EP3186850A4 - Three-dimensional thin film battery - Google Patents

Three-dimensional thin film battery Download PDF

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Publication number
EP3186850A4
EP3186850A4 EP15835274.0A EP15835274A EP3186850A4 EP 3186850 A4 EP3186850 A4 EP 3186850A4 EP 15835274 A EP15835274 A EP 15835274A EP 3186850 A4 EP3186850 A4 EP 3186850A4
Authority
EP
European Patent Office
Prior art keywords
thin film
film battery
dimensional thin
dimensional
battery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15835274.0A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3186850A1 (en
Inventor
Daoying SONG
Byung Sung Leo Kwak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of EP3186850A1 publication Critical patent/EP3186850A1/en
Publication of EP3186850A4 publication Critical patent/EP3186850A4/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/70—Carriers or collectors characterised by shape or form
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H01M10/0436—Small-sized flat cells or batteries for portable equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562—Solid materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0404—Methods of deposition of the material by coating on electrode collectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0017—Non-aqueous electrolytes
    • H01M2300/0065—Solid electrolytes
    • H01M2300/0068—Solid electrolytes inorganic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0017—Non-aqueous electrolytes
    • H01M2300/0065—Solid electrolytes
    • H01M2300/0068—Solid electrolytes inorganic
    • H01M2300/0071—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H01M4/0426—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0428—Chemical vapour deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Secondary Cells (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
EP15835274.0A 2014-08-27 2015-08-27 Three-dimensional thin film battery Withdrawn EP3186850A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462042557P 2014-08-27 2014-08-27
PCT/US2015/047286 WO2016033379A1 (en) 2014-08-27 2015-08-27 Three-dimensional thin film battery

Publications (2)

Publication Number Publication Date
EP3186850A1 EP3186850A1 (en) 2017-07-05
EP3186850A4 true EP3186850A4 (en) 2018-01-24

Family

ID=55400610

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15835274.0A Withdrawn EP3186850A4 (en) 2014-08-27 2015-08-27 Three-dimensional thin film battery

Country Status (6)

Country Link
EP (1) EP3186850A4 (zh)
JP (1) JP2017530518A (zh)
KR (1) KR20170044730A (zh)
CN (1) CN106663841A (zh)
TW (1) TW201622228A (zh)
WO (1) WO2016033379A1 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170301955A1 (en) 2016-04-14 2017-10-19 Applied Materials, Inc. Thin film battery device and method of formation
KR102054326B1 (ko) 2016-08-25 2019-12-11 주식회사 엘지화학 미세 홀들을 포함하고 있는 이차전지용 전극
US10431847B2 (en) 2016-09-19 2019-10-01 International Business Machines Corporation Stacked film battery architecture
US20180287185A1 (en) * 2017-03-30 2018-10-04 International Business Machines Corporation Three-dimensional thin-film battery device
US10622680B2 (en) 2017-04-06 2020-04-14 International Business Machines Corporation High charge rate, large capacity, solid-state battery
KR102682126B1 (ko) * 2017-08-04 2024-07-08 삼성전자주식회사 고체 전해질, 그 제조방법 및 이를 포함한 리튬전지
DE102017218130A1 (de) 2017-10-11 2019-04-11 Robert Bosch Gmbh Verfahren zur Herstellung eines Stromableiters, Elektrode und Batteriezelle
CN109755615B (zh) * 2019-01-24 2021-05-28 深圳市致远动力科技有限公司 具有三维微纳结构的全固态薄膜燃料电池的制备方法
CN111682200B (zh) * 2020-07-14 2021-10-22 万华化学集团股份有限公司 用于锂离子电池的正极材料及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6495283B1 (en) * 1999-05-11 2002-12-17 Korea Institute Of Science And Technology Battery with trench structure and fabrication method thereof
US20080050656A1 (en) * 2006-08-25 2008-02-28 Eisenbeiser Kurt W Thin film battery having textured layer
KR20090062409A (ko) * 2007-12-13 2009-06-17 지에스나노텍 주식회사 전극의 표면적 및 전극과 전해질의 접촉면적을 증가시킨박막형 전지 및 그의 제조방법
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
US20130260183A1 (en) * 2012-03-28 2013-10-03 International Business Machines Corporation Three dimensional solid-state battery integrated with cmos devices

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000100443A (ja) * 1998-09-25 2000-04-07 Mitsubishi Chemicals Corp 二次電池用電極基材フィルム及び二次電池
JP2005108521A (ja) * 2003-09-29 2005-04-21 Hitachi Maxell Ltd 薄膜電極とその製造方法およびその薄膜電極を用いたリチウム二次電池
US7901829B2 (en) * 2005-09-13 2011-03-08 3M Innovative Properties Company Enhanced catalyst interface for membrane electrode assembly
US20070172735A1 (en) * 2006-01-26 2007-07-26 David R. Hall Thin-film Battery
CN101517793B (zh) * 2006-07-18 2011-08-24 西姆贝特公司 用于固态微电池光刻制造、切单和钝化的方法和设备
JP2009289585A (ja) * 2008-05-29 2009-12-10 Sony Corp 負極および二次電池
DE102010029060A1 (de) * 2010-05-18 2011-11-24 Robert Bosch Gmbh Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie
JP5666839B2 (ja) * 2010-06-30 2015-02-12 古河電気工業株式会社 ２次電池用負極、負極集電体、２次電池及びこれらの製造方法
KR101942715B1 (ko) * 2011-06-17 2019-01-28 어플라이드 머티어리얼스, 인코포레이티드 무마스크 전해질 증착을 사용한 박막 배터리 제조
JP2014032893A (ja) * 2012-08-06 2014-02-20 Sharp Corp 薄膜電池

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6495283B1 (en) * 1999-05-11 2002-12-17 Korea Institute Of Science And Technology Battery with trench structure and fabrication method thereof
US20080050656A1 (en) * 2006-08-25 2008-02-28 Eisenbeiser Kurt W Thin film battery having textured layer
KR20090062409A (ko) * 2007-12-13 2009-06-17 지에스나노텍 주식회사 전극의 표면적 및 전극과 전해질의 접촉면적을 증가시킨박막형 전지 및 그의 제조방법
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
US20130260183A1 (en) * 2012-03-28 2013-10-03 International Business Machines Corporation Three dimensional solid-state battery integrated with cmos devices

Also Published As

Publication number Publication date
JP2017530518A (ja) 2017-10-12
CN106663841A (zh) 2017-05-10
EP3186850A1 (en) 2017-07-05
WO2016033379A1 (en) 2016-03-03
TW201622228A (zh) 2016-06-16
KR20170044730A (ko) 2017-04-25

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