EP3122463B1 - Method for fragmenting a rod-like material, in particular made of polycrystalline silicon - Google Patents

Method for fragmenting a rod-like material, in particular made of polycrystalline silicon Download PDF

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Publication number
EP3122463B1
EP3122463B1 EP14717391.8A EP14717391A EP3122463B1 EP 3122463 B1 EP3122463 B1 EP 3122463B1 EP 14717391 A EP14717391 A EP 14717391A EP 3122463 B1 EP3122463 B1 EP 3122463B1
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Prior art keywords
rod
electrode arrangement
high voltage
electrodes
generating
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German (de)
French (fr)
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EP3122463A1 (en
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Johannes KÄPPELER
Alexander WEH
Jürgen KALKE
Reinhard MÜLLER-SIEBERT
Joël KOLLY
Marion Esther MORACH
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Selfrag AG
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Selfrag AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C19/00—Other disintegrating devices or methods
    • B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C19/00—Other disintegrating devices or methods
    • B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
    • B02C2019/183—Crushing by discharge of high electrical energy

Definitions

  • the invention relates to a method for fragmenting a rod-like material, in particular of polycrystalline silicon, a system for carrying out the method and a use of the system according to the preambles of the independent claims.
  • the Siemens method is predominantly used. This process produces polycrystalline silicon rods with thicknesses in the range between 100 mm and 150 mm, which must be broken into small pieces for use in the crystal furnaces.
  • the pieces should preferably have a size between 10 mm and 30 mm, not less than 2 mm may be and also should not be needle-shaped, as this has a negative effect on the flow properties. Due to the special crystalline structure of silicon breaking of silicon rods into such a fraction with the largest possible uniform size and shape is very difficult.
  • the high-purity base material must not be contaminated when it is broken by contact with foreign material. Contamination of the material with foreign substances, especially metals, is critical and should be below 5 ppb, better still below 2 ppb.
  • a first aspect of the invention relates to a method of fragmenting a rod-like material, preferably a semiconductor material, e.g. polycrystalline silicon.
  • an electrode arrangement with two or more electrodes is arranged in the region of a portion of the rod-like material to be fragmented, immersed in a process fluid, preferably water, such that the electrodes are immersed in the process fluid and both at a distance from each other and to the rod-like material exhibit.
  • These distances are chosen such that can be generated by the rod-like material and / or along the surface of the rod-like material by applying high voltage pulses to the electrode assembly in the region of these electrodes Hochwoods screwoeuvre.
  • the size of these distances depends on the conductivity of the process fluid, the conductivity of the rod-like material and from the height of the high-voltage pulses. Suitable distances can be determined by the skilled person for the respective operating situation by simple trial and error.
  • the electrode assembly is subjected to high voltage pulses, so that there is high voltage breakdowns through the rod-like material and / or along the surface of the rod-like material in the region of the electrodes.
  • high voltage breakdowns a relative movement in the longitudinal direction of the rod-like material between the electrode assembly and the rod-like material is generated, whereby the location of the high voltage breakdowns by the rod-like material and / or along the surface of the rod-like material changes progressively in the longitudinal direction of the rod-like material.
  • the rod-like material is completely immersed in the process fluid during fragmentation. It advantageously has a substantially horizontal position.
  • rod-like material is taken during fragmentation in an upwardly open trough or dish-like container and the fragments resulting from its fragmentation are collected in this container and transported away after complete fragmentation with this container.
  • the method can be carried out in industrial batch mode with relatively simple systems without complex transport devices.
  • the rod-like material when fragmented, is immersed in the process fluid with one end and preferably has an oblique position in which the lower end of the rod-like material is immersed in the process fluid.
  • the relative movement between the electrode assembly and the rod-like material is generated at least in part by displacing the rod-like material in its longitudinal direction.
  • the electrode arrangement in order to produce the relative movement between the electrode arrangement and the rod-like material, the electrode arrangement is displaced in the longitudinal direction of the rod-like material.
  • one or the other variant or a combination of the two variants may be particularly preferred.
  • the electrode arrangement is displaced in the longitudinal direction of the rod-like material together with a high-voltage generator generating the high-voltage pulses. This can be dispensed with a complex movable coupling of the electrode assembly to the high voltage generator.
  • rod-like material when fragmenting an oblique or preferably horizontal position and the electrodes of the electrode assembly are arranged above the rod-like material, with advantage substantially centered with respect to the Longitudinal axis of the rod-like material, so a particularly uniform fragmentation result can be achieved.
  • the electrodes of the electrode assembly are preferably arranged such that the distance of the respective electrode to the surface of the rod-like material is in each case in the range of 2 mm to 40 mm and the distance between the electrodes in the range between 40 mm and 100 mm. Distances in these areas have proven to be particularly suitable.
  • the electrode arrangement is preferably subjected to high-voltage pulses in the range between 100 KV and 300 KV, in particular in the range between 150 KV and 200 KV.
  • the high voltage pulses preferably have a power per pulse between 300 joules and 1000 joules, in particular between 500 joules and 750 joules.
  • the application of the high-voltage pulses to the electrode arrangement for generating the high-voltage breakdowns through the rod-like material and / or along the surface of the rod-like material preferably takes place at pulse frequencies in the range between 0.5 Hz and 40 Hz, in particular in the range between 1 Hz and 5 Hz.
  • the relative movement between the electrode arrangement and the rod-like material and / or the application of high-voltage pulses to the electrode arrangement preferably takes place in such a way that 0.5 to 1.0 pulses, in particular 0.1 to 2.0 pulses, are applied to the electrode arrangement per millimeter of relative movement.
  • the area between the electrodes of the electrode assembly and the rod-like material which is flooded with process fluid is preferably purged with process liquid. In this way, fine material can be removed from the process zone and a consistent quality of the process fluid present in the process zone can be ensured, which is conducive to stable process control.
  • the at least two electrodes of the electrode arrangement for generating the high-voltage breakdowns by the rod-like material and / or along the surface of the rod-like material are simultaneously exposed to pulses with different potentials not equal to the ground potential.
  • one or the other variant may be more preferable.
  • a second aspect of the invention relates to a plant for carrying out the process according to the first aspect of the invention.
  • the plant comprises a process space, which can be filled with a process fluid, preferably water, and in which the rod-like material or a portion thereof can be arranged such that the rod-like material or the portion of the rod-like material with Process fluid filled process space is surrounded by process fluid.
  • a process fluid preferably water
  • the system comprises an electrode arrangement with at least two electrodes, which can be arranged in the region of the rod-like material or this portion of the rod-like material in process space filled with process fluid and intended to receive the rod-like material or the portion of the rod-like material for the intended operation. that the electrodes are immersed in the process fluid and at a distance from each other and each have a distance to the rod-like material, which distances allow it during normal operation by applying high voltage pulses to the electrode assembly in the region of these electrodes high voltage breakdowns through the rod-like material and / or along to produce the surface of the rod-like material.
  • these distances depend on the conductivity of the process fluid, the conductivity of the rod-like material and the height of the high voltage pulses. Suitable distances can be determined for the respective operating situation by a person skilled in the art by simple trial and error.
  • the system further comprises means for applying high voltage pulses to the electrode assembly to generate the high voltage breakdowns through the rod-like material and / or along the surface of the rod-like material, and means for producing relative longitudinal movement of the rod-like material between the electrode assembly and the rod-like material during production the high voltage breakdowns in the normal operation, such that the location of the high voltage breakdowns by the rod-like material and / or along the surface of the rod-like material in the longitudinal direction of this material is progressively changed, wherein the rod-like Material is in each case surrounded by process fluid and the electrodes are immersed in this location in each case in the process fluid.
  • the method according to the first aspect of the invention can be carried out in a simple manner.
  • the system comprises a device for receiving the rod-like material, preferably an upwardly open trough or dish-like container for receiving the rod-like material.
  • a device for receiving the rod-like material preferably an upwardly open trough or dish-like container for receiving the rod-like material.
  • the rod-like material can be kept completely surrounded by process liquid in the intended operation in the process chamber, preferably in a horizontal position.
  • the system is also preferably designed such that this tub-like or shell-like container can be removed from the system after the intended fragmentation operation together with the fragmentation of the rod-like material contained therein.
  • the system comprises a device for receiving the rod-like material, with which the rod-like can be held such that it is immersed in the process space with one end in the process fluid, in particular such that it has an inclined position and its lower end is immersed in the process fluid in the process space.
  • the means for generating a relative movement between the electrode assembly and the rod-like material are formed in a preferred embodiment of the system for displacement of the rod-like material along its longitudinal axis.
  • these means are designed for displacement of the electrode arrangement along the longitudinal axis of the rod.
  • one or the other variant or a combination of the two variants may be particularly preferred.
  • the means for applying high-voltage pulses to the electrode arrangement comprise a high-voltage pulse generator and the means for producing a relative movement between the electrode arrangement and the rod-like material are designed to displace the electrode arrangement together with the high-voltage pulse generator along the longitudinal axis of the rod-like material. This can be dispensed with a complex movable coupling of the electrode assembly to the high voltage generator.
  • the system is designed such that the at least two electrodes of the electrode assembly can be arranged as intended above the rod-like material, advantageously substantially centered with respect to the longitudinal axis of the rod-like material.
  • the at least two electrodes of the electrode assembly can be arranged as intended above the rod-like material, advantageously substantially centered with respect to the longitudinal axis of the rod-like material.
  • the electrodes of the electrode arrangement can advantageously be arranged in such a way that the distance between the electrodes and the surface of the rod-like material is in the range from 2 mm to 40 mm and the distance between the electrodes is in the range between 40 mm and 100 mm. Such distances have proven to be particularly suitable.
  • the system has means for particular automated adjustment of the respective distance of the electrodes to the rod-like material, preferably for setting the respective distance during the intended operation of the system.
  • the means for applying high-voltage pulses to the electrode arrangement are advantageously designed to subject the electrode arrangement with high-voltage pulses in the range between 100 KV and 300 KV, in particular in the range between 150 KV and 200 KV, with a power per pulse in the range between 300 Joules and 1000 Joules , in particular between 500 Joule and 750 Joule and with a pulse frequency in the range between 0.5 Hz and 40 Hz, in particular between 1 Hz and 5 Hz.
  • the means for generating a relative movement in the longitudinal direction of the rod-like material between the electrode assembly and the rod-like material or the means for acting on the electrode assembly with high-voltage pulses are designed such that in Fragment michs congress the electrode assembly per millimeter relative movement with 0.5 to 1.0 Pulses, in particular with 0.1 to 2.0 pulses can be applied. Such pulse rates per mm relative movement have proven to be particularly suitable.
  • the system comprises means for purging the region between the electrodes of the electrode assembly and the rod-like material with process liquid during the fragmentation operation.
  • Such means comprise, for example, one or more feed nozzles, via which fresh or treated process liquid can be injected into the region between the electrodes and the rod-like material. This will make it possible To remove fine particles from this area and to keep the electrical conductivity of the process fluid constant in this area, which promotes stable process control.
  • the at least two electrodes of the electrode arrangement for generating the high-voltage breakdowns by the rod-like material and / or along the surface of the rod-like material can be acted upon simultaneously with pulses with different potentials than the ground potential.
  • one or the other embodiment may be more preferable.
  • the system according to the invention has a system control, by means of which, preferably during the fragmentation operation, the energy of the high-voltage pulses, the frequency of the high-voltage pulses, the relative speed between the electrode arrangement and the rod-like material, the distance between the electrodes and the rod-like Material and / or certain system parameters, preferably automated, adjusted and / or can be controlled, with advantage depending on determined in normal operation plant and / or process parameters.
  • a third aspect of the invention relates to the use of the plant according to the second aspect of the invention for fragmenting rods of semiconductor material, preferably of polycrystalline silicon. With such use of the system, the advantages of the invention are particularly evident.
  • FIG. 1 This shows a section through a part of an inventive system.
  • Fig. 1 shows a part of an inventive plant for the fragmentation of polycrystalline silicon rods 1 according to the method according to the first aspect of the invention in a section transverse to the longitudinal direction of a therein arranged to be fragmented silicon rod.
  • the system has a basin 9 extending in the longitudinal direction of the silicon rod 1, which forms a process space 8 according to the claims, which is filled with a process fluid 2, in the present case water 2.
  • the silicon rod to be fragmented is 1. It has a horizontal position and is completely made of process fluid 2 surrounded.
  • the trough-like container 7 is formed in such a way and stored in the process space 8 that it can be removed from the process space 8 after complete fragmentation of the silicon rod 1 together with the resulting fragments of the silicon rod 1, which are then arranged as a loose bed of material therein.
  • the system comprises an electrode arrangement 4 with two electrodes 5, 6, which are arranged substantially centered with respect to the longitudinal axis of the silicon rod 1 above the same.
  • the two electrodes 5, 6 are immersed in the process fluid 2 and the left-hand electrode 5 is subjected to high-voltage pulses in the fragmentation mode by a high-voltage pulse generator (not shown) which likewise belongs to the system. while the right electrode 6 is grounded.
  • the two electrodes 5, 6 have a significantly greater distance from each other than in each case with respect to the silicon rod 1. These distances are selected such that upon application of the high voltage pulse generator with high voltage pulses in the region of these electrodes 5, 6 high voltage breakdowns through the silicon rod.
  • the diameter of the silicon rod 1 is about 120 mm, its length is about 2 m.
  • the distances between the electrodes 5, 6 to the surface of the silicon rod 1 are about 8 mm.
  • the distance between the electrodes 5, 6 to each other is about 60 mm.
  • the high-voltage pulses that can be generated by the high-voltage pulse generator have a voltage of approximately 200 KV and are generated at a pulse frequency of 5 Hz.
  • the power per pulse is about 700 joules.
  • the electrode arrangement 4 when generating the high-voltage breakdowns together with the high-voltage pulse generator, the electrode arrangement 4 is movable along a sliding carriage (not shown) in the longitudinal direction of the silicon rod 1, so that the location of the high-voltage breakdowns through the silicon rod 1 or along the surface of the silicon rod 1 in the longitudinal direction the same progressively changed, without causing the distances of the electrodes 5, 6 are substantially changed to the silicon rod 1.
  • the electrode assembly 4 is at a speed in the range between 6 mm and 10 mm per second along the silicon rod 1.
  • the system also includes a system control, by means of which the distance between the electrodes 5, 6 and the silicon rod 1 and the travel speed of the electrode assembly 4 can be adjusted during the fragmentation operation.

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  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Disintegrating Or Milling (AREA)
  • Silicon Compounds (AREA)

Description

TECHNISCHES GEBIETTECHNICAL AREA

Die Erfindung betrifft ein Verfahren zum Fragmentieren eines stangenartigen Materials, insbesondere aus polykristallinem Silizium, eine Anlage zur Durchführung des Verfahrens sowie eine Verwendung der Anlage gemäss den Oberbegriffen der unabhängigen Patentansprüche.The invention relates to a method for fragmenting a rod-like material, in particular of polycrystalline silicon, a system for carrying out the method and a use of the system according to the preambles of the independent claims.

STAND DER TECHNIKSTATE OF THE ART

Zur Herstellung von hochreinem Polysilizium als Grundmaterial für die Kristallzucht von polykristallinen oder monokristallinen Substraten für die Solar- oder Elektronikindustrie wird überwiegend das Siemensverfahren eingesetzt. Mit diesem Verfahren werden polykristalline Silizium-Stangen mit Dicken im Bereich zwischen 100 mm und 150 mm erzeugt, welche für die Verwendung in den Kristallöfen in kleine Stücke gebrochen werden müssen.For the production of high-purity polysilicon as a base material for the crystal growth of polycrystalline or monocrystalline substrates for the solar or electronics industry, the Siemens method is predominantly used. This process produces polycrystalline silicon rods with thicknesses in the range between 100 mm and 150 mm, which must be broken into small pieces for use in the crystal furnaces.

Dabei ist zu beachten, dass die Stücke möglichst eine Grösse zwischen 10 mm und 30 mm aufweisen sollten, nicht kleiner als 2 mm sein dürfen und zudem nicht nadelförmig sein sollten, da sich dies negativ auf die Fliesseigenschaften auswirkt. Aufgrund der speziellen kristallinen Struktur von Silizium ist das Brechen von Silizium-Stangen in eine solche Fraktion mit möglichst gleichmässiger Grösse und Form sehr schwierig.It should be noted that the pieces should preferably have a size between 10 mm and 30 mm, not less than 2 mm may be and also should not be needle-shaped, as this has a negative effect on the flow properties. Due to the special crystalline structure of silicon breaking of silicon rods into such a fraction with the largest possible uniform size and shape is very difficult.

Weiter ist zu beachten, dass das hochreine Grundmaterial beim Brechen durch den Kontakt mit Fremdmaterial nicht verunreinigt werden darf. Eine Kontamination des Materials mit Fremdstoffen, insbesondere mit Metallen, ist kritisch und sollte unter 5 ppb liegen, besser noch unter 2 ppb.It should also be noted that the high-purity base material must not be contaminated when it is broken by contact with foreign material. Contamination of the material with foreign substances, especially metals, is critical and should be below 5 ppb, better still below 2 ppb.

Aus dem Stand der Technik sind verschiedene Verfahren zum Brechen von Silizium-Stangen bekannt, bei denen die Stangen entweder durch mechanische oder durch thermische Einwirkung gebrochen werden, oder durch eine Kombination aus mechanischer und thermischer Einwirkung. Auch ist es bekannt, die Stangen mittels Schockwellen zu zerkleinern, wie dies z.B. aus EP 0 887 105 A1 oder EP 0 976 457 A1 bekannt ist.Various methods are known in the prior art for breaking silicon rods in which the rods are broken, either by mechanical or thermal action, or by a combination of mechanical and thermal action. It is also known to crush the rods by means of shock waves, as for example EP 0 887 105 A1 or EP 0 976 457 A1 is known.

Weiterer Stand der Technik wie die DE 197 36 027 A1 befasst sich mit einem Verfahren und einer Vorrichtung zum Fragmentieren eines Materials, nämlich Stahlbetonplatten, wobei Prozessfluid welches das Material umgibt bereitgestellt wird und dieses zwischen den Elektroden durch Erzeugen von Hochspannungsdurchschlägen durch das Material im Bereich der beiden Elektroden durch Beaufschlagen der Elektrodenanordnung mit Hochspannungspulsen fragmentiert wird; wonach dann eine Relativbewegung zwischen der Elektrodenanordnung und dem Material erzeugt wird, so dass sich der Ort der Hochspannungsdurchschläge durch das Material verändert. Alle diese bekannten Verfahren weisen jedoch substantielle Nachteile hinsichtlich der Betriebs- bzw. Anlagenkosten, des Energieaufwands, der Korngrössenverteilung und/oder der Kontamination des Materials auf.Further state of the art like the DE 197 36 027 A1 is concerned with a method and apparatus for fragmenting a material, namely reinforced concrete slabs, whereby process fluid surrounding the material is provided and fragmented between the electrodes by generating high voltage breakdowns through the material in the region of the two electrodes by applying high voltage pulses to the electrode assembly; then a relative movement between the electrode assembly and the material is generated, such that the location of the high voltage breakdowns through the material changes. However, all of these known methods have substantial disadvantages in terms of operating and plant costs, the energy consumption, the particle size distribution and / or the contamination of the material.

DARSTELLUNG DER ERFINDUNGPRESENTATION OF THE INVENTION

Es stellt sich deshalb die Aufgabe, Verfahren und Vorrichtungen zur Verfügung zu stellen, welche diese Nachteile des Standes der Technik nicht aufweisen oder zumindest teilweise vermeiden.It is therefore the object to provide methods and devices that do not have these disadvantages of the prior art or at least partially avoided.

Diese Aufgabe wird durch die Gegenstände der unabhängigen Patentansprüche gelöst.This object is solved by the subject matters of the independent claims.

Entsprechend betrifft ein erster Aspekt der Erfindung ein Verfahren zum Fragmentieren eines stangenartigen Materials, bevorzugterweise eines Halbleitermaterials, wie z.B. polykristallines Silizium.Accordingly, a first aspect of the invention relates to a method of fragmenting a rod-like material, preferably a semiconductor material, e.g. polycrystalline silicon.

Dabei wird eine Elektrodenanordnung mit zwei oder mehr Elektroden derartig im Bereich eines in ein Prozessfluid, bevorzugterweise Wasser, eingetauchten Abschnitts des zu fragmentierenden stangenartigen Materials angeordnet, dass die Elektroden in das Prozessfluid eingetaucht sind und sowohl einen Abstand zueinander und als auch jeweils zu dem stangenartigen Material aufweisen.In this case, an electrode arrangement with two or more electrodes is arranged in the region of a portion of the rod-like material to be fragmented, immersed in a process fluid, preferably water, such that the electrodes are immersed in the process fluid and both at a distance from each other and to the rod-like material exhibit.

Diese Abstände werden derartig gewählt, dass durch Beaufschlagung der Elektrodenanordnung mit Hochspannungspulsen im Bereich dieser Elektroden Hochspannungsdurchschläge durch das stangenartige Material und/- oder entlang der Oberfläche des stangenartigen Materials erzeugt werden können. Die Grösse dieser Abstände hängt von der Leitfähigkeit des Prozessfluids, von der Leitfähigkeit des stangenartigen Materials und von der Höhe der Hochspannungspulse ab. Geeignete Abstände können vom Fachmann für die jeweilige Betriebssituation durch einfaches Ausprobieren ermittelt werden.These distances are chosen such that can be generated by the rod-like material and / or along the surface of the rod-like material by applying high voltage pulses to the electrode assembly in the region of these electrodes Hochspannungsdurchschläge. The size of these distances depends on the conductivity of the process fluid, the conductivity of the rod-like material and from the height of the high-voltage pulses. Suitable distances can be determined by the skilled person for the respective operating situation by simple trial and error.

Die Elektrodenanordnung wird mit Hochspannungspulsen beaufschlagt, so dass es zu Hochspannungsdurchschlägen durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials im Bereich der Elektroden kommt. Während dem Erzeugen der Hochspannungsdurchschläge wird eine Relativbewegung in Längsrichtung des stangenartigen Materials zwischen der Elektrodenanordnung und dem stangenartigen Material erzeugt, wodurch sich der Ort der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials fortschreitend in Längsrichtung des stangenartigen Materials verändert.The electrode assembly is subjected to high voltage pulses, so that there is high voltage breakdowns through the rod-like material and / or along the surface of the rod-like material in the region of the electrodes. During the generation of the high voltage breakdowns, a relative movement in the longitudinal direction of the rod-like material between the electrode assembly and the rod-like material is generated, whereby the location of the high voltage breakdowns by the rod-like material and / or along the surface of the rod-like material changes progressively in the longitudinal direction of the rod-like material.

Mit dem erfindungsgemässen Verfahren ist es z.B. möglich, stangenartiges Halbleitermaterial und insbesondere Silizium-Stangen mit einem verhältnismässig geringen Energieaufwand in eine Fraktion mit relativ gleichmässiger Grösse und Form zu zerkleinern, welche sich bestens für die Weiterverarbeitung in Kristallöfen eignet. Auch kann die Kontamination mit Fremdmaterial mit diesem Verfahren extrem klein gehalten werden.With the method according to the invention it is e.g. possible to comminute rod-like semiconductor material and in particular silicon rods with a relatively small amount of energy into a fraction of relatively uniform size and shape, which is ideally suited for further processing in crystal furnaces. Also, the contamination with foreign material can be kept extremely small with this method.

In einer bevorzugten Ausführungsform des Verfahrens ist das stangenartige Material beim Fragmentieren vollständig in das Prozessfluid eingetaucht. Es weist dabei mit Vorteil eine im Wesentlichen horizontale Lage auf.In a preferred embodiment of the method, the rod-like material is completely immersed in the process fluid during fragmentation. It advantageously has a substantially horizontal position.

Dabei ist es weiter bevorzugt, dass das stangenartige Material beim Fragmentieren in einem nach oben offenen wannen- oder schalenartigen Behältnis aufgenommen ist und die sich aus seiner Fragmentierung hervorgehenden Fragmente in diesem Behältnis gesammelt werden und nach der vollständigen Fragmentierung mit diesem Behältnis abtransportiert werden.It is further preferred that the rod-like material is taken during fragmentation in an upwardly open trough or dish-like container and the fragments resulting from its fragmentation are collected in this container and transported away after complete fragmentation with this container.

Hierdurch kann das Verfahren im industriellen Batchbetrieb mit relativ einfachen Anlagen ohne aufwändige Transporteinrichtungen durchgeführt werden.As a result, the method can be carried out in industrial batch mode with relatively simple systems without complex transport devices.

In einer anderen bevorzugten Ausführungsform des Verfahrens ist das stangenartige Material beim Fragmentieren mit einem Ende in das Prozessfluid eingetaucht und weist dabei bevorzugterweise eine schräge Lage auf, bei der das untere Ende des stangenartigen Materials in das Prozessfluid eingetaucht ist. Hierdurch lässt sich das Verfahren auf einfache Weise im quasi-kontinuierlichen Betrieb unter fortwährender Zuführung von stangenartigem Material in die mit Prozessfluid geflutete Fragmentierungszone realisieren.In another preferred embodiment of the method, when fragmented, the rod-like material is immersed in the process fluid with one end and preferably has an oblique position in which the lower end of the rod-like material is immersed in the process fluid. As a result, the method can be realized in a simple manner in quasi-continuous operation with continuous supply of rod-like material into the fragmentation zone flooded with process fluid.

Mit Vorteil wird die Relativbewegung zwischen der Elektrodenanordnung und dem stangenartigen Material zumindest zum Teil durch Verschieben des stangenartigen Materials in seiner Längsrichtung erzeugt.Advantageously, the relative movement between the electrode assembly and the rod-like material is generated at least in part by displacing the rod-like material in its longitudinal direction.

Alternativ oder ergänzend ist es vorgesehen, dass zur Erzeugung der Relativbewegung zwischen der Elektrodenanordnung und dem stangenartigen Material die Elektrodenanordnung in Längsrichtung des stangenartigen Materials verschoben wird.Alternatively or additionally, it is provided that in order to produce the relative movement between the electrode arrangement and the rod-like material, the electrode arrangement is displaced in the longitudinal direction of the rod-like material.

Je nach Anlagenkonzept kann die eine oder die andere Variante oder eine Kombination beider Varianten besonders bevorzugt sein.Depending on the system concept, one or the other variant or a combination of the two variants may be particularly preferred.

Dabei ist es in der letztgenannten Variante bevorzugt, dass die Elektrodenanordnung zusammen mit einem die Hochspannungspulse erzeugenden Hochspannungsgenerator in Längsrichtung des stangenartigen Materials verschoben wird. Hierdurch kann auf eine aufwendige bewegliche Ankopplung der Elektrodenanordnung an den Hochspannungsgenerator verzichtet werden.In the latter variant, it is preferred that the electrode arrangement is displaced in the longitudinal direction of the rod-like material together with a high-voltage generator generating the high-voltage pulses. This can be dispensed with a complex movable coupling of the electrode assembly to the high voltage generator.

Weist das stangenartige Material beim Fragmentieren eine schräge oder bevorzugterweise horizontale Lage auf und werden die Elektroden der Elektrodenanordnung dabei oberhalb des stangenartigen Materials angeordnet, mit Vorteil im Wesentlichen zentriert bezüglich der Längsachse des stangenartigen Materials, so kann ein besonders gleichmässiges Fragmentierungsergebnis erzielt werden.If the rod-like material when fragmenting an oblique or preferably horizontal position and the electrodes of the electrode assembly are arranged above the rod-like material, with advantage substantially centered with respect to the Longitudinal axis of the rod-like material, so a particularly uniform fragmentation result can be achieved.

Die Elektroden der Elektrodenanordnung werden bevorzugterweise derartig angeordnet, dass der Abstand der jeweiligen Elektrode zu der Oberfläche des stangenartigen Materials jeweils im Bereich von 2 mm bis 40 mm liegt und der Abstand zwischen den Elektroden im Bereich zwischen 40 mm und 100 mm liegt. Abstände in diesen Bereichen haben sich als besonders geeignet erwiesen.The electrodes of the electrode assembly are preferably arranged such that the distance of the respective electrode to the surface of the rod-like material is in each case in the range of 2 mm to 40 mm and the distance between the electrodes in the range between 40 mm and 100 mm. Distances in these areas have proven to be particularly suitable.

Zur Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials wird die Elektrodenanordnung bevorzugterweise mit Hochspannungspulsen im Bereich zwischen 100 KV und 300 KV, insbesondere im Bereich zwischen 150 KV und 200 KV beaufschlagt.To generate the high-voltage breakdowns by the rod-like material and / or along the surface of the rod-like material, the electrode arrangement is preferably subjected to high-voltage pulses in the range between 100 KV and 300 KV, in particular in the range between 150 KV and 200 KV.

Die Hochspannungspulse haben bevorzugterweise eine Leistung pro Puls zwischen 300 Joule und 1000 Joule, insbesondere zwischen 500 Joule und 750 Joule.The high voltage pulses preferably have a power per pulse between 300 joules and 1000 joules, in particular between 500 joules and 750 joules.

Diese Spannungs- und Leistungsbereiche haben sich als besonders geeignet erwiesen.These voltage and power ranges have proven to be particularly suitable.

Die Beaufschlagung der Elektrodenanordnung mit Hochspannungspulsen zur Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials erfolgt bevorzugterweise mit Puls-Frequenzen im Bereich zwischen 0.5 Hz und 40 Hz, insbesondere im Bereich zwischen 1 Hz und 5 Hz.The application of the high-voltage pulses to the electrode arrangement for generating the high-voltage breakdowns through the rod-like material and / or along the surface of the rod-like material preferably takes place at pulse frequencies in the range between 0.5 Hz and 40 Hz, in particular in the range between 1 Hz and 5 Hz.

Die Relativbewegung zwischen der Elektrodenanordnung und dem stangenartigen Material und/oder die Beaufschlagung der Elektrodenanordnung mit Hochspanungspulsen erfolgt bevorzugterweise derartig, dass die Elektrodenanordnung pro Millimeter Relativbewegung mit 0.5 bis 1.0 Pulsen, insbesondere mit 0.1 bis 2.0 Pulsen beaufschlagt wird.The relative movement between the electrode arrangement and the rod-like material and / or the application of high-voltage pulses to the electrode arrangement preferably takes place in such a way that 0.5 to 1.0 pulses, in particular 0.1 to 2.0 pulses, are applied to the electrode arrangement per millimeter of relative movement.

Derartige Puls-Frequenzen und Puls-Beaufschlagungen pro Millimeter Relativbewegung haben sich als besonders geeignet erwiesen.Such pulse frequencies and pulse impulses per millimeter relative movement have proven to be particularly suitable.

Der Bereich zwischen den Elektroden der Elektrodenanordnung und dem stangenartigen Material, welcher mit Prozessfluid geflutet ist, wird bevorzugterweise mit Prozessflüssigkeit gespült. Auf diese Weise kann Feinmaterial aus der Prozesszone entfernt werden und eine gleichbleibende Qualität des in der Prozesszone vorhandenen Prozessfluids sichergestellt werden, was einer stabilen Prozessführung zuträglich ist.The area between the electrodes of the electrode assembly and the rod-like material which is flooded with process fluid is preferably purged with process liquid. In this way, fine material can be removed from the process zone and a consistent quality of the process fluid present in the process zone can be ensured, which is conducive to stable process control.

In einer bevorzugten Ausführungsform des Verfahrens wird eine erste der mindestens zwei Elektroden der Elektrodenanordnung zur Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials mit den Hochspannungspulsen beaufschlagt während eine zweite dieser Elektroden auf einem festen Potential liegt, insbesondere geerdet ist.In a preferred embodiment of the method, a first of the at least two electrodes of the electrode arrangement for generating the high-voltage breakdowns by the rod-like material and / or along the surface of the rod-like material with the high voltage pulses applied while a second of these electrodes is at a fixed potential, in particular grounded ,

In einer anderen bevorzugten Ausführungsform des Verfahrens werden die mindestens zwei Elektroden der Elektrodenanordnung zur Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials gleichzeitig mit Pulsen mit unterschiedlichem Potential ungleich dem Erdpotential beaufschlagt werden.In another preferred embodiment of the method, the at least two electrodes of the electrode arrangement for generating the high-voltage breakdowns by the rod-like material and / or along the surface of the rod-like material are simultaneously exposed to pulses with different potentials not equal to the ground potential.

Je nach Art und Aufbau der verwendeten Hochspannungspulsquelle kann die eine oder die andere Variante bevorzugter sein.Depending on the type and structure of the high-voltage pulse source used, one or the other variant may be more preferable.

Ein zweiter Aspekt der Erfindung betrifft eine Anlage zur Durchführung des Verfahrens gemäss dem ersten Aspekt der Erfindung. Die Anlage umfasst einen Prozessraum, welcher mit einem Prozessfluid, bevorzugterweise mit Wasser, befüllbar ist und in welchem das stangenartige Material oder ein Abschnitt desselben derartig angeordnet werden kann, dass das stangenartige Material oder der Abschnitt des stangenartigen Materials bei mit Prozessfluid befülltem Prozessraum von Prozessfluid umgeben ist.A second aspect of the invention relates to a plant for carrying out the process according to the first aspect of the invention. The plant comprises a process space, which can be filled with a process fluid, preferably water, and in which the rod-like material or a portion thereof can be arranged such that the rod-like material or the portion of the rod-like material with Process fluid filled process space is surrounded by process fluid.

Des weiteren Umfasst die Anlage eine Elektrodenanordnung mit mindestens zwei Elektroden, welche bei mit Prozessfluid befülltem und bestimmungsgemäss das stangenartige Material oder den Abschnitt des stangenartigen Materials aufnehmendem Prozessraum für den bestimmungsgemässen Betrieb derartig im Bereich des stangenartigen Materials oder dieses Abschnitts des stangenartigen Materials angeordnet werden können, dass die Elektroden in das Prozessfluid eingetaucht sind und dabei einen Abstand zueinander und jeweils einen Abstand zu dem stangenartigen Material aufweisen, welche Abstände es ermöglichen, im bestimmungsgemässen Betrieb durch Beaufschlagung der Elektrodenanordnung mit Hochspannungspulsen im Bereich dieser Elektroden Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials zu erzeugen.Furthermore, the system comprises an electrode arrangement with at least two electrodes, which can be arranged in the region of the rod-like material or this portion of the rod-like material in process space filled with process fluid and intended to receive the rod-like material or the portion of the rod-like material for the intended operation. that the electrodes are immersed in the process fluid and at a distance from each other and each have a distance to the rod-like material, which distances allow it during normal operation by applying high voltage pulses to the electrode assembly in the region of these electrodes high voltage breakdowns through the rod-like material and / or along to produce the surface of the rod-like material.

Wie bereits erwähnt wurde hängen diese Abstände von der Leitfähigkeit des Prozessfluids, von der Leitfähigkeit des stangenartigen Materials und von der Höhe der Hochspannungspulse ab. Geeignete Abstände können für die jeweilige Betriebssituation vom Fachmann durch einfaches Ausprobieren ermittelt werden.As already mentioned, these distances depend on the conductivity of the process fluid, the conductivity of the rod-like material and the height of the high voltage pulses. Suitable distances can be determined for the respective operating situation by a person skilled in the art by simple trial and error.

Weiter umfasst die Anlage Mittel zum Beaufschlagen der Elektrodenanordnung mit Hochspannungspulsen zwecks Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials, sowie Mittel zur Erzeugung einer Relativbewegung in Längsrichtung des stangenartigen Materials zwischen der Elektrodenanordnung und dem stangenartigen Material während dem Erzeugen der Hochspannungsdurchschläge im bestimmungsgemässen Betrieb, derart, dass der Ort der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials in Längsrichtung dieses Materials fortschreitend verändert wird, wobei das stangenartige Material an diesem Ort jeweils von Prozessfluid umgeben ist und die Elektroden an diesem Ort jeweils in das Prozessfluid eingetaucht sind.The system further comprises means for applying high voltage pulses to the electrode assembly to generate the high voltage breakdowns through the rod-like material and / or along the surface of the rod-like material, and means for producing relative longitudinal movement of the rod-like material between the electrode assembly and the rod-like material during production the high voltage breakdowns in the normal operation, such that the location of the high voltage breakdowns by the rod-like material and / or along the surface of the rod-like material in the longitudinal direction of this material is progressively changed, wherein the rod-like Material is in each case surrounded by process fluid and the electrodes are immersed in this location in each case in the process fluid.

Mit der erfindungsgemässen Anlage lässt sich das Verfahren gemäss dem ersten Aspekt der Erfindung auf einfache Weise durchführen.With the system according to the invention, the method according to the first aspect of the invention can be carried out in a simple manner.

In einer bevorzugten Ausführungsform weist die Anlage eine Vorrichtung zur Aufnahme des stangenartigen Materials auf, bevorzugterweise ein nach oben offenes wannen- oder schalenartiges Behältnis zur Aufnahme des stangenartigen Materials. Mit diesem Behältnis kann das stangenartige Material im bestimmungsgemässen Betrieb im Prozessraum vollständig von Prozessflüssigkeit umgeben gehalten werden, und zwar bevorzugterweise in einer horizontalen Lage.In a preferred embodiment, the system comprises a device for receiving the rod-like material, preferably an upwardly open trough or dish-like container for receiving the rod-like material. With this container, the rod-like material can be kept completely surrounded by process liquid in the intended operation in the process chamber, preferably in a horizontal position.

Dabei ist die Anlage zudem bevorzugterweise derartig ausgebildet, dass dieses wannen- oder schalenartige Behältnis nach dem bestimmungsgemässen Fragmentierungsbetrieb zusammen mit den darin befindlichen, aus der Fragmentierung hervorgegangenen Fragmenten des stangenartigen Materials aus der Anlage entnommen werden kann.In this case, the system is also preferably designed such that this tub-like or shell-like container can be removed from the system after the intended fragmentation operation together with the fragmentation of the rod-like material contained therein.

Hierdurch kann eine relativ einfache Anlage ohne aufwändige Transporteinrichtungen für den industriellen Batch-Betrieb bereitgestellt werden.As a result, a relatively simple plant can be provided without complex transport facilities for industrial batch operation.

In einer anderen bevorzugten Ausführungsform weist die Anlage eine Vorrichtung zur Aufnahme des stangenartigen Materials auf, mit welcher das stangenartige derartig gehalten werden kann, dass es im Prozessraum mit einem Ende in das Prozessfluid eingetaucht ist, insbesondere derart, dass es dabei eine schräge Lage aufweist und sein unteres Ende in das Prozessfluid im Prozessraum eingetaucht ist. Hierdurch kann auf einfache Weise eine quasi-kontinuierliche Anlage realisiert werden, bei welcher fortlaufend, insbesondere unter Schwerkraftförderung, stangenartiges Material in die mit Prozessfluid geflutete Fragmentierungszone zugeführt und darin fragmentiert wird.In another preferred embodiment, the system comprises a device for receiving the rod-like material, with which the rod-like can be held such that it is immersed in the process space with one end in the process fluid, in particular such that it has an inclined position and its lower end is immersed in the process fluid in the process space. In this way, a quasi-continuous system can be realized in a simple manner in which rod-like material is continuously fed, in particular under gravity, into the fragmentation zone flooded with process fluid and fragmented therein.

Die Mittel zur Erzeugung einer Relativbewegung zwischen der Elektrodenanordnung und dem stangenartigen Material sind in einer bevorzugten Ausführungsform der Anlage zur Verschiebung des stangenartigen Materials entlang dessen Längsachse ausgebildet.The means for generating a relative movement between the electrode assembly and the rod-like material are formed in a preferred embodiment of the system for displacement of the rod-like material along its longitudinal axis.

Alternativ oder zusätzlich sind diese Mittel zur Verschiebung der Elektrodenanordnung entlang der Längsachse der Stange ausgebildet.Alternatively or additionally, these means are designed for displacement of the electrode arrangement along the longitudinal axis of the rod.

Je nach Anlagenkonzept kann die eine oder die andere Variante oder eine Kombination beider Varianten besonders bevorzugt sein.Depending on the system concept, one or the other variant or a combination of the two variants may be particularly preferred.

Dabei ist es in der letztgenannten Variante bevorzugt, dass die Mittel zum Beaufschlagen der Elektrodenanordnung mit Hochspannungspulsen einen Hochspannungspulsgenerator umfassen und die Mittel zur Erzeugung einer Relativbewegung zwischen der Elektrodenanordnung und dem stangenartigen Material ausgebildet sind zur Verschiebung der Elektrodenanordnung zusammen mit dem Hochspannungspulsgenerator entlang der Längsachse des stangenartigen Materials. Hierdurch kann auf eine aufwendige bewegliche Ankopplung der Elektrodenanordnung an den Hochspannungsgenerator verzichtet werden.In the latter variant, it is preferred that the means for applying high-voltage pulses to the electrode arrangement comprise a high-voltage pulse generator and the means for producing a relative movement between the electrode arrangement and the rod-like material are designed to displace the electrode arrangement together with the high-voltage pulse generator along the longitudinal axis of the rod-like material. This can be dispensed with a complex movable coupling of the electrode assembly to the high voltage generator.

Bevorzugterweise ist die Anlage derartig ausgebildet, dass die mindestens zwei Elektroden der Elektrodenanordnung bestimmungsgemäss oberhalb des stangenartigen Materials angeordnet werden können, mit Vorteil im Wesentlichen zentriert bezüglich der Längsachse des stangenartigen Materials. Mit derartigen Anlagen lässt sich ein besonders gleichmässiges Fragmentierungsergebnis erzielen.Preferably, the system is designed such that the at least two electrodes of the electrode assembly can be arranged as intended above the rod-like material, advantageously substantially centered with respect to the longitudinal axis of the rod-like material. With such systems, a particularly uniform fragmentation result can be achieved.

Die Elektroden der Elektrodenanordnung können mit Vorteil derartig angeordnet werden, dass der Abstand der Elektroden zu der Oberfläche des stangenartigen Materials jeweils im Bereich von 2 mm bis 40 mm liegt und der Abstand zwischen den Elektroden im Bereich zwischen 40 mm und 100 mm. Derartige Abstände haben sich als besonders geeignet erwiesen.The electrodes of the electrode arrangement can advantageously be arranged in such a way that the distance between the electrodes and the surface of the rod-like material is in the range from 2 mm to 40 mm and the distance between the electrodes is in the range between 40 mm and 100 mm. Such distances have proven to be particularly suitable.

Weiter ist es bevorzugt dass die Anlage Mittel aufweist zur insbesondere automatisierten Einstellung des jeweiligen Abstands der Elektroden zu dem stangenartigen Material, bevorzugterweise zur Einstellung des jeweiligen Abstands während dem bestimmungsgemässen Betrieb der Anlage.Further, it is preferred that the system has means for particular automated adjustment of the respective distance of the electrodes to the rod-like material, preferably for setting the respective distance during the intended operation of the system.

Die Mittel zum Beaufschlagen der Elektrodenanordnung mit Hochspannungspulsen sind mit Vorteil ausgebildet zur Beaufschlagung der Elektrodenanordnung mit Hochspannungspulsen im Bereich zwischen 100 KV und 300 KV, insbesondere im Bereich zwischen 150 KV und 200 KV, mit einer Leistung pro Puls im Bereich zwischen 300 Joule und 1000 Joule, insbesondere zwischen 500 Joule und 750 Joule und mit einer Pulsfrequenz im Bereich zwischen 0.5 Hz und 40 Hz, insbesondere zwischen 1 Hz und 5 Hz.The means for applying high-voltage pulses to the electrode arrangement are advantageously designed to subject the electrode arrangement with high-voltage pulses in the range between 100 KV and 300 KV, in particular in the range between 150 KV and 200 KV, with a power per pulse in the range between 300 Joules and 1000 Joules , in particular between 500 Joule and 750 Joule and with a pulse frequency in the range between 0.5 Hz and 40 Hz, in particular between 1 Hz and 5 Hz.

Derartige Parameterbereiche haben sich als besonders geeignet erwiesen.Such parameter ranges have proven to be particularly suitable.

Weiter ist es bevorzugt, dass die Mittel zur Erzeugung einer Relativbewegung in Längsrichtung des stangenartigen Materials zwischen der Elektrodenanordnung und dem stangenartigen Material bzw. die Mittel zur Beaufschlagung der Elektrodenanordnung mit Hochspannungspulsen derartig ausgebildet sind, dass im Fragmentierungsbetrieb die Elektrodenanordnung pro Millimeter Relativbewegung mit 0.5 bis 1.0 Pulsen, insbesondere mit 0.1 bis 2.0 Pulsen beaufschlagt werden kann. Derartige Pulsraten pro mm Relativbewegung haben sich als besonders geeignet erwiesen.Further, it is preferred that the means for generating a relative movement in the longitudinal direction of the rod-like material between the electrode assembly and the rod-like material or the means for acting on the electrode assembly with high-voltage pulses are designed such that in Fragmentierungsbetrieb the electrode assembly per millimeter relative movement with 0.5 to 1.0 Pulses, in particular with 0.1 to 2.0 pulses can be applied. Such pulse rates per mm relative movement have proven to be particularly suitable.

In einer weiteren bevorzugten Ausführungsform umfasst die Anlage Mittel zum Spülen des Bereichs zwischen den Elektroden der Elektrodenanordnung und dem stangenartigen Material mit Prozessflüssigkeit während dem Fragmentierungsbetrieb. Solche Mittel umfassen beispielsweise eine oder mehrere Zuführungsdüsen, über welche frische oder aufbereitete Prozessflüssigkeit in den Bereich zwischen den Elektroden und dem stangenartigen Material eingedüst werden kann. Hierdurch wird es möglich, Feinpartikel aus diesem Bereich zu entfernen und die elektrische Leitfähigkeit der Prozessflüssigkeit in diesem Bereich konstant zu halten, was eine stabile Prozessführung begünstigt.In a further preferred embodiment, the system comprises means for purging the region between the electrodes of the electrode assembly and the rod-like material with process liquid during the fragmentation operation. Such means comprise, for example, one or more feed nozzles, via which fresh or treated process liquid can be injected into the region between the electrodes and the rod-like material. This will make it possible To remove fine particles from this area and to keep the electrical conductivity of the process fluid constant in this area, which promotes stable process control.

In noch einer weiteren bevorzugten Ausführungsform der Anlage ist eine erste der mindestens zwei Elektroden der Elektrodenanordnung zur Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials mit den Hochspannungspulsen beaufschlagbar, während eine andere der mindestens zwei Elektroden auf einem festen Potential liegt, insbesondere auf Erdpotential.In yet another preferred embodiment of the system, a first of the at least two electrodes of the electrode assembly for generating the high voltage breakdowns by the rod-like material and / or along the surface of the rod-like material with the high voltage pulses acted upon, while another of the at least two electrodes at a fixed potential lies, in particular at ground potential.

In einer anderen bevorzugten Ausführungsform der Anlage sind die mindestens zwei Elektroden der Elektrodenanordnung zur Erzeugung der Hochspannungsdurchschläge durch das stangenartige Material und/oder entlang der Oberfläche des stangenartigen Materials gleichzeitig mit Pulsen mit unterschiedlichem Potential ungleich dem Erdpotential beaufschlagbar.In another preferred embodiment of the system, the at least two electrodes of the electrode arrangement for generating the high-voltage breakdowns by the rod-like material and / or along the surface of the rod-like material can be acted upon simultaneously with pulses with different potentials than the ground potential.

Je nach Elektrodenanordnung und verwendetem Hochspannungspulsgenerator kann die eine oder die andere Ausführungsform bevorzugter sein.Depending on the electrode arrangement and high-voltage pulse generator used, one or the other embodiment may be more preferable.

Weiter ist es bevorzugt, dass die erfindungsgemässe Anlage über eine Anlagensteuerung verfügt, mittels welcher, bevorzugterweise während dem Fragmentierungsbetrieb, die Energie der Hochspannungspulse, die Frequenz der Hochspannungspulse, die Relativgeschwindigkeit zwischen der Elektrodenanordnung und dem stangenartigen Material, der Abstand zwischen den Elektroden und dem stangenartigen Material und/oder bestimmte Anlagenparameter, bevorzugterweise automatisiert, eingestellt und/- oder geregelt werden können, mit Vorteil in Abhängigkeit von im bestimmungsgemässen Betrieb ermittelten Anlagen- und/oder Prozessparametern.Furthermore, it is preferred that the system according to the invention has a system control, by means of which, preferably during the fragmentation operation, the energy of the high-voltage pulses, the frequency of the high-voltage pulses, the relative speed between the electrode arrangement and the rod-like material, the distance between the electrodes and the rod-like Material and / or certain system parameters, preferably automated, adjusted and / or can be controlled, with advantage depending on determined in normal operation plant and / or process parameters.

Ein dritter Aspekt der Erfindung betrifft die Verwendung der Anlage gemäss dem zweiten Aspekt der Erfindung zur Fragmentierung von Stangen aus Halbleitermaterial, bevorzugterweise aus polykristallinem Silizium. Bei einer derartigen Verwendung der Anlage kommen die Vorteile der Erfindung besonders deutlich zum Tragen.A third aspect of the invention relates to the use of the plant according to the second aspect of the invention for fragmenting rods of semiconductor material, preferably of polycrystalline silicon. With such use of the system, the advantages of the invention are particularly evident.

KURZE BESCHREIBUNG DER ZEICHNUNGBRIEF DESCRIPTION OF THE DRAWING

Weitere Ausgestaltungen, Vorteile und Anwendungen der Erfindung ergeben sich aus den abhängigen Ansprüchen und aus der nun folgenden Beschreibung anhand von Fig. 1. Diese zeigt einen Schnitt durch einen Teil einer erfindungsgemässen Anlage.Further embodiments, advantages and applications of the invention will become apparent from the dependent claims and from the following description with reference to Fig. 1 , This shows a section through a part of an inventive system.

WEGE ZUR AUSFÜHRUNG DER ERFINDUNGWAYS FOR CARRYING OUT THE INVENTION

Fig. 1 zeigt einen Teil einer erfindungsgemässen Anlage zur Fragmentierung von polykristallinen Siliziumstangen 1 nach dem Verfahren gemäss dem ersten Aspekt der Erfindung im Schnitt quer zur Längsrichtung einer darin angeordneten, zu fragmentierenden Siliziumstange 1. Fig. 1 shows a part of an inventive plant for the fragmentation of polycrystalline silicon rods 1 according to the method according to the first aspect of the invention in a section transverse to the longitudinal direction of a therein arranged to be fragmented silicon rod. 1

Wie zu erkennen ist, weist die Anlage ein sich in Längsrichtung der Siliziumstange 1 erstreckendes Becken 9 auf, welches einen anspruchsgemässen Prozessraum 8 bildet, der mit einem Prozessfluid 2, im vorliegenden Fall Wasser 2, befüllt ist.As can be seen, the system has a basin 9 extending in the longitudinal direction of the silicon rod 1, which forms a process space 8 according to the claims, which is filled with a process fluid 2, in the present case water 2.

Angeordnet im Prozessraum 8 in einem wannenartigen Behältnis 7, dessen Innenwandungen von einer Polyurethanmatte 10 gebildet sind, die sich nach unten auf einer Unterlage 11 aus PE abstützt, ist die zu fragmentierende Siliziumstange 1. Sie weist dabei eine horizontale Lage auf und ist vollständig von Prozessfluid 2 umgeben. Das wannenartige Behältnis 7 ist derartig ausgebildet und im Prozessraum 8 gelagert, dass es nach dem vollständigen Fragmentieren der Siliziumstange 1 zusammen mit den daraus hervorgegangenen Fragmenten der Sliziumstange 1, welche dann als lose Materialschüttung darin angeordnet sind, aus dem Prozessraum 8 entnommen werden kann.Arranged in the process chamber 8 in a trough-like container 7, whose inner walls are formed by a polyurethane mat 10, which is supported on a base 11 made of PE, the silicon rod to be fragmented is 1. It has a horizontal position and is completely made of process fluid 2 surrounded. The trough-like container 7 is formed in such a way and stored in the process space 8 that it can be removed from the process space 8 after complete fragmentation of the silicon rod 1 together with the resulting fragments of the silicon rod 1, which are then arranged as a loose bed of material therein.

Weiter umfasst die Anlage eine Elektrodenanordnung 4 mit zwei Elektroden 5, 6, welche im Wesentlichen zentriert bezüglich der Längsachse der Siliziumstange 1 oberhalb derselben angeordnet sind. Die beiden Elektroden 5, 6 sind in das Prozessfluid 2 eingetaucht und die linke Elektrode 5 wird im Fragmentierungsbetrieb von einem ebenfalls zur Anlage gehörenden Hochspannungspulsgenerator (nicht gezeigt) mit Hochspannungspulsen beaufschlagt. während die rechte Elektrode 6 geerdet ist. Die beiden Elektroden 5, 6 weisen zueinander einen deutlich grösseren Abstand auf als jeweils gegenüber der Siliziumstange 1. Diese Abstände sind derartig gewählt, dass bei Beaufschlagung der linken Elektrode 5 durch den Hochspannungspulsgenerator mit Hochspannungspulsen im Bereich dieser Elektroden 5, 6 Hochspannungsdurchschläge durch die Siliziumstange 1 und/oder entlang der Oberfläche der Siliziumstange 1 erzeugt werden, welche zur Fragmentierung der Siliziumstange 1 führen. Im vorliegenden Fall beträgt der Durchmesser der Siliziumstange 1 etwa 120 mm, ihre Länge beträgt etwa 2 m. Die Abstände der Elektroden 5, 6 zur Oberfläche der Siliziumstange 1 betragen etwa 8 mm. Der Abstand der Elektroden 5, 6 zueinander beträgt etwa 60 mm. Die mit dem Hochspannungspulsgenerator erzeugbaren Hochspannungspulse weisen eine Spannung von etwa 200 KV auf und werden mit einer Pulsfrequenz von 5 Hz erzeugt. Die Leistung pro Puls beträgt etwa 700 Joule.Furthermore, the system comprises an electrode arrangement 4 with two electrodes 5, 6, which are arranged substantially centered with respect to the longitudinal axis of the silicon rod 1 above the same. The two electrodes 5, 6 are immersed in the process fluid 2 and the left-hand electrode 5 is subjected to high-voltage pulses in the fragmentation mode by a high-voltage pulse generator (not shown) which likewise belongs to the system. while the right electrode 6 is grounded. The two electrodes 5, 6 have a significantly greater distance from each other than in each case with respect to the silicon rod 1. These distances are selected such that upon application of the high voltage pulse generator with high voltage pulses in the region of these electrodes 5, 6 high voltage breakdowns through the silicon rod. 1 and / or generated along the surface of the silicon rod 1, which lead to the fragmentation of the silicon rod 1. In the present case, the diameter of the silicon rod 1 is about 120 mm, its length is about 2 m. The distances between the electrodes 5, 6 to the surface of the silicon rod 1 are about 8 mm. The distance between the electrodes 5, 6 to each other is about 60 mm. The high-voltage pulses that can be generated by the high-voltage pulse generator have a voltage of approximately 200 KV and are generated at a pulse frequency of 5 Hz. The power per pulse is about 700 joules.

Dabei ist die Elektrodenanordnung 4 beim Erzeugen der Hochspannungsdurchschläge zusammen mit dem Hochspannungspulsgenerator auf einem (nicht gezeigten) Schiebeschlitten in Längsrichtung der Siliziumstange 1 entlang derselben verfahrbar, so dass sich der Ort der Hochspannungsdurchschläge durch die Siliziumstange 1 bzw. entlang der Oberfläche der Siliziumstange 1 in Längsrichtung derselben fortschreitend verändert, ohne dass dabei die Abstände der Elektroden 5, 6 zur Siliziumstange 1 wesentlich verändert werden. Im bestimmungsgemässen Betrieb wird die Elektrodenanordnung 4 mit einer Geschwindigkeit im Bereich zwischen 6 mm und 10 mm pro Sekunde entlang der Siliziumstange 1 verfahren.In this case, when generating the high-voltage breakdowns together with the high-voltage pulse generator, the electrode arrangement 4 is movable along a sliding carriage (not shown) in the longitudinal direction of the silicon rod 1, so that the location of the high-voltage breakdowns through the silicon rod 1 or along the surface of the silicon rod 1 in the longitudinal direction the same progressively changed, without causing the distances of the electrodes 5, 6 are substantially changed to the silicon rod 1. In normal operation, the electrode assembly 4 is at a speed in the range between 6 mm and 10 mm per second along the silicon rod 1.

Die Anlage umfasst zudem eine Anlagensteuerung, mittels welcher während dem Fragmentierungsbetrieb der Abstand zwischen den Elektroden 5, 6 und der Siliziumstange 1 und die Verfahrgeschwindigkeit der Elektrodenanordnung 4 eingestellt werden kann.The system also includes a system control, by means of which the distance between the electrodes 5, 6 and the silicon rod 1 and the travel speed of the electrode assembly 4 can be adjusted during the fragmentation operation.

Während in der vorliegenden Anmeldung bevorzugte Ausführungen der Erfindung beschrieben sind, ist klar darauf hinzuweisen, dass die Erfindung nicht auf diese beschränkt ist und auch in anderer Weise innerhalb des Umfangs der nun folgenden Ansprüche ausgeführt werden kann.While preferred embodiments of the invention are described in the present application, it should be clearly understood that the invention is not limited to these and may be practiced otherwise within the scope of the following claims.

Claims (35)

  1. Method for fragmenting a rod-like material (1), in particular made of a semiconductor material, in particular made of polycrystalline silicon, comprising the steps:
    a) providing a section (3) of the rod-like material (1) surrounded by a process fluid (2), in particular by water (2);
    b) arranging an electrode arrangement (4) comprising at least two electrodes (5, 6) in the region of this section (3) such that the at least two electrodes (5, 6) are immersed in the process fluid (2) and are at a distance from one another and are each at a distance from the rod-like material (1); and
    c) generating high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1) in the region of both electrodes (5, 6) by applying high voltage pulses to the electrode arrangement (4),
    wherein, during the generation of the high-voltage breakdowns, a relative movement in the longitudinal direction of the rod-like material (1) is generated between the electrode arrangement (4) and the rod-like material (1) such that the location of the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1) progressively changes in longitudinal direction of the rod-like material (1).
  2. Method according to claim 1, wherein the rod-like material (1) is provided completely immersed in the process fluid (2), and in particular, wherein the rod-like material (1) thereby has a horizontal position.
  3. Method according to claim 2, wherein the rod-like material (1), in particular in horizontal position, is provided received in a container (7) which is open to the top and which is tub-like or shell-like, and wherein the fragments of the rod-like material (1) emerging from the fragmentation after the fragmentation of the rod-like material (1) are transported with this tub-like or shell-like container (7) from the location of the fragmentation to another location.
  4. Method according to claim 1, wherein the rod-like material is provided immersed with one end in the process fluid, and in particular, wherein the rod-like material thereby has an inclined position and the lower end of the rod-like material is immersed in the process fluid.
  5. Method according to one of the preceding claims, wherein the rod-like material is moved in its longitudinal direction for generating the relative movement between the electrode arrangement and the rod-like material.
  6. Method according to one of the preceding claims, wherein the electrode arrangement (4) is moved in longitudinal direction of the rod-like material (1) for generating the relative movement between the electrode arrangement (4) and the rod-like material (1).
  7. Method according to claim 6, wherein the electrode arrangement (4) together with a high voltage generator generating the high voltage pulses is moved in longitudinal direction of the rod-like material (1).
  8. Method according to one of the preceding claims, wherein the rod-like material (1) is provided in an inclined or horizontal position and the at least two electrodes (5, 6) of the electrode arrangement (4) are arranged above the rod-like material (1), in particular essentially centred with respect to the longitudinal axis of the rod-like material (1).
  9. Method according to one of the preceding claims, wherein the at least two electrodes (5, 6) of the electrode arrangement (4) are arranged such that the distance of the electrodes (5, 6) to the surface of the rod-like material (1) lies each in the range between 2 mm and 40 mm and the distance between the electrodes (5, 6) lies in the range between 40 mm and 100 mm.
  10. Method according to one of the preceding claims, wherein high voltage pulses are applied to the electrode arrangement (4) in the range between 100 KV and 300 KV, in particular in the range between 150 KV and 200 KV, for generating the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1).
  11. Method according to one of the preceding claims, wherein high voltage pulses are applied to the electrode arrangement (4) with a power per pulse between 300 Joule and 1000 Joule, in particular between 500 Joule and 750 Joule, for generating the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1).
  12. Method according to one of the preceding claims, wherein high voltage pulse frequencies in the range between 0.5 Hz and 40 Hz, in particular in the range between 1 Hz and 5 Hz, are applied to the electrode arrangement (4) for generating the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1).
  13. Method according to one of the preceding claims, wherein the relative movement between the electrode arrangement (4) and the rod-like material (1) and/or the application of high voltage pulses to the electrode arrangement (4) take place such that 0.5 to 1.0 pulses, in particular 0.1 to 2.0 pulses, per millimetre relative movement are applied to the electrode arrangement (4).
  14. Method according to one of the preceding claims, wherein the region between the electrodes (5, 6) of the electrode arrangement (4) and the rod-like material (1) is flushed with process liquid (2).
  15. Method according to one of the preceding claims, wherein the high voltage pulses are applied to the first (5) of the at least two electrodes (5, 6) of the electrode arrangement (4) for generating the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1) while a second (6) of these electrodes (5, 6) lies on a fixed potential, in particular is grounded.
  16. Method according to one of the claims 1 to 14, wherein pulses with different potentials unequal to ground potential are simultaneously applied to the at least two electrodes of the electrode arrangement for generating the high voltage breakdowns through the rod-like material and/or along the surface of the rod-like material.
  17. Equipment for performing the method according to one of the preceding claims, comprising:
    a) a process room (8) fillable with a process fluid (2), in particular with water (2), for receiving the rod-like material (1) or a section (3) of the rod-like material (1) such that the rod-like material (1) or the section (3) of the rod-like material (1) is surrounded by process fluid (2) when the process room (8) is filled with process fluid (2);
    b) an electrode arrangement (4) comprising at least two electrodes (5, 6) which, when the process room (8) is filled with process fluid (2) and as intended is receiving the rod-like material (1) or the section (3) of the rod-like material (1), can be arranged as intended such in the region of the rod-like material (1) or of this section (3) of the rod-like material (1) that the at least two electrodes (5, 6) are immersed in the process fluid (2) and thereby are at a distance from one another and each are at a distance from the rod-like material (1), which distances allow to generate, during the intended operation, high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1) in the region of these electrodes (5, 6) by applying the high voltage pulses to the electrode arrangement (4);
    c) means for applying high voltage pulses to the electrode arrangement (4) for generating the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1); and
    d) means for generating a relative movement in longitudinal direction of the rod-like material (1) between the electrode arrangement (4) and the rod-like material (4) during the generation of the high voltage breakdowns during the intended operation such that the location of the high voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1) is progressively changed in longitudinal direction of this material (1), wherein the rod-like material (1) at this location in each case is surrounded by process fluid (2) and the electrodes (5, 6) in each case are immersed in the process fluid (2) at this location.
  18. Equipment according to claim 17, wherein the equipment has an arrangement (7) for receiving the rod-like material (1), in particular a container (7) for receiving the rod-like material (1) which is open to the top and which is tub-like or shell-like, by means of which the rod-like material (1) is held completely surrounded by process liquid (2) in the process room (8) during the intended operation, in particular such that the rod-like material (1) thereby has a horizontal position.
  19. Equipment according to claim 18, wherein the tub-like or shell-like container (7) after the intended fragmentation operation can be taken from the equipment together with the fragments of the rod-like material (1) which have emerged from the fragmentation.
  20. Equipment according to claim 17, wherein the equipment has an arrangement for receiving the rod-like material, by means of which the rod-like can be held such that it is immersed with one end in the process fluid in the process room, in particular such that thereby it has a inclined position and its lower end is immersed in the process fluid in the process room.
  21. Equipment according to one of the claims 17 to 20, wherein the means for generating a relative movement between the electrode arrangement and the rod-like material are designed for moving the rod-like material along its longitudinal axis.
  22. Equipment according to one of the claims 17 to 21, wherein the means for generating a relative movement between the electrode arrangement (4) and the rod-like material (1) are designed for moving the electrode arrangement (4) along the longitudinal axis of the rod-like material (1).
  23. Equipment according to claim 22, wherein the means for applying high voltage pulses to the electrode arrangement (4) comprise a high voltage pulse generator and the means for generating a relative movement between the electrode arrangement (4) and the rod-like material (1) are designed for moving the electrode arrangement (4) together with the high voltage pulse generator along the longitudinal axis of the rod-like material (1) .
  24. Equipment according to one of the claims 17 to 23, wherein the at least two electrodes (5, 6) of the electrode arrangement (4) can be arranged as intended above the rod-like material (1), in particular essentially centred with respect to the longitudinal axis of the rod-like material (1).
  25. Equipment according to one of the claims 17 to 24, wherein the at least two electrodes (5, 6) of the electrode arrangement (4) can be arranged as intended such that the distance of the electrodes (5, 6) to the surface of the rod-like material (1) in each case lies in the range of 2 mm to 40 mm and the distance between the electrodes (5, 6) lies in the range between 40 mm and 100 mm.
  26. Equipment according to one of the claims 17 to 25, wherein the equipment comprises means for particularly automatically adjusting the distance of the electrodes (5, 6) to the rod-like material (1), in particular for adjusting during the intended operation of the equipment.
  27. Equipment according to one of the claims 17 to 26, wherein the means for applying the high voltage pulses to the electrode arrangement (4) are designed for applying high voltage pulses to the electrode arrangement (4) in the range between 100 KV and 300 KV, in particular between 150 KV and 200 KV.
  28. Equipment according to one of the claims 17 to 27, wherein the means for applying high voltage pulses to the electrode arrangement (4) are designed for applying high voltage pulses to the electrode arrangement (4) with a power per pulse in the range between 300 Joule and 1000 Joule, in particular between 500 Joule and 750 Joule.
  29. Equipment according to one of the claims 17 to 28, wherein the means for applying high voltage pulses to the electrode arrangement (4) are designed to apply high voltage pulses to the electrode arrangement (4) with a pulse frequency in the range between 0.5 Hz and 40 Hz, in particular between 1 Hz and 5 Hz.
  30. Equipment according to one of the claims 15 to 27, wherein the means for generating a relative movement in the longitudinal direction of the rod-like material (1) between the electrode arrangement (4) and the rod-like material (1) and/or the means for applying high voltage pulses to the electrode arrangement (4) are designed such that 0.5 to 1.0 pulses, in particular 0.1 to 2.0 pulses, can be applied to the electrode arrangement (4) per millimetre relative movement during the intended operation.
  31. Equipment according to one of the claims 17 to 30, wherein means are provided for flushing the region between the electrodes (5, 6) of the electrode arrangement (4) and the rod-like material (1) with process liquid (2) during the intended operation.
  32. Equipment according to one of the claims 17 to 31, wherein the high voltage pulses can be applied to a first (5) of the at least two electrodes (5, 6) of the electrode arrangement (4) while another (6) of the at least two electrodes (5, 6) lies on a fixed potential, in particular is grounded.
  33. Equipment according to one of the claims 17 to 31, wherein pulses with different potential unequal to the ground potential are simultaneously applied to the at least two electrodes of the electrode arrangement for generating the high voltage breakdowns through the rod-like material and/or along the surface of the rod-like material.
  34. Equipment according to one of the claims 17 to 33, further comprising an equipment controller, by means of which, in particular during the intended operation, the energy of the high voltage pulses, the frequency of the high voltage pulses, the relative speed between the electrode arrangement (4) and the rod-like material (1), the distance between the electrodes (5, 6) and the rod-like material (1) and/or certain parameters of the equipment can be adjusted and/or controlled, in particular in an automated way, in particular in dependence on equipment and/or process parameters determined during the intended operation.
  35. Use of the equipment according to one of the claims 17 and 34 for fragmenting rods (1) made of semiconductor material, in particular made of polycrystalline silicon.
EP14717391.8A 2014-03-26 2014-03-26 Method for fragmenting a rod-like material, in particular made of polycrystalline silicon Active EP3122463B1 (en)

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EP3354622A1 (en) * 2017-01-26 2018-08-01 Omya International AG Process for the preparation of fragmented natural calcium carbonate with a reduced content of impurities and products obtained thereof
CN107350056B (en) * 2017-08-24 2018-04-24 华中科技大学 A kind of high electric field pulse spallation reaction groove for continuous productive process
JP6947126B2 (en) * 2018-06-12 2021-10-13 株式会社Sumco Silicon rod crushing method and equipment, and silicon ingot manufacturing method
TWI802721B (en) * 2018-07-04 2023-05-21 日商三菱綜合材料股份有限公司 Method for crushing semiconductor raw material or method for producing cracks and method for manufacturing semiconductor raw material block
CN110215984B (en) * 2019-07-05 2021-04-13 东北大学 High-voltage electric pulse pretreatment method for strengthening galena crushing and sorting
JP2021107042A (en) * 2019-12-27 2021-07-29 三菱マテリアル株式会社 Method for fracturing semiconductor material or method for generating crack and method for manufacturing semiconductor material block

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