse DC type static eliminator 10 (FIG. 4) in the case of controlling the duty ratio of positive and negative voltages applied to the discharge electrode in order to bring the workpiece into a neutralized state. The concept of 16 resistance values will be described.

  As described above, the DC type static eliminator 10 (FIG. 4) includes the pair of discharge electrodes 11 and 12 even in the pulse type. One discharge electrode 11 is a plus electrode and the other discharge electrode 12 is a minus electrode. A positive pole direct current (DC) power source 14 capable of generating a predetermined voltage value, for example, a positive voltage of 5 kV, is provided. Furthermore, although the polarity is different, the absolute value of the voltage value is a positive pole DC power source 14. A negative pole direct current (DC) power supply 15 that can generate a negative voltage of −5 kV, which is substantially equivalent to the above, is provided. A positive pole direct current (DC) power source 14 is connected to the positive discharge electrode 11 and applies a predetermined voltage to the discharge electrode 11 so that the atmosphere around the electrode is positive ion in a nitrogen gas atmosphere. By positively ionizing, a positive discharge current is generated. Similarly, a negative pole direct current (DC) power source 15 is connected to the negative-side discharge electrode 12 via a limiting resistor 16, and the discharge electrode 12 is applied with a voltage having a predetermined value described above. Electrons from the ground are discharged into the nitrogen gas atmosphere via, thereby generating a negative discharge current.

  Further, even in the pulse type DC static eliminator 10, the polarity of the workpiece and the amount of charge are detected by a resistor 16 provided between the ground and the power source and a voltmeter 18 connected to both ends of the resistor 16. This detection signal is sent to the controller 19.

  The controller 19 performs on / off control for the power sources 14 and 15 for alternately generating a voltage between the positive power source 14 and the negative power source 15, but the polarity detected from the ammeter 18 described above. Based on the size of the power supply, the power-on time with respect to the reverse polarity of the charged polarity of the workpiece is made relatively long with respect to the power-on time of the same polarity with which the workpiece is charged. By increasing the ratio of the duty ratio to the opposite polarity side of the charged polarity of the work relative to the other, the work is discharged quickly.

  In view of the fact that the limiting resistor 16 does not exist, the pulse type DC type static eliminator 10 has an extremely larger number of electrons than the positive ions from the positive discharge electrode 11 as described in the section “Background Art” above. May be instantaneously sent from the negative discharge electrode 12 to the workpiece, and may not function as a static eliminator in a nitrogen atmosphere. This is almost the same as the predetermined voltage value of the positive power supply 14 as an absolute value when the predetermined voltage is compared with the discharge current value of the discharge current generated by applying a voltage from the positive power supply 14 to the discharge electrode 11. This is because the discharge current value of the discharge current generated by applying the negative voltage to the discharge electrode 12 is greatly different.

  For this reason, in the static eliminator 10 that performs static elimination by varying the duty ratio of the positive and negative voltages, the resistance provided by the limiting resistor 16 between the negative power source 15 and the negative discharge electrode 15. The magnitude of the value is such that the discharge current value of the discharge current generated by the positive discharge electrode 11 in an inert gas atmosphere is substantially equal to the discharge current value of the discharge current generated by the positive discharge electrode 11. It is necessary to have a size that can be generated.

  However, in general, when the same absolute voltage is applied to the discharge electrodes 11 and 12 from the positive power source 14 and the negative power source 15 even in the atmosphere, the negative ions are about 10% to 30% compared to the positive ions. A large amount of ions are generated. From this, in order to generate substantially the same amount of ions (discharge current value), for example, the operating voltage of the positive power source 14 is about 5 kV, and the operating voltage of the negative power source 15 is about 3.5 kV, which is a positive and negative voltage. Sometimes a value is used. The same can be said for the relationship between positive ions and electrons generated in a nitrogen atmosphere. Therefore, also in this embodiment, the magnitude of the resistance value of the limiting resistor 16 is positive in an inert gas atmosphere. It is sufficient that the negative discharge electrode 12 can generate a discharge current value of the discharge current generated by the discharge electrode 11 on the side that is substantially equal to the absolute value of the discharge current. The voltage generated by the negative-side power supply 15 may be slightly smaller than the voltage generated by the positive-side power supply 14 from the viewpoint of suppressing the magnitude of the resistance value.

  In addition, although not shown, a voltage is simultaneously generated for a DC type static eliminator, that is, positive and negative power sources 14 and 15 that share the same main components as the tenth embodiment, and the controller 19 generates positive and negative power sources. Needless to say, the same effect can be obtained with respect to the DC static eliminator of the type that simultaneously provides on / off signals to 14 and 15 if the resistance limitation having the same size as in the tenth embodiment is employed. .

  As a second example of the pulse type, the concept regarding the size of the limiting resistor 16 in the duty ratio control of the pulse AC type static eliminator will be described below.

  Next, a description will be given of a case where the static elimination control is performed by controlling the duty ratio of the positive and negative power source voltages in the pulse AC type static elimination device. Here, the static eliminator to which the duty ratio control is applicable is substantially the same as the configuration described in FIG. That is, the static elimination apparatus 20 has the common discharge electrode 21 with reference to FIG. 5 again. The discharge electrode 21 is supplied with a positive voltage from a positive pole direct current (DC) power source 14 capable of generating a positive voltage of +5 kV. Furthermore, although the polarity is different, the absolute value of the positive electrode DC power source 14 is different from that of the positive pole DC power source 14. A negative voltage is supplied from a negative pole direct current (DC) power supply 15 capable of generating a substantially equivalent negative voltage of −5 kV.

  The positive pole direct current (DC) power supply 14 applies the voltage of the predetermined value described above to the common discharge electrode 21 through the limiting resistor 16, thereby ionizing the atmosphere around the electrode into positive ions in the nitrogen gas atmosphere. As a result, a positive discharge current is generated. Similarly, a negative pole direct current (DC) power supply 15 is connected to the discharge electrode 2 via the limiting resistor 16, and the voltage of the predetermined value described above is applied to the discharge electrode 21, whereby the discharge electrode 21 is connected. Electrons from the ground are released into the nitrogen gas atmosphere, and a negative discharge current is generated. Further, in the static eliminator 20, the polarity of the workpiece and the charge amount thereof are detected by a resistor 17 provided between the ground and the power source and a voltmeter 18 connected to both ends of the resistor 17, and this detection is performed. A signal is sent to the controller 19.

  The controller 19 performs on / off control on the power supplies 14 and 15 in order to alternately generate a voltage between the positive power supply 14 and the negative power supply 15. Based on the measured polarity and its magnitude, the power-on time for the reverse polarity of the workpiece's charged polarity should be made relatively longer than the power-on time of the workpiece's charged same polarity That is, by increasing the ratio of the duty ratio to the opposite polarity side of the charged polarity of the work relative to the other, the work is discharged quickly.

  In this pulse type AC type, first, considering that the limiting resistor 16 does not exist, as described in the section of “Background Art”, a positive voltage generated by the discharge electrode 21 when a positive voltage is applied. Electrons that are extremely larger than ions are generated when a negative voltage is applied to the discharge electrode 21, and the electrons are instantaneously sent to the workpiece, which may not function as a static eliminator in a nitrogen atmosphere. . This is because the discharge current value of the discharge current generated by applying a predetermined voltage from the positive power source 14 to the discharge electrode 21 and the absolute value of the predetermined voltage value of the positive power source 14 are negative. This is because the discharge current values of the discharge current generated by the power source 15 and applied to the discharge electrode 21 are greatly different.

  For this reason, in the AC type static eliminator 20 that performs static elimination by varying the duty ratio of the positive and negative voltages, the resistance value given by the limiting resistance between the negative power source 13 and the discharge electrode 21 is large. The discharge current value of the discharge current almost equal to the discharge current value of the discharge current generated by the discharge electrode 21 when a positive voltage is applied in an inert gas atmosphere, and the negative voltage as the discharge electrode 21. It is necessary to make it the magnitude | size which the discharge electrode 21 produces | generates when it applies to.

  However, in general, when the same absolute voltage is applied to the discharge electrode 21 from the positive power source 14 and the negative power source 15 even in the atmosphere, about 10% to 30% of negative ions are generated compared to the positive ions. In order to generate almost the same ion amount (discharge current value), for example, the operating voltage of the positive power supply is about 5 kV, and the operating voltage of the negative power supply is about 3.5 kV, which is different between plus and minus. A voltage value may be used. The same can be said for the relationship between positive ions and electrons generated in a nitrogen atmosphere. Therefore, even in the pulse AC type static eliminator 20, the resistance value of the limiting resistor 16 is that of an inert gas. The discharge current value of the discharge current that is almost the same as the absolute value of the discharge current value that is generated when a positive voltage is applied in the atmosphere can be generated when a negative voltage is applied to the discharge electrode 21. Further, from the viewpoint of suppressing the magnitude of the resistance value of the limiting resistor 16, the voltage generated by the negative power source 15 is slightly smaller than the voltage generated by the positive power source 14. Also good.

  As for the AC type static eliminator 20, as illustrated in FIG. 6, the first voltage supply line 14 a extending from the positive power source 14 toward the discharge electrode 21 and the negative power source 15 to the discharge electrode 21 are illustrated. And a common voltage supply line 20 for alternately supplying the voltage from the first voltage supply line 14a and the second voltage supply line 15a to the discharge electrode 21. In the case of the voltage supply line, the limiting resistor 16 may be provided in the second voltage supply line 15a in order to bring about the influence of the limiting resistor only on the voltage supplied from the negative power source 15. Of course.

  In the above embodiment, the positive discharge current generated from the discharge electrode in various types of static eliminator and in the voltage variable type and the voltage duty ratio variable type in an inert gas atmosphere. A limiting resistor is provided between the power supply and the discharge electrode to apply at least a negative voltage, so that the range and the magnitude of the negative current and the range of the negative discharge current generated from the discharge current and the magnitude thereof are substantially the same. I explained about.

Next, an embodiment in which the function of the “limiting resistor” of the present invention is provided by the material of the discharge electrode will be described. Referring to FIG. 7, an experimental apparatus 30 employing a discharge electrode 31 made of zirconia (ZrO ₂ ) instead of the limiting resistor 16 was made, and the applied voltage and the discharge current characteristics were verified. The experimental apparatus 30 including the discharge electrode 31 made of zirconia is the apparatus 1 or 20 of FIGS. 1 or 5 except that the material of the discharge electrode 2 of FIG. 1 or the discharge electrode 21 of FIG. 5 is zirconia (ZrO ₂ ). And substantially the same configuration. The volume resistivity of zirconia (ZrO ₂ ) is about 10 ⁸ Ωcm.

FIG. 8 shows resistance characteristics of the discharge electrode 31 made of zirconia. The discharge electrode 31 made of zirconia has a resistance value of 0.25 GΩ (0.25 × 10 ⁹ Ω) when a current flows by 1 μA, as indicated by an arrow in FIG.

  FIG. 9 is a graph when a negative high voltage is applied to the zirconia discharge electrode 31, and FIG. 10 is a graph when a positive high voltage is applied to the zirconia discharge electrode 31. As can be understood from FIGS. 9 and 10, by using the zirconia discharge electrode 31 as compared with the case of using tungsten (W) which is a conductive material, the discharge current can be reduced in both positive and negative polarities. It can be seen that the voltage adjustment range necessary for adjusting the absolute value in the range of 1 to 10 μA is expanding.

In particular, in FIG. 9 relating to negative discharge, the adjustment range of the negative voltage at the discharge electrode 21 made of tungsten is 0.04 kV in a high-purity N ₂ gas atmosphere, whereas the zirconia (which is a semiconductive material) When the discharge electrode 31 is composed of ZrO ₂ ), the adjustment range of the negative voltage is 1.1 kV, so that it is possible to adopt a general power source that has been conventionally employed as the power source 15, and therefore the selection of the power source 15 Can be secured.

In addition, regarding positive discharge, the voltage value of the power source required to flow a discharge current of 1 μA or more is only required to be 4.55 kV or more. Referring to FIG. 10, it is made of zirconia (ZrO ₂ ) in a high purity N ₂ gas atmosphere. Even in the case of the discharge electrode 31, since this condition is satisfied, it can be seen that zirconia (ZrO ₂ ) may be adopted for the positive electrode. Therefore, even if a semiconductive discharge electrode made of zirconia (ZrO ₂ ) is used for the positive electrode as well as the negative electrode, it is possible to ensure sufficient static elimination performance while adopting a general precision power supply. it can. That is, the ion balance imbalance can be suppressed to such an extent that the ion balance can be ensured by executing general ion balance control in the static elimination in the inert gas atmosphere.

  Examples of materials that can be employed as the discharge electrode 31 that is a semiconductive electrode include silicon carbide, silicon nitride, alumina, and aluminum nitride in addition to zirconia.

  When controlling the magnitudes of positive and negative voltages applied to the discharge electrode 31 using the static eliminator 30 shown in FIG. 7, the definition of the magnitude of the limiting resistance value of the discharge electrode 31 as a semiconductive material is defined. Is formed in an inert gas atmosphere by applying a voltage in the first adjustable voltage adjustment range when the discharge electrode 31 is connected to a positive power supply by a switch means (not shown). Can be generated when the discharge electrode 31 is connected to the negative-side power supply by the switch means (not shown). It can be said that it is a size. Also, as a precondition for this definition, the first voltage value has an adjustable voltage adjustment range and a first voltage adjustment basic unit within the first adjustable voltage adjustment range, and generates a positive voltage. Possible positive power supply, voltage adjustment range in which the first voltage value can be adjusted, voltage adjustment range in which the second voltage value can be adjusted, which is almost equivalent as an absolute value, and this second voltage value can be adjusted Within the voltage adjustment range, it has a second voltage adjustment basic unit that is substantially the same as the first voltage adjustment basic unit, and has a negative side power source capable of generating a negative voltage, and a positive side with respect to the discharge electrode 31. There is switch means for alternately switching and connecting the power source and the negative side power source.

  In addition, when the duty ratio of the positive and negative voltages applied to the discharge electrode 31 is controlled using the static eliminator 30 shown in FIG. 7, the magnitude of the limiting resistance value of the discharge electrode 31 as a semiconductive material Is defined as the discharge current that can be discharged in an inert gas atmosphere when the discharge electrode 31 is connected to the positive-side power supply 14 by the switch means and the voltage of the first voltage value is applied to the discharge electrode 31. It can be said that the second discharge current value that is substantially equivalent to the first discharge current value in absolute value is a magnitude that can be generated when the negative power supply 15 and the discharge electrode 31 are connected. Also, as a precondition for this definition, a positive power source 14 that can generate a positive voltage at the first voltage value, and a negative power source that can generate a negative voltage at the second voltage value. 15 and switch means (not shown) for alternately switching and connecting the positive power source 14 and the negative power source 15 to the discharge electrode 31, and the positive power source and the negative power source alternately plus There are control means for generating negative voltages and controlling the duty ratios of the positive and negative voltages and switching the switch means based on the controlled duty ratio. 11 has the same basic configuration as that of the static eliminator 10 shown in FIG. 4, the switch means SW1, SW2 and the positive and negative power sources 14, 15 shown in FIG. For feedback control from the ground, refer to the embodiment of FIG.

  FIG. 11 shows a static eliminator 40 of a first modification. Since the static eliminator 40 is also a modification of the static eliminator 10 of the first embodiment of FIG. 4, the same reference numerals are given to the elements common to the elements included in the first embodiment, and the description thereof will be appropriately given. Omitted.

Referring to FIG. 11, in the static eliminator 40 of the modification, the material of the positive electrode 11 is a conductive discharge electrode made of tungsten (W) as in the first embodiment, but the negative electrode is zirconia ( This is a semiconductive discharge electrode 31 employing ZrO ₂ ). Of course, as described above, the positive electrode 2 may be made of a high resistance material such as zirconia (ZrO ₂ ). The positive discharge electrode 11 and the negative discharge electrode 12 have a positive voltage by alternately switching the first and second switches SW1, SW2 interposed between the positive power source 14 and the negative power source 15. Negative voltages are supplied respectively.

  When controlling the magnitudes of positive and negative voltages applied to the discharge electrodes 11 and 31 using the static eliminator 40 shown in FIG. 11, the limiting resistance value of the negative electrode discharge electrode 31 as a semiconductive material Is defined in the second range, which is almost equal in absolute value to the first range of the discharge current generated by the positive side discharge electrode 11 in the negative side discharge electrode 31 in the inert gas atmosphere. It can be said that it is a magnitude | size which can produce | generate a discharge current.

  Also, as a precondition for this definition, the first voltage value has an adjustable voltage adjustment range and a first voltage adjustment basic unit within the first adjustable voltage adjustment range, and generates a positive voltage. A positive-side power supply 14 capable of generating a possible positive voltage, a voltage adjustment range in which a first voltage value can be adjusted, and a voltage adjustment range in which a second voltage value that is substantially equivalent to an absolute value can be adjusted, and the second voltage adjustment range A second power supply 15 having a second voltage adjustment basic unit substantially equal to the first voltage adjustment basic unit within a voltage adjustment range in which the second voltage value can be adjusted, and capable of generating a negative voltage; Connected to the power source 14 on the side, and applied with a voltage in a voltage adjustment range in which the first voltage value can be adjusted, so that the discharge current in the first range can be discharged in an inert gas atmosphere. And denden pole 11, there are negative side of the discharge electrode 15 connected to the negative side of the power supply 15 to the second voltage value is a voltage of adjustable voltage adjustment range.

  In addition, when the duty ratio of positive and negative voltages applied to the discharge electrodes 11 and 31 is controlled using the static eliminator 40 shown in FIG. 11, the limit of the negative electrode discharge electrode 31 as a semiconductive material is limited. The definition of the magnitude of the resistance value is that the absolute value of the second discharge current generated by the negative discharge electrode 31 in an inert gas atmosphere is the first discharge current value of the positive discharge electrode 11. It can be said that the sizes are almost the same. As a precondition for this definition, a positive power source 14 that can generate a positive voltage at the first voltage value, and a negative power source 15 that can generate a negative voltage at the second voltage value. The positive-side power source 14 and the negative-side power source 15 alternately generate positive and negative voltages and are connected to the positive-side power source 14 and control means for controlling the duty ratio of these positive and negative voltages. The positive-side discharge electrode 11 that generates a discharge current having a first discharge current value by the first voltage value supplied from the positive-side power source 14 in an inert gas atmosphere, and the negative-side power source 15 A negative discharge electrode 31 that is connected and generates a discharge current having a second discharge current value by a second voltage value supplied from a negative power source 15 in an inert gas atmosphere; A.

  FIG. 12 shows a static eliminator 50 of a second modification. The static eliminator 50 is also a further modification of the first embodiment described above (FIG. 12 and the first modification (FIG. 11)).

Referring to FIG. 12, in the static eliminator 50, the material of the positive electrode 11 is a conductive discharge electrode made of tungsten (W) as in the first embodiment. As the material, a semiconductive material having a relatively high resistance value is adopted, and a limiting resistor 16 is provided in association therewith. In the static eliminator 50, the resistance value obtained by adding the resistance value of the negative discharge electrode 51 made of a semiconductive material and the resistance value of the limiting resistor 16 is not less than the above-described 0.1 GΩ (0.1 × 10 ⁹ Ω). The selection of the semiconductive material of the negative discharge electrode 51 and the resistance value of the limiting resistor 16 are set so as to be less than 10 GΩ (10 × 10 ⁹ Ω).

  Here, when controlling the magnitudes of the positive and negative voltages applied to the discharge electrodes 11 and 51 using the static eliminator 50, the negative-side discharge electrode 51 and the limiting resistor 16 as a semiconductive material are used. The definition of the combined limit resistance value is almost the same as the absolute value of the first range of the discharge current generated by the positive discharge electrode 11 in the negative discharge electrode 51 in the inert gas atmosphere. It can be said that it is the magnitude | size which can produce | generate the discharge current in a 2nd range.

  As a precondition for this definition, the first voltage value has an adjustable voltage adjustment range and a first voltage adjustment basic unit within the first adjustable voltage adjustment range, and can generate a positive voltage. A positive-side power source 14 capable of generating a positive voltage, a voltage adjustment range in which a first voltage value can be adjusted, and a voltage adjustment range in which a second voltage value substantially the same as an absolute value can be adjusted; A second power supply 15 having a second voltage adjustment basic unit substantially equal to the first voltage adjustment basic unit within a voltage adjustment range in which the voltage value can be adjusted, and capable of generating a negative voltage, and a positive side A positive-side discharge current that is connected to the power source 14 and that can discharge a discharge current in the first range in an inert gas atmosphere by applying a voltage in a voltage adjustment range in which the first voltage value can be adjusted. 11, there is a negative side of the discharge electrode 15 connected to the negative side of the power supply 15 to the second voltage value is a voltage of adjustable voltage adjustment range.

  Further, when the duty ratio of the positive and negative voltages applied to the discharge electrodes 11 and 51 is controlled using the static eliminator 50, the sum of the negative electrode discharge electrode 51 as the semiconductive material and the limiting resistor 16 is added. The definition of the magnitude of the limited resistance value is that the absolute value of the second discharge current generated by the negative discharge electrode 51 in the inert gas atmosphere is the first discharge current of the positive discharge electrode 11. It can be said that the size is almost equal to the value.

  As a precondition for this definition, a positive power source 14 that can generate a positive voltage at the first voltage value, and a negative power source 15 that can generate a negative voltage at the second voltage value. The positive-side power source 14 and the negative-side power source 15 alternately generate positive and negative voltages and are connected to the positive-side power source 14 and control means for controlling the duty ratio of these positive and negative voltages. The positive-side discharge electrode 11 that generates a discharge current having a first discharge current value by the first voltage value supplied from the positive-side power source 14 in an inert gas atmosphere, and the negative-side power source 15 A negative discharge electrode 51 that is connected and generates a discharge current having a second discharge current value by a second voltage value supplied from a negative power source 15 in an inert gas atmosphere; A.

  As described above, in the static eliminator 50, the positive electrode discharge electrode 11 may employ a configuration in which a semiconductive material is used and / or the limiting resistor 16 is added.

  Needless to say, the above-described method using a combination of the limiting resistance and the semiconductive material as the discharge electrode material may be used in the AC type static eliminator described with reference to FIG. However, when controlling the magnitude of the positive and negative voltages applied to the discharge electrode 21 using an AC type static eliminator, the limit resistance obtained by adding the discharge electrode 21 as the semiconductive material and the limiting resistor 16 together. The definition of the magnitude of the value is that when the discharge electrode 21 is connected to the positive-side power supply 14 by the switch means (not shown), the voltage in the first adjustable voltage adjustment range is applied, so that A discharge electrode 21 is connected to a negative-side power source 15 by a switch means (not shown) by a switch means (not shown), in which a second range, which is almost equivalent to the first range of dischargeable discharge current formed in an active gas atmosphere. It can be said that it is a size that can be generated when connected. Also, as a precondition for this definition, the first voltage value has an adjustable voltage adjustment range and a first voltage adjustment basic unit within the first adjustable voltage adjustment range, and generates a positive voltage. Possible positive power supply, voltage adjustment range in which the first voltage value can be adjusted, voltage adjustment range in which the second voltage value can be adjusted, which is almost equivalent as an absolute value, and this second voltage value can be adjusted Within the voltage adjustment range, it has a second voltage adjustment basic unit that is substantially the same as the first voltage adjustment basic unit, and has a negative side power source capable of generating a negative voltage, and a positive side with respect to the discharge electrode 31. There is switch means for alternately switching and connecting the power source and the negative side power source.

  Similarly, when the duty ratio of positive and negative voltages applied to the discharge electrode 21 is controlled using an AC type static eliminator, the combined limit of the discharge electrode 21 as the semiconductive material and the limiting resistor 16 is combined. The definition of the magnitude of the resistance value is that the discharge electrode 21 is connected to the positive power source by the switch means, and the voltage of the first voltage value is applied to the discharge electrode 21 so that the discharge can be performed in an inert gas atmosphere. The second discharge current value, which is almost the same as the absolute value of the first discharge current value, is a magnitude that can be generated when the negative power supply and the discharge electrode 21 are connected. it can. Also, as a precondition for this definition, a positive power source 14 that can generate a positive voltage at the first voltage value, and a negative power source that can generate a negative voltage at the second voltage value. 15, switch means (not shown) for alternately switching and connecting the positive power source 14 and the negative power source 15 to the discharge electrode 21, and the positive power source 14 and the negative power source 15 alternately. There is a controller 19 that generates positive and negative voltages, controls the duty ratio of these positive and negative voltages, and switches and controls the switch means based on the controlled duty ratio.

  Further, as another example of the AC type, there is one in which a limiting resistor 16 is provided at the position shown in FIG. 6, and in this case, the discharge electrode 21 can be formed of a semiconductive material. In this case, the combined resistance value is defined by the two cases described above (controlling the magnitude of the positive and negative voltages applied to the discharge electrode 21 and the positive and negative applied to the discharge electrode 21. This is the same as when the duty ratio of the voltage is controlled.

FIG. 13 shows a static eliminator 60 as a modification of the AC static eliminator 20 described in FIG. Reference numeral 52 is a ground electrode. The common discharge electrode 21 is a conductive electrode such as tungsten (W). The resistance value of the limiting resistor 16 interposed between the power supply 13 and the common discharge electrode 12 is set to 0.1 GΩ (0.1 × 10 ⁹ Ω) or more and less than 10 GΩ (10 × 10 ⁹ Ω).

A static eliminator 70 shown in FIG. 14 is a modification of the static eliminator 60 shown in FIG. In the static eliminator 70, the discharge electrode 31 is formed of a semiconductive electrode employing zirconia (ZrO ₂ ) instead of the limiting resistor 16.

A static eliminator 80 shown in FIG. 15 is a modification of the static eliminators 60 and 70 shown in FIGS. 13 and 14 described above. In the static eliminator 80 of FIG. 15, a discharge electrode 51 made of a semiconductive material having a relatively high resistance value is employed, and a limiting resistor 16 is provided in association therewith. In the static eliminator 80, the resistance value obtained by adding the resistance value of the discharge electrode 51 made of a semiconductive material and the resistance value of the limiting resistor 16 is not less than the above-described 0.1 GΩ (0.1 × 10 ⁹ Ω) and 10 GΩ. The selection of the semiconductive material of the discharge electrode 51 and the resistance value of the limiting resistor 16 are set so as to be less than (10 × 10 ⁹ Ω).

  Although various embodiments of the present invention have been described above, the limiting resistor 16 may be configured by a variable resistor whose resistance value can be changed, or may be configured by a fixed resistor whose resistance value is fixed. In addition, when performing ion balance control in the embodiment of the present invention, ion balance control may be performed according to the application voltage and application time of a high voltage generally performed conventionally, but instead of this, The ion balance control may be performed by fixing the high voltage value and controlling the resistance value of the limiting resistor 16.

It is a block diagram of the pulse AC static elimination apparatus for demonstrating the outline | summary of invention. It is a figure which shows the relationship between the applied voltage and discharge current at the time of a minus discharge comparing the case where air | atmosphere is air | atmosphere and the case of high purity nitrogen gas. It is a figure which shows the relationship between the applied voltage and discharge current at the time of plus discharge by contrasting the case where air | atmosphere is air | atmosphere and the case of high purity nitrogen gas. It is a block diagram of the static elimination apparatus of DC type which applies a high voltage to the negative side discharge electrode via a limiting resistor. It is a block diagram of an AC-type static eliminator that applies a high voltage to positive and negative discharge electrodes via a limiting resistor. FIG. 6 is a configuration diagram of a modified example of the AC-type static eliminator of FIG. 5 that applies a high voltage to the negative-side discharge electrode via a limiting resistor. It is a block diagram of the AC type static elimination apparatus which employ | adopted zirconia as a material of a discharge electrode. It is a resistance characteristic figure of the discharge electrode made from zirconia. It is a figure which shows the relationship between the applied voltage and discharge current at the time of negative discharge using a zirconia discharge electrode by contrasting the case where atmosphere is air | atmosphere and the case of high purity nitrogen gas. It is a figure which shows the relationship between the applied voltage and discharge current at the time of plus discharge using a zirconia discharge electrode by contrasting the case where atmosphere is air | atmosphere and the case of high purity nitrogen gas. It is a schematic block diagram of the example which comprised the discharge electrode of the negative pole with the zirconia electrode as the 1st modification of DC type static elimination apparatus. FIG. 6 is a configuration diagram of an example in which a negative electrode discharge electrode is configured by a semiconductive electrode and a limiting resistor is interposed between the semiconductive electrode and a power source as a second modification of the DC type static eliminator. It is a block diagram of the example which interposed the limiting resistance between the discharge electrode and power supply of AC type static elimination apparatus. It is a block diagram of the example which employ | adopted zirconia as a discharge electrode as a modification of the AC type static elimination apparatus of FIG. It is a block diagram of the example which employ | adopted the semiconductive electrode as a discharge electrode of AC power supply type static elimination apparatus, and interposed the limiting resistance between the semiconductive electrode and the power supply.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Positive discharge electrode 12 Negative discharge electrode 13 Power supply circuit 14 Positive pole DC power supply 15 Negative pole DC power supply 16 Limiting resistor 19 Controller 21 Common discharge electrode 31 Discharge electrode which consists of zirconia 51 Discharge electrode which consists of semiconductive materials

Claims (12)

In the static eliminator used in an inert gas atmosphere,
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Connected to the first power source and applied with a voltage in a voltage adjustment range in which the first voltage value can be adjusted, thereby discharging a discharge current in the first range in an inert gas atmosphere. A discharge electrode;
A second discharge electrode connected to a second power source for applying a voltage in a voltage adjustment range in which the second voltage value is adjustable;
A first range of discharge current generated by the first discharge electrode in the second discharge electrode provided between the second power source and the second discharge electrode in an inert gas atmosphere. And a limiting resistor having a magnitude capable of generating a discharge current in a second range that is substantially equivalent in absolute value. In the static eliminator used in an inert gas atmosphere,
A discharge electrode;
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Switch means for alternately switching and connecting the first power source and the second power source to the discharge electrode;
By being applied between the switch means and the discharge electrode, and when the discharge electrode is connected to the first power source by the switch means, the voltage in the first adjustable voltage adjustment range is applied. The discharge electrode is connected to the second power source by the switch means, the second range being almost equivalent to the first range of the dischargeable discharge current formed in the inert gas atmosphere. A static elimination device having a limiting resistor of a size that can be generated at the time. In the static eliminator used in an inert gas atmosphere,
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Control means for generating positive and negative voltages alternately in the first power supply and the second power supply and controlling the duty ratio of these positive and negative voltages;
A first discharge electrode connected to the first power source and generating a discharge current having a first discharge current value by the first voltage value supplied from the first power source in an inert gas atmosphere When,
A second discharge electrode connected to the second power source and generating a discharge current having a second discharge current value by the second voltage value supplied from the second power source in an inert gas atmosphere When,
An absolute value of a second discharge current interposed between the second power source and the second discharge electrode and generated by the second discharge electrode in an inert gas atmosphere is calculated as the first value. The static elimination apparatus which has a limiting resistance for making it substantially equal to the first discharge current value of the discharge electrode. In the static eliminator used in an inert gas atmosphere,
A common discharge electrode;
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Switch means for alternately switching and connecting the first power source and the second power source to the common discharge electrode;
The positive and negative voltages are alternately generated in the first power source and the second power source, the duty ratio of these positive and negative voltages is controlled, and the switching means is controlled based on the controlled duty ratio. Control means for
A limiting resistor interposed between the switch means and the common discharge electrode;
The limiting resistor is capable of discharging in an inert gas atmosphere when the common discharge electrode is connected to a first power source by the switch means and the voltage of the first voltage value is applied to the common discharge electrode. The second discharge current value, which is almost the same as the first discharge current value of the negative discharge current, has a resistance value that can be generated when the second power source and the common discharge electrode are connected. A static eliminator characterized by comprising: In the static eliminator used in an inert gas atmosphere,
A common discharge electrode;
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
A first voltage supply line extending from the first power source toward the common discharge electrode; a second voltage supply line extending from the second power source toward the common discharge electrode; A voltage supply line comprising a third voltage supply line connected to the voltage supply line and supplying a voltage supplied from the first and second power supply lines to the common discharge electrode;
Switch means for alternately switching and connecting the first power source and the second power source to the common discharge electrode;
The positive and negative voltages are alternately generated in the first power source and the second power source, the duty ratio of these positive and negative voltages is controlled, and the switching means is controlled based on the controlled duty ratio. Control means for
A limiting resistor provided in the second voltage supply line,
The limiting resistor is capable of discharging in an inert gas atmosphere when the common discharge electrode is connected to a first power source by the switch means and the voltage of the first voltage value is applied to the common discharge electrode. The second discharge current value, which is almost the same as the first discharge current value of the negative discharge current, has a resistance value that can be generated when the second power source and the common discharge electrode are connected. A static eliminator characterized by comprising:   The static elimination apparatus as described in any one of Claims 1-5 with which the said limiting resistance is comprised with the variable resistor. 6. The static eliminator according to claim 3, wherein the absolute value of the second voltage value is substantially equal to the absolute value of the first voltage value. In the static eliminator used in an inert gas atmosphere,
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Connected to the first power source and applied with a voltage in a voltage adjustment range in which the first voltage value can be adjusted, thereby discharging a discharge current in the first range in an inert gas atmosphere. A discharge electrode;
A second discharge electrode connected to a second power source for applying a voltage in a voltage adjustment range in which the second voltage value is adjustable;
The second discharge electrode is composed of a semiconductive material, and the magnitude of the limiting resistance value by the semiconductive material is the first discharge in the second discharge electrode in an inert gas atmosphere. A static eliminator having a magnitude capable of generating a discharge current in a second range that is substantially equivalent in absolute value to a first range of a discharge current generated by an electrode. In the static eliminator used in an inert gas atmosphere,
A discharge electrode;
A first power supply having a voltage adjustment range in which a first voltage value can be adjusted, a first voltage adjustment basic unit in the first adjustable voltage adjustment range, and capable of generating a positive voltage;
The voltage adjustment range in which the first voltage value can be adjusted and the voltage adjustment range in which the second voltage value can be adjusted, which is substantially the same as the absolute value, and the voltage adjustment range in which the second voltage value can be adjusted, A second power supply having a second voltage regulation basic unit substantially equal to one voltage regulation basic unit and capable of generating a negative voltage;
Switch means for alternately switching and connecting the first power source and the second power source to the discharge electrode;
The discharge electrode is made of a semiconductive material, and the magnitude as the limiting resistance value by the semiconductive material is the first adjustment when the discharge electrode is connected to the first power source by the switch means. By applying a voltage in a possible voltage adjustment range, the discharge electrode has a second range that is almost equivalent to the first range of the dischargeable discharge current formed in the inert gas atmosphere as an absolute value. Is a size that can be generated when connected to a second power source by the switch means. In the static eliminator used in an inert gas atmosphere,
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Control means for generating positive and negative voltages alternately in the first power supply and the second power supply and controlling the duty ratio of these positive and negative voltages;
A first discharge electrode connected to the first power source and generating a discharge current having a first discharge current value by the first voltage value supplied from the first power source in an inert gas atmosphere When,
A second discharge electrode connected to the second power source and generating a discharge current having a second discharge current value by the second voltage value supplied from the second power source in an inert gas atmosphere When,
The second discharge electrode is made of a semiconductive material, and a magnitude as a limiting resistance value by the semiconductive material is generated by the second discharge electrode in an inert gas atmosphere. A static eliminator having a magnitude for making an absolute value of a discharge current substantially equal to a first discharge current value of the first discharge electrode. In the static eliminator used in an inert gas atmosphere,
A common discharge electrode;
A first power source capable of generating a positive voltage at a first voltage value;
A second power source capable of generating a negative voltage at the second voltage value;
Switch means for alternately switching and connecting the first power source and the second power source to the common discharge electrode;
The positive and negative voltages are alternately generated in the first power source and the second power source, the duty ratio of these positive and negative voltages is controlled, and the switching means is controlled based on the controlled duty ratio. Control means for
The common discharge electrode is made of a semiconductive material, and the magnitude as the limiting resistance value by the semiconductive material is such that the common discharge electrode is connected to a first power source by the switch means and the first voltage When the common discharge electrode is applied to the voltage, the second discharge current value, which is almost the same as the first discharge current value of the discharge current that can be discharged in the inert gas atmosphere, is the second value. A static eliminator having a size that can be generated when the power source of the power source and the common discharge electrode are connected.   The static eliminator according to any one of claims 8 to 11, wherein the semiconductive material is one material selected from the group consisting of zirconia, silicon carbide, silicon nitride, alumina, and aluminum nitride.

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