EP3053704A4 - Dispositif de polissage, procédé de traitement d'élément de polissage, procédé de modification d'élément de polissage, outil de coupe de traitement de forme, et outil de modification de surface - Google Patents

Dispositif de polissage, procédé de traitement d'élément de polissage, procédé de modification d'élément de polissage, outil de coupe de traitement de forme, et outil de modification de surface Download PDF

Info

Publication number
EP3053704A4
EP3053704A4 EP14851154.6A EP14851154A EP3053704A4 EP 3053704 A4 EP3053704 A4 EP 3053704A4 EP 14851154 A EP14851154 A EP 14851154A EP 3053704 A4 EP3053704 A4 EP 3053704A4
Authority
EP
European Patent Office
Prior art keywords
polishing
polishing member
tool
modification
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14851154.6A
Other languages
German (de)
English (en)
Other versions
EP3053704A1 (fr
Inventor
Hitoshi Morinaga
Hiroshi Asano
Shingo OTSUKI
Kazusei Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Inc filed Critical Fujimi Inc
Publication of EP3053704A1 publication Critical patent/EP3053704A1/fr
Publication of EP3053704A4 publication Critical patent/EP3053704A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B24B53/07—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels by means of forming tools having a shape complementary to that to be produced, e.g. blocks, profile rolls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
EP14851154.6A 2013-10-04 2014-10-02 Dispositif de polissage, procédé de traitement d'élément de polissage, procédé de modification d'élément de polissage, outil de coupe de traitement de forme, et outil de modification de surface Withdrawn EP3053704A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013209601 2013-10-04
PCT/JP2014/076359 WO2015050185A1 (fr) 2013-10-04 2014-10-02 Dispositif de polissage, procédé de traitement d'élément de polissage, procédé de modification d'élément de polissage, outil de coupe de traitement de forme, et outil de modification de surface

Publications (2)

Publication Number Publication Date
EP3053704A1 EP3053704A1 (fr) 2016-08-10
EP3053704A4 true EP3053704A4 (fr) 2017-07-19

Family

ID=52778772

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14851154.6A Withdrawn EP3053704A4 (fr) 2013-10-04 2014-10-02 Dispositif de polissage, procédé de traitement d'élément de polissage, procédé de modification d'élément de polissage, outil de coupe de traitement de forme, et outil de modification de surface

Country Status (7)

Country Link
US (1) US20160236322A1 (fr)
EP (1) EP3053704A4 (fr)
JP (2) JPWO2015050185A1 (fr)
KR (1) KR20160067107A (fr)
CN (1) CN105636743B (fr)
TW (1) TWI689378B (fr)
WO (1) WO2015050185A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6884015B2 (ja) * 2017-03-22 2021-06-09 株式会社荏原製作所 基板の研磨装置および研磨方法
US11685013B2 (en) 2018-01-24 2023-06-27 Taiwan Semiconductor Manufacturing Company, Ltd. Polishing pad for chemical mechanical planarization

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1082418A (en) * 1966-07-22 1967-09-06 Toolmasters Ltd Improvements relating to grinding wheels

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JPS47636Y1 (fr) * 1966-07-12 1972-01-11
US3526058A (en) * 1967-06-28 1970-09-01 Litton Industries Inc Diamond roller dresser
US4010583A (en) * 1974-05-28 1977-03-08 Engelhard Minerals & Chemicals Corporation Fixed-super-abrasive tool and method of manufacture thereof
FR2327847A1 (fr) * 1975-10-15 1977-05-13 Monsanto Co Galet pour profiler par ecrasement une meule de rectification
US4182082A (en) * 1978-01-19 1980-01-08 Ernst Winter & Sohn (Gmbh & Co.) Method for the profiling of grinding wheels and apparatus therefor
US4555873A (en) * 1981-03-30 1985-12-03 Energy-Adaptive Grinding, Inc. Method and apparatus for wheel conditioning in a grinding machine
JPS6090674A (ja) * 1983-10-22 1985-05-21 Yasumasa Nakamura 研麿用スポンジホイ−ル
JPS60143646U (ja) * 1984-03-02 1985-09-24 豊田工機株式会社 研削装置
JPH01289671A (ja) * 1988-05-11 1989-11-21 Boarheath Theodore サンディングホイール
JP2559650B2 (ja) * 1991-11-27 1996-12-04 信越半導体株式会社 ウエーハ面取部研磨装置
JP2921250B2 (ja) * 1992-02-28 1999-07-19 信越半導体株式会社 ウエーハ面取部の鏡面研磨方法及び装置
JPH06170720A (ja) * 1992-12-02 1994-06-21 Speedfam Co Ltd 定盤のドレッシング装置
US5624306A (en) * 1993-11-23 1997-04-29 Visser Irrevocable Trust 1992-1 Stacked sanding wheel for radical profiles
JPH08206953A (ja) * 1994-11-28 1996-08-13 Canon Inc 研削・研磨方法及び研削・研磨用工具及びその製造方法
US5938507A (en) * 1995-10-27 1999-08-17 Applied Materials, Inc. Linear conditioner apparatus for a chemical mechanical polishing system
EP0875339A4 (fr) * 1995-12-06 2001-01-10 Idemitsu Kosan Co Procede de lissage des surfaces de materiau en feuille, et procede de fabrication dudit materiau selon ledit procede
JP3676030B2 (ja) * 1997-04-10 2005-07-27 株式会社東芝 研磨パッドのドレッシング方法及び半導体装置の製造方法
JP3187353B2 (ja) 1997-10-01 2001-07-11 株式会社エスプリジャパン 自動車等の乗り物の空調装置の清掃方法および清掃装置
JPH11188590A (ja) 1997-12-22 1999-07-13 Speedfam Co Ltd エッジポリッシング装置
CN1138612C (zh) * 1998-06-25 2004-02-18 尤诺瓦英国有限公司 抛光晶片边缘的方法和设备
US6783428B1 (en) * 1999-01-18 2004-08-31 Nsk Ltd. Method for forming grooves on workpiece and for dressing a grindstone used in the groove formation
JP2001121391A (ja) * 1999-10-28 2001-05-08 Canon Inc 研磨皿の合わせ方法
US6630059B1 (en) * 2000-01-14 2003-10-07 Nutool, Inc. Workpeice proximity plating apparatus
JP2003048164A (ja) * 2001-08-07 2003-02-18 Disco Abrasive Syst Ltd 研磨ホイール
JP3534115B1 (ja) * 2003-04-02 2004-06-07 住友電気工業株式会社 エッジ研磨した窒化物半導体基板とエッジ研磨したＧａＮ自立基板及び窒化物半導体基板のエッジ加工方法
JP2005340732A (ja) * 2004-05-31 2005-12-08 Disco Abrasive Syst Ltd ウェーハ清浄化装置
JP2007088143A (ja) * 2005-09-21 2007-04-05 Elpida Memory Inc エッジ研磨装置
JP4742845B2 (ja) * 2005-12-15 2011-08-10 信越半導体株式会社 半導体ウエーハの面取り部の加工方法及び砥石の溝形状の修正方法
JP2010173016A (ja) * 2009-01-29 2010-08-12 Mitsubishi Materials Corp 半導体研磨布用コンディショナー、半導体研磨布用コンディショナーの製造方法及び半導体研磨装置
JP2010182813A (ja) * 2009-02-04 2010-08-19 Noritake Super Abrasive Co Ltd Ｃｍｐパッドコンディショナー
CN201380419Y (zh) * 2009-03-02 2010-01-13 湖北新火炬科技股份有限公司 金刚滚轮磨削砂轮用于磨削轮毂总成内滚道的装置
JP5405887B2 (ja) * 2009-04-27 2014-02-05 ルネサスエレクトロニクス株式会社 研磨装置及び研磨方法
CN201728564U (zh) * 2010-07-28 2011-02-02 许昌义 角磨机可帖轮与不干胶砂纸

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1082418A (en) * 1966-07-22 1967-09-06 Toolmasters Ltd Improvements relating to grinding wheels

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2015050185A1 *

Also Published As

Publication number Publication date
JP6474861B2 (ja) 2019-02-27
KR20160067107A (ko) 2016-06-13
JPWO2015050185A1 (ja) 2017-03-09
CN105636743B (zh) 2021-01-08
JP2017185623A (ja) 2017-10-12
TW201536479A (zh) 2015-10-01
WO2015050185A1 (fr) 2015-04-09
US20160236322A1 (en) 2016-08-18
CN105636743A (zh) 2016-06-01
TWI689378B (zh) 2020-04-01
EP3053704A1 (fr) 2016-08-10

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