EP3135909B1 - Pompe sous vide a membrane - Google Patents

Pompe sous vide a membrane Download PDF

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Publication number
EP3135909B1
EP3135909B1 EP15182144.4A EP15182144A EP3135909B1 EP 3135909 B1 EP3135909 B1 EP 3135909B1 EP 15182144 A EP15182144 A EP 15182144A EP 3135909 B1 EP3135909 B1 EP 3135909B1
Authority
EP
European Patent Office
Prior art keywords
membrane
working space
vacuum pump
accordance
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15182144.4A
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German (de)
English (en)
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EP3135909A1 (fr
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15182144.4A priority Critical patent/EP3135909B1/fr
Priority to JP2016162584A priority patent/JP6421148B2/ja
Priority to US15/245,347 priority patent/US10563648B2/en
Publication of EP3135909A1 publication Critical patent/EP3135909A1/fr
Application granted granted Critical
Publication of EP3135909B1 publication Critical patent/EP3135909B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/041—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms double acting plate-like flexible pumping member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1075—Valves; Arrangement of valves the valve being a flexible annular ring

Definitions

  • the present invention relates to a diaphragm vacuum pump.
  • a diaphragm which delimits a pump chamber or working chamber is usually deflected mechanically or hydraulically in order to enlarge the pump chamber in a suction phase and to reduce it in a compression phase.
  • valves are necessary at an inlet and outlet of the pump chamber, a valve at the outlet being closed during the suction phase and a valve at the inlet being closed during the compression phase.
  • a disadvantage of a conventional diaphragm vacuum pump is the components that are required for the mechanical or hydraulic deflection of the diaphragm. These components require a certain amount of space, and wear also occurs either on the components themselves or on the membrane.
  • conventional membrane vacuum pumps have an unused space or a so-called "dead volume" at a reversal point of the membrane in the compression phase, the gas content of which is not expelled via the outlet.
  • a membrane vacuum pump in which a membrane made of a magnetorheological or electrorheological material is arranged in a flow channel between opposing actuators which are arranged on both sides of the flow channel.
  • the membrane is deflected in the flow channel in such a way that a fluid volume is encapsulated in the flow channel and then subsequently is transported along the flow channel from an inlet to an outlet of the membrane vacuum pump.
  • This diaphragm vacuum pump has to be arranged on both sides of the flow channel in order to encapsulate the fluid volume, and that complex control of the actuators and intensive deformation of the diaphragm at several points and in different directions is required to transport the fluid volume .
  • One object of the present invention is to create a diaphragm vacuum pump which, on the one hand, has a compact and simple structure and, on the other hand, overcomes the disadvantages of conventional diaphragm vacuum pumps, in particular with regard to wear and tear and dead volume.
  • the diaphragm vacuum pump according to the invention has at least one working space which is delimited by a diaphragm, which is deformable to change the size of the working space, and a wall, and a controllable actuator unit, which is used to deform the diaphragm by contactless application of the diaphragm by means of electrical and / or magnetic fields is provided.
  • a controllable actuator unit which is used to deform the diaphragm by contactless application of the diaphragm by means of electrical and / or magnetic fields is provided.
  • In the wall that delimits the working space at least one inlet and at least one outlet for a medium are formed. The medium is in a suction phase Sucked into the working space via the inlet, which increases in size, and expelled in a compression phase via the outlet from the working space, which is reduced in size.
  • the suction phase and the compression phase alternate periodically during a pumping process in the membrane vacuum pump.
  • the duration of the suction phase and the compression phase can each be adjusted by applying the electric and / or magnetic fields to the membrane. In this way, the pumping frequency of the membrane vacuum pump can be controlled.
  • the diaphragm Since the diaphragm is subjected to a contactless action to deform it, the diaphragm is the only part of the diaphragm vacuum pump that has to move. Therefore, very little wear occurs during the pumping process of the diaphragm vacuum pump, and the diaphragm vacuum pump has a correspondingly long service life.
  • the diaphragm vacuum pump since the diaphragm vacuum pump ultimately only comprises the wall and the diaphragm which form the working space and the actuator unit, it has a compact and simple structure. As a result, the diaphragm vacuum pump can also be used as a backing pump in those cases, for example for a turbo molecular pump, in which little space is available for a backing pump. Because of the small total number of parts required, the diaphragm vacuum pump according to the invention also has low manufacturing costs.
  • the membrane can be made flat and with a constant thickness. Alternatively, it is possible to provide the membrane with a profile on one side or on both sides. Furthermore, the thickness of the membrane can vary, wherein in particular the thickness profile of the membrane can be adapted to the shape of the wall, in particular to the shape of a recess formed in the wall.
  • the working space has an axis along which the membrane is deformable.
  • the axis is enclosed by an annular sealing area between the membrane and the wall.
  • the working space is preferably designed to be rotationally symmetrical with respect to the axis.
  • the working chamber of the diaphragm vacuum pump is closed and sealed off during the pumping process by the annular sealing area. Since the sealing area surrounds the axis in a ring, the membrane is mainly deformed within this ring. This results in an efficient enlargement and reduction of the working space when the membrane is deformed, for example starting from the sealing area inwards in the direction of the axis.
  • the sealing area is also rotationally symmetrical with respect to this, and the working space can be produced in a simple manner. Furthermore, in this case there is a uniform, concentric deformation of the membrane, in which at most low stresses occur in the membrane.
  • the inlet of the vacuum pump comprises one or more openings which are formed in the wall in the area of an annular sealing area between the membrane and the wall. Since the deformation of the membrane takes place within the annular sealing area, the inlet is thus located in an edge area of the wall or membrane in which it has the maximum circumference. Since the inlet comprises several openings, the arrangement of the openings in the annular sealing area maximizes the volume of the medium that can be taken up by the vacuum pump in the suction phase.
  • the inlet can also be closed by means of the membrane. This means that there is no need for a valve at the inlet of the vacuum pump, which is required in conventional diaphragm vacuum pumps.
  • the working space of the vacuum pump comprises a recess formed in the wall.
  • the membrane can be deformed into the depression in the compression phase and out of the depression in the suction phase by means of the actuator unit.
  • the recess is preferably designed to be rotationally symmetrical with respect to an axis of the working space.
  • the maximum size of the working space is thus at least partially predetermined by the shape of the recess.
  • the working space also has a predefined size when the membrane is in a non-deformed state.
  • the membrane can advantageously be deformed into the depression in the compression phase until it rests against the wall. This avoids the dead volume described above, which is disadvantageous in conventional diaphragm vacuum pumps.
  • the recess can be designed in such a way that only a slight deformation of the membrane is required during the pumping process of the vacuum pump. As a result, due to the reduced wear and tear, the service life of the diaphragm and the vacuum pump is further extended overall.
  • the wall defines a continuously differentiable curve in each cross section containing an axis of the working space.
  • the deformation of the membrane can take place along this curve.
  • This configuration of the wall makes it possible to avoid excessive or even kinking deformations of the membrane.
  • the membrane can nestle against the wall, so that the mechanical stress on the membrane is reduced to a minimum and its service life is further extended.
  • the actuator unit can preferably be activated in such a way that the membrane can be deformed in a differentiated manner in terms of time and / or location.
  • the actuator unit is advantageously controlled by a control device which controls the actuator unit in such a way that the deformation of the membrane over time and / or the spatial shape of the deformation can be determined. In this way, not only is the pumping frequency of the vacuum pump controlled, but the extent and shape when changing the size of the working space can also be controlled.
  • the membrane is preferably deformable from an outer edge area inward in the direction of an axis of the working space. This results in a uniform deformation of the membrane from the outside to the inside, and therefore low stresses occur within the membrane.
  • the actuator unit preferably comprises a plurality of actuators that can be electrically acted upon, which can be electromagnets or electrodes, for example.
  • the membrane preferably comprises or consists of a material which is magnetic and / or magnetizable or which is electro- or magnetorheological or dielectric. The selection of the material of the membrane is made to match the type of actuator.
  • the actuators that can be acted upon electrically can be controlled with relatively simple, inexpensive electronics that are integrated into the control device.
  • the actuation of the electrically actuatable actuators can take place in accordance with the properties of the membrane in order to achieve the required pumping frequency or the required pumping speed of the vacuum pump.
  • the actuator unit preferably comprises a plurality of actuators arranged distributed on the wall outside the work space.
  • the individual actuators can be controlled individually and can be serviced or exchanged individually.
  • the membrane can be deformed in sections by individual control of the actuators arranged distributed on the wall.
  • the actuators are in particular arranged concentrically around an axis of the working space. This in turn simplifies the production of the pump, and moreover, a uniform deformation of the membrane is possible if it is designed in the form of a disk.
  • the membrane separates two working spaces, each delimited by a wall.
  • a single membrane causes a change in the size of two working spaces at the same time through a corresponding deformation. If a working space is enlarged in the suction phase by the deformation of the membrane, the second working space is simultaneously reduced accordingly by the deformation of the membrane in the compression phase. This enables two pump stages to be implemented simultaneously with a single membrane.
  • any number of vacuum pumps according to the invention can be combined with one another.
  • modules from a plurality of pump stages connected in parallel can also be combined to form an overall pump unit either with modules of the same type or with modules that comprise several pump stages connected in series.
  • the actuator unit is preferably controllable in such a way that the outlet of the one working chamber remains closed by means of the membrane until the inlet of the other working space is closed by means of the membrane.
  • a valve at the outlet of the first pumping stage can be dispensed with, since the membrane takes on the function of such a valve through the time-controlled closing of the outlet of one working chamber and the inlet of the other working chamber.
  • the invention relates to a system with at least two cooperating vacuum pumps according to the invention.
  • the vacuum pumps are preferably connected in series or in parallel, it being possible, as already mentioned above, to provide both parallel and series connections within an overall pump. E.g. several modules in which several pumps are connected in series, connected in parallel.
  • a modular system can be created that allows a more or less complex pump system to be put together from any number of individual pumps of the type according to the invention, in which the individual Pumps or modules or groups of pumps are interconnected and can be controlled according to the requirements of the respective application.
  • Fig. 1 shows an embodiment of a membrane vacuum pump 11 according to the invention in a schematic sectional view.
  • the vacuum pump 11 has a working space which is divided by a membrane 15 into an upper working space 13a and a lower working space 13b.
  • the work space is further limited by a wall which is composed of an upper wall half 17a and a lower wall half 17b.
  • the upper and lower wall halves 17a, 17b each have a recess 19 in relation to the membrane 15, which is in a position of rest in the illustration.
  • an edge area 21 the wall, i. in each case the upper wall half 17a and the lower wall half 17b, inlets 23a, 23b, while an outlet 25a, 25b is arranged in the middle of the recess 19.
  • a gaseous medium which is to be conveyed by means of the pump 11, passes through the inlets 23a, 23b into the working space 13, as indicated by the arrows 24.
  • the medium is ejected from the outlets 25a, 25b and ultimately arrives via lines in an area which is, for example, at atmospheric pressure.
  • the inlets 23a, 23b also include a plurality of openings 27 which are located in a sealing area 29 in which the openings 27 are closed by means of the membrane 15 when the medium is expelled through the outlets 25a, 25b.
  • the openings 27 can e.g. be provided in the form of circular or slot-shaped openings.
  • the vacuum pump 11 also has an actuator unit which consists of an upper actuator unit 31a and a lower actuator unit 31b, which are separate from one another are controllable.
  • the actuator units each have a plurality of electromagnets 33 as actuators, which are arranged outside the working space 13 and outside the respective wall 17a, 17b and are distributed over them.
  • the membrane 15 consists of a magnetorheological elastomer material.
  • the diaphragm 15 is pulled in the direction of the activated electromagnet (s) 33 due to the magnetorheological elastomeric material, i. deformed into or out of one of the respective depressions 19 of the relevant wall 17a, 17b.
  • the entire arrangement of the vacuum pump 11 is rotationally symmetrical with respect to an axis 35.
  • the electromagnets 33 are thus either ring-shaped magnets at the individual radial positions, or a plurality of discrete, ring-shaped, evenly distributed individual magnets are provided at the individual radial positions.
  • the individual openings 27 of the inlets 23a, 23b are each evenly distributed over the annular sealing area 29.
  • the radial positions of the electromagnets 33 are evenly distributed over the respective wall 17a, 17b.
  • the electromagnets 33 of the actuator units 31a, 31b are activated by a control device 41.
  • a control device 41 For the sake of simplicity, only connections to the electromagnets 33 of the upper actuator unit 31a are shown.
  • the electromagnets 33 of the lower actuator unit 31b are also connected to the control device 41. All of the electromagnets 33 can be controlled independently of one another, so that the membrane 15 can be deliberately differently deformed in different partial areas.
  • FIG Figures 2a to 2c The functioning of the membrane vacuum pump 11 according to the invention is shown in FIG Figures 2a to 2c illustrated.
  • Fig. 2a the electromagnets 33 of the upper actuator unit 31a are activated, while the electromagnets 33 of the lower actuator unit 31b are deactivated. Due to the magnetic interaction between its magnetorheological material and the electromagnets 33 of the upper actuator unit 31a, the membrane 15 therefore rests against the upper wall half 17a, ie in its recess 19.
  • the upper working space 13a is therefore located in Fig. 2a at the end of the compression phase and has a size practically zero.
  • the lower working space 13b is at the end of the suction phase in which the openings 27 of the inlet 23b are open.
  • a non-return valve (not shown) at the outlet 25b of the lower working chamber 13b prevents a backflow via the outlet 25b into the lower working chamber 13b in its suction phase.
  • the electromagnets 33 of the upper actuator unit 31a are deactivated, while the electromagnets 33 of the lower actuator unit 31b are activated.
  • the membrane 15 is released from the upper wall half 17a and moves in the direction of the lower wall half 17b.
  • the actuator units 31a, 31b are controlled in such a way that the membrane 15 reaches the lower wall half 17b in its sealing area 29 early and thus closes the openings 27 of the inlet 23b in the lower wall half 17b in order to initiate the compression phase of the lower working space 13b.
  • the medium to be conveyed is ejected via its outlet 25b.
  • a check valve (not shown) at the outlet 25a of the upper working chamber 13a prevents a backflow into the latter during its suction phase.
  • the membrane 15 rests against the lower wall half 17b from radially outside to radially inward, in order to push the gas completely out of the lower working space 13b.
  • the electromagnets 33 of the lower actuator unit 31b are deactivated again, and a renewed activation of the electromagnets 33 of the upper actuator unit 31a begins.
  • the membrane 15 thus performs a periodic deformation between the upper wall half 17a and the lower wall half 17b.
  • the shape of the wall halves 17a, 17b enables the respective working spaces 13a, 13b to be completely emptied and protects the material of the membrane 15.
  • the frequency of the periodic deformation of the membrane 15 is controlled by the alternating activation of the electromagnets 33 of the upper and lower actuator units 31a, 31b controlled.
  • the membrane vacuum pump 11 comprises two pump stages due to the upper and lower working spaces 13a, 13b. These two pump stages can either be connected in parallel by connecting the inlets 23a, 23b of both the upper wall half 17a and the lower wall half 17b to the same recipient or to a common main pump, for example a turbo molecular pump. Correspondingly, the outlets 25a, 25b are connected to one another in such a parallel connection, ie lead to a common outlet line (not shown).
  • the two pump stages of the membrane vacuum pump 11 can also be connected in series, as shown in FIG Figure 2c is shown schematically.
  • the outlet 25a in the upper wall half 17a is connected to the inlet 23b of the lower wall half 17b.
  • the path of the medium to be conveyed thus initially runs through the inlet 23a of the upper wall half 17a into the upper working space 13a, then through its outlet 25a and a line 43 ( Figure 2c ) to the inlet 23b of the lower wall half 17b, via the inlet 23b into the lower working space 13b and via this to the outlet 25b in the lower wall half 17b.
  • the path of the medium through the membrane vacuum pump is in Figure 2c illustrated by the corresponding arrows 45.
  • the electromagnets 33 of the actuator units 31a, 31b can each be controlled independently of one another, it is possible to deform the membrane 15 in a targeted manner such that the outlet 25a of the upper working chamber 13a remains closed by the membrane 15 until the inlet 23b of the lower one Working space 13b is closed by the membrane 15.
  • the membrane 15 is initially "attracted” only in the edge area 21 or sealing area 29 of the lower working space 13b, ie deformed in the direction of the lower wall half 17b, while the membrane 15 is in the central area , ie in the vicinity of the axis 35, is "held” in the recess 19 of the upper wall half 17a.
  • FIG Figure 2c shown schematically.
  • Diaphragm vacuum pump 11 does not have a check valve between the two pump stages, ie between the lower working chamber 13b and the upper working chamber 13a.
  • the outlet 25b of the lower working chamber 13b still has such a check valve to prevent the backflow.
  • the membrane 15 can be made of or comprise an electrorheological material.
  • the electromagnets 33 instead of the electromagnets 33, corresponding electrodes are used in the two actuator units 31a, 31b.
  • the diaphragm vacuum pump 11 has, on the one hand, the advantages of a conventional diaphragm vacuum pump, in particular with regard to "dry” operation without lubricants such as oil, which is required in piston pumps.
  • the operation of the pump 11 according to the invention is also very quiet and low in vibration.
  • the membrane vacuum pump 11 is characterized by a particularly simple and compact design with a relatively small number of parts and thus by comparatively low manufacturing costs.
  • the disadvantageous "dead volume" of conventional diaphragm vacuum pumps ie a volume in the working chamber that is not pumped out via an outlet, is avoided by opening the diaphragm 15 at the end of the respective compression phase of the upper and lower working chamber 13a, 13b in of the respective recess 19 rests completely on the upper or lower wall halves 17a, 17b.

Claims (13)

  1. Pompe à vide à membrane (11),
    comportant au moins une chambre de travail (13, 13a, 13b) qui est délimitée par une membrane (15) déformable pour modifier la taille de la chambre de travail (13, 13a, 13b) et par une paroi (17, 17a, 17b) dans laquelle sont ménagées au moins une entrée (23a, 23b) et au moins une sortie (25a, 25b) pour un fluide qui, dans une phase d'aspiration, est aspiré par l'entrée (23a, 23b) jusque dans la chambre de travail (13, 13a, 13b) qui, ce faisant, s'agrandit, fluide qui, en phase de compression, est éjecté par la sortie (25a, 25b) hors de la chambre de travail (13, 13a, 13b) qui, ce faisant, se réduit, et
    comportant une unité d'actionnement pilotable (31, 31a, 31b) pour déformer la membrane (15) par sollicitation sans contact de la membrane (15) au moyen de champs électriques et/ou magnétiques,
    la chambre de travail (13, 13a, 13b) présentant un axe (35) le long duquel la membrane (15) est déformable et qui est entouré par une zone d'étanchéité annulaire (29) entre la membrane (15) et la paroi (17, 17a, 17b),
    caractérisée en ce que
    l'entrée (23a, 23b) présente une ou plusieurs ouvertures (27) qui sont ménagées dans la paroi (17, 17a, 17b) au niveau de la zone d'étanchéité annulaire entre la membrane (15) et la paroi (17, 17a, 17b), l'entrée (23a, 23b) pouvant être refermée au moyen de la membrane (15).
  2. Pompe à vide (11) selon la revendication 1,
    caractérisée en ce que
    la chambre de travail (13, 13a, 13b) est réalisée à symétrie de révolution par rapport à l'axe (35).
  3. Pompe à vide (11) selon la revendication 1 ou 2,
    caractérisée en ce que
    la chambre de travail (13, 13a, 13b) présente une cavité (19) formée dans la paroi (17, 17a, 17b), la membrane (15) pouvant être déformée jusque dans la cavité (19) dans la phase de compression et pouvant être déformée hors de la cavité (19) dans la phase d'aspiration, au moyen de l'unité d'actionnement (31, 31a, 31 b),
    la cavité (19) étant réalisée en particulier à symétrie de révolution par rapport à un axe (35) de la chambre de travail (13, 13a, 13b).
  4. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    dans chaque section transversale contenant un axe (35) de la chambre de travail (13, 13a, 13b), la paroi (17, 17a, 17b) définit une courbe constamment différenciable.
  5. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    l'unité d'actionnement (31, 31a, 31b) peut être pilotée de telle manière que la membrane (15) peut être déformée de manière différenciée dans le temps et/ou localement.
  6. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    la membrane (15) est déformable depuis une zone de bord extérieure (21) vers l'intérieur dans la direction d'un axe (35) de la chambre de travail (13, 13a, 13b).
  7. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    l'unité d'actionnement (31, 31a, 31b) comprend une pluralité d'actionneurs (33) susceptibles d'être sollicités par voie électrique, en particulier des électroaimants (33) ou des électrodes.
  8. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    la membrane (15) comprend un matériau ou est constituée d'un matériau qui est magnétique et/ou magnétisable ou qui est électro-rhéologique ou magnéto-rhéologique ou diélectrique.
  9. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    l'unité d'actionnement (31, 31a, 31b) comprend une pluralité d'actionneurs (33) disposés à l'extérieur de la chambre de travail (13, 13a, 13b) en étant répartis sur la paroi (17, 17a, 17b), les actionneurs (33) étant en particulier disposés concentriquement autour d'un axe (35) de la chambre de travail (13, 13a, 13b).
  10. Pompe à vide (11) selon l'une des revendications précédentes,
    caractérisée en ce que
    la membrane (15) sépare deux chambres de travail (13a, 13b) l'une de l'autre, chacune étant délimitée par une paroi (17, 17a, 17b).
  11. Pompe à vide (11) selon la revendication 10,
    caractérisée en ce que
    pour former deux étages de pompage connectés en série, la sortie (25a) d'une chambre de travail (13a) est connectée à l'entrée (23b) de l'autre chambre de travail (13b), ou
    en ce que pour former deux étages de pompage connectés en parallèle, les entrées (23a, 23b) des deux chambres de travail (13a, 13b) sont connectées en parallèle.
  12. Pompe à vide (11) selon la revendication 10 ou 11,
    caractérisée en ce que
    l'unité d'actionnement (31, 31a, 31b) peut être pilotée de telle manière que la sortie respective (25a, 25b) d'une chambre de travail (13a, 13b) reste fermée au moyen de la membrane (15) jusqu'à ce que l'entrée (23a, 23b) de l'autre chambre de travail (13a, 13b) soit fermée au moyen de la membrane (15).
  13. Système comportant au moins deux pompes à vide à membrane (11) selon l'une des revendications précédentes, qui coopérant l'une avec l'autre et qui sont connectées en série et/ou en parallèle,
    dans lequel sont prévus en particulier au moins deux modules ou groupes comportant chacun au moins deux pompes à vide à membrane (11).
EP15182144.4A 2015-08-24 2015-08-24 Pompe sous vide a membrane Active EP3135909B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP15182144.4A EP3135909B1 (fr) 2015-08-24 2015-08-24 Pompe sous vide a membrane
JP2016162584A JP6421148B2 (ja) 2015-08-24 2016-08-23 メンブラン真空ポンプ
US15/245,347 US10563648B2 (en) 2015-08-24 2016-08-24 Membrane vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15182144.4A EP3135909B1 (fr) 2015-08-24 2015-08-24 Pompe sous vide a membrane

Publications (2)

Publication Number Publication Date
EP3135909A1 EP3135909A1 (fr) 2017-03-01
EP3135909B1 true EP3135909B1 (fr) 2020-11-04

Family

ID=53969271

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15182144.4A Active EP3135909B1 (fr) 2015-08-24 2015-08-24 Pompe sous vide a membrane

Country Status (3)

Country Link
US (1) US10563648B2 (fr)
EP (1) EP3135909B1 (fr)
JP (1) JP6421148B2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10426639B2 (en) * 2016-08-31 2019-10-01 Otto Bock Healthcare Lp Multi-chamber vacuum pump
EP3438455B1 (fr) * 2017-08-01 2021-05-12 Schwarzer Precision GmbH & Co. KG Pompe à membrane et procédé d'actionnement sans contact des membranes d'une pluralité de chambres de travail d'une pompe à membrane
CZ2017799A3 (cs) * 2017-12-13 2019-04-17 Západočeská Univerzita V Plzni Peristaltické čerpadlo s magnetoelastickým pohonem
CN113482893B (zh) * 2021-06-10 2022-04-01 浙江大学 一种基于介电弹性材料的柔性泵

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2630760A (en) * 1947-09-26 1953-03-10 Ryba Anton Electromagnetic pumping device for pumping fluids
US2659310A (en) * 1950-09-02 1953-11-17 Ryba Anton Electromagnetic pumping device for pumping fluids
DE863701C (de) * 1950-10-22 1953-01-19 Anton Ryba Elektromagnetischer Kompressor bzw. Pumpe
GB700368A (en) * 1951-01-10 1953-12-02 Anton Ryba Electromagnetic compressor or pump
IL59942A (en) 1980-04-28 1986-08-31 D P Lab Ltd Method and device for fluid transfer
JPH0443875Y2 (fr) 1986-06-23 1992-10-16
JPH0443875A (ja) * 1990-06-08 1992-02-13 Hitachi Koki Co Ltd マグネット式真空ポンプ
JP4873014B2 (ja) * 2006-12-09 2012-02-08 株式会社村田製作所 圧電マイクロブロア
DE102012013681A1 (de) 2012-07-11 2014-01-16 Pfeiffer Vacuum Gmbh Pumpenmodul, sowie Verdrängerpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP6421148B2 (ja) 2018-11-07
JP2017078402A (ja) 2017-04-27
EP3135909A1 (fr) 2017-03-01
US20170058883A1 (en) 2017-03-02
US10563648B2 (en) 2020-02-18

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