EP3657019B1 - Vacuum pump and method for controlling the deactivation of same - Google Patents

Vacuum pump and method for controlling the deactivation of same Download PDF

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Publication number
EP3657019B1
EP3657019B1 EP19207809.5A EP19207809A EP3657019B1 EP 3657019 B1 EP3657019 B1 EP 3657019B1 EP 19207809 A EP19207809 A EP 19207809A EP 3657019 B1 EP3657019 B1 EP 3657019B1
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EP
European Patent Office
Prior art keywords
vacuum pump
rotation
rotor
shutdown
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19207809.5A
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German (de)
French (fr)
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EP3657019A1 (en
Inventor
Tommaso PESSO
Marco Zucchini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19207809.5A priority Critical patent/EP3657019B1/en
Publication of EP3657019A1 publication Critical patent/EP3657019A1/en
Application granted granted Critical
Publication of EP3657019B1 publication Critical patent/EP3657019B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control

Definitions

  • the invention relates to a vacuum pump and a method for controlling the shutdown of such a pump.
  • the vacuum pump comprises an inlet having an inlet valve, an outlet, a rotor which is rotatably arranged in an interior of the vacuum pump, and a drive unit for the rotor.
  • a rotation of the rotor in a conveying direction of rotation brings about a conveyance of a fluid from the inlet to the outlet of the vacuum pump.
  • a vacuum In a recipient of a vacuum system, a vacuum is usually required that is as free of impurities as possible in order to be able to carry out production and / or measurement processes in the recipient as desired.
  • oil and other lubricants are extremely undesirable as contaminants in the recipient of a vacuum system, since they can interfere with the production and / or measurement processes. If the vacuum system contains a vacuum pump with oil lubrication, it is therefore necessary that a flow of the oil into the recipient of the vacuum pump is always prevented, in particular when switching off or in the event of failure or deactivation of an oil-lubricated vacuum pump.
  • known vacuum pumps have a safety valve in the inlet area of the vacuum pump, which is automatically closed when the vacuum pump is switched off or fails in order to separate the oil-lubricated areas of the vacuum pump from upstream components of the vacuum system and in particular from the recipient. Closing the safety valve also has the effect that a fluid to be conveyed by means of the pump does not flow back in the direction of the recipient, thereby preventing a rapid pressure increase in the recipient.
  • the safety valve is, for example, an electrical, pneumatic or hydraulic valve. Alternatively, a spring loaded valve can be used.
  • known pumps contain one or more passages in the area of the outlet. These passages have the effect that, in the event of an intentional or unintentional shutdown of the vacuum pump, a sufficient amount of fluid flows via the outlet into an interior of the vacuum pump and thereby causes a rotation of the rotor in a direction opposite to the direction required for conveying the fluid from the inlet is provided for the outlet of the vacuum pump.
  • This return flow of the fluid via the outlet into the interior of the vacuum pump depends on the pressure difference between the interior of the vacuum pump and the area downstream of the outlet of the vacuum pump, this pressure difference being generated before the vacuum pump is switched off during its operation.
  • the rotation of the rotor of the vacuum pump opposite to the direction of rotation when the fluid is conveyed causes the safety valve of the vacuum pump to close.
  • the passages in the area of the outlet of the vacuum pump are typically filled with oil during its operation, the passages must first be emptied or freed of oil when the vacuum pump is switched off before the fluid can flow back into the interior of the vacuum pump.
  • the length of time between the switching off of the vacuum pump and the triggering of the rotation of the rotor in the opposite direction, and thus between switching off the vacuum pump and the closing of the safety valve depends on the temperature and viscosity of the oil used to lubricate the vacuum pump is used. When the vacuum pump is cold and therefore the oil temperature is lower, the oil has a higher viscosity.
  • the internal elements of the vacuum pump such as the rotor, have a higher viscous friction at lower temperatures, so that a greater pressure difference is required than at higher temperatures in order to cause the above-described reverse rotation of the rotor.
  • the time taken to close the safety valve is therefore longer with a cold pump or at low temperatures than at higher temperatures. The period of time that is required to close the safety valve is thus a variable that depends on the temperature of the vacuum pump.
  • One object of the invention is therefore to create a vacuum pump whose inlet can be closed within the shortest and predefined period of time when the vacuum pump is switched off or deactivated.
  • the vacuum pump comprises an inlet having an inlet valve, an outlet, a rotor which is rotatably arranged in an interior of the vacuum pump, and a drive unit for the rotor.
  • the rotor has a conveying direction of rotation, and a rotation of the rotor in the conveying direction of rotation brings about a conveyance of a fluid from the inlet to the outlet of the vacuum pump.
  • the drive unit of the vacuum pump is set up to rotate the rotor in the opposite direction to the conveying direction of rotation when the vacuum pump is switched off or deactivated in such a way that the inlet valve closes.
  • the vacuum pump is, for example, a rotary vane, scroll, screw or Roots pump, which is usually in the rough vacuum range is used, ie for example as a backing pump of a turbo molecular pump, and which is lubricated with a lubricant such as oil.
  • the drive unit of the vacuum pump actively supports the rotation of the rotor in the opposite direction to the conveying direction of rotation as soon as the vacuum pump is switched off or fails.
  • the rotation of the rotor in the opposite direction to the direction of rotation of the delivery compresses fluid that is in the interior of the vacuum pump at the time of shutdown and transports it back in the direction of the inlet valve, which is closed by the pressure of the compressed fluid.
  • the inlet valve therefore acts like a check valve when the vacuum pump is switched off.
  • the inlet valve Since the closing of the inlet valve is actively supported by the drive unit, the inlet valve can be closed within a short period of time, which at best depends slightly on the temperature of the vacuum pump or the viscosity of a lubricant such as oil in the vacuum pump. As a result of the fast closing of the inlet valve, the negative pressure downstream of the inlet valve of the vacuum pump can be maintained better than with a longer closing time. In addition, by quickly closing the inlet valve, it can be prevented earlier that a backflow of a lubricant such as oil occurs via the inlet of the vacuum pump, for example into a high vacuum pump and into a recipient of a vacuum system.
  • a lubricant such as oil
  • the vacuum pump further comprises a triggering device which is set up to detect the shutdown of the vacuum pump and to trigger or effect the rotation of the rotor opposite to the conveying direction of rotation by means of the drive unit.
  • the triggering device can also be set up to distinguish between an intended shutdown and an emergency shutdown or deactivation when the shutdown of the vacuum pump is detected.
  • the support for the closing of the inlet valve can begin at a defined point in time at which the triggering device recognizes the shutdown of the vacuum pump on the basis of a predetermined event.
  • a predetermined event is, for example, changing a switch position of the drive unit of the vacuum pump or interrupting the power supply for the vacuum pump. Since the detection of the shutdown of the vacuum pump by means of the triggering device is associated with defined events, in this embodiment it can be ruled out that the drive unit causes an unintentional rotation of the rotor in the opposite direction to the conveying direction of rotation, if in reality there is no intentional or unintentional shutdown of the vacuum pump. If the triggering device can furthermore distinguish between an intended shutdown and an emergency shutdown of the vacuum pump, different measures can be carried out by means of the drive unit in order to cause the rotor to rotate in the opposite direction to the direction of rotation of the conveying system.
  • the drive unit comprises an electric motor for driving the rotor.
  • a frequency converter is assigned to the electric motor.
  • the frequency converter can be suitably controlled so that the direction of rotation of the electric motor and thus the direction of rotation of the rotor of the vacuum pump is reversed. Because the reverse the direction of rotation of the rotor is mainly caused by electrical and / or electronic devices and not primarily by a backflow within the vacuum pump, the closing of the inlet valve can take place within a period of time which is shorter than in those vacuum pumps in which there is no such active reversal of the Direction of rotation of the rotor by means of electrical and / or electronic devices is possible. Furthermore, by suitably controlling the frequency converter, the length of time for closing the inlet valve can be defined in a defined manner.
  • the electric motor includes, in particular, electromagnets. It has been shown that the rotation of the rotor opposite to the conveying direction of rotation can be triggered particularly quickly by means of an electric motor, comprising permanent magnets, so that the inlet valve can be closed particularly quickly as soon as the vacuum pump is switched off.
  • the frequency converter can comprise at least one capacitor for energy storage.
  • the drive unit can also be set up, in the event of an emergency shutdown of the vacuum pump, to rotate the rotor in the opposite direction to the conveying direction of rotation by means of the energy stored in the frequency converter. This enables the above-described active support when closing the inlet valve by means of the rotation of the rotor opposite to the conveying direction of rotation by the drive unit even when a power supply to the vacuum pump is interrupted, for example in the event of a power failure.
  • the outlet comprises an outlet valve which is provided with passages to allow the fluid to flow back into the interior of the vacuum pump.
  • passages through a housing of the vacuum pump can be arranged in the area of the outlet, which passages connect an outer space to the inner space of the vacuum pump. This also enables the fluid to flow back into the interior.
  • the backflow of the fluid into the interior of the vacuum pump occurs when the vacuum pump is switched off due to the pressure difference between the interior and the exterior at the outlet of the vacuum pump.
  • the return flow also supports the rotation of the rotor in the opposite direction to the direction of rotation of the delivery when the vacuum pump is switched off. This further shortens the time it takes to close the inlet valve when the vacuum pump is switched off.
  • the invention also relates to a method for controlling the switching off of a vacuum pump, as described above, for example.
  • the vacuum pump has an inlet with an inlet valve, an outlet and a rotor with a drive unit.
  • the rotor is rotatably arranged in an interior of the vacuum pump and has a conveying direction of rotation. A rotation of the rotor in the conveying direction of rotation brings about a conveyance of a fluid from the inlet to the outlet of the vacuum pump.
  • the method when the vacuum pump is switched off or deactivated by means of the drive unit, the rotor is rotated opposite to the conveying direction of rotation in such a way that closing of the inlet valve is supported.
  • the advantages described above in connection with the vacuum pump also apply mutatis mutandis to the method according to the invention.
  • the vacuum pump when the vacuum pump is switched off by means of the drive unit, an active rotation of the rotor opposite to the conveying direction of rotation is carried out.
  • the inlet valve closes within a predefined short period of time, which at best depends slightly on operating parameters of the vacuum pump, such as the temperature and the viscosity of a lubricant of the vacuum pump.
  • the shutdown of the vacuum pump is detected by means of a triggering device which, by means of the drive unit, triggers the rotation of the rotor in the opposite direction to the direction of rotation of the conveyor.
  • a triggering device which, by means of the drive unit, triggers the rotation of the rotor in the opposite direction to the direction of rotation of the conveyor.
  • the triggering of the rotation of the rotor in the opposite direction to the direction of rotation of the conveying system can thus be linked to defined events during the operation of the vacuum pump.
  • the drive unit of the vacuum pump can, for example, be suitably controlled in order to cause the rotor to rotate in the opposite direction to the direction of rotation of the conveying system.
  • the vacuum pump comprises an electric motor with a frequency converter
  • the frequency converter can, for example, be suitably controlled in order to reverse the direction of rotation of the rotor when the vacuum pump is switched off.
  • the rotor in the event of an emergency shutdown of the vacuum pump, the rotor can be rotated in the opposite direction to the conveying direction of rotation by means of energy that is stored in the frequency converter of the electric motor of the vacuum pump.
  • the rotation of the rotor in the opposite direction to the direction of rotation of the conveying system is possible even in the event of an emergency shutdown in which the power supply to the vacuum pump may be interrupted.
  • the closing of the inlet valve is additionally supported by a backflow of the fluid into the interior of the vacuum pump.
  • the return flow takes place through passages which run through an outlet valve of the vacuum pump or through a housing of the vacuum pump and connect an external space with the internal space of the vacuum pump.
  • the return flow of the fluid which can occur when the vacuum pump is switched off, thus supports the rotation of the rotor in the opposite direction to the direction of rotation of the delivery. As a result, the period of time for closing the inlet valve when the vacuum pump is switched off can be shortened.
  • At least one full rotation of the rotor in the opposite direction to the conveying direction of rotation is also preferably carried out. This ensures that the compression of the fluid in the interior of the vacuum pump due to the rotation of the rotor in the opposite direction to the direction of rotation of the delivery generates sufficient pressure to close the inlet valve.
  • a vacuum system 11 is shown schematically, which comprises a recipient 13 which is connected to a vacuum pump 15 for the high vacuum range is.
  • the vacuum pump 15 is designed, for example, as a turbo molecular pump.
  • the vacuum system 11 further comprises a vacuum pump 17 according to the invention, which is designed as a rotary vane pump.
  • the rotary vane pump 17 is connected as a backing pump to the vacuum pump 15 for the high vacuum range.
  • the rotary vane pump 17 comprises a rotor 19 which is arranged eccentrically in an interior 21 of the rotary vane pump 17.
  • the rotor 19 has three rotary slides 23 which are each arranged in a slot 25 of the rotor 19.
  • a fluid to be conveyed which reaches the interior 21 of the rotary vane pump 17 via an inlet 27, is transported to an outlet 29 of the rotary vane pump 17 and is compressed in the process, since the volume enclosed between two rotary slides 23 in the interior 21 decreased during the rotation of the rotor 19 due to its eccentric arrangement.
  • the rotation of the rotor 19 takes place during normal operation of the rotary vane pump 17 in a conveying direction of rotation 30, which in the example of FIG Fig. 1 is shown as a counterclockwise rotation.
  • the rotary vane pump 17 also has a drive unit 31 which comprises an electric motor 33 and a control unit 35 for the latter.
  • the electric motor 33 is connected to the rotor 19 in order to drive the latter.
  • the control unit 35 has a frequency converter 37 which is connected to the electric motor 33.
  • the frequency converter 37 in turn comprises a capacitor 38 which is provided for storing electrical energy.
  • the rotary vane pump 17 has a triggering device 39 which is set up to detect a shutdown or deactivation of the rotary vane pump 17.
  • the triggering device 39 monitors a switch and a power supply to the rotary vane pump 17, what a Fig. 1 are not shown. If the switch is switched from an on position to an off position, the triggering device 39 determines that the rotary vane pump 17 has been switched off intentionally. If, on the other hand, the power supply to the rotary vane pump 17 is interrupted or deactivated, although the switch is in the on position, the triggering device 39 determines that an unintentional shutdown or an emergency shutdown of the rotary vane pump 17 has occurred, for example during a power failure.
  • the triggering device 39 can additionally or alternatively also be assigned sensors with which the operating states of the rotary vane pump 17 and / or other components of the vacuum system 11 can be monitored.
  • a pressure sensor can be present in the recipient 13, the signal of which is detected by the triggering device 39. If the pressure in the recipient 13, which is measured by the sensor, rises above a predetermined value during operation of the vacuum system 11, ie after it has been pumped up, for example due to a leak in the recipient 13, the triggering device 39 can trigger an emergency shutdown or deactivation of the rotary vane pump 17 effect.
  • Fig. 2 shows a detailed view of the rotary vane pump 17, which has a housing 41.
  • the housing 41 can also be referred to as a stator body, since it encloses the interior space 21 of the rotary vane pump 17 in which the rotor 19 of the rotary vane pump 17 is arranged.
  • the inlet 27 of the rotary vane pump 17 comprises an inlet channel 45, via which the interior 21 of the rotary vane pump 17 with an outlet of the vacuum pump 15 for the high vacuum range (cf. Fig. 1 ) connected is.
  • the inlet 27 further comprises an inlet valve 47.
  • the outlet 29 of the rotary vane pump 17 comprises a corresponding outlet channel 49 and an outlet valve 51, which is designed as a flexible lamellar valve.
  • a hole 53 is provided in the outlet valve 51, which allows a defined amount of a fluid to enter one of the delivery chambers 43 via the outlet channel 49.
  • a lubricant chamber 55 is also provided, which contains a lubricant 57 such as oil for lubricating the rotary vane pump 17.
  • the rotary slides 23 are each prestressed in the slots 25 against the inner wall of the housing 41, for example by means of springs which are arranged in the respective slots 25.
  • the outlet 29 can have several outlet channels 49 in an alternative embodiment.
  • the vacuum system 11 (cf. Fig. 1 ) is in operation to generate a high vacuum in the recipient 13, the vacuum pumps 15, 17 are switched on, and the rotor 19 of the rotary vane pump 17 rotates in the conveying direction of rotation 30.
  • the triggering device 39 If the triggering device 39, however, an intended shutdown or a When the emergency shutdown or deactivation of the rotary vane pump 17 is detected, the triggering device 39 causes the frequency converter 37 in the control unit 35 to be controlled in such a way that the electric motor 33 and thus also the rotor 19 of the rotary vane pump 17 rotate in a direction of rotation 60 (cf. Fig. 2 ) opposite to the direction of rotation 30 of the conveying rotation.
  • the rotation of the rotor 19 in the direction of rotation 60 opposite to the direction of rotation 30 of the conveying rotation thus supports the closing of the inlet valve 47 can reach the recipient 13 via this.
  • the closing of the inlet valve 47 prevents the fluid from flowing back into the recipient 13, so that the vacuum can be maintained in this at least for a certain period of time.
  • the capacitor 38 is charged in the frequency converter 37 for storing electrical energy.
  • the energy stored in the capacitor 38 is used to rotate the electric motor 33 and thus also the rotor 19 of the rotary vane pump 17 in the direction of rotation 60 opposite to the direction of rotation 30 of the delivery . This makes it possible to close the inlet valve 47 quickly even if no power supply is available for the rotary vane pump 17 due to the emergency shutdown.
  • the inlet valve 47 the rotary vane pump 17 is always closed within a short predefined period of time when it is switched off or deactivated.

Description

Die Erfindung betrifft eine Vakuumpumpe und Verfahren zum Steuern des Abschaltens einer solchen. Die Vakuumpumpe umfasst einen Einlass, der ein Einlassventil aufweist, einen Auslass, einen Rotor, der drehbar in einem Innenraum der Vakuumpumpe angeordnet ist, und eine Antriebseinheit für den Rotor. Eine Drehung des Rotors in einer Förderdrehrichtung bewirkt eine Förderung eines Fluids von dem Einlass zu dem Auslass der Vakuumpumpe.The invention relates to a vacuum pump and a method for controlling the shutdown of such a pump. The vacuum pump comprises an inlet having an inlet valve, an outlet, a rotor which is rotatably arranged in an interior of the vacuum pump, and a drive unit for the rotor. A rotation of the rotor in a conveying direction of rotation brings about a conveyance of a fluid from the inlet to the outlet of the vacuum pump.

In einem Rezipienten einer Vakuumanlage ist meistens ein Vakuum erforderlich, das möglichst frei von Verunreinigungen ist, um Produktions- und/oder Messvorgänge in dem Rezipienten wie gewünscht durchführen zu können. Insbesondere sind Öl und andere Schmiermittel als Verunreinigung im Rezipienten einer Vakuumanlage äußerst unerwünscht, da diese die Produktions- und/oder Messvorgänge empfindlich stören können. Wenn die Vakuumanlage eine Vakuumpumpe mit Ölschmierung enthält, ist es daher erforderlich, dass eine Strömung des Öls in den Rezipienten der Vakuumpumpe hinein stets verhindert wird, und zwar insbesondere beim Abschalten oder bei einem Ausfall oder einer Deaktivierung einer mit Öl geschmierten Vakuumpumpe.In a recipient of a vacuum system, a vacuum is usually required that is as free of impurities as possible in order to be able to carry out production and / or measurement processes in the recipient as desired. In particular, oil and other lubricants are extremely undesirable as contaminants in the recipient of a vacuum system, since they can interfere with the production and / or measurement processes. If the vacuum system contains a vacuum pump with oil lubrication, it is therefore necessary that a flow of the oil into the recipient of the vacuum pump is always prevented, in particular when switching off or in the event of failure or deactivation of an oil-lubricated vacuum pump.

Zu diesem Zweck weisen bekannte Vakuumpumpen ein Sicherheitsventil im Einlassbereich der Vakuumpumpe auf, das bei einem Abschalten oder einem Ausfall der Vakuumpumpe automatisch geschlossen wird, um die mit Öl geschmierten Bereiche der Vakuumpumpe von stromaufwärts gelegenen Komponenten der Vakuumanlage und insbesondere vom Rezipienten zu trennen. Das Schließen des Sicherheitsventils bewirkt außerdem, dass keine Rückströmung eines mittels der Pumpe zu fördernden Fluids in Richtung des Rezipienten erfolgt und dadurch ein schneller Druckanstieg in dem Rezipienten verhindert wird.For this purpose, known vacuum pumps have a safety valve in the inlet area of the vacuum pump, which is automatically closed when the vacuum pump is switched off or fails in order to separate the oil-lubricated areas of the vacuum pump from upstream components of the vacuum system and in particular from the recipient. Closing the safety valve also has the effect that a fluid to be conveyed by means of the pump does not flow back in the direction of the recipient, thereby preventing a rapid pressure increase in the recipient.

Bei dem Sicherheitsventil handelt es sich beispielsweise um ein elektrisches, pneumatisches oder hydraulisches Ventil. Alternativ kann ein mit einer Feder vorgespanntes Ventil verwendet werden. Zusätzlich enthalten bekannte Pumpen einen oder mehrere Durchgänge im Bereich des Auslasses. Diese Durchgänge bewirken, dass bei einer beabsichtigten oder unbeabsichtigten Abschaltung der Vakuumpumpe eine ausreichende Menge an Fluid über den Auslass in einen Innenraum der Vakuumpumpe strömt und dadurch eine Drehung des Rotors in einer Richtung entgegengesetzt zu der Richtung bewirkt, die für eine Förderung des Fluids vom Einlass zum Auslass der Vakuumpumpe vorgesehen ist. Diese Rückströmung des Fluids über den Auslass in den Innenraum der Vakuumpumpe hängt von dem Druckunterschied zwischen dem Innenraum der Vakuumpumpe und dem Bereich stromabwärts des Auslasses der Vakuumpumpe ab, wobei dieser Druckunterschied vor der Abschaltung der Vakuumpumpe während deren Betrieb erzeugt wird. Die Drehung des Rotors der Vakuumpumpe entgegengesetzt zur Drehrichtung bei Förderung des Fluids bewirkt ein Schließen des Sicherheitsventils der Vakuumpumpe.The safety valve is, for example, an electrical, pneumatic or hydraulic valve. Alternatively, a spring loaded valve can be used. In addition, known pumps contain one or more passages in the area of the outlet. These passages have the effect that, in the event of an intentional or unintentional shutdown of the vacuum pump, a sufficient amount of fluid flows via the outlet into an interior of the vacuum pump and thereby causes a rotation of the rotor in a direction opposite to the direction required for conveying the fluid from the inlet is provided for the outlet of the vacuum pump. This return flow of the fluid via the outlet into the interior of the vacuum pump depends on the pressure difference between the interior of the vacuum pump and the area downstream of the outlet of the vacuum pump, this pressure difference being generated before the vacuum pump is switched off during its operation. The rotation of the rotor of the vacuum pump opposite to the direction of rotation when the fluid is conveyed causes the safety valve of the vacuum pump to close.

Da die Durchgänge im Bereich des Auslasses der Vakuumpumpe während deren Betrieb typischerweise mit Öl gefüllt sind, müssen die Durchgänge bei einer Abschaltung der Vakuumpumpe zunächst entleert bzw. von Öl befreit werden, bevor das Fluid in den Innenraum der Vakuumpumpe zurückströmen kann. Folglich hängt die Zeitdauer, die zwischen der Abschaltung der Vakuumpumpe und der Auslösung der Drehung des Rotors in entgegengesetzter Richtung und damit zwischen der Abschaltung der Vakuumpumpe und dem Schließen des Sicherheitsventils vergeht, von der Temperatur und der Viskosität des Öls ab, das zum Schmieren der Vakuumpumpe verwendet wird. Wenn die Vakuumpumpe kalt ist und somit eine niedrigere Öltemperatur vorliegt, weist das Öl eine höhere Viskosität auf. Dadurch wird eine größere Zeitdauer als bei höheren Temperaturen benötigt, um die Durchgänge im Bereich des Auslasses der Vakuumpumpe von Öl zu befreien. Ferner weisen die inneren Elemente der Vakuumpumpe wie etwa der Rotor bei niedrigeren Temperaturen eine höhere viskose Reibung auf, so dass eine größere Druckdifferenz als bei höheren Temperaturen erforderlich ist, um die vorstehend beschriebene Rückwärtsdrehung des Rotors zu bewirken. Insgesamt ist die Zeitdauer zum Schließen des Sicherheitsventils daher bei einer kalten Pumpe bzw. bei niedrigen Temperaturen länger als bei höheren Temperaturen. Die Zeitdauer, die zum Schließen des Sicherheitsventils erforderlich ist, ist somit eine veränderliche Größe, die von der Temperatur der Vakuumpumpe abhängt.Since the passages in the area of the outlet of the vacuum pump are typically filled with oil during its operation, the passages must first be emptied or freed of oil when the vacuum pump is switched off before the fluid can flow back into the interior of the vacuum pump. As a result, the length of time between the switching off of the vacuum pump and the triggering of the rotation of the rotor in the opposite direction, and thus between switching off the vacuum pump and the closing of the safety valve, depends on the temperature and viscosity of the oil used to lubricate the vacuum pump is used. When the vacuum pump is cold and therefore the oil temperature is lower, the oil has a higher viscosity. As a result, a longer period of time is required than at higher temperatures in order to close the oil passages in the area of the outlet of the vacuum pump to free. Furthermore, the internal elements of the vacuum pump, such as the rotor, have a higher viscous friction at lower temperatures, so that a greater pressure difference is required than at higher temperatures in order to cause the above-described reverse rotation of the rotor. Overall, the time taken to close the safety valve is therefore longer with a cold pump or at low temperatures than at higher temperatures. The period of time that is required to close the safety valve is thus a variable that depends on the temperature of the vacuum pump.

Aus der DE 10 2013 210 854 A1 sind eine Vakuumpumpe mit den Merkmalen gemäß dem Oberbegriff des Anspruchs 1 und ein Verfahren mit den Merkmalen gemäß dem Oberbegriff des Anspruchs 10 bekannt.From the DE 10 2013 210 854 A1 a vacuum pump with the features according to the preamble of claim 1 and a method with the features according to the preamble of claim 10 are known.

Eine Aufgabe der Erfindung besteht folglich darin, eine Vakuumpumpe zu schaffen, deren Einlass bei einer Abschaltung oder Deaktivierung der Vakuumpumpe innerhalb einer möglichst kurzen und vordefinierten Zeitdauer schließbar ist.One object of the invention is therefore to create a vacuum pump whose inlet can be closed within the shortest and predefined period of time when the vacuum pump is switched off or deactivated.

Diese Aufgabe wird durch eine Vakuumpumpe mit den Merkmalen des Anspruchs 1 gelöst. Die Vakuumpumpe umfasst einen Einlass, der ein Einlassventil aufweist, einen Auslass, einen Rotor, der drehbar in einem Innenraum der Vakuumpumpe angeordnet ist, und eine Antriebseinheit für den Rotor. Der Rotor weist eine Förderdrehrichtung auf, und eine Drehung des Rotors in der Förderdrehrichtung bewirkt eine Förderung eines Fluids von dem Einlass zu dem Auslass der Vakuumpumpe. Die Antriebseinheit der Vakuumpumpe ist eingerichtet, den Rotor bei einer Abschaltung oder Deaktivierung der Vakuumpumpe derart entgegengesetzt zu der Förderdrehrichtung zu drehen, dass ein Schließen des Einlassventils unterstützt wird.This object is achieved by a vacuum pump with the features of claim 1. The vacuum pump comprises an inlet having an inlet valve, an outlet, a rotor which is rotatably arranged in an interior of the vacuum pump, and a drive unit for the rotor. The rotor has a conveying direction of rotation, and a rotation of the rotor in the conveying direction of rotation brings about a conveyance of a fluid from the inlet to the outlet of the vacuum pump. The drive unit of the vacuum pump is set up to rotate the rotor in the opposite direction to the conveying direction of rotation when the vacuum pump is switched off or deactivated in such a way that the inlet valve closes.

Bei der Vakuumpumpe handelt es sich beispielsweise um eine Drehschieber-, Scroll-, Schrauben- oder Rootspumpe, welche üblicherweise im Grobvakuumbereich eingesetzt wird, d.h. beispielsweise als Vorpumpe einer Turbomolekularpumpe, und welche mit einem Schmiermittel wie etwa Öl geschmiert wird.The vacuum pump is, for example, a rotary vane, scroll, screw or Roots pump, which is usually in the rough vacuum range is used, ie for example as a backing pump of a turbo molecular pump, and which is lubricated with a lubricant such as oil.

Erfindungsgemäß bewirkt die Antriebseinheit der Vakuumpumpe eine aktive Unterstützung der Drehung des Rotors entgegengesetzt zur Förderdrehrichtung, sobald die Vakuumpumpe abgeschaltet wird oder ausfällt. Durch die Drehung des Rotors entgegengesetzt zur Förderdrehrichtung wird Fluid, das sich zum Zeitpunkt der Abschaltung in dem Innenraum der Vakuumpumpe befindet, komprimiert und zurück in Richtung des Einlassventils transportiert, das durch den Druck des komprimierten Fluids geschlossen wird. Das Einlassventil wirkt daher bei einer Abschaltung der Vakuumpumpe wie ein Rückschlagventil.According to the invention, the drive unit of the vacuum pump actively supports the rotation of the rotor in the opposite direction to the conveying direction of rotation as soon as the vacuum pump is switched off or fails. The rotation of the rotor in the opposite direction to the direction of rotation of the delivery compresses fluid that is in the interior of the vacuum pump at the time of shutdown and transports it back in the direction of the inlet valve, which is closed by the pressure of the compressed fluid. The inlet valve therefore acts like a check valve when the vacuum pump is switched off.

Es erfolgt somit nicht nur eine passive Auslösung der Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung aufgrund einer Rückströmung des Fluids in den Innenraum der Vakuumpumpe. Stattdessen wird die Drehung des Rotors entgegengesetzt zur Förderdrehrichtung hauptsächlich durch die Antriebseinheit der Vakuumpumpe bewirkt oder zumindest unterstützt.There is thus not only a passive triggering of the rotation of the rotor opposite to the conveying direction of rotation due to a backflow of the fluid into the interior of the vacuum pump. Instead, the rotation of the rotor in the opposite direction to the direction of rotation of the conveying system is mainly brought about or at least supported by the drive unit of the vacuum pump.

Da das Schließen des Einlassventils mittels der Antriebseinheit aktiv unterstützt wird, kann das Einlassventil innerhalb einer kurzen Zeitdauer geschlossen werden, die bestenfalls geringfügig von der Temperatur der Vakuumpumpe bzw. der Viskosität eines Schmiermittels wie etwa Öl in der Vakuumpumpe abhängt. Durch das schnelle Schließen des Einlassventils kann der Unterdruck stromabwärts des Einlassventils der Vakuumpumpe besser aufrechterhalten werden als bei einer längeren Schließzeit. Außerdem kann durch das schnelle Schließen des Einlassventils früher verhindert werden, dass eine Rückströmung eines Schmiermittels wie etwa Öl über den Einlass der Vakuumpumpe hinweg beispielsweise in eine Hochvakuumpumpe und in einen Rezipienten einer Vakuumanlage auftritt.Since the closing of the inlet valve is actively supported by the drive unit, the inlet valve can be closed within a short period of time, which at best depends slightly on the temperature of the vacuum pump or the viscosity of a lubricant such as oil in the vacuum pump. As a result of the fast closing of the inlet valve, the negative pressure downstream of the inlet valve of the vacuum pump can be maintained better than with a longer closing time. In addition, by quickly closing the inlet valve, it can be prevented earlier that a backflow of a lubricant such as oil occurs via the inlet of the vacuum pump, for example into a high vacuum pump and into a recipient of a vacuum system.

Vorteilhafte Weiterbildungen der Erfindung sind in den Unteransprüchen, der nachstehenden Beschreibung und in den Figuren angegeben.Advantageous further developments of the invention are given in the subclaims, the description below and in the figures.

Gemäß einer Ausführungsform umfasst die Vakuumpumpe ferner eine Auslöseeinrichtung, die eingerichtet ist, die Abschaltung der Vakuumpumpe zu erfassen und mittels der Antriebseinheit die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung auszulösen oder zu bewirken. Die Auslöseeinrichtung kann ferner eingerichtet sein, bei dem Erfassen der Abschaltung der Vakuumpumpe zwischen einer beabsichtigten Abschaltung und einer Notabschaltung oder Deaktivierung zu unterscheiden.According to one embodiment, the vacuum pump further comprises a triggering device which is set up to detect the shutdown of the vacuum pump and to trigger or effect the rotation of the rotor opposite to the conveying direction of rotation by means of the drive unit. The triggering device can also be set up to distinguish between an intended shutdown and an emergency shutdown or deactivation when the shutdown of the vacuum pump is detected.

Wenn die Abschaltung oder Deaktivierung der Vakuumpumpe mittels der Auslöseeinrichtung erfasst wird, kann die Unterstützung des Schließens des Einlassventils zu einem definierten Zeitpunkt beginnen, bei welchem die Auslöseeinrichtung die Abschaltung der Vakuumpumpe anhand eines vorbestimmten Ereignisses erkennt. Ein solches vorbestimmtes Ereignis ist beispielsweise das Verändern einer Schalterstellung der Antriebseinheit der Vakuumpumpe oder eine Unterbrechung der Stromzufuhr für die Vakuumpumpe. Da das Erfassen der Abschaltung der Vakuumpumpe mittels der Auslöseeinrichtung mit definierten Ereignissen verbunden ist, kann bei dieser Ausführungsform ausgeschlossen werden, dass die Antriebseinheit eine unbeabsichtigte Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung bewirkt, wenn in Wirklichkeit keine beabsichtigte oder unbeabsichtigte Abschaltung der Vakuumpumpe erfolgt. Wenn die Auslöseeinrichtung darüber hinaus zwischen einer beabsichtigten Abschaltung und einer Notabschaltung der Vakuumpumpe unterscheiden kann, können mittels der Antriebseinheit unterschiedliche Maßnahmen durchgeführt werden, um jeweils die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung zu bewirken.If the shutdown or deactivation of the vacuum pump is detected by means of the triggering device, the support for the closing of the inlet valve can begin at a defined point in time at which the triggering device recognizes the shutdown of the vacuum pump on the basis of a predetermined event. Such a predetermined event is, for example, changing a switch position of the drive unit of the vacuum pump or interrupting the power supply for the vacuum pump. Since the detection of the shutdown of the vacuum pump by means of the triggering device is associated with defined events, in this embodiment it can be ruled out that the drive unit causes an unintentional rotation of the rotor in the opposite direction to the conveying direction of rotation, if in reality there is no intentional or unintentional shutdown of the vacuum pump. If the triggering device can furthermore distinguish between an intended shutdown and an emergency shutdown of the vacuum pump, different measures can be carried out by means of the drive unit in order to cause the rotor to rotate in the opposite direction to the direction of rotation of the conveying system.

Gemäß einer weiteren Ausführungsform umfasst die Antriebseinheit einen Elektromotor zum Antreiben des Rotors. Dem Elektromotor ist ein Frequenzwandler zugeordnet. Bei einer Abschaltung der Vakuumpumpe kann der Frequenzwandler geeignet gesteuert werden, so dass die Drehrichtung des Elektromotors und damit die Drehrichtung des Rotors der Vakuumpumpe umgekehrt wird. Da die Umkehrung der Drehrichtung des Rotors somit hauptsächlich durch elektrische und/oder elektronische Einrichtungen und nicht primär durch eine Rückströmung innerhalb der Vakuumpumpe bewirkt wird, kann das Schließen des Einlassventils innerhalb einer Zeitdauer erfolgen, die kürzer als bei solchen Vakuumpumpen ist, bei denen keine solche aktive Umkehrung der Drehrichtung des Rotors mittels elektrischer und/oder elektronischer Einrichtungen möglich ist. Ferner kann durch die geeignete Steuerung des Frequenzwandlers die Zeitdauer zum Schließen des Einlassventils definiert festgelegt werden.According to a further embodiment, the drive unit comprises an electric motor for driving the rotor. A frequency converter is assigned to the electric motor. When the vacuum pump is switched off, the frequency converter can be suitably controlled so that the direction of rotation of the electric motor and thus the direction of rotation of the rotor of the vacuum pump is reversed. Because the reverse the direction of rotation of the rotor is mainly caused by electrical and / or electronic devices and not primarily by a backflow within the vacuum pump, the closing of the inlet valve can take place within a period of time which is shorter than in those vacuum pumps in which there is no such active reversal of the Direction of rotation of the rotor by means of electrical and / or electronic devices is possible. Furthermore, by suitably controlling the frequency converter, the length of time for closing the inlet valve can be defined in a defined manner.

Der Elektromotor umfasst insbesondere Elektromagnete. Es hat sich gezeigt, dass sich die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung mittels eines Elektromotors, Permanentmagnete umfasst, besonders schnell auslösen lässt, so dass ein besonders schnelles Schließen des Einlassventils erfolgen kann, sobald die Vakuumpumpe abgeschaltet wird.The electric motor includes, in particular, electromagnets. It has been shown that the rotation of the rotor opposite to the conveying direction of rotation can be triggered particularly quickly by means of an electric motor, comprising permanent magnets, so that the inlet valve can be closed particularly quickly as soon as the vacuum pump is switched off.

Der Frequenzwandler kann zumindest einen Kondensator zur Energiespeicherung umfassen. Die Antriebseinheit kann ferner eingerichtet sein, im Falle einer Notabschaltung der Vakuumpumpe den Rotor mittels der in dem Frequenzwandler gespeicherten Energie entgegengesetzt zu der Förderdrehrichtung zu drehen. Dies ermöglicht die vorstehend beschriebene aktive Unterstützung bei dem Schließen des Einlassventils mittels der Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung durch die Antriebseinheit sogar dann, wenn eine Stromzufuhr der Vakuumpumpe unterbrochen ist, beispielsweise bei einem Stromausfall.The frequency converter can comprise at least one capacitor for energy storage. The drive unit can also be set up, in the event of an emergency shutdown of the vacuum pump, to rotate the rotor in the opposite direction to the conveying direction of rotation by means of the energy stored in the frequency converter. This enables the above-described active support when closing the inlet valve by means of the rotation of the rotor opposite to the conveying direction of rotation by the drive unit even when a power supply to the vacuum pump is interrupted, for example in the event of a power failure.

Da die Energie, die in dem Frequenzwandler bzw. in dessen Kondensator gespeichert ist, bei einer Notabschaltung für die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung verwendet wird, verbleibt nach der Abschaltung der Vakuumpumpe keine restliche Energie in dem Frequenzwandler. Dadurch wird die Sicherheit des Betriebs der Vakuumpumpe verbessert, da nach der Abschaltung der Vakuumpumpe insbesondere der Kondensator des Frequenzwandlers entladen ist.Since the energy that is stored in the frequency converter or in its capacitor is used in the event of an emergency shutdown for the rotation of the rotor in the opposite direction to the conveying direction of rotation, no residual energy remains in the frequency converter after the vacuum pump has been switched off. This improves the safety of the operation of the vacuum pump, since after the shutdown of the Vacuum pump in particular the capacitor of the frequency converter is discharged.

Gemäß einer weiteren Ausführungsform umfasst der Auslass ein Auslassventil, das mit Durchgängen versehen ist, um eine Rückströmung des Fluids in den Innenraum der Vakuumpumpe zu ermöglichen. Alternativ oder zusätzlich können im Bereich des Auslasses Durchgänge durch ein Gehäuse der Vakuumpumpe angeordnet sein, welche einen Außenraum mit dem Innenraum der Vakuumpumpe verbinden. Dadurch kann ebenfalls eine Rückströmung des Fluids in den Innenraum ermöglicht werden.According to a further embodiment, the outlet comprises an outlet valve which is provided with passages to allow the fluid to flow back into the interior of the vacuum pump. Alternatively or additionally, passages through a housing of the vacuum pump can be arranged in the area of the outlet, which passages connect an outer space to the inner space of the vacuum pump. This also enables the fluid to flow back into the interior.

Die Rückströmung des Fluids in den Innenraum der Vakuumpumpe tritt bei einer Abschaltung der Vakuumpumpe aufgrund der Druckdifferenz zwischen dem Innenraum und dem Außenraum am Auslass der Vakuumpumpe auf. Die Rückströmung unterstützt zusätzlich die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung bei der Abschaltung der Vakuumpumpe. Dadurch wird die Zeitdauer für das Schließen des Einlassventils bei der Abschaltung der Vakuumpumpe weiter verkürzt.The backflow of the fluid into the interior of the vacuum pump occurs when the vacuum pump is switched off due to the pressure difference between the interior and the exterior at the outlet of the vacuum pump. The return flow also supports the rotation of the rotor in the opposite direction to the direction of rotation of the delivery when the vacuum pump is switched off. This further shortens the time it takes to close the inlet valve when the vacuum pump is switched off.

Weiterer Gegenstand der Erfindung ist ein Verfahren zum Steuern des Abschaltens einer Vakuumpumpe, wie sie beispielsweise vorstehend beschrieben ist. Die Vakuumpumpe weist einen Einlass mit einem Einlassventil, einen Auslass und einen Rotor mit einer Antriebseinheit auf. Der Rotor ist drehbar in einem Innenraum der Vakuumpumpe angeordnet und weist eine Förderdrehrichtung auf. Eine Drehung des Rotors in der Förderdrehrichtung bewirkt eine Förderung eines Fluids von dem Einlass zu dem Auslass der Vakuumpumpe. Gemäß dem Verfahren wird der Rotor bei einem Abschalten oder einem Deaktivieren der Vakuumpumpe mittels der Antriebseinheit derart entgegengesetzt zu der Förderdrehrichtung gedreht, dass ein Schließen des Einlassventils unterstützt wird.The invention also relates to a method for controlling the switching off of a vacuum pump, as described above, for example. The vacuum pump has an inlet with an inlet valve, an outlet and a rotor with a drive unit. The rotor is rotatably arranged in an interior of the vacuum pump and has a conveying direction of rotation. A rotation of the rotor in the conveying direction of rotation brings about a conveyance of a fluid from the inlet to the outlet of the vacuum pump. According to the method, when the vacuum pump is switched off or deactivated by means of the drive unit, the rotor is rotated opposite to the conveying direction of rotation in such a way that closing of the inlet valve is supported.

Die im Zusammenhang mit der Vakuumpumpe vorstehend beschriebenen Vorteile gelten sinngemäß auch für das erfindungsgemäße Verfahren. Insbesondere wird gemäß dem Verfahren bei dem Abschalten der Vakuumpumpe mittels der Antriebseinheit eine aktive Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung durchgeführt. Dadurch erfolgt das Schließen des Einlassventils innerhalb einer vordefinierten kurzen Zeitdauer, die bestenfalls geringfügig von Betriebsparametern der Vakuumpumpe abhängt, wie etwa der Temperatur und der Viskosität eines Schmiermittels der Vakuumpumpe.The advantages described above in connection with the vacuum pump also apply mutatis mutandis to the method according to the invention. In particular, according to the method, when the vacuum pump is switched off by means of the drive unit, an active rotation of the rotor opposite to the conveying direction of rotation is carried out. As a result, the inlet valve closes within a predefined short period of time, which at best depends slightly on operating parameters of the vacuum pump, such as the temperature and the viscosity of a lubricant of the vacuum pump.

Gemäß einer Ausführungsform des Verfahrens wird die Abschaltung der Vakuumpumpe mittels einer Auslöseeinrichtung erfasst, welche mittels der Antriebseinheit die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung auslöst. Dabei kann zwischen einer beabsichtigten Abschaltung und einer Notabschaltung oder Deaktivierung unterschieden werden. Das Auslösen der Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung kann somit mit definierten Ereignissen während des Betriebs der Vakuumpumpe verknüpft werden. Bei einer beabsichtigten Abschaltung der Vakuumpumpe, beispielsweise durch Betätigen eines Schalters, kann beispielsweise eine geeignete Ansteuerung der Antriebseinheit der Vakuumpumpe erfolgen, um die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung zu bewirken. Falls die Vakuumpumpe einen Elektromotor mit Frequenzwandler umfasst, kann beispielsweise der Frequenzwandler geeignet gesteuert werden, um die Drehrichtung des Rotors bei der Abschaltung der Vakuumpumpe umzukehren.According to one embodiment of the method, the shutdown of the vacuum pump is detected by means of a triggering device which, by means of the drive unit, triggers the rotation of the rotor in the opposite direction to the direction of rotation of the conveyor. A distinction can be made between an intended shutdown and an emergency shutdown or deactivation. The triggering of the rotation of the rotor in the opposite direction to the direction of rotation of the conveying system can thus be linked to defined events during the operation of the vacuum pump. If the vacuum pump is intended to be switched off, for example by actuating a switch, the drive unit of the vacuum pump can, for example, be suitably controlled in order to cause the rotor to rotate in the opposite direction to the direction of rotation of the conveying system. If the vacuum pump comprises an electric motor with a frequency converter, the frequency converter can, for example, be suitably controlled in order to reverse the direction of rotation of the rotor when the vacuum pump is switched off.

Ferner kann der Rotor im Falle der Notabschaltung der Vakuumpumpe mittels Energie, die in dem Frequenzwandler des Elektromotors der Vakuumpumpe gespeichert ist, entgegengesetzt zu der Förderdrehrichtung gedreht werden. Dadurch ist die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung auch bei einer Notabschaltung möglich, bei der die Stromzufuhr der Vakuumpumpe möglicherweise unterbrochen wird.Furthermore, in the event of an emergency shutdown of the vacuum pump, the rotor can be rotated in the opposite direction to the conveying direction of rotation by means of energy that is stored in the frequency converter of the electric motor of the vacuum pump. As a result, the rotation of the rotor in the opposite direction to the direction of rotation of the conveying system is possible even in the event of an emergency shutdown in which the power supply to the vacuum pump may be interrupted.

Gemäß einer weiteren Ausführungsform des Verfahrens wird das Schließen des Einlassventils zusätzlich durch eine Rückströmung des Fluids in den Innenraum der Vakuumpumpe unterstützt. Dabei erfolgt die Rückströmung durch Durchgänge hindurch, die durch ein Auslassventil der Vakuumpumpe oder durch ein Gehäuse der Vakuumpumpe hindurch verlaufen und einen Außenraum mit dem Innenraum der Vakuumpumpe verbinden. Die Rückströmung des Fluids, die bei einer Abschaltung der Vakuumpumpe auftreten kann, unterstützt somit die Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung. Dadurch kann die Zeitdauer für das Schließen des Einlassventils bei einer Abschaltung der Vakuumpumpe verkürzt werden.According to a further embodiment of the method, the closing of the inlet valve is additionally supported by a backflow of the fluid into the interior of the vacuum pump. The return flow takes place through passages which run through an outlet valve of the vacuum pump or through a housing of the vacuum pump and connect an external space with the internal space of the vacuum pump. The return flow of the fluid, which can occur when the vacuum pump is switched off, thus supports the rotation of the rotor in the opposite direction to the direction of rotation of the delivery. As a result, the period of time for closing the inlet valve when the vacuum pump is switched off can be shortened.

Bei einer Abschaltung der Vakuumpumpe wird ferner vorzugsweise mindestens eine volle Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung ausgeführt. Dadurch wird sichergestellt, dass die Kompression des Fluids in dem Innenraum der Vakuumpumpe aufgrund der Drehung des Rotors entgegengesetzt zu der Förderdrehrichtung einen ausreichenden Druck zum Schließen des Einlassventils erzeugt.When the vacuum pump is switched off, at least one full rotation of the rotor in the opposite direction to the conveying direction of rotation is also preferably carried out. This ensures that the compression of the fluid in the interior of the vacuum pump due to the rotation of the rotor in the opposite direction to the direction of rotation of the delivery generates sufficient pressure to close the inlet valve.

Nachfolgend wird die Erfindung beispielhaft anhand vorteilhafter Ausführungsformen unter Bezugnahme auf die beigefügten Figuren beschrieben. Es zeigen:

Fig. 1
eine schematische Darstellung einer Vakuumanlage, die eine erfindungsgemäße Vakuumpumpe umfasst,
Fig. 2
eine detaillierte Ansicht der Vakuumpumpe von Fig. 1.
The invention is described below by way of example using advantageous embodiments with reference to the accompanying figures. Show it:
Fig. 1
a schematic representation of a vacuum system that includes a vacuum pump according to the invention,
Fig. 2
a detailed view of the vacuum pump of Fig. 1 .

In Fig. 1 ist eine Vakuumanlage 11 schematisch dargestellt, die einen Rezipienten 13 umfasst, der mit einer Vakuumpumpe 15 für den Hochvakuumbereich verbunden ist. Die Vakuumpumpe 15 ist beispielsweise als Turbomolekularpumpe ausgebildet.In Fig. 1 a vacuum system 11 is shown schematically, which comprises a recipient 13 which is connected to a vacuum pump 15 for the high vacuum range is. The vacuum pump 15 is designed, for example, as a turbo molecular pump.

Die Vakuumanlage 11 umfasst ferner eine erfindungsgemäße Vakuumpumpe 17, die als Drehschieberpumpe ausgebildet ist. Die Drehschieberpumpe 17 ist als Vorpumpe mit der Vakuumpumpe 15 für den Hochvakuumbereich verbunden. Die Drehschieberpumpe 17 umfasst einen Rotor 19, der exzentrisch in einem Innenraum 21 der Drehschieberpumpe 17 angeordnet ist.The vacuum system 11 further comprises a vacuum pump 17 according to the invention, which is designed as a rotary vane pump. The rotary vane pump 17 is connected as a backing pump to the vacuum pump 15 for the high vacuum range. The rotary vane pump 17 comprises a rotor 19 which is arranged eccentrically in an interior 21 of the rotary vane pump 17.

Der Rotor 19 weist drei Drehschieber 23 auf, die jeweils in einem Schlitz 25 des Rotors 19 angeordnet sind. Bei einer Drehung des Rotors 19 wird ein zu förderndes Fluid, das über einen Einlass 27 in den Innenraum 21 der Drehschieberpumpe 17 gelangt, zu einem Auslass 29 der Drehschieberpumpe 17 transportiert und dabei komprimiert, da sich das zwischen zwei Drehschiebern 23 eingeschlossene Volumen im Innenraum 21 während der Drehung des Rotors 19 aufgrund dessen exzentrischer Anordnung verkleinert. Die Drehung des Rotors 19 erfolgt im Normalbetrieb der Drehschieberpumpe 17 in einer Förderdrehrichtung 30, die im Beispiel von Fig. 1 als eine Drehung gegen den Uhrzeigersinn dargestellt ist.The rotor 19 has three rotary slides 23 which are each arranged in a slot 25 of the rotor 19. When the rotor 19 rotates, a fluid to be conveyed, which reaches the interior 21 of the rotary vane pump 17 via an inlet 27, is transported to an outlet 29 of the rotary vane pump 17 and is compressed in the process, since the volume enclosed between two rotary slides 23 in the interior 21 decreased during the rotation of the rotor 19 due to its eccentric arrangement. The rotation of the rotor 19 takes place during normal operation of the rotary vane pump 17 in a conveying direction of rotation 30, which in the example of FIG Fig. 1 is shown as a counterclockwise rotation.

Die Drehschieberpumpe 17 weist ferner eine Antriebseinheit 31 auf, die einen Elektromotor 33 und eine Steuereinheit 35 für diesen umfasst. Der Elektromotor 33 ist mit dem Rotor 19 verbunden, um diesen anzutreiben. Die Steuereinheit 35 weist einen Frequenzwandler 37 auf, der mit dem Elektromotor 33 verbunden ist. Der Frequenzwandler 37 wiederum umfasst einen Kondensator 38, der zur Speicherung von elektrischer Energie vorgesehen ist.The rotary vane pump 17 also has a drive unit 31 which comprises an electric motor 33 and a control unit 35 for the latter. The electric motor 33 is connected to the rotor 19 in order to drive the latter. The control unit 35 has a frequency converter 37 which is connected to the electric motor 33. The frequency converter 37 in turn comprises a capacitor 38 which is provided for storing electrical energy.

Zusätzlich weist die erfindungsgemäße Drehschieberpumpe 17 eine Auslöseeinrichtung 39 auf, die eingerichtet ist, eine Abschaltung oder Deaktivierung der Drehschieberpumpe 17 zu erfassen. Zu diesem Zweck überwacht die Auslöseeinrichtung 39 einen Schalter und eine Stromversorgung der Drehschieberpumpe 17, welche in Fig. 1 nicht dargestellt sind. Wird der Schalter von einer Ein-Position in eine Aus-Position umgeschaltet, ermittelt die Auslöseeinrichtung 39, dass eine beabsichtigte Abschaltung der Drehschieberpumpe 17 vorliegt. Wenn hingegen die Stromversorgung der Drehschieberpumpe 17 unterbrochen bzw. deaktiviert ist, obwohl sich der Schalter in der Ein-Position befindet, ermittelt die Auslöseeinrichtung 39, dass eine unbeabsichtigte Abschaltung bzw. eine Notabschaltung der Drehschieberpumpe 17 vorliegt, beispielsweise während eines Stromausfalls. Der Auslöseeinrichtung 39 können zusätzlich oder alternativ jedoch auch Sensoren zugeordnet sein, mit den Betriebszustände der Drehschieberpumpe 17 und/oder weiterer Komponenten der Vakuumanlage 11 überwachbar sind. Beispielsweise kann in dem Rezipienten 13 ein Drucksensor vorhanden sein, dessen Signal von der Auslöseeinrichtung 39 erfasst wird. Wenn der Druck in dem Rezipienten 13, der mit dem Sensor gemessen wird, im Betrieb der Vakuumanlage 11, d.h. nach deren Anpumpen, über einen vorbestimmten Wert ansteigt, beispielsweise aufgrund eines Lecks im Rezipienten 13, kann die Auslöseeinrichtung 39 eine Notabschaltung oder Deaktivierung der Drehschieberpumpe 17 bewirken.In addition, the rotary vane pump 17 according to the invention has a triggering device 39 which is set up to detect a shutdown or deactivation of the rotary vane pump 17. For this purpose, the triggering device 39 monitors a switch and a power supply to the rotary vane pump 17, what a Fig. 1 are not shown. If the switch is switched from an on position to an off position, the triggering device 39 determines that the rotary vane pump 17 has been switched off intentionally. If, on the other hand, the power supply to the rotary vane pump 17 is interrupted or deactivated, although the switch is in the on position, the triggering device 39 determines that an unintentional shutdown or an emergency shutdown of the rotary vane pump 17 has occurred, for example during a power failure. The triggering device 39 can additionally or alternatively also be assigned sensors with which the operating states of the rotary vane pump 17 and / or other components of the vacuum system 11 can be monitored. For example, a pressure sensor can be present in the recipient 13, the signal of which is detected by the triggering device 39. If the pressure in the recipient 13, which is measured by the sensor, rises above a predetermined value during operation of the vacuum system 11, ie after it has been pumped up, for example due to a leak in the recipient 13, the triggering device 39 can trigger an emergency shutdown or deactivation of the rotary vane pump 17 effect.

Fig. 2 zeigt eine detaillierte Ansicht der Drehschieberpumpe 17, die ein Gehäuse 41 aufweist. Das Gehäuse 41 kann auch als ein Statorkörper bezeichnet werden, da es den Innenraum 21 der Drehschieberpumpe 17 umschließt, in welchem der Rotor 19 der Drehschieberpumpe 17 angeordnet ist. Jeweils zwei der drei Drehschieber 23, die in einem jeweiligen Schlitz 25 des Rotors 19 angeordnet sind, begrenzen eine Förderkammer 43 innerhalb des Innenraums 21 der Drehschieberpumpe 17. Über den Einlass 27 gelangt ein zu förderndes Fluid in eine der Förderkammern 43 zwischen zwei Drehschiebern 23 im Innenraum 21 der Drehschieberpumpe 17. Wenn sich der Rotor 19 um eine Drehachse 44, die exzentrisch bezüglich des Gehäuses 41 angeordnet ist, in der Förderdrehrichtung 30 dreht, wird die Förderkammer 43 zwischen dem Einlass 27 und dem Auslass 29 der Drehschieberpumpe 17 sukzessive verkleinert. Dadurch wird das Fluid, das über den Einlass 27 in den Innenraum 21 gelangt, komprimiert und über den Auslass 29 aus der Drehschieberpumpe 17 ausgestoßen. Fig. 2 shows a detailed view of the rotary vane pump 17, which has a housing 41. The housing 41 can also be referred to as a stator body, since it encloses the interior space 21 of the rotary vane pump 17 in which the rotor 19 of the rotary vane pump 17 is arranged. Two of the three rotary slides 23, which are arranged in a respective slot 25 of the rotor 19, delimit a delivery chamber 43 within the interior 21 of the rotary vane pump 17 Interior 21 of the rotary vane pump 17. When the rotor 19 rotates about an axis of rotation 44, which is arranged eccentrically with respect to the housing 41, in the delivery direction of rotation 30, the delivery chamber 43 between the inlet 27 and the outlet 29 of the rotary vane pump 17 is successively reduced in size. This will make the fluid that reaches the interior space 21 via the inlet 27, is compressed and ejected from the rotary vane pump 17 via the outlet 29.

Der Einlass 27 der Drehschieberpumpe 17 umfasst einen Einlasskanal 45, über den der Innenraum 21 der Drehschieberpumpe 17 mit einem Auslass der Vakuumpumpe 15 für den Hochvakuumbereich (vgl. Fig. 1) verbunden ist. Ferner umfasst der Einlass 27 ein Einlassventil 47.The inlet 27 of the rotary vane pump 17 comprises an inlet channel 45, via which the interior 21 of the rotary vane pump 17 with an outlet of the vacuum pump 15 for the high vacuum range (cf. Fig. 1 ) connected is. The inlet 27 further comprises an inlet valve 47.

Der Auslass 29 der Drehschieberpumpe 17 umfasst einen entsprechenden Auslasskanal 49 und ein Auslassventil 51, das als flexibles Lamellenventil ausgebildet ist. In dem Auslassventil 51 ist ein Loch 53 vorgesehen, das den Eintritt einer definierten Menge eines Fluids über den Auslasskanal 49 in eine der Förderkammern 43 zulässt. Im Bereich des Auslasses 29 ist ferner eine Schmiermittelkammer 55 vorgesehen, die ein Schmiermittel 57 wie etwa Öl zur Schmierung der Drehschieberpumpe 17 enthält. Durch den Eintritt der definierten Menge eines Fluids durch das Loch 53 des Auslassventils 51 über den Auslasskanal 49 in eine der Förderkammern 43 gelangt das Schmiermittel 57 in den Innenraum 21 der Drehschieberpumpe 17. Dadurch werden die Enden der Drehschieber 23, die an einer Innenwand des Gehäuses 41 anliegen, mittels des Schmiermittels 57 geschmiert. Damit die Enden der Drehschieber 23 an der Innenwand des Gehäuses 41 anliegen, sind die Drehschieber 23 jeweils in den Schlitzen 25 gegen die Innenwand des Gehäuses 41 vorgespannt, beispielsweise mittels Federn, die in den jeweiligen Schlitzen 25 angeordnet sind. Obwohl in Fig. 2 nur ein Auslasskanal 49 in dem Auslass 29 der Drehschieberpumpe 17 dargestellt ist, kann der Auslass 29 bei einer alternativen Ausführungsform mehrere Auslasskanäle 49 aufweisen.The outlet 29 of the rotary vane pump 17 comprises a corresponding outlet channel 49 and an outlet valve 51, which is designed as a flexible lamellar valve. A hole 53 is provided in the outlet valve 51, which allows a defined amount of a fluid to enter one of the delivery chambers 43 via the outlet channel 49. In the area of the outlet 29, a lubricant chamber 55 is also provided, which contains a lubricant 57 such as oil for lubricating the rotary vane pump 17. As a result of the entry of the defined amount of fluid through the hole 53 of the outlet valve 51 via the outlet channel 49 into one of the delivery chambers 43, the lubricant 57 enters the interior 21 of the rotary vane pump 17 41 rest, lubricated by means of the lubricant 57. So that the ends of the rotary slides 23 rest against the inner wall of the housing 41, the rotary slides 23 are each prestressed in the slots 25 against the inner wall of the housing 41, for example by means of springs which are arranged in the respective slots 25. Although in Fig. 2 Only one outlet channel 49 is shown in the outlet 29 of the rotary vane pump 17, the outlet 29 can have several outlet channels 49 in an alternative embodiment.

Wenn die Vakuumanlage 11 (vgl. Fig. 1) in Betrieb ist, um ein Hochvakuum in dem Rezipienten 13 zu erzeugen, sind die Vakuumpumpen 15, 17 eingeschaltet, und der Rotor 19 der Drehschieberpumpe 17 dreht sich in der Förderdrehrichtung 30. Wenn die Auslöseeinrichtung 39 jedoch eine beabsichtigte Abschaltung oder eine Notabschaltung oder Deaktivierung der Drehschieberpumpe 17 erfasst, bewirkt die Auslöseeinrichtung 39, dass der Frequenzwandler 37 in der Steuereinheit 35 derart gesteuert wird, dass sich der Elektromotor 33 und damit auch der Rotor 19 der Drehschieberpumpe 17 in einer Drehrichtung 60 (vgl. Fig. 2) entgegengesetzt zu der Förderdrehrichtung 30 dreht. Durch diese Umkehrung der Drehrichtung des Rotors 19 wird das Fluid in der Förderkammer 43, die mit dem Einlass 27 der Drehschieberpumpe 17 verbunden ist, komprimiert. Dadurch wird eine Kraft auf das Einlassventil 47 ausgeübt, das aufgrund dieser Kraft in eine geschlossene Position übergeht.If the vacuum system 11 (cf. Fig. 1 ) is in operation to generate a high vacuum in the recipient 13, the vacuum pumps 15, 17 are switched on, and the rotor 19 of the rotary vane pump 17 rotates in the conveying direction of rotation 30. If the triggering device 39, however, an intended shutdown or a When the emergency shutdown or deactivation of the rotary vane pump 17 is detected, the triggering device 39 causes the frequency converter 37 in the control unit 35 to be controlled in such a way that the electric motor 33 and thus also the rotor 19 of the rotary vane pump 17 rotate in a direction of rotation 60 (cf. Fig. 2 ) opposite to the direction of rotation 30 of the conveying rotation. As a result of this reversal of the direction of rotation of the rotor 19, the fluid in the delivery chamber 43, which is connected to the inlet 27 of the rotary vane pump 17, is compressed. As a result, a force is exerted on the inlet valve 47 which, as a result of this force, changes into a closed position.

Bei einer Abschaltung der Drehschieberpumpe 17 unterstützt somit die Drehung des Rotors 19 in der Drehrichtung 60 entgegengesetzt zu der Förderdrehrichtung 30 das Schließen des Einlassventils 47. Dadurch wird verhindert, dass das Schmiermittel 57 aus dem Innenraum 21 der Drehschieberpumpe 17 in den Bereich der Vakuumpumpe 15 und über diese in den Rezipienten 13 gelangen kann. Außerdem verhindert das Schließen des Einlassventils 47 eine Rückströmung des Fluids in den Rezipienten 13, so dass das Vakuum in diesem zumindest für einen gewissen Zeitraum aufrechterhalten werden kann.When the rotary vane pump 17 is switched off, the rotation of the rotor 19 in the direction of rotation 60 opposite to the direction of rotation 30 of the conveying rotation thus supports the closing of the inlet valve 47 can reach the recipient 13 via this. In addition, the closing of the inlet valve 47 prevents the fluid from flowing back into the recipient 13, so that the vacuum can be maintained in this at least for a certain period of time.

Da das Loch 53 (vgl. Fig. 2) in dem Auslassventil 51 die Rückströmung einer definierten Menge des Fluids in den Innenraum 21 der Drehschieberpumpe 17 hinein zulässt, unterstützt diese Rückströmung über das Auslassventil 51 die Drehung des Rotors 19 in der Drehrichtung 60 bei einer Abschaltung oder Deaktivierung der Drehschieberpumpe 17, da das zurückströmende Fluid den Druck in der Förderkammer 43 erhöht, die momentan mit dem Auslasskanal 49 verbunden ist. Das Schließen des Einlassventils 47 erfolgt jedoch hauptsächlich durch die aktive Änderung der Drehrichtung des Rotors 19 von der Förderdrehrichtung 30 in die entgegengesetzte Drehrichtung 60 aufgrund der Steuerung des Frequenzwandlers 37, sobald die Auslöseeinrichtung 39 eine Abschaltung oder Deaktivierung der Drehschieberpumpe 17 erfasst.Since the hole 53 (cf. Fig. 2 ) allows a defined amount of the fluid to flow back into the interior 21 of the rotary vane pump 17 in the outlet valve 51, this return flow via the outlet valve 51 supports the rotation of the rotor 19 in the direction of rotation 60 when the rotary vane pump 17 is switched off or deactivated, since the return flow Fluid increases the pressure in the delivery chamber 43, which is currently connected to the outlet channel 49. The closing of the inlet valve 47 takes place mainly by actively changing the direction of rotation of the rotor 19 from the conveying direction of rotation 30 to the opposite direction of rotation 60 due to the control of the frequency converter 37 as soon as the triggering device 39 detects a shutdown or deactivation of the rotary vane pump 17.

Während des normalen Betriebs der Drehschieberpumpe 17, d.h. bei einer Drehung des Rotors 19 in der Förderdrehrichtung 30, wird der Kondensator 38 in dem Frequenzwandler 37 zur Speicherung elektrischer Energie aufgeladen. Sobald die Auslöseeinrichtung 39 eine unbeabsichtigte Abschaltung bzw. Notabschaltung oder Deaktivierung der Drehschieberpumpe 17 erfasst, wird die in dem Kondensator 38 gespeicherte Energie verwendet, um den Elektromotor 33 und damit auch den Rotor 19 der Drehschieberpumpe 17 in der Drehrichtung 60 entgegengesetzt zur Förderdrehrichtung 30 zu drehen. Dadurch ist es möglich, das Einlassventil 47 auch dann schnell zu schließen, wenn aufgrund der Notabschaltung keine Stromversorgung für die Drehschieberpumpe 17 zur Verfügung steht. Da der Rotor 19 bei einer Abschaltung oder Deaktivierung der Drehschieberpumpe 17 stets auf aktive Weise mittels der Steuerung des Frequenzwandlers 37 in der Drehrichtung 60 gedreht wird, und zwar auch bei einer Notabschaltung, bei der die Stromversorgung der Drehschieberpumpe 17 unterbrochen wird, wird das Einlassventil 47 der Drehschieberpumpe 17 bei der Abschaltung oder Deaktivierung stets innerhalb einer kurzen vordefinierten Zeitdauer geschlossen.During normal operation of the rotary vane pump 17, that is to say when the rotor 19 rotates in the direction of rotation 30 of the conveying rotation, the capacitor 38 is charged in the frequency converter 37 for storing electrical energy. As soon as the triggering device 39 detects an unintentional shutdown or emergency shutdown or deactivation of the rotary vane pump 17, the energy stored in the capacitor 38 is used to rotate the electric motor 33 and thus also the rotor 19 of the rotary vane pump 17 in the direction of rotation 60 opposite to the direction of rotation 30 of the delivery . This makes it possible to close the inlet valve 47 quickly even if no power supply is available for the rotary vane pump 17 due to the emergency shutdown. Since the rotor 19 is always actively rotated in the direction of rotation 60 when the rotary vane pump 17 is switched off or deactivated by means of the control of the frequency converter 37, even in the event of an emergency shutdown in which the power supply to the rotary vane pump 17 is interrupted, the inlet valve 47 the rotary vane pump 17 is always closed within a short predefined period of time when it is switched off or deactivated.

BezuqszeichenlisteReference list

1111th
VakuumanlageVacuum system
1313th
Rezipientrecipient
1515th
Vakuumpumpe für den HochvakuumbereichVacuum pump for the high vacuum range
1717th
DrehschieberpumpeRotary vane pump
1919th
Rotorrotor
2121
Innenrauminner space
2323
DrehschieberRotary valve
2525th
Schlitzslot
2727
Einlassinlet
2929
AuslassOutlet
3030th
FörderdrehrichtungDirection of rotation
3131
AntriebseinheitDrive unit
3333
ElektromotorElectric motor
3535
SteuereinheitControl unit
3737
FrequenzwandlerFrequency converter
3838
Kondensatorcapacitor
3939
AuslöseeinrichtungRelease mechanism
4141
Gehäusecasing
4343
FörderkammerDelivery chamber
4444
DrehachseAxis of rotation
4545
EinlasskanalInlet port
4747
EinlassventilInlet valve
4949
AuslasskanalOutlet duct
5151
Auslassventiloutlet valve
5353
Lochhole
5555
SchmiermittelkammerLubricant chamber
5757
Schmiermittellubricant
6060
Drehrichtung entgegengesetzt zur FörderdrehrichtungDirection of rotation opposite to the direction of rotation of the conveyor

Claims (15)

  1. A vacuum pump (17) comprising
    an inlet (27) which has an inlet valve (47);
    an outlet (29);
    a rotor (19) which is rotatably arranged in an inner space (21) of the vacuum pump (17); and
    a drive unit (31) for the rotor (19),
    wherein the rotor (19) has a conveying direction of rotation (30) and a rotation of the rotor (19) in the conveying direction of rotation (30) effects a conveying of a fluid from the inlet (27) to the outlet (29) of the vacuum pump (17),
    characterized in that
    the drive unit (31) is configured to rotate the rotor (19) oppositely to the conveying direction of rotation (30) on a shutdown or deactivation of the vacuum pump (17) such that a closing of the inlet valve (47) is supported.
  2. A vacuum pump (17) in accordance with claim 1,
    further comprising a triggering device (39) which is configured to detect the shutdown of the vacuum pump (17) and to trigger the rotation of the rotor (19) oppositely to the conveying direction of rotation (30) by means of the drive unit (31).
  3. A vacuum pump (17) in accordance with claim 2,
    wherein the triggering device (39) is further configured, on the detection of the shutdown of the vacuum pump (17), to distinguish between an intended shutdown and an emergency shutdown or deactivation.
  4. A vacuum pump in accordance with any one of the preceding claims,
    wherein the drive unit (31) comprises an electric motor (33) for driving the rotor (19), with a frequency converter (37) being associated with said electric motor (33).
  5. A vacuum pump (17) in accordance with claim 4,
    wherein the electric motor (33) comprises permanent magnets.
  6. A vacuum pump (17) in accordance with claim 4 or claim 5,
    wherein the frequency converter (37) comprises at least one capacitor (38) for storing energy.
  7. A vacuum pump (17) in accordance with claim 6,
    wherein the drive unit (31) is further configured, in the event of an emergency shutdown of the vacuum pump (17), to rotate the rotor (19) oppositely to the conveying direction of rotation (30) by means of the energy stored in the frequency converter (37).
  8. A vacuum pump in accordance with any one of the preceding claims,
    wherein the outlet (29) comprises an outlet valve (51) which is provided with passages to enable a backflow of the fluid into the inner space (21) of the vacuum pump (17).
  9. A vacuum pump in accordance with any one of the preceding claims,
    wherein passages through a housing (41) of the vacuum pump (17) are arranged in the region of the outlet (29), said passages connecting an outer space to the inner space (21) of the vacuum pump (17).
  10. A method of controlling the shutdown of a vacuum pump (17) which has an inlet (27) having an inlet valve (47), an outlet (29), and a rotor (19) which has a drive unit (31) and which is rotatably arranged in an inner space (21) of the vacuum pump (17), wherein the rotor (19) has a conveying direction of rotation (30) and a rotation of the rotor (19) in the conveying direction of rotation (30) effects a conveying of a fluid from the inlet (27) to the outlet (29) of the vacuum pump (17),
    characterized in that
    the method comprises the rotor (19) being rotated oppositely to the conveying direction of rotation (30) by means of the drive unit (31) on a shutdown or a deactivation of the vacuum pump (17) such that a closing of the inlet valve (47) is supported.
  11. A method in accordance with claim 10,
    wherein the shutdown of the vacuum pump (17) is detected by means of a triggering device (39) which triggers the rotation of the rotor (19) oppositely to the conveying direction of rotation (30) by means of the drive unit (31).
  12. A method in accordance with claim 11,
    wherein, on the detection of the shutdown of the vacuum pump (17), a distinction is made by means of the triggering device (39) between an intended shutdown and an emergency shutdown or deactivation.
  13. A method in accordance with claim 12,
    wherein, in the event of the emergency shutdown or deactivation of the vacuum pump (17), the rotor (19) is rotated oppositely to the conveying direction of rotation (30) by means of energy which is stored in a frequency converter (37) of an electric motor (33) of the vacuum pump (17).
  14. A method in accordance with any one of the claims 10 to 13,
    wherein the closing of the inlet valve (47) is additionally supported by a backflow of the fluid into the inner space (21) of the vacuum pump (17), wherein the backflow takes place through passages (53) which extend through an outlet valve (51) of the vacuum pump (17) or through a housing of the vacuum pump (17) and which connect an outer space to the inner space (21) of the vacuum pump (17).
  15. A method in accordance with any one of the claims 10 to 14,
    wherein at least one full rotation of the rotor (19) is performed oppositely to the conveying direction of rotation (30) on a shutdown of the vacuum pump (12).
EP19207809.5A 2019-11-07 2019-11-07 Vacuum pump and method for controlling the deactivation of same Active EP3657019B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19207809.5A EP3657019B1 (en) 2019-11-07 2019-11-07 Vacuum pump and method for controlling the deactivation of same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19207809.5A EP3657019B1 (en) 2019-11-07 2019-11-07 Vacuum pump and method for controlling the deactivation of same

Publications (2)

Publication Number Publication Date
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EP3657019B1 true EP3657019B1 (en) 2022-01-05

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Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5180279A (en) * 1978-10-27 1980-05-01 Dynavac Pty. Ltd. Vacuum pump inlet valve
DE102013210854A1 (en) * 2013-06-11 2014-12-11 Oerlikon Leybold Vacuum Gmbh Vacuum pump and method for operating a vacuum pump
IT201700115881A1 (en) * 2017-10-13 2019-04-13 D V P Vacuum Tech S P A PUMP FOR LUBRICATED VACUUM

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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