EP3008343A1 - Vacuum pump, and method for operating a vacuum pump - Google Patents
Vacuum pump, and method for operating a vacuum pumpInfo
- Publication number
- EP3008343A1 EP3008343A1 EP14726958.3A EP14726958A EP3008343A1 EP 3008343 A1 EP3008343 A1 EP 3008343A1 EP 14726958 A EP14726958 A EP 14726958A EP 3008343 A1 EP3008343 A1 EP 3008343A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- channel
- switching element
- check valve
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
Definitions
- the invention relates to a vacuum pump and a method for operating a vacuum pump.
- Vacuum pumps such as, for example, rotary vane pumps, have a suction chamber in a pump housing.
- a conveying element In the pumping chamber for conveying a gaseous medium, a conveying element is arranged.
- the conveying element In a rotary vane pump, the conveying element has an eccentrically arranged in the cylindrical suction chamber rotor element in which a plurality of slides are arranged. The slides are slidably held in slots of the rotor element and abut against the inside of the pump chamber.
- the eccentrically arranged rotor element By rotating the eccentrically arranged rotor element, the medium is conveyed by means of the chambers, which change in size through the rotation and are arranged between adjacent slides, from an inlet of the pump chamber to an outlet.
- a check valve is arranged in the region of the inlet. In a mechanical embodiment of the check valve, this is adjusted via a spring. In order to ensure a safe closing of the suction nozzle, the valve must be close to its Be set sealing surface. At low pressures, in particular less than 1 mbar at the pump inlet, there is the disadvantage that the delivery rate of the pump decreases at low pressures.
- the object of the invention is to provide a vacuum pump and a method for operating a vacuum pump, wherein even at low pressures of in particular less than 1 mbar at the inlet, even without provision of an electromagnetic valve, the highest possible pumping power can be achieved.
- the object is achieved by a vacuum pump according to claim 1 and a method for operating a vacuum pump according to claim 8.
- the vacuum pump according to the invention which may in particular be a rotary vane pump, has a suction chamber in a housing.
- a rotary vane pump is an eccentrically arranged in a cylindrical suction chamber, cylindrical conveyor element with slidable slides. The slides are located on the inner wall of the pump chamber.
- the suction space is connected to an inlet and an outlet. Due to the rotational movement of the conveyor element, in particular, a gaseous medium is conveyed through the inlet in the direction of the outlet in order to evacuate a space connected to the inlet.
- a check valve is arranged, which closes the inlet when the vacuum pump is switched off.
- the check valve may be integrated in an inlet channel forming the inlet.
- the check valve By the check valve backflow of the pumped medium is avoided in the evacuated space.
- a fluid device is provided according to the invention.
- the fluid device acts on turning off the vacuum pump to close the check valve on this. This has the advantage that the check valve is wide and in particular fully opened even at low pressures in the inlet region. As a result, a large pump power can continue to be realized even at low pressures.
- By providing the check valve actuating fluid device it is possible to increase the gap between the check valve and the suction port compared to a mechanical spring-set check valve.
- a spring can be completely eliminated.
- this has a fluidically actuated switching element such as a control piston.
- a fluid acts to close the check valve on the check valve.
- the switching element is connected via a connecting channel with the check valve, wherein the connecting channel is connected either directly to the check valve or via the inlet channel, through which the medium to be conveyed is sucked into the suction chamber.
- the switching element of the fluid device is connected to a supply channel in which a pressurized fluid is provided. With the aid of the pressurized fluid, a pressure is exerted on the switching piston during operation of the vacuum pump, so that it is held in a closed position. In the closed position, the connecting channel between the switching element and the check valve is closed. This is particularly advantageous if the connecting channel is not connected directly to the check valve, but indirectly via the inlet channel with the check valve, since otherwise fluid would be sucked from the connecting channel into the pump chamber of the vacuum pump.
- the supply channel is connected to the connecting channel by actuating the switching element, ie. in particular by moving the control piston. Then, fluid flows from the supply channel through the connecting channel and possibly through the inlet channel in the direction of the check valve and closes it, so that after switching off the vacuum pump no medium can flow back into the evacuated space.
- the switching element is connected to a closing channel. By varying the pressure of a fluid in the closing channel, actuation of the switching element can take place. In this case, it is particularly preferable for pressure to be applied to the switching element via the closing channel during the operation of the vacuum pump during the operation of the vacuum pump.
- opening of the switching element that is. in particular, a displacement of the control piston.
- the construction of pressure in the closing channel this is connected to the outlet of the vacuum pump. Since there is a significantly higher pressure at the outlet of the vacuum pump than at the inlet of the vacuum pump, it is possible to conduct this pressure for closing the switching element via the closing channel to the switching element, so that the pressure acts in particular on the switching piston.
- the pressure at the pump outlet drops.
- the pressure in the closing channel connected to the outlet or the outlet region also decreases. This results in an opening of the fluid device.
- the opening process can be assisted by a spring, for example.
- a support can take place due to a pressure acting on the switching element via the feed channel.
- the switching element is configured such that the pressure prevailing in the closing channel and the pressure prevailing in the supply channel in the opposite direction acts on the switching element in particular on opposing piston surfaces of the switching piston.
- the feed channel is connected to a pressure generating device of the vacuum pump. This is in particular the compression zone in the vacuum generator just before its outlet.
- the piston geometry of the switching element is designed such that the switching element has a cavity which is connected to the feed channel 42. As a result, a corresponding effective area is formed within the switching element.
- the above-described inventive principle of the action on a check valve by means of a fluid device is not limited to rotary vane pumps, but can also be used in vacuum pumps of other types. Regardless of the design of the vacuum pump, it is particularly preferred that the conveyed medium is used as the fluid which is supplied to the switching channel and serves to switch the switching element, in particular the switching piston.
- An oil-lubricated vacuum pump such as a rotary vane pump, is a mixture of gas and oil since the oil which seals the rotary vane relative to the inner wall of the suction chamber is carried in small quantities.
- the invention relates to a method for operating the above-described vacuum pump. This is advantageously developed as described above.
- the switching of the check valve is carried out according to the method according to the invention when switching off the vacuum pump fluidic actuation of the switching element, i. in particular the switching piston of the fluid device, whereby the check valve is thereby closed.
- fluid is conveyed in the direction of the check valve or flows in the direction of the check valve.
- the fluid preferably flows through the supply channel via the switching element into the connecting channel.
- fluid is supplied to the closing channel for closing the switching element during the pressure build-up operation, wherein this fluid is, in particular, fluid conveyed by the vacuum pump.
- this fluid is, in particular, the fluid delivered by the vacuum pump from the space to be evacuated, in particular gas.
- the method is advantageously developed as described above with reference to the device.
- FIG. 1 is a schematic sectional view of a rotary vane pump
- Fig. 2 is a schematic sectional view of the fluidic switching device in
- Fig. 3 is a schematic sectional view of the fluidic switching device in
- FIG. 1 shows a rotary vane pump as an example of a vacuum pump.
- This has a housing 10 in which a pump chamber 12 is formed.
- a rotary member 14 (pump rotor) is formed, that together with Sliders 16 forms a conveyor element.
- the sliders 16 are slidable in slots 18 disposed in the rotor member 14. For example. an oil supply into the slots 18 takes place via an internal oil supply, so that the oil seals the slides 16 with respect to the inner wall 20 of the pump chamber 12. Since the rotation element 14 is arranged eccentrically, rotation of the rotation element 14 results in delivery of, in particular, gaseous medium, which is sucked in through an inlet 22 and expelled through an outlet 24.
- the inlet 22 is connected to an inlet port 26.
- the suction of the medium to be conveyed takes place, so that a space connected to the inlet pipe 26 to be evacuated space is evacuated.
- a check valve 28 and possibly a filter element or sieve 30 is arranged within the inlet 22, 26.
- a fluid means 36 is provided for a quick and safe closing, ie. Moving the check valve 28 in Fig. 1 upward to ensure when turning off the vacuum pump.
- This has a connecting channel 38, which is arranged in the illustrated embodiment between a switching element 40 and the connecting channel 38.
- the fluid device 36 has a supply channel 42 connected to the oil box or oil reservoir, which also communicates with the switching element 40 connected is.
- a cavity 43 is provided within the switching element 40, into which the feed channel 42 opens.
- a closing channel 44 is connected to the switching element 40. The closing channel 44 is further connected to the outlet 24 of the vacuum generator or in the region of the outlet 24 with the suction chamber 12.
- the medium sucked into the chambers 32 through the inlet channel 22 is compressed, so that there is a higher pressure at the outlet 24 than at the inlet 22. Due to the connection with the closing channel 44, this pressure also prevails on the switching element 40 designed in particular as a switching piston. By this pressure, the switching element 40 is closed, so that no fluid enters the connecting channel 38 (FIG. 2). At the same time, a pressure is applied to the switching element 40 via the feed channel 42, which, however, exerts a smaller force on the switching piston 40 as a function of the effective piston surfaces than the pressure prevailing in the closing channel 44. This ensures that the fluid device 36 remains closed during operation.
- the piston 40 preferably has a cavity into which fluid flows through the feed channel 42 when the valve is closed (FIG. 2), so that this a force on the piston in FIG. 2 exerts to the left, wherein the counterforce is generated by the pressure prevailing in the switching channel 44.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL14726958T PL3008343T3 (en) | 2013-06-11 | 2014-05-26 | Vacuum pump, and method for operating a vacuum pump |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013210854.0A DE102013210854A1 (en) | 2013-06-11 | 2013-06-11 | Vacuum pump and method for operating a vacuum pump |
PCT/EP2014/060838 WO2014198524A1 (en) | 2013-06-11 | 2014-05-26 | Vacuum pump, and method for operating a vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3008343A1 true EP3008343A1 (en) | 2016-04-20 |
EP3008343B1 EP3008343B1 (en) | 2019-07-10 |
Family
ID=50841779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14726958.3A Active EP3008343B1 (en) | 2013-06-11 | 2014-05-26 | Vacuum pump, and method for operating a vacuum pump |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP3008343B1 (en) |
CN (1) | CN105378284B (en) |
DE (1) | DE102013210854A1 (en) |
ES (1) | ES2749125T3 (en) |
PL (1) | PL3008343T3 (en) |
TW (1) | TWI622703B (en) |
WO (1) | WO2014198524A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3657019B1 (en) * | 2019-11-07 | 2022-01-05 | Pfeiffer Vacuum Gmbh | Vacuum pump and method for controlling the deactivation of same |
CN113531986A (en) * | 2020-04-17 | 2021-10-22 | 海信(山东)冰箱有限公司 | Refrigerator with a door |
CN113531990B (en) * | 2020-04-17 | 2023-04-18 | 海信冰箱有限公司 | Refrigerator with a door |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1195361A (en) * | 1966-03-28 | 1970-06-17 | N G N Ltd | Improvements in and relating to Vacuum Pumping apparatus including a Rotary Vacuum Pump |
DE2612024A1 (en) * | 1976-03-20 | 1977-09-22 | Barmag Barmer Maschf | Vacuum pump for servo assisted brake systems in diesel driven vehicle - has pilot valve and non return valve with connecting socket on vacuum side |
FR2383335A1 (en) * | 1977-03-08 | 1978-10-06 | Leybold Heraeus Sogev | MECHANICAL PUMP WITH OIL SEAL |
AU5180279A (en) * | 1978-10-27 | 1980-05-01 | Dynavac Pty. Ltd. | Vacuum pump inlet valve |
DE3150033A1 (en) * | 1981-12-17 | 1983-07-14 | Leybold-Heraeus GmbH, 5000 Köln | VACUUM PUMP WITH A SUCTION VALVE AND OPERATING PROCEDURE THEREFOR |
GB9223806D0 (en) * | 1992-11-13 | 1993-01-06 | Boc Group Plc | Improvements in vacuum pumps |
JPH10339288A (en) * | 1993-06-08 | 1998-12-22 | Hitachi Ltd | Eccentric vane pump |
CN2471974Y (en) * | 2001-01-18 | 2002-01-16 | 成都无极真空科技有限公司 | Direct connecting vacuum pump |
KR100519567B1 (en) * | 2003-09-22 | 2005-10-11 | 김덕겸 | A rotary vane-type vacuum pump |
CN102725532B (en) * | 2010-01-29 | 2015-09-23 | Ulvac机工株式会社 | Pump |
-
2013
- 2013-06-11 DE DE102013210854.0A patent/DE102013210854A1/en not_active Ceased
-
2014
- 2014-05-26 ES ES14726958T patent/ES2749125T3/en active Active
- 2014-05-26 PL PL14726958T patent/PL3008343T3/en unknown
- 2014-05-26 EP EP14726958.3A patent/EP3008343B1/en active Active
- 2014-05-26 CN CN201480033243.3A patent/CN105378284B/en active Active
- 2014-05-26 WO PCT/EP2014/060838 patent/WO2014198524A1/en active Application Filing
- 2014-06-09 TW TW103119834A patent/TWI622703B/en active
Non-Patent Citations (1)
Title |
---|
See references of WO2014198524A1 * |
Also Published As
Publication number | Publication date |
---|---|
TWI622703B (en) | 2018-05-01 |
DE102013210854A1 (en) | 2014-12-11 |
PL3008343T3 (en) | 2020-01-31 |
TW201510362A (en) | 2015-03-16 |
CN105378284A (en) | 2016-03-02 |
CN105378284B (en) | 2017-07-25 |
WO2014198524A1 (en) | 2014-12-18 |
EP3008343B1 (en) | 2019-07-10 |
ES2749125T3 (en) | 2020-03-19 |
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