EP3253183A4 - Atmosphährendruck-plasmaerzeugungsvorrichtung - Google Patents

Atmosphährendruck-plasmaerzeugungsvorrichtung Download PDF

Info

Publication number
EP3253183A4
EP3253183A4 EP15879895.9A EP15879895A EP3253183A4 EP 3253183 A4 EP3253183 A4 EP 3253183A4 EP 15879895 A EP15879895 A EP 15879895A EP 3253183 A4 EP3253183 A4 EP 3253183A4
Authority
EP
European Patent Office
Prior art keywords
atmospheric
generation device
plasma generation
pressure plasma
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15879895.9A
Other languages
English (en)
French (fr)
Other versions
EP3253183B1 (de
EP3253183A1 (de
Inventor
Akihiro NIWA
Takahiro Jindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Machine Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Machine Manufacturing Co Ltd filed Critical Fuji Machine Manufacturing Co Ltd
Publication of EP3253183A1 publication Critical patent/EP3253183A1/de
Publication of EP3253183A4 publication Critical patent/EP3253183A4/de
Application granted granted Critical
Publication of EP3253183B1 publication Critical patent/EP3253183B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)
EP15879895.9A 2015-01-27 2015-01-27 Atmosphährendruck-plasmaerzeugungsvorrichtung Active EP3253183B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2015/052191 WO2016120998A1 (ja) 2015-01-27 2015-01-27 大気圧プラズマ発生装置

Publications (3)

Publication Number Publication Date
EP3253183A1 EP3253183A1 (de) 2017-12-06
EP3253183A4 true EP3253183A4 (de) 2018-09-26
EP3253183B1 EP3253183B1 (de) 2023-11-08

Family

ID=56542655

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15879895.9A Active EP3253183B1 (de) 2015-01-27 2015-01-27 Atmosphährendruck-plasmaerzeugungsvorrichtung

Country Status (3)

Country Link
EP (1) EP3253183B1 (de)
JP (1) JP6425742B2 (de)
WO (1) WO2016120998A1 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105428A1 (ja) * 2006-02-13 2007-09-20 National University Corporation Gunma University プラズマ発生装置用ノズル、プラズマ発生装置、プラズマ表面処理装置、プラズマ発生方法およびプラズマ表面処理方法
WO2015071746A1 (en) * 2013-11-14 2015-05-21 Nadir S.R.L. Method for generating an atmospheric plasma jet and atmospheric plasma minitorch device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3267810B2 (ja) * 1993-07-20 2002-03-25 株式会社半導体エネルギー研究所 被膜形成方法
JP2010218997A (ja) * 2009-03-19 2010-09-30 Shibaura Mechatronics Corp プラズマ発生装置およびプラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105428A1 (ja) * 2006-02-13 2007-09-20 National University Corporation Gunma University プラズマ発生装置用ノズル、プラズマ発生装置、プラズマ表面処理装置、プラズマ発生方法およびプラズマ表面処理方法
WO2015071746A1 (en) * 2013-11-14 2015-05-21 Nadir S.R.L. Method for generating an atmospheric plasma jet and atmospheric plasma minitorch device

Also Published As

Publication number Publication date
EP3253183B1 (de) 2023-11-08
WO2016120998A1 (ja) 2016-08-04
JP6425742B2 (ja) 2018-11-21
JPWO2016120998A1 (ja) 2017-11-02
EP3253183A1 (de) 2017-12-06

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