EP3039392A1 - Capteur thermique et procédé de fabrication d'un capteur thermique - Google Patents
Capteur thermique et procédé de fabrication d'un capteur thermiqueInfo
- Publication number
- EP3039392A1 EP3039392A1 EP14755094.1A EP14755094A EP3039392A1 EP 3039392 A1 EP3039392 A1 EP 3039392A1 EP 14755094 A EP14755094 A EP 14755094A EP 3039392 A1 EP3039392 A1 EP 3039392A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- thermal sensor
- connection point
- effect transistor
- thermoelectric generator
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title abstract description 9
- 230000005669 field effect Effects 0.000 claims abstract description 34
- 230000001419 dependent effect Effects 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- 239000011159 matrix material Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000003491 array Methods 0.000 abstract description 8
- 230000005855 radiation Effects 0.000 abstract description 8
- 238000003384 imaging method Methods 0.000 abstract description 5
- 238000013461 design Methods 0.000 abstract description 4
- 230000004888 barrier function Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 238000011156 evaluation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000004297 night vision Effects 0.000 description 3
- 238000001931 thermography Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 150000003376 silicon Chemical class 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000010259 detection of temperature stimulus Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
- G01J5/14—Electrical features thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J2005/106—Arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
- G01J2005/123—Thermoelectric array
Definitions
- Thermocouple as well as a field effect transistor and a diode to form.
- the gate potential of the field effect transistor is provided by the thermoelectric generator, whereby the field effect transistor amplifies the temperature-dependent output signal of the thermoelectric generator.
- the field effect transistor in turn is connected in series with a p-n diode, which allows electrical current to flow in one direction while blocking current flow in the opposite direction.
- FIG. 2 shows a schematic illustration of a top view of a thermal sensor according to a further embodiment of the present invention
- FIG. 4 shows a schematic representation of a method for producing a
- Substrate 2 is arranged. It is also possible that FET 20 and diode 30 are arranged on different substrates, or at least one of the components is also designed as a discrete component.
- the substrate 2 may be
- the provision of FET 20 and / or diode 30 is on a silicon substrate.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Radiation Pyrometers (AREA)
Abstract
La présente invention concerne un capteur thermique ainsi qu'un procédé de fabrication d'un tel capteur thermique possédant un faible rapport signal/bruit tout en donnant un signal d'intensité relativement élevée. Pour cela, elle combine un générateur thermoélectrique avec un transistor à effet de champ et une diode. Grâce à sa diode intégrée et à l'effet de blocage qui va de pair, le capteur thermique permet de réaliser de manière économique et efficiente des réseaux de capteurs d'imagerie servant à convertir le rayonnement thermique en signaux électriques.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013216909.4A DE102013216909A1 (de) | 2013-08-26 | 2013-08-26 | Thermosensor und Verfahren zur Herstellung eines Thermosensors |
| PCT/EP2014/067986 WO2015028419A1 (fr) | 2013-08-26 | 2014-08-25 | Capteur thermique et procédé de fabrication d'un capteur thermique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP3039392A1 true EP3039392A1 (fr) | 2016-07-06 |
Family
ID=51392271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP14755094.1A Withdrawn EP3039392A1 (fr) | 2013-08-26 | 2014-08-25 | Capteur thermique et procédé de fabrication d'un capteur thermique |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9891113B2 (fr) |
| EP (1) | EP3039392A1 (fr) |
| CN (1) | CN105473989A (fr) |
| DE (1) | DE102013216909A1 (fr) |
| WO (1) | WO2015028419A1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6389774B2 (ja) | 2015-02-10 | 2018-09-12 | 東芝テック株式会社 | 商品販売データ処理装置 |
| FR3048128B1 (fr) * | 2016-02-18 | 2018-05-18 | Centre National De La Recherche Scientifique | Dispositif thermoelectrique |
| JP2018169170A (ja) * | 2017-03-29 | 2018-11-01 | ソニーセミコンダクタソリューションズ株式会社 | 遠赤外線撮像装置 |
| CN112212987A (zh) * | 2020-10-10 | 2021-01-12 | 江苏创芯海微科技有限公司 | 红外敏感单元及其阵列测温电路 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4558342A (en) | 1983-05-31 | 1985-12-10 | Rockwell International Corporation | Thermoelectric infrared detector array |
| JP2521783B2 (ja) * | 1987-09-28 | 1996-08-07 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JP3261617B2 (ja) * | 1992-06-19 | 2002-03-04 | ハネウエル・インコーポレーテッド | 赤外線カメラ |
| US5261747A (en) * | 1992-06-22 | 1993-11-16 | Trustees Of Dartmouth College | Switchable thermoelectric element and array |
| US5554849A (en) | 1995-01-17 | 1996-09-10 | Flir Systems, Inc. | Micro-bolometric infrared staring array |
| WO2010035738A1 (fr) * | 2008-09-25 | 2010-04-01 | パナソニック電工株式会社 | Capteur infrarouge |
| US8734008B2 (en) * | 2008-11-05 | 2014-05-27 | Next Biometrics As | Voltage reading technique for large sensor arrays through reduced noise differential path |
| FR3008496B1 (fr) * | 2013-07-12 | 2016-12-23 | Valeo Etudes Electroniques | Dispositif et procede de detection de la position du visage d'un individu, notamment d'un conducteur de vehicule automobile, afficheur comprenant un tel dispositif |
-
2013
- 2013-08-26 DE DE102013216909.4A patent/DE102013216909A1/de not_active Withdrawn
-
2014
- 2014-08-25 US US14/914,285 patent/US9891113B2/en not_active Expired - Fee Related
- 2014-08-25 EP EP14755094.1A patent/EP3039392A1/fr not_active Withdrawn
- 2014-08-25 WO PCT/EP2014/067986 patent/WO2015028419A1/fr active Application Filing
- 2014-08-25 CN CN201480047033.XA patent/CN105473989A/zh active Pending
Non-Patent Citations (1)
| Title |
|---|
| MULLER M ET AL: "A thermoelectric infrared radiation sensor with monolithically integrated amplifier stage and temperature sensor", SENSORS AND ACTUATORS A: PHYSICAL, ELSEVIER BV, NL, vol. 54, no. 1-3, 1 June 1996 (1996-06-01), pages 601 - 605, XP004077932, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(97)80022-2 * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102013216909A1 (de) | 2015-02-26 |
| CN105473989A (zh) | 2016-04-06 |
| US20160231178A1 (en) | 2016-08-11 |
| US9891113B2 (en) | 2018-02-13 |
| WO2015028419A1 (fr) | 2015-03-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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| 17P | Request for examination filed |
Effective date: 20160329 |
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| AK | Designated contracting states |
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| AX | Request for extension of the european patent |
Extension state: BA ME |
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| DAX | Request for extension of the european patent (deleted) | ||
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
| 17Q | First examination report despatched |
Effective date: 20190628 |
|
| 18W | Application withdrawn |
Effective date: 20190716 |